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    전기기계 변환장치의 제조 방법
    114.
    发明公开
    전기기계 변환장치의 제조 방법 有权
    制造机电传感器的方法

    公开(公告)号：KR1020130031206A

    公开(公告)日：2013-03-28

    申请号：KR1020120099744

    申请日：2012-09-10

    Applicant: 캐논 가부시끼가이샤

    Inventor： 카토아야코 ,  토라시마카즈토시

    IPC: H04R19/00 ,  A61B8/00 ,  H01L29/84

    CPC classification number: B06B1/0292 ,  B81B3/0075 ,  B81B2201/0221 ,  B81B2203/0127 ,  B81B2203/0315 ,  B81B2203/0392 ,  H04R19/005 ,  H04R31/00

    Abstract: PURPOSE: A manufacturing method of an electronic machine converting device is provided to reduce a change of the flatness of an insulating layer in the bottom of a gap without a process for removing a protrusion on a blocking wall. CONSTITUTION: A first insulating layer(2) is formed on a first substrate and a part of the first insulating layer is removed to form a blocking wall(3). A second insulating layer(10) is formed on an area of the first substrate. The second substrate is adhered to the blocking wall to form a gap. A vibration film facing the second insulating layer is formed from the second substrate. The height of the gap of the blocking wall is lower than the height of a central part.

    Abstract translation: 目的：提供一种电子机器转换装置的制造方法，以减少间隙底部的绝缘层的平坦度的变化，而不需要除去阻挡壁上的突起的工序。 构成：在第一基板上形成第一绝缘层（2），并且去除第一绝缘层的一部分以形成阻挡壁（3）。 在第一基板的区域上形成第二绝缘层（10）。 第二基板粘附到阻挡壁以形成间隙。 与第二绝缘层相对的振动膜由第二基板形成。 阻挡壁的间隙的高度低于中心部分的高度。

    SYSTEMS, DEVICES, AND METHODS TO REDUCE DIELECTRIC CHARGING IN MICRO-ELECTROMECHANICAL SYSTEMS DEVICES
    115.
    发明公开
    SYSTEMS, DEVICES, AND METHODS TO REDUCE DIELECTRIC CHARGING IN MICRO-ELECTROMECHANICAL SYSTEMS DEVICES 审中-公开

    公开(公告)号：EP3201123A4

    公开(公告)日：2018-05-23

    申请号：EP15846735

    申请日：2015-10-05

    Applicant: WISPRY INC

    Inventor： DEREUS DANA ,  MORRIS ARTHUR S ,  MOLINERO-GILES DAVID

    IPC: B81B7/02 ,  B81B5/00 ,  B81C1/00

    CPC classification number: H01G5/16 ,  B81B3/0008 ,  B81B3/0051 ,  B81B2201/0221

    Abstract: The present subject matter relates to devices, systems, and methods for isolation of electrostatic actuators in MEMS devices to reduce or minimize dielectric charging. A tunable component can include a fixed actuator electrode positioned on a substrate, a movable actuator electrode carried on a movable component that is suspended over the substrate, one or more isolation bumps positioned between the fixed actuator electrode and the movable actuator electrode, and a fixed isolation landing that is isolated within a portion of the fixed actuator electrode that is at, near, and/or substantially aligned with each of the one or more isolation bumps. In this arrangement, the movable actuator electrode can be selectively movable toward the fixed actuator electrode, but the one or more isolation bumps can prevent contact between the fixed and movable actuator electrodes, and the fixed isolation landing can inhibit the development of an electric field in the isolation bump.

    VARIABLE CAPACITANCE DEVICE AND PRODUCTION METHOD THEREFOR
    118.
    发明公开
    VARIABLE CAPACITANCE DEVICE AND PRODUCTION METHOD THEREFOR 审中-公开

    公开(公告)号：EP3128544A4

    公开(公告)日：2018-01-17

    申请号：EP15772395

    申请日：2015-03-17

    Applicant: MURATA MANUFACTURING CO

    Inventor： NAKAISO TOSHIYUKI ,  SAKAI NOBUO

    IPC: H01L21/822 ,  H01G4/33 ,  H01G7/06 ,  H01L27/02 ,  H01L27/08 ,  H01L49/02

    CPC classification number: H01L27/0248 ,  B81B7/0022 ,  B81B2201/0221 ,  H01G4/33 ,  H01G7/06 ,  H01L27/0805 ,  H01L28/55 ,  H01L29/93

    Abstract: There are included a semiconductor substrate (10), a redistribution layer (50) provided on a main surface of the semiconductor substrate (10), and a plurality of terminal electrodes (PE) including a first input/output terminal, a second input/output terminal, a ground terminal and a control voltage application terminal, where a variable capacitance element section (VC) that is a ferroelectric thin film is formed to the redistribution layer (50), the variable capacitance element section (VC) being formed from a pair of capacitor electrodes connected to the first input/output terminal and the second input/output terminal, respectively, and a ferroelectric thin film disposed between the pair of capacitor electrodes, and where an ESD protection element (ESDP1, ESDP2) connected between the first input/output terminal or the second input/output terminal and the ground terminal (GND) is formed on the main surface of the semiconductor substrate (10).

    SYSTEMS, DEVICES, AND METHODS TO REDUCE DIELECTRIC CHARGING IN MICRO-ELECTROMECHANICAL SYSTEMS DEVICES
    119.
    发明公开
    SYSTEMS, DEVICES, AND METHODS TO REDUCE DIELECTRIC CHARGING IN MICRO-ELECTROMECHANICAL SYSTEMS DEVICES 审中-公开
    用于减少微机电系统装置中的电介质充电的系统，装置和方法

    公开(公告)号：EP3201123A1

    公开(公告)日：2017-08-09

    申请号：EP15846735.7

    申请日：2015-10-05

    Applicant: Wispry, Inc.

    Inventor： DEREUS, Dana ,  MORRIS, Arthur, S. ,  MOLINERO-GILES, David

    IPC: B81B7/02 ,  B81B5/00 ,  B81C1/00

    CPC classification number: H01G5/16 ,  B81B3/0008 ,  B81B3/0051 ,  B81B2201/0221

    Abstract: The present subject matter relates to devices, systems, and methods for isolation of electrostatic actuators in MEMS devices to reduce or minimize dielectric charging. A tunable component can include a fixed actuator electrode positioned on a substrate, a movable actuator electrode carried on a movable component that is suspended over the substrate, one or more isolation bumps positioned between the fixed actuator electrode and the movable actuator electrode, and a fixed isolation landing that is isolated within a portion of the fixed actuator electrode that is at, near, and/or substantially aligned with each of the one or more isolation bumps. In this arrangement, the movable actuator electrode can be selectively movable toward the fixed actuator electrode, but the one or more isolation bumps can prevent contact between the fixed and movable actuator electrodes, and the fixed isolation landing can inhibit the development of an electric field in the isolation bump.

    Abstract translation: 本主题涉及用于隔离MEMS装置中的静电致动器以减少或最小化介电充电的装置，系统和方法。 可调谐部件可以包括位于基板上的固定致动器电极，悬挂在基板上的可移动部件上携带的可移动致动器电极，位于固定致动器电极和可移动​​致动器电极之间的一个或多个隔离凸点，以及固定 所述隔离着陆隔离在所述固定致动器电极的与所述一个或多个隔离凸起中的每一个处于，靠近和/或基本上对齐的部分内。 在这种布置中，可移动致动器电极可以选择性地朝向固定致动器电极移动，但是一个或多个隔离凸起可以防止固定和可移动致动器电极之间的接触，并且固定隔离平台可以抑制电场发展 隔离凸点。

    ACTUATOR PLATE PARTITIONING AND CONTROL DEVICES AND METHODS
    120.
    发明公开
    ACTUATOR PLATE PARTITIONING AND CONTROL DEVICES AND METHODS 审中-公开
    控制面板分割与控制装置及程序

    公开(公告)号：EP2969912A4

    公开(公告)日：2016-11-09

    申请号：EP14764504

    申请日：2014-03-17

    Applicant: WISPRY INC

    Inventor： DEREUS DANA ,  CUNNINGHAM SHAWN J ,  MORRIS ARTHUR S

    IPC: B81B7/02 ,  H01G5/14

    CPC classification number: B81B3/001 ,  B81B3/0051 ,  B81B3/0056 ,  B81B2201/0221 ,  B81B2203/04 ,  B81B2203/053 ,  H01G4/1227 ,  H01G5/18

    Abstract: Devices and methods of operating partitioned actuator plates to obtain a desirable shape of a movable component of a micro-electro-mechanical system (MEMS) device. The subject matter described herein can in some embodiments include a micro-electro-mechanical system (MEMS) device including a plurality of actuation electrodes attached to a first surface, where each of the one or more actuation electrode being independently controllable, and a movable component spaced apart from the first surface and movable with respect to the first surface. Where the movable component further includes one or more movable actuation electrodes spaced apart from the plurality of fixed actuation electrodes.

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