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101.发明申请PLANAR ELECTRON EMITTER WITH EXTENDED LIFETIME AND SYSTEM USING SAME 审中-公开具有延长寿命的PLANAR电子发射器和使用它的系统
公开(公告)号：WO2004114348A1
公开(公告)日：2004-12-29
申请号：PCT/IB2004/001988
申请日：2004-06-15
Applicant: NANION ApS , VISCOR, Petr , JENSEN, Michael , ANDERSEN, Roy , KOLARIK, Vladimir , DELONG, Armin
Inventor： VISCOR, Petr , JENSEN, Michael , ANDERSEN, Roy , KOLARIK, Vladimir , DELONG, Armin
IPC: H01J1/312
CPC classification number: B82Y10/00 , H01J1/312 , H01J2201/3125
Abstract: Metal-insulator-metal planar electron emitters (PEES) have potential for use in advanced lithography for future generations of semiconductor devices. The PEE has, however, a limited lifetime, which restricts its commercial applicability. It is believed that the limited lifetime of the PEE is limited by in-diffusion of metal ions from the anode. The in-diffusion may be countered in a number of different ways. One way is to cool the PEE to temperatures below room temperature. This lowers the metal ion mobility, and so the metal ions are less likely to diffuse into the insulator layer. Another way is to occasionally reverse the electrical potential across the PEE from the polarity used to generate the electron beam. This counteracts the electrical driving force that drives the positively charged metal ions from the PEE anode to the PEE cathode.
Abstract translation: 金属 - 绝缘体 - 金属平面电子发射体（PEES）有潜力用于未来几代半导体器件的先进光刻技术。 然而，PEE的寿命有限，限制了其商业适用性。 据信，PEE的有限寿命受到来自阳极的金属离子的扩散的限制。 内扩散可以以多种不同的方式来抵消。 一种方法是将PEE冷却到低于室温的温度。 这降低了金属离子迁移率，因此金属离子不太可能扩散到绝缘体层中。 另一种方法是偶尔从用于产生电子束的极性反转PEE两端的电位。 这抵消了驱动从PEE阳极到PEE阴极的带正电荷的金属离子的电驱动力。
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公开(公告)号：WO2004036615A1
公开(公告)日：2004-04-29
申请号：PCT/JP2002/010835
申请日：2002-10-18
IPC: H01J31/12
CPC classification number: H01J29/481 , B82Y10/00 , H01J1/312 , H01J31/127 , H01J2201/3125
Abstract: An upper wiring electrode (16) serving as a power feed line to an upper electrode (13) of a thin-film type electron source array is underlaid with a second layer insulation layer (15) to prevent a short circuit. The electron emission part is limited by the second layer insulation layer (15) to cover defects unevenly distributed over the boundary between an electron acceleration layer (12) and a first layer insulation layer (14), so that insulation breakdown with time is prevented.
Abstract translation: 用作到薄膜型电子源阵列的上电极（13）的馈电线的上布线电极（16）被覆有第二层绝缘层（15）以防止短路。 电子发射部分由第二层绝缘层（15）限制，以覆盖不均匀分布在电子加速层（12）和第一层绝缘层（14）之间的边界上的缺陷，从而防止绝缘击穿随时间变化。
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公开(公告)号：WO00070642A1
公开(公告)日：2000-11-23
申请号：PCT/JP2000/002979
申请日：2000-05-10
CPC classification number: B82Y10/00 , H01J31/123 , H01J2201/3125 , H01J2329/00
Abstract: A display device which has a second substrate having a phosphor layer formed on the surface thereof and, being opposed to the second substrate, a first substrate (11) having an electron beam source formed thereon, the electron beam source having the structure: a first conductive film (12) laminated on the first substrate (11) - an insulating film (14) - a second conductive film (16), wherein the insulating film (14) comprises an insulating film which is formed by subjecting the first conductive film (12) to an anodic oxidation using a non-aqueous liquid chemical system containing an organic solvent such as a compound having an alcoholic hydroxyl group and at least one solute selected from a salt of an inorganic oxo acid and a salt of an organic carboxylic acid. The display device can be used for improving the quality and the operating life of an insulating film (14) which constitutes a tunneling insulating layer of an electron beam source element of an MIM type diode structure.
Abstract translation: 一种显示装置，具有在其表面上形成有荧光体层的第二基板，与第二基板相对，形成有电子束源的第一基板（11），该电子束源具有以下结构：第一 层叠在第一基板（11）上的导电膜（12） - 绝缘膜（14） - 第二导电膜（16），其中所述绝缘膜（14）包括绝缘膜，所述绝缘膜通过使所述第一导电膜（ 12）使用含有有机溶剂例如具有醇羟基的化合物和至少一种选自无机含氧酸的盐和有机羧酸的盐的溶质的非水性液体化学体系进行阳极氧化。 显示装置可用于提高构成MIM型二极管结构的电子束源元件的隧道绝缘层的绝缘膜（14）的质量和使用寿命。
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公开(公告)号：US09390878B2
公开(公告)日：2016-07-12
申请号：US14599986
申请日：2015-01-19
Applicant: Tsinghua University , HON HAI PRECISION INDUSTRY CO., LTD.
Inventor： Peng Liu , De-Jie Li , Chun-Hai Zhang , Duan-Liang Zhou , Bing-Chu Du , Shou-Shan Fan
CPC classification number: H01J1/308 , H01J1/312 , H01J2201/30461 , H01J2201/30469 , H01J2201/3125 , H01J2329/0449 , H01J2329/0455 , H01J2329/0478 , H01J2329/0484 , Y10S977/939
Abstract: An electron emission source includes a first electrode, a semiconductor layer, an insulating layer, and a second electrode stacked in that sequence, wherein an electron collection layer is sandwiched between the semiconductor layer and the insulating layer, the electron collection layer is in contact with the semiconductor layer and the insulating layer, and the electron collection layer is a conductive layer to collect electrons.
Abstract translation: 电子发射源包括以该顺序堆叠的第一电极，半导体层，绝缘层和第二电极，其中电子收集层夹在半导体层和绝缘层之间，电子收集层与 半导体层和绝缘层，并且电子收集层是用于收集电子的导电层。
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公开(公告)号：US09373476B2
公开(公告)日：2016-06-21
申请号：US14599994
申请日：2015-01-19
Applicant: Tsinghua University , HON HAI PRECISION INDUSTRY CO., LTD.
Inventor： Peng Liu , De-Jie Li , Chun-Hai Zhang , Duan-Liang Zhou , Bing-Chu Du , Shou-Shan Fan
CPC classification number: H01J29/04 , H01J31/12 , H01J2201/3125
Abstract: An electron emission device includes a number of electron emission units, wherein each of the number of electron emission units includes a first electrode, an insulating layer, and a second electrode stacked in that sequence, wherein the first electrode is a carbon nanotube composite structure having a carbon nanotube layer and a semiconductor layer stacked together, and the semiconductor layer is sandwiched between the carbon nanotube layer and the insulating layer, the first electrodes in the number of electron emission units are spaced apart from each other, and the second electrodes in the number of electron emission units are spaced apart from each other.
Abstract translation: 电子发射装置包括多个电子发射单元，其中每个电子发射单元包括以该顺序堆叠的第一电极，绝缘层和第二电极，其中第一电极是碳纳米管复合结构，其具有 碳纳米管层和层叠在一起的半导体层，并且半导体层夹在碳纳米管层和绝缘层之间，多个电子发射单元中的第一电极彼此间隔开，并且第二电极 电子发射单元的数量彼此间隔开。
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Patent Agency Ranking
公开(公告)号：US20150206699A1
公开(公告)日：2015-07-23
申请号：US14599989
申请日：2015-01-19
Applicant: Tsinghua University , HON HAI PRECISION INDUSTRY CO., LTD.
Inventor： PENG LIU , DE-JIE LI , CHUN-HAI ZHANG , DUAN-LIANG ZHOU , BING-CHU DU , SHOU-SHAN FAN
CPC classification number: H01J31/12 , H01J1/304 , H01J1/308 , H01J1/312 , H01J29/02 , H01J29/18 , H01J31/127 , H01J2201/30469 , H01J2201/3125 , H01J2329/0455 , H01J2329/0478 , H01J2329/0484
Abstract: An electron emission device includes a number of electron emission units spaced from each other, wherein each of the number of electron emission units includes a first electrode, a semiconductor layer, an insulating layer, and a second electrode stacked with each other, the first electrode includes a carbon nanotube layer, a number of holes defines in the semiconductor layer, and a portion of the carbon nanotube layer suspended on the number of holes.
Abstract translation: 电子发射装置包括彼此间隔开的多个电子发射单元，其中多个电子发射单元中的每一个包括彼此堆叠的第一电极，半导体层，绝缘层和第二电极，第一电极 包括碳纳米管层，在半导体层中限定多个孔，并且一部分碳纳米管层悬挂在孔数上。
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公开(公告)号：US20150206694A1
公开(公告)日：2015-07-23
申请号：US14599994
申请日：2015-01-19
Applicant: Tsinghua University , HON HAI PRECISION INDUSTRY CO., LTD.
Inventor： PENG LIU , DE-JIE LI , CHUN-HAI ZHANG , DUAN-LIANG ZHOU , BING-CHU DU , SHOU-SHAN FAN
CPC classification number: H01J29/04 , H01J31/12 , H01J2201/3125
Abstract: An electron emission device includes a number of electron emission units, wherein each of the number of electron emission units includes a first electrode, an insulating layer, and a second electrode stacked in that sequence, wherein the first electrode is a carbon nanotube composite structure having a carbon nanotube layer and a semiconductor layer stacked together, and the semiconductor layer is sandwiched between the carbon nanotube layer and the insulating layer, the first electrodes in the number of electron emission units are spaced apart from each other, and the second electrodes in the number of electron emission units are spaced apart from each other.
Abstract translation: 电子发射装置包括多个电子发射单元，其中每个电子发射单元包括以该顺序堆叠的第一电极，绝缘层和第二电极，其中第一电极是碳纳米管复合结构，其具有 碳纳米管层和层叠在一起的半导体层，并且半导体层夹在碳纳米管层和绝缘层之间，多个电子发射单元中的第一电极彼此间隔开，并且第二电极 电子发射单元的数量彼此间隔开。
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108.发明授权Electron emitting element including a fine particle layer containing insulating particles, and devices and methods related thereto 有权包含含有绝缘粒子的微粒层的电子发射元件，以及与其相关的装置和方法公开(公告)号：US08476818B2
公开(公告)日：2013-07-02
申请号：US12698342
申请日：2010-02-02
Applicant: Hiroyuki Hirakawa , Ayae Nagaoka , Yasuo Imura , Tadashi Iwamatsu
Inventor： Hiroyuki Hirakawa , Ayae Nagaoka , Yasuo Imura , Tadashi Iwamatsu
CPC classification number: G03G15/02 , B82Y10/00 , G02F2001/133625 , H01J1/312 , H01J31/127 , H01J63/06 , H01J2201/3125 , H01J2329/0484
Abstract: An electron emitting element of the present invention includes an electron acceleration layer sandwiched between an electrode substrate and a thin-film electrode, and the electron acceleration layer includes a fine particle layer containing insulating fine particles and a basic dispersant. This makes it possible to provide an electron emitting element which does not cause insulation breakdown in an insulating layer and which can be produced at a low cost.
Abstract translation: 本发明的电子发射元件包括夹在电极基板和薄膜电极之间的电子加速层，电子加速层包括含有绝缘细颗粒和碱性分散剂的细颗粒层。 这使得可以提供一种不会在绝缘层中引起绝缘击穿并且可以以低成本制造的电子发射元件。
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109.发明授权Electron emitting element having an electron acceleration layer, electron emitting device, light emitting device, image display device, cooling device, and charging device 有权具有电子加速层的电子发射元件，电子发射器件，发光器件，图像显示器件，冷却器件和充电器件公开(公告)号：US08299700B2
公开(公告)日：2012-10-30
申请号：US12699349
申请日：2010-02-03
Applicant: Tadashi Iwamatsu , Ayae Nagaoka , Hiroyuki Hirakawa , Yasuo Imura
Inventor： Tadashi Iwamatsu , Ayae Nagaoka , Hiroyuki Hirakawa , Yasuo Imura
CPC classification number: G03G15/02 , B82Y10/00 , H01J1/312 , H01J9/022 , H01J31/127 , H01J2201/312 , H01J2201/3125 , H05B33/08
Abstract: An electron emitting element of the present invention includes an electron acceleration layer provided between an electrode substrate and a thin-film electrode, which electron acceleration layer includes (a) conductive fine particles and (b) insulating fine particles having an average particle diameter greater than that of the conductive fine particles. The electron emitting element satisfies the following relational expression: 0.3x+3.9≦y≦75, where x (nm) is an average particle diameter of the insulating fine particles, and y (nm) is a thickness of the thin-film electrode 3. Such a configuration allows modification of the thickness of the thin-film electrode with respect to the size of the insulating particles, thereby ensuring electrical conduction and allowing sufficient current to flow inside the element. As a result, stable emission of ballistic electrons from the thin-film electrode is possible.
Abstract translation: 本发明的电子发射元件包括设置在电极基板和薄膜电极之间的电子加速层，该电子加速层包括（a）导电细颗粒和（b）绝缘平均粒径大于 导电细颗粒的。 电子发射元件满足以下关系式：0.3x + 3.9＆nlE; y＆nlE; 75，其中x（nm）是绝缘细颗粒的平均粒径，y（nm）是薄膜电极的厚度 这样的结构允许相对于绝缘颗粒的尺寸修改薄膜电极的厚度，从而确保导电并允许足够的电流在元件内部流动。 结果，可以从薄膜电极稳定地发射弹道电子。
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110.发明授权Electron emitter formed of a dielectric material characterized by having high mechanical quality factor 有权由介电材料形成的电子发射体，其特征在于具有高的机械品质因数公开(公告)号：US07723909B2
公开(公告)日：2010-05-25
申请号：US11471938
申请日：2006-06-21
Applicant: Hirofumi Yamaguchi , Kei Sato
Inventor： Hirofumi Yamaguchi , Kei Sato
CPC classification number: H01J1/32 , H01J1/312 , H01J2201/3125
Abstract: A dielectric-film-type electron emitter includes an emitter section, a first electrode, and a second electrode. The emitter section is formed of a thin layer of a polycrystalline dielectric material. The dielectric material constituting the emitter section is formed of a material having high mechanical quality factor (Qm). Specifically, the dielectric material has a Qm higher than that of a so-called low-Qm material (a material having a Qm of 100 or less). The Qm of the dielectric material is preferably 300 or more, more preferably 500 or more.
Abstract translation: 电介质膜型电子发射器包括发射极部分，第一电极和第二电极。 发射极部分由多晶电介质材料的薄层形成。 构成发射极部的介电材料由具有高机械品质因数（Qm）的材料形成。 具体地说，介电材料的Qm高于所谓的低Qm材料（Qm为100以下的材料）。 电介质材料的Qm优选为300以上，更优选为500以上。
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