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    Electron microscope
    172.
    发明公开
    Electron microscope 有权
    电子显微镜

    公开(公告)号：EP1585165A3

    公开(公告)日：2008-03-12

    申请号：EP05252228.1

    申请日：2005-04-08

    Applicant: JEOL Ltd.

    Inventor： Kaneyama, Toshikatsu

    IPC: H01J37/26 ,  H01J37/153 ,  H01J37/05

    CPC classification number: H01J37/26 ,  H01J2237/05 ,  H01J2237/2522

    Abstract: There is disclosed an electron microscope that achieves low-magnification imaging while the objective lens is kept at high excitation in the same way as during high-magnification imaging. An objective minilens (12) located immediately behind the objective lens (11) demagnifies a specimen image magnified by the objective lens. Consequently, a sharply focused electron beam enters the first intermediate lens (13). This greatly reduces the effects of off-axis aberrations in the intermediate lenses. The first, second, and third intermediate lenses (13,14,15) create a crossover image and a microscope image in the entrance window plane (24) and entrance image plane (25), respectively, of an energy filter (16). The energy filter focuses the microscope image and crossover image onto the exit image plane (26) and exit window plane (27), respectively. The output image from the filter is projected onto the final image plane (20) by first and second projector lenses (18,19).

    Abstract translation: 公开了一种电子显微镜，其以与高倍率成像期间相同的方式将物镜保持在高激发状态下实现低倍率成像。 位于物镜（11）后面的客观微型瞄准镜（12）缩小由物镜放大的样品图像。 结果，急剧聚焦的电子束进入第一中间透镜（13）。 这大大减少了中间透镜中的轴外像差的影响。 第一，第二和第三中间透镜（13,14,15）分别在能量过滤器（16）的入口窗口平面（24）和入口图像平面（25）中产生交叉图像和显微镜图像。 能量过滤器分别将显微镜图像和交叉图像聚焦到出射图像平面（26）和出射窗平面（27）上。 来自滤波器的输出图像被第一和第二投影透镜（18,19）投影到最终图像平面（20）上。

    Electron microscope
    173.
    发明公开
    Electron microscope 有权
    Elektronenmikroskop

    公开(公告)号：EP1585165A2

    公开(公告)日：2005-10-12

    申请号：EP05252228.1

    申请日：2005-04-08

    Applicant: JEOL Ltd.

    Inventor： Kaneyama, Toshikatsu

    IPC: H01J37/26 ,  H01J37/153 ,  H01J37/05

    CPC classification number: H01J37/26 ,  H01J2237/05 ,  H01J2237/2522

    Abstract: There is disclosed an electron microscope that achieves low-magnification imaging while the objective lens is kept at high excitation in the same way as during high-magnification imaging. An objective minilens (12) located immediately behind the objective lens (11) demagnifies a specimen image magnified by the objective lens. Consequently, a sharply focused electron beam enters the first intermediate lens (13). This greatly reduces the effects of off-axis aberrations in the intermediate lenses. The first, second, and third intermediate lenses (13,14,15) create a crossover image and a microscope image in the entrance window plane (24) and entrance image plane (25), respectively, of an energy filter (16). The energy filter focuses the microscope image and crossover image onto the exit image plane (26) and exit window plane (27), respectively. The output image from the filter is projected onto the final image plane (20) by first and second projector lenses (18,19).

    Abstract translation: 公开了以与高倍率成像时相同的方式使物镜保持高激发时实现低倍率成像的电子显微镜。 位于物镜正后方的物镜（12）使由物镜放大的样本图像缩小。 因此，锐利聚焦的电子束进入第一中间透镜（13）。 这大大降低了中间透镜中离轴像差的影响。 第一，第二和第三中间透镜（13,14,15）分别在能量过滤器（16）的入射窗平面（24）和入射图像平面（25）中产生交叉图像和显微镜图像。 能量过滤器将显微镜图像和交叉图像分别聚焦到出射图像平面（26）和出射窗口平面（27）上。 通过第一和第二投影透镜（18,19）将来自滤光器的输出图像投影到最终图像平面（20）上。

    SCANNING ELECTRON MICROSCOPE
    174.
    发明公开
    SCANNING ELECTRON MICROSCOPE 有权
    ABTAST-ELEKTRONENMIKROSKOP

    公开(公告)号：EP1271603A1

    公开(公告)日：2003-01-02

    申请号：EP00913013.9

    申请日：2000-03-31

    Applicant: Hitachi, Ltd.

    Inventor： TODOKORO, Hideo, Instruments, Hitachi, Ltd ,  EZUMI, Makoto, Instruments, Hitachi, Ltd ,  OSE, Yoichi, Instruments, Hitachi, Ltd ,  SUZUKI, Naomasa, Instruments, Hitachi, Ltd

    IPC: H01J37/22 ,  H01J37/244 ,  H01J37/28

    CPC classification number: H01J37/26 ,  H01J37/244 ,  H01J37/28 ,  H01J2237/05 ,  H01J2237/2448 ,  H01J2237/24485 ,  H01J2237/26

    Abstract: A scanning electron microscope with an energy filter which can positively utilize secondary electrons and/or reflected electrons which collide against a mesh electrode and are lost. The scanning electron microscope which has a porous electrode for producing an electric field for energy-filtering electrons produced by applying a primary electron beam to a sample and a 1st electron detector which detects electrons passing through the porous electrode is characterized by further having a porous structure provided near the sample, a deflector which deflects electrons from the axis of the primary electron beam, and a 2nd electron detector which detects the electrons deflected by the deflector.

    Abstract translation: 具有能量过滤器的扫描电子显微镜，其能够正确地利用与网状电极碰撞而损失的二次电子和/或反射电子。 具有用于产生用于对样品施加一次电子束产生的电子能量的电场的多孔电极的扫描电子显微镜和检测通过多孔电极的电子的第一电子检测器的特征在于进一步具有多孔结构 设置在样本附近的偏转器，其使电子从一次电子束的轴线偏转;以及第二电子检测器，其检测由偏转器偏转的电子。

    Energy transfer and/or ion transportation device and particle beam device having the same
    179.
    发明专利
    Energy transfer and/or ion transportation device and particle beam device having the same 审中-公开
    能量转移和/或离子运输装置和具有该能力的颗粒束装置

    公开(公告)号：JP2011159625A

    公开(公告)日：2011-08-18

    申请号：JP2011015823

    申请日：2011-01-27

    Applicant: Carl Zeiss Nts Gmbh ,  カール・ツァイス・エヌティーエス・ゲーエムベーハーCarl Zeiss NTS GmbH

    Inventor： GLASMACHERS ALBRECHT ,  LAUE ALEXANDER ,  ALIMAN MICHEL ,  MANTZ HUBERT ,  ZEILE ULRIKE ,  DOEMER HOLGER

    IPC: H01J49/06 ,  G01N27/62 ,  H01J49/10

    CPC classification number: H01J37/265 ,  H01J3/26 ,  H01J37/244 ,  H01J37/256 ,  H01J37/28 ,  H01J49/063 ,  H01J49/065 ,  H01J49/10 ,  H01J2237/05 ,  H01J2237/2449 ,  H01J2237/2527

    Abstract: PROBLEM TO BE SOLVED: To provide a device which is simple in design and easy in connection of respective elements in the device for transferring energy of ions to at least one gas particle and/or the device for transporting ions. SOLUTION: In the energy transfer and/or ion transportation devices 1200, 1300 for transferring energy of at least one ion to at least one gas particle in a gas, a container 1201 internally containing a gas is prepared, and the container 1201 has a transportation axis. Furthermore, at least one first multipole unit and at least one second multipole unit are arranged, and the first multipole unit and the second multipole unit are arranged along the transportation axis. The first multipole unit and the second multipole unit are formed by a printed circuit board. Furthermore, an electronic circuit is arranged to generate a potential gradient by applying potential to each multipole unit, and especially, the potential gradient is generated along the transportation axis. COPYRIGHT: (C)2011,JPO&INPIT

    Abstract translation: 要解决的问题：提供一种设备简单且容易连接设备中用于将能量离子转移至至少一个气体颗粒的装置和/或用于输送离子的装置的装置。 解决方案：在用于将至少一种离子的能量转移到气体中的至少一种气体粒子的能量转移和/或离子输送装置1200,1300中，制备内部容纳气体的容器1201，容器1201 有运输轴。 此外，布置至少一个第一多极单元和至少一个第二多极单元，并且第一多极单元和第二多极单元沿着输送轴线布置。 第一多极单元和第二多极单元由印刷电路板形成。 此外，电子电路被布置为通过向每个多极单元施加电位来产生电位梯度，并且特别地，沿着输送轴产生电位梯度。 版权所有（C）2011，JPO＆INPIT

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