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    HIGH RESOLUTION ATOM PROBE
    171.
    发明申请
    HIGH RESOLUTION ATOM PROBE 审中-公开
    高分辨率原子探针

    公开(公告)号：WO2004111604A3

    公开(公告)日：2005-08-18

    申请号：PCT/US2004016590

    申请日：2004-05-26

    Applicant: IMAGO SCIENT INSTR ,  GRIBB TYE TRAVIS

    Inventor： GRIBB TYE TRAVIS

    IPC: G01N20060101 ,  G01N25/00 ,  H01J37/285

    CPC classification number: H01J37/285 ,  B82Y15/00 ,  H01J37/05 ,  H01J37/10 ,  H01J2237/024 ,  H01J2237/0492 ,  H01J2237/053 ,  H01J2237/244

    Abstract: A three dimensional atom probe comprising a sharp specimen (10) coupled to a mounting means (12) where emission of charged particles is caused by application of a potential to the specimen tip (10) such that charged particles are influenced by filtering electrodes (206, 204) before impingement on a detection screen (202).

    Abstract translation: 一种三维原子探针，其包括耦合到安装装置（12）的尖锐的样本（10），其中通过向所述样本末端（10）施加电位而引起带电粒子的发射，使得带电粒子受到过滤电极（206 ，204），然后冲击到检测屏（202）上。

    イオンビーム装置
    172.
    发明申请
    イオンビーム装置 审中-公开
    离子束装置

    公开(公告)号：WO2005055271A1

    公开(公告)日：2005-06-16

    申请号：PCT/JP2004/018330

    申请日：2004-12-02

    Applicant: 日新イオン機器株式会社 ,  内藤 勝男 ,  藤田 秀樹

    Inventor： 内藤 勝男 ,  藤田 秀樹

    IPC: H01J37/317

    CPC classification number: H01J37/3171 ,  H01J37/05 ,  H01J37/1477 ,  H01J2237/053 ,  H01J2237/057

    Abstract: このイオンビーム装置は、イオンビーム４を射出するイオン源２と、そのイオンビーム４が入射されてそれから所望質量のイオンビーム４を分離して取り出す質量分離電磁石６と、そのイオンビーム４が入射されてそれを一定の走査面内で一定の走査中心Ｐを中心にして走査して取り出す走査器１２と、そのイオンビーム４が入射されてその内の所望エネルギーのイオンビーム４ａを、前記走査中心Ｐを中心とする円弧状の偏向領域で、前記走査面に垂直な方向に進むように静電的に９０度偏向して取り出す静電偏向器３０と、ターゲット５０を保持してそれを、静電偏向器３０から取り出されたイオンビーム４ａに一定の角度で交差する方向に機械的に往復走査する走査機構５４とを備えている。

    Abstract translation: 一种离子束装置，包括发射离子束的离子源（2），用于从所输入的离子束（4）分离并取出所需质量的离子束（4）的质量分离电磁体（6）， 扫描器（12），用于在恒定的扫描表面内并且围绕恒定的扫描中心（P）扫描输入的离子束（4）并且将其取回;静电偏转器（30），用于使90℃的离子束（4a）静电偏转 在以扫描中心（P）为中心的弓形偏转区域中的输入离子束（4）中的期望能量，以便沿垂直于上述扫描表面的方向前进并将其取回;以及扫描机构 ），用于保持目标（50）并且在从静电偏转器（30）取回的离子束（4a）以一定角度交叉的方向进行机械往复扫描。

    ELECTRON/ION GUN FOR ELECTRON OR ION BEAMS WITH HIGH MONOCHROMASY OR HIGH CURRENT DENSITY
    175.
    发明申请
    ELECTRON/ION GUN FOR ELECTRON OR ION BEAMS WITH HIGH MONOCHROMASY OR HIGH CURRENT DENSITY 审中-公开
    对于电子或离子射线生成器系统横梁的高monochromasy或高电流密度

    公开(公告)号：WO01082330A1

    公开(公告)日：2001-11-01

    申请号：PCT/DE2001/000409

    申请日：2001-01-31

    IPC: H01J37/05 ,  H01J49/46

    CPC classification number: H01J37/05 ,  H01J49/46 ,  H01J2237/2602 ,  H01J2237/2823

    Abstract: The invention relates to an electron/ion gun for electron or ion beams, comprising a beam source and a monochromator. According to the invention, said monochromator is equipped with an additional beam guidance system and a switchover element which conveys the particles coming from the beam source to either the monochromator or the rest of the beam guidance system is provided at the input of the monochromator.

    Abstract translation: 在用于电子或离子束与束源和一个单色光束生成系统，提出有附加光束引导系统装备单色仪并在其输入端，其将从光束源颗粒无论是单色或到附加光束引导系统传来的数据提供一个开关元件。

    GAS CLUSTER ION BEAM LOW MASS ION FILTER
    176.
    发明申请
    GAS CLUSTER ION BEAM LOW MASS ION FILTER 审中-公开
    具有离子性气体带的低离子过滤器

    公开(公告)号：WO01040532A2

    公开(公告)日：2001-06-07

    申请号：PCT/US2000/042556

    申请日：2000-12-05

    IPC: H01J37/05 ,  H01J37/305 ,  H01J49/04 ,  H05H7/04 ,  C23C

    CPC classification number: H01J49/0422 ,  H01J27/026 ,  H01J37/05 ,  H01J49/10 ,  H01J2237/0812 ,  H05H7/04

    Abstract: Incorporating the use of a permanent magnet (252) within a GCIB apparatus to separate undesirable monomer ions from a gas cluster ion beam (148) to facilitate improved processing of workpieces (152). In an alternate embodiment, the effect of the permanent magnet may be controlled by the use of an electrical coil. The above system eliminates problems related to power consumption and heat generation.

    Abstract translation: 本发明涉及GCIB装置内的永磁体（气态离子簇）用于从气态离子束分离不需要的单体离子的用途， 以促进部件的改进处理。 在另一个实施例中，永磁体的效果可以通过使用电线圈来控制。 该系统消除了与能耗和产热有关的问题。

    APPARATUS AND METHOD RELATING TO CHARGED PARTICLES
    177.
    发明申请
    APPARATUS AND METHOD RELATING TO CHARGED PARTICLES 审中-公开
    关于充电颗粒的装置和方法

    公开(公告)号：WO99066535A3

    公开(公告)日：2000-04-27

    申请号：PCT/GB1999/001879

    申请日：1999-06-15

    IPC: H01J37/317 ,  H01J49/20 ,  H01J49/30 ,  H01J49/32 ,  H01J49/00

    CPC classification number: H01J49/06 ,  H01J37/05 ,  H01J37/3171 ,  H01J49/322 ,  H01J2237/055 ,  H01J2237/057

    Abstract: Apparatus for acting upon charged particles has particular application in a mass analysis apparatus. An array of elongate magnetic poles (311) extends longitudinally in the direction of a longitudinal axis (350) of the array, the array having a symmetrical reference surface (320) containing the longitudinal axis and passing through the array with magnetic poles (311) on each side of the reference surface. Charged particles (314) enter into, or originate in, the field of the magnetic pole array at a position spaced from the said longitudinal axis (350). The array of magnetic poles is such as to provide between opposed poles (311A, 311B), an extended region of magnetic field in which the charged magnetic particles pass with a curved motion imposed thereon by the field, together with entry and exit regions (312A and 312B) which provide curved magnetic fields (312A, 312B), giving focusing or divergence of the beam of charged particles passing through the fringe field at an angle to the normal to the entry or exit region. The apparatus includes resolving means (332) for selecting a required species of particle from the beam by parameter dependent dispersion in a plane transverse to the reference surface (320), by focusing of the beam of particles at different focal points (331) along the general direction of propagation of the beam (314).

    Abstract translation: 用于作用于带电粒子的装置在质量分析装置中具有特别的应用。 细长磁极阵列（311）在阵列的纵向轴线（350）的方向上纵向延伸，该阵列具有包含纵向轴线的对称参考表面（320）并且通过磁极（311）穿过阵列， 在参考表面的每一侧。 带电粒子（314）在与所述纵向轴线（350）间隔开的位置处进入或产生在磁极阵列的场中。 磁极阵列可以在相对的极（311A，311B）之间提供磁场的扩展区域，其中充电的磁性粒子通过场中施加的弯曲运动，以及进入和退出区域（312A） 和312B），其提供弯曲的磁场（312A，312B），使得穿过条纹场的带电粒子束以与入口或出口区域的法线成一定角度聚焦或发散。 该设备包括分解装置（332），用于通过在垂直于参考表面（320）的平面中通过参数依赖性色散从光束中选择所需粒子种类，通过沿不同焦点（331）的粒子束聚焦 光束（314）的一般传播方向。

    WIEN FILTER
    178.
    发明申请
    WIEN FILTER 审中-公开

    公开(公告)号：WO99034401A1

    公开(公告)日：1999-07-08

    申请号：PCT/NL1998/000728

    申请日：1998-12-23

    IPC: H01J37/05 ,  H01J49/46 ,  H01J49/48

    CPC classification number: H01J37/05 ,  H01J49/466

    Abstract: The invention relates to a Wien filter provided with electrodes for generating an electric field, and magnetic poles for generating a magnetic field, said electrodes and magnetic poles being positioned around and having a finite length along a filter axis, and being positioned around the filter axis such that electric and magnetic forces induced by the respective fields and exerted on an electrically charged particle moving substantially along the fileter axis at a certain velocity, take substantially an opposite direction to one another and are directed substantially perpendicular to the particle's direction of movement through the filter, said filter having along its axis two ends determined by the finite length of the electrodes and magnetic poles, and said ends both being terminated by a closing plate which is positioned substantially transversely to the filter axis and is provided with an aperture around the filter axis to allow the particle to enter into an exit from the filter. The closing plates are made from a material of low electric and magnetic resistance, and the distance from the closing plates to a plane halfway along and perpendicular to the filter axis is at most approximately equal to the shortest distance from the filter axis to the electrodes and/or magnetic poles.

    Abstract translation: 本发明涉及一种维恩滤波器，其具有用于产生电场的电极和用于产生磁场的磁极，所述电极和磁极位于沿滤光器轴线周围并具有有限长度并沿着滤光器轴线定位 使得由相应的场感应并施加在基本沿着歪斜轴线以一定速度运动的带电粒子上的电和磁力基本上彼此相反的方向，并且基本上垂直于粒子的移动方向被引导通过 过滤器，所述过滤器沿其轴线由电极和磁极的有限长度确定两端，并且所述端部由基本上横向于过滤器轴线定位的封闭板端接，并且在过滤器周围设置有孔 轴以允许颗粒进入过滤器的出口。 封闭板由低电阻和低磁阻的材料制成，并且从封闭板到平行于滤光器轴线的中心的平面的距离至多近似等于从滤光器轴线到电极的最短距离， /或磁极。

    PARTICLE-OPTICAL APPARATUS COMPRISING A FIXED DIAPHRAGM FOR THE MONOCHROMATOR FILTER
    179.
    发明申请
    PARTICLE-OPTICAL APPARATUS COMPRISING A FIXED DIAPHRAGM FOR THE MONOCHROMATOR FILTER 审中-公开
    包含用于单色滤光片的固定膜片的颗粒光学装置

    公开(公告)号：WO1997013268A1

    公开(公告)日：1997-04-10

    申请号：PCT/IB1996001029

    申请日：1996-10-01

    Applicant: PHILIPS ELECTRONICS N.V. ,  PHILIPS NORDEN AB ,  TIEMEIJER, Peter, C. ,  CHMELIK, Jarda ,  KRUIT, Pieter

    Inventor： PHILIPS ELECTRONICS N.V. ,  PHILIPS NORDEN AB

    IPC: H01J37/05

    CPC classification number: H01J37/05 ,  H01J2237/057

    Abstract: An electron microscope comprises an energy-selective filter (10) which is arranged ahead of the high-voltage field in the electron gun (2). Because the filter carries high-voltage potential and is arranged within the gun space (14) which is filled with SF6 gas, problems arise regarding electrical and mechanical passages to the filter. Notably the centering of the filter is problematic. In order to enable suitable aperture adjustment of the filter nevertheless (for current limitation and for avoiding optical aberrations introduced into the beam by the filter), there is provided an entrance diaphragm (30) which is rigidly connected to the filter parts, notably to a pole face or to a field-defining closing piece (48a) of the filter.

    Abstract translation: 电子显微镜包括位于电子枪（2）的高压场前方的能量选择滤光器（10）。 因为过滤器承载高压电位并且被布置在填充有SF 6气体的枪空间（14）内，所以关于过滤器的电和机械通道出现问题。 值得注意的是过滤器的中心是有问题的。 为了使滤波器适当的孔径调节（为了限制电流并避免由滤波器引入到光束中的光学像差），提供了一个入口隔膜（30），其刚性地连接到过滤器部件，特别是一个 极面或过滤器的场界定闭合件（48a）。

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