公开(公告)号：KR1020130092035A

公开(公告)日：2013-08-20

申请号：KR1020120013474

申请日：2012-02-09

Applicant: 전자부품연구원

Inventor： 이경일 ,  조진우 ,  김성현 ,  이철승 ,  김선민

IPC: C01G9/02 ,  C01B31/02 ,  B01J19/24

CPC classification number: C01G9/02 ,  B01J19/24 ,  B82B3/0004 ,  C01B32/158

Abstract: PURPOSE: A long type zinc oxide nanowire growth method is provided to improve the generation efficiency of nano generator by reducing a damage of nano generator from a surrounding environment with arranging the long type ZnO nanowire to the mode except the vertical array. CONSTITUTION: A long type zinc oxide nanowire growth method comprises the following steps. A growth solution is prepared by mixing zinc nitrate hexahydrate, hexamethylenetetramine and ammonium chloride. A substrate in which a catalyst layer is formed is inundated in the growth solution for the preset time. The ammonium chloride is controlled in the range of 0.09-0.15 M of molarity and in the range of 1-24 hours of growth time. The zinc nitrate hexahydrate and hexamethylenetetramine are comprised as 0.03 M respectively. The nano generator manufacturing method comprises the following steps. The long type ZnO nanowire which is grown with the long type ZnO nanowire growth method is extracted. At least one of CNT and Ag nanowire is mixed with the extracted long type ZnO nanowire; and the mixed nanowire is mixed with liquid PDMS to prepare a PDMS solution. The PDMS solution is coated on the substrate and the PDMS film of the thin film is formed. And the PDMS film is separated from the substrate and the electrode is formed. [Reference numerals] (101) Growing ZnO nanowire over fixed length; (103) Extracting ZnO nanowire; (105) Mixing ZnO nanowire +CNT+Ag nanowire; (107) Injecting the mixture in PDMS to produce a PDMS film in a membrane film form on a substrate; (109) Separating the PDMS film from the substrate and form an anode

Abstract translation: 目的：提供一种长型氧化锌纳米线生长方法，通过将长型ZnO纳米线布置成除了垂直阵列之外的模式，通过减少纳米发生器从周围环境的损伤来提高纳米发生器的发生效率。 构成：长型氧化锌纳米线生长方法包括以下步骤。 通过混合硝酸锌六水合物，六亚甲基四胺和氯化铵制备生长溶液。 其中形成催化剂层的基板在生长溶液中浸没预定时间。 氯化铵控制在0.09-0.15M的摩尔浓度范围内，在1-24小时的生长时间内。 硝酸锌六水合物和六亚甲基四胺分别为0.03M。 纳米发生器的制造方法包括以下步骤。 提取用长型ZnO纳米线生长法生长的长型ZnO纳米线。 将CNT和Ag纳米线中的至少一种与提取的长型ZnO纳米线混合; 并将混合的纳米线与液体PDMS混合以制备PDMS溶液。 将PDMS溶液涂布在基材上，形成薄膜的PDMS膜。 并且PDMS膜与衬底分离并形成电极。 （101）固定长度生长的ZnO纳米线; （103）提取ZnO纳米线; （105）混合ZnO纳米线+ CNT + Ag纳米线; （107）在PDMS中注入混合物以在基片上产生膜膜形式的PDMS膜; （109）将PDMS膜与基板分离并形成阳极

公开(公告)号：KR1020130092033A

公开(公告)日：2013-08-20

申请号：KR1020120013472

申请日：2012-02-09

Applicant: 전자부품연구원

Inventor： 이경일 ,  조진우 ,  김성현 ,  이철승 ,  김선민

IPC: D06M11/44 ,  D06M13/224 ,  D06M13/325 ,  B82Y40/00 ,  D06C7/00

CPC classification number: D06M11/44 ,  B82Y40/00 ,  D06C7/00 ,  D06M13/224 ,  D06M13/325

Abstract: PURPOSE: A manufacturing method of a functional fabric material using zinc oxide nanowires and a functional fabric material manufactured thereby are provided to be able to form ZnO nanowire on a fabric with an economic process, and to be able to supply the auxiliary power to mobile devices through the non-utility generation as the fabric has a piezoelectric property. CONSTITUTION: A manufacturing method a functional fabric material using ZnO nanowires comprises a step (101) of preparing a fabric ; a step (103) of forming a catalyst layer on the surface of the fabric; a step (105) of growing ZnO nanowires by dipping the fabric formed with the catalyst layer in a growth solution; and steps (107,109) of washing and drying the fabric with ZnO nanowires grown. [Reference numerals] (101) Arrange fabric; (103) Form a catalyst layer on fabric; (105) ZnO nanowire in which a catalyst layer is formed grows; (107) Washing; (109) Drying

Abstract translation: 目的：提供使用氧化锌纳米线的功能性织物材料的制造方法和由此制造的功能性织物材料，以便能够在经济的工艺上在织物上形成ZnO纳米线，并且能够将辅助电力提供给移动装置 通过非织造布具有压电性能的非实用产品。 构成：使用ZnO纳米线的功能性织物材料的制造方法包括制备织物的步骤（101） 在织物的表面上形成催化剂层的步骤（103）; 通过将由催化剂层形成的织物浸渍在生长溶液中来生长ZnO纳米线的步骤（105）; 以及用生长的ZnO纳米线洗涤和干燥织物的步骤（107,109）。 （附图标记）（101）布置布; （103）在织物上形成催化剂层; （105）其中形成催化剂层的ZnO纳米线生长; （107）洗涤; （109）干燥

公开(公告)号：KR101206265B1

公开(公告)日：2012-11-30

申请号：KR1020100050813

申请日：2010-05-31

Applicant: 전자부품연구원

Inventor： 김성현 ,  조진우 ,  이경일 ,  김선민

IPC: B29C59/14 ,  B82B3/00 ,  H01L21/208 ,  H01L21/20

Abstract: 본 발명은 플라즈마 표면 처리를 이용한 산화아연 나노와이어 특성 제어 방법 및 그 방법으로 제조된 산화아연 나노와이어를 구비하는 전자 소자에 관한 것으로, 기판과, 상기 기판 위에 형성되며 표면이 플라즈마 표면처리되는 산화아연 촉매층과, 상기 산화아연 촉매층 위에 성장되는 복수의 산화아연 나노와이어와, 상기 산화아연 나노와이어를 포함하여 상기 산화아연 촉매층 위에 형성되는 다층의 박막 실리콘과, 상기 산화아연 시드층 및 박막 실리콘 위에 형성되는 전극을 포함하는 것을 특징으로 하는 박막 실리콘 태양전지의 구성, 이를 제조하기 위한 방법과 산화아연 나노와이어 특성 제어를 위한 방법을 개시한다.

公开(公告)号：KR1020120067249A

公开(公告)日：2012-06-25

申请号：KR1020100128728

申请日：2010-12-15

Applicant: 전자부품연구원

Inventor： 이경일 ,  조진우 ,  김성현 ,  김선민 ,  노임준 ,  신백균

IPC: B82B3/00 ,  B82Y40/00

CPC classification number: H01L21/02603 ,  B82Y40/00 ,  C01G9/02 ,  C01P2004/16

Abstract: PURPOSE: A manufacturing method of zinc oxide nano-wires using metal masking and a zinc oxide nano-wire material manufactured by the method are provided to control density of growing zinc oxide nano-wires by forming metallic mask layer on a catalyst layer without a light exposure process. CONSTITUTION: A manufacturing method of zinc oxide nano-wires using metal masking comprises the following steps: preparing a substrate(10); forming a catalyst layer(20) of zinc oxide material on the substrate; forming a mask layer(30) having a plurality of growth holes(33) through a thermal process; and growing zinc oxide nano-wires(40) based on the catalyst layer part which is exposed to the plurality of growth holes. The metallic mask layer formation step comprises the following steps: forming a coating layer with 20-30 nano meters thickness by spreading aqueous solution including the metal nano-particles on the catalyst layer; and forming the metallic mask layer by heat treating the coating layer at 150-700 deg. Celsius.

Abstract translation: 目的：提供使用金属掩蔽的氧化锌纳米线的制造方法和通过该方法制造的氧化锌纳米线材料，以通过在不具有光的催化剂层上形成金属掩模层来控制生长的氧化锌纳米线的密度 曝光过程。 构成：使用金属掩模的氧化锌纳米线的制造方法包括以下步骤：制备基板（10）; 在衬底上形成氧化锌材料的催化剂层（20）; 通过热处理形成具有多个生长孔（33）的掩模层（30）; 以及基于暴露于多个生长孔的催化剂层部分生长氧化锌纳米线（40）。 金属掩模层形成步骤包括以下步骤：通过在催化剂层上铺展包含金属纳米颗粒的水溶液，形成20-30纳米厚的涂层; 以及通过在150-700度下热处理该涂层来形成金属掩模层。 摄氏度。

公开(公告)号：KR1020120015798A

公开(公告)日：2012-02-22

申请号：KR1020100078233

申请日：2010-08-13

Applicant: 전자부품연구원

Inventor： 이경일 ,  김성현 ,  조진우

IPC: B05C5/00

CPC classification number: B05C5/027 ,  B05C5/0291 ,  B05C11/1034 ,  B05C11/1044

Abstract: PURPOSE: An electrostatic multi-nozzle droplet discharging apparatus using triode and a method for driving the same are provided to improve the precision of patterns and to be applicable for mass-production. CONSTITUTION: A droplet discharging apparatus(10) includes the following: a reservoir(13) contains a solution; a chuck(19) loads a substrate; a nozzle(14) includes a droplet outlet; a gate electrode(17) is arranged between the substrate and the nozzle and includes a through hole through which droplet passes to be discharged on a substrate; a first voltage supplying unit(15) supplies a direct bias voltage to the nozzle; and a second voltage supplying unit(16) supplies a gate voltage of a pulse form to the gate electrode.

Abstract translation: 目的：提供使用三极管的静电多喷嘴液滴喷射装置及其驱动方法，以提高图案的精度并适用于批量生产。 构成：液滴喷射装置（10）包括以下部件：容器（13）包含溶液; 卡盘（19）装载基板; 喷嘴（14）包括液滴出口; 在基板和喷嘴之间布置有栅电极（17），并且包括通孔，通过该通孔将其排出到基板上; 第一电压供给单元（15）向喷嘴提供直接偏置电压; 并且第二电压供给单元（16）将脉冲形式的栅极电压提供给栅电极。

公开(公告)号：KR1020100012576A

公开(公告)日：2010-02-08

申请号：KR1020080074054

申请日：2008-07-29

Applicant: 전자부품연구원

Inventor： 김성현 ,  한종훈 ,  이경일 ,  이철승

IPC: B82B3/00 ,  B82Y40/00

CPC classification number: C01B32/158 ,  B82B3/0052 ,  B82Y30/00 ,  B82Y40/00

Abstract: PURPOSE: An apparatus for the vertical alignment of a carbon nanotube and a method is provided to improve the durability and performance of a cathode by preventing gas from releasing by using a cathode substrate including a metal layer with a low melting point and by aligning the carbon nanotube vertically by using an electric field. CONSTITUTION: An apparatus for the vertical alignment of a carbon nanotube comprises: a support stand(205) included in a chamber to align a carbon nanotube and a cathode substrate with a metal layer; an anode electrode(210) formed on the upper side of the support stand and can control the interval of the cathode substrate; a first and second heat radiator(240,250) separately formed on the upper side of the anode electrode and the lower side of the support stand to radiate the heat required for heat treating the metal layer included in the cathode substrate; a power supply device connected to the metal layer, formed in the cathode substrate and the anode electrode, for impressing electric power for aligning the carbon nanotube vertically.

Abstract translation: 目的：提供一种用于碳纳米管的垂直取向的装置和方法，以通过使用包括具有低熔点的金属层的阴极基板和通过使碳的排列来防止气体释放而提高阴极的耐久性和性能 纳米管通过使用电场垂直。 构成：用于碳纳米管的垂直取向的装置包括：包括在室中的支撑架（205），用于使碳纳米管和阴极基板与金属层对准; 阳极电极（210），其形成在所述支撑台的上侧，并且能够控制所述阴极基板的间隔; 分别形成在阳极电极的上侧和支撑台的下侧的第一和第二散热器（240,250），以辐射热处理包括在阴极衬底中的金属层所需的热量; 连接到金属层的电源装置，形成在阴极基板和阳极电极中，用于施加用于垂直对准碳纳米管的电力。

公开(公告)号：KR100877076B1

公开(公告)日：2009-01-09

申请号：KR1020070052620

申请日：2007-05-30

Applicant: 전자부품연구원

Inventor： 조진우 ,  신진국 ,  한종훈 ,  장세홍 ,  이경일 ,  서문석 ,  이유진 ,  이철승 ,  김성현

IPC: G01R1/067 ,  G01R1/073 ,  H01L21/66

Abstract: 본 발명은 유리잉크 코팅법을 이용한 프로브카드용 탐침의 절연방법에 관한 것으로, 보다 자세하게는 고집적화되는 반도체 칩 및 디스플레이 회로검사에 사용되는 프로브카드용 탐침 상호 간에 절연성을 확보하기 위한 방법에 관한 것이다.
본 발명의 유리잉크 코팅법을 이용한 프로브카드용 탐침의 절연방법은 프로브카드용 탐침을 절연하는 방법에 있어서, 도금 또는 에칭 공정으로 탐침을 제작하는 단계; 상기 탐침을 크리닝한 후, 유리잉크를 이용하여 코팅하는 단계; 상기 코팅된 탐침의 양끝을 연마하여 프로브 유닛에 삽입하는 단계; 및 상기 탐침을 에폭시로 고정한 후, 상기 프로브 유닛을 PCB 회로부에 연결시키는 단계를 포함한다.
프로브카드, 탐침, 절연, 유리잉크, 에폭시

公开(公告)号：KR100848262B1

公开(公告)日：2008-07-25

申请号：KR1020070053723

申请日：2007-06-01

Applicant: 전자부품연구원

Inventor： 이경일 ,  조진우 ,  김성현 ,  한종훈 ,  서문석 ,  이철승 ,  신진국

IPC: G02F1/1345

CPC classification number: G02F1/1309 ,  B41J2/14 ,  B41J2/1642 ,  G02F1/1303 ,  G03F7/0002 ,  H04N5/225

Abstract: A minute pattern transfer apparatus with the variable line path is provided to form the patterns with various line paths by controlling the interval between probes. An ink preserving member(320) preserves ink. An ink transmitting member(330) transmits the ink to a probe member. The probe member(340) transfers the ink introduced from the ink transmitting member. A driving member controls the interval formed at the probe member. The probe member includes a space for preserving the ink transmitted from the ink preserving member. Plural probes(341) transfer the ink. A spring(370) is connected with the probe member in order to support the motion of the probe. Plural probes are formed in parallel to each other. The driving member includes a magnet fixed to the probe member. A coil is located at the upper portion of the magnet and makes the current flow.

Abstract translation: 提供具有可变线路径的微小图案转印装置，通过控制探针之间的间隔来形成具有各种线路径的图案。 油墨保存构件（320）保留油墨。 墨水传送部件（330）将墨水传送到探针部件。 探针构件（340）传送从墨水传送构件引入的墨。 驱动构件控制在探针构件上形成的间隔。 探针构件包括用于保存从保墨构件透过的墨的空间。 多个探头（341）传送墨水。 弹簧（370）与探针构件连接以便支撑探针的运动。 多个探针彼此平行地形成。 驱动构件包括固定到探针构件的磁体。 线圈位于磁体的上部并使电流流动。

公开(公告)号：KR1020070009789A

公开(公告)日：2007-01-19

申请号：KR1020050063672

申请日：2005-07-14

Applicant: 전자부품연구원

Inventor： 서문석 ,  신진국 ,  이철승 ,  김성현 ,  최영진 ,  이경일 ,  조진우

IPC: G01Q60/38 ,  H01L21/027 ,  H01L21/31 ,  H01L21/324

CPC classification number: G01Q60/38 ,  H01L21/0273 ,  H01L21/31 ,  H01L21/324

Abstract: A probe of an AFM(Atomic Force Microscope) cantilever using a ferroelectric is provided to precisely measure the electric polarization of the ferroelectric by using the ferroelectric in the probe of the cantilever. A probe of an AFM(Atomic Force Microscope) cantilever using a ferroelectric includes a cantilever support(100), an insulation layer(110), a metal layer(120), and a ferroelectric(130). The insulation layer is formed on the cantilever support. The metal layer is formed on the insulation layer. The ferroelectric is formed at the tip head of the metal layer. The ferroelectric has a domain of 180 degrees. The ferroelectric uses a PZT.

Abstract translation: 提供使用铁电体的AFM（原子力显微镜）悬臂的探针，通过在悬臂的探针中使用铁电体来精确测量铁电体的电极化。 使用铁电体的AFM（原子力显微镜）悬臂的探针包括悬臂支撑件（100），绝缘层（110），金属层（120）和铁电体（130）。 绝缘层形成在悬臂支架上。 金属层形成在绝缘层上。 铁电体形成在金属层的尖端处。 铁电体具有180度的域。 铁电使用PZT。

公开(公告)号：KR1020040045974A

公开(公告)日：2004-06-05

申请号：KR1020020073749

申请日：2002-11-26

Applicant: 전자부품연구원

Inventor： 김성현 ,  최영진

IPC: B82B3/00 ,  B82Y40/00

CPC classification number: C01B32/16 ,  B01J19/10 ,  C01B32/162 ,  C01P2004/64

Abstract: PURPOSE: A method for growing vertically aligned single wall carbon nanotube(SWNT) is provided, which is characterized by growing a single-wall carbon nanotube in a special position on the substrate by applying electron beam partly on the substrate. CONSTITUTION: The vertically aligned single-wall carbon nanotube is produced by the following steps of: (i) coating a mixed nanoparticle solution as a catalytic material on a Si-wafer or glass substrate, wherein the mixed nanoparticle solution is obtained by mixing 20mg of nanosize Al2O3, 20mg of Fe(NO3)3·9H2O and 2mg of MoO(acac)2 in 10ml of methanol for 24hrs, and radiating ultrasonic waves; (ii) leaving a coated substrate in the air to evaporate solvent and then thermal treating at 160-180deg.C within 5min to attach nano particles to the substrate; (iii) putting the substrate into a chamber generating electron beam; (iv) flowing a mixed gas of CH3(high purity) and H2 gas into the chamber; (v) radiating an electron beam to a position where a carbon nanotube is grown, wherein the growing length of the single-wall carbon nanotube is controlled according to strength and radiation time of the electron beam.

Abstract translation: 目的：提供一种用于生长垂直排列的单壁碳纳米管（SWNT）的方法，其特征在于通过在基板上部分地施加电子束在基板上的特殊位置生长单壁碳纳米管。 构成：垂直排列的单壁碳纳米管通过以下步骤制备：（i）在Si晶片或玻璃基板上涂覆作为催化材料的混合纳米颗粒溶液，其中混合纳米颗粒溶液通过混合20mg 纳米级Al2O3，20mg Fe（NO3）3·9H2O和2mg MoO（acac）2在10ml甲醇中24小时，并辐射超声波; （ii）将涂布的基材留在空气中蒸发溶剂，然后在5分钟内在160-180℃下进行热处理，以将纳米颗粒附着在基材上; （iii）将基板放入产生电子束的室中; （iv）将CH3（高纯度）和H 2气体的混合气体流入腔室; （v）将电子束照射到生长碳纳米管的位置，其中根据电子束的强度和辐射时间控制单壁碳纳米管的生长长度。