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    삼차원 빗살 가진 구조물 및 이를 채용한 관성 감지 센서와 액츄
    171.
    发明授权
    삼차원 빗살 가진 구조물 및 이를 채용한 관성 감지 센서와 액츄 失效
    삼차원빗살가진구조물및이를채용한관성감지센서와액츄

    公开(公告)号：KR100459887B1

    公开(公告)日：2004-12-03

    申请号：KR1019990000387

    申请日：1999-01-11

    Applicant: 삼성전자주식회사

    Inventor： 이기방 ,  최재준 ,  정희문 ,  김규용 ,  강성규

    IPC: G01P15/08

    CPC classification number: H02N1/008 ,  B81B3/0094 ,  B81B2201/025 ,  B81B2203/0136 ,  G01C19/5755 ,  G01P15/097 ,  G01P15/125 ,  G01P2015/0814

    Abstract: In the 3-dimensional comb structure, a suspension structure (34), which is an inertia body, is separated a predetermined height from a substrate (31), maintaining the predetermined height from the substrate. A movable comb, which has at least one movable comb finger (35), protrudes perpendicularly from the suspension structure (34). A fixed comb, which has at least one fixed comb finger (32), protrudes perpendicularly from the substrate (31), in mesh with the movable comb. The 3-dimensional comb structure is driven by a voltage provided from a power supply unit which is connected to the movable comb and the fixed comb.

    Abstract translation: 在三维梳状结构中，作为惯性体的悬架结构（34）与基板（31）分离预定高度，从基板保持预定高度。 具有至少一个可动梳齿（35）的可动梳子从悬挂结构（34）垂直地伸出。 具有至少一个固定的梳状指状物（32）的固定梳状物从衬底（31）垂直地伸出，与可动梳状物啮合。 三维梳状结构由连接到可动梳和固定梳的电源单元提供的电压驱动。 ＆lt;图像＆GT;

    Sensor module, sensor device, sensor device manufacturing method and electronic apparatus
    178.
    发明专利
    Sensor module, sensor device, sensor device manufacturing method and electronic apparatus 有权
    传感器模块，传感器装置，传感器装置制造方法和电子装置

    公开(公告)号：JP2012220231A

    公开(公告)日：2012-11-12

    申请号：JP2011083352

    申请日：2011-04-05

    Applicant: Seiko Epson Corp ,  セイコーエプソン株式会社

    Inventor： KOYAMA YUGO

    IPC: G01C19/56 ,  H01L41/08 ,  H01L41/09 ,  H01L41/18 ,  H01L41/187 ,  H01L41/22

    CPC classification number: B81B7/0074 ,  B81B2201/025

    Abstract: PROBLEM TO BE SOLVED: To provide a sensor module compatible with multiple axes and a sensor device equipped therewith.SOLUTION: A sensor module 1 comprises: a support member 10 having three support surfaces 11, 12, 13 orthogonal to one another; three IC chips 20 each having connection terminals 22 and outer connection terminals 23 on an active surface 21 side, being mounted at the support surfaces 11, 12, 13 of the support member 10, respectively, at a non active surface 29 side parallel with the active surface 21; three vibration gyro elements 30 each having a base part 31, vibration arms (32a, 32b, etc.) drawn from the base part 31 and connection electrodes 39; and flexible wiring boards 40, 40a connected to the outer connection terminals 23 of the IC chips 20. The vibration gyro elements 30 are arranged on the active surface 21 sides of the IC chips 20, respectively. A connection electrode 39 is coupled to the connection terminal 22 of each IC chip 20 so that a principal surface 30a is parallel with a support surface 11, 12 or 13. The flexible wiring board 40 has a wiring pattern layer 43.

    Abstract translation: 要解决的问题：提供与多个轴兼容的传感器模块以及配备其的传感器装置。 传感器模块1包括：支撑构件10，其具有彼此正交的三个支撑表面11,12,13; 在有源面21侧具有连接端子22和外部连接端子23的三个IC芯片20分别安装在支撑部件10的支承面11,12,13处， 活性表面21; 三个振动陀螺元件30各自具有基部31，从基部31和连接电极39拉出的振动臂（32a，32b等） 以及连接到IC芯片20的外部连接端子23的柔性布线板40,40。振动陀螺元件30分别设置在IC芯片20的有源面21侧。 连接电极39连接到每个IC芯片20的连接端子22，使得主表面30a与支撑表面11,12或13平行。柔性布线板40具有布线图案层43。 （C）2013，JPO＆INPIT

    Mems vertical comb structure with linear drive/pickoff
    179.
    发明专利
    Mems vertical comb structure with linear drive/pickoff 审中-公开
    具有线性驱动/ PICKOFF的MEMS垂直结构

    公开(公告)号：JP2012141289A

    公开(公告)日：2012-07-26

    申请号：JP2011255395

    申请日：2011-11-22

    Applicant: Honeywell Internatl Inc ,  ハネウェル・インターナショナル・インコーポレーテッド

    Inventor： HORNING ROBERT D ,  SUPINO RYAN

    IPC: G01C19/5755 ,  G01P15/125

    CPC classification number: B81B3/0086 ,  B81B2201/025 ,  B81B2203/0136 ,  Y10T29/49117

    Abstract: PROBLEM TO BE SOLVED: To provide a Micro Electro Mechanical Systems (MEMS) sensor.SOLUTION: A MEMS sensor comprises a substrate and at least one proof mass having a first plurality of combs. The proof mass is coupled to the substrate via one or more suspension beams such that the proof mass and the first plurality of combs are movable. The MEMS sensor also comprises at least one anchor having a second plurality of combs. The anchor is coupled to the substrate such that the anchor and the second plurality of combs are fixed in a predetermined position relative to the substrate. The first plurality of combs are interleaved with the second plurality of combs. Each of the combs comprises a plurality of conductive layers electrically isolated from each other by one or more non-conductive layers. Each conductive layer is individually coupled to a respective electric potential such that capacitance between the combs varies approximately linearly with displacement of the movable combs in an out-of-plane direction.

    Abstract translation: 要解决的问题：提供微机电系统（MEMS）传感器。 解决方案：MEMS传感器包括基板和至少一个具有第一多个梳子的检验质量块。 检测质量通过一个或多个悬架梁耦合到基板，使得检验质量块和第一组多个梳子可移动。 MEMS传感器还包括具有第二多个梳子的至少一个锚固件。 锚固件联接到基板，使得锚和第二多个梳被固定在相对于基底的预定位置。 第一组多个梳子与第二组梳子交错。 每个梳子包括通过一个或多个非导电层彼此电隔离的多个导电层。 每个导电层单独地耦合到相应的电位，使得梳子之间的电容随着可移动梳状体在平面外方向上的位移而近似线性地变化。 版权所有（C）2012，JPO＆INPIT

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