Abstract:
A pump is provided that includes a nanometer-scale beam that is suspended in a housing. The housing may include a number of apertures such that molecules can move in and out of the housing. The nanometer-scale beam may be suspended as a jump rope or as a cantilever. The movement of the nanometer-scale beam may be mechanically stopped from moving in a particular way (e.g., towards a particular end of the housing). Thus, for example, the beam and the stop work together to pump molecules in the direction that the beam bounces off the stop. The speed and movement of the nanometer-scale beam can also be influenced either electrostatically or electromagnetically. As such, the speed and direction that a working substance is pumped by a nanometer-scale beam may be electrically controlled.
Abstract:
A micromechanical component having a substrate made from a substrate material having a first doping type, a micromechanical functional structure provided in the substrate and a cover layer to at least partially cover the micromechanical functional structure. The micromechanical functional structure has zones made from the substrate material having a second doping type, the zones being at least partially surrounded by a cavity, and the cover layer has a porous layer made from the substrate material.
Abstract:
A micromachined fluid handling device having improved properties. The valve is made of reinforced parylene. A heater heats a fluid to expand the fluid. The heater is formed on unsupported silicon nitride to reduce the power. The device can be used to form a valve or a pump. Another embodiment forms a composite silicone/parylene membrane. Another feature uses a valve seat that has concentric grooves for better sealing operation.
Abstract:
A method of fabricating an elastomeric structure, comprising: forming a first elastomeric layer on top of a first micromachined mold, the first micromachined mold having a first raised protrusion which forms a first recess extending along a bottom surface of the first elastomeric layer; forming a second elastomeric layer on top of a second micromachined mold, the second micromachined mold having a second raised protrusion which forms a second recess extending along a bottom surface of the second elastomeric layer; bonding the bottom surface of the second elastomeric layer onto a top surface of the first elastomeric layer such that a control channel forms in the second recess between the first and second elastomeric layers; and positioning the first elastomeric layer on top of a planar substrate such that a flow channel forms in the first recess between the first elastomeric layer and the planar substrate.
Abstract:
A method of fabricating an elastomeric structure, comprising: forming a first elastomeric layer on top of a first micromachined mold, the first micromachined mold having a first raised protrusion which forms a first recess extending along a bottom surface of the first elastomeric layer; forming a second elastomeric layer on top of a second micromachined mold, the second micromachined mold having a second raised protrusion which forms a second recess extending along a bottom surface of the second elastomeric layer; bonding the bottom surface of the second elastomeric layer onto a top surface of the first elastomeric layer such that a control channel forms in the second recess between the first and second elastomeric layers; and positioning the first elastomeric layer on top of a planar substrate such that a flow channel forms in the first recess between the first elastomeric layer and the planar substrate.
Abstract:
A micromachined fluid handling device having improved properties. The valve is made of reinforced parylene. A heater heats a fluid to expand the fluid. The heater is formed on unsupported silicon nitride to reduce the power. The device can be used to form a valve or a pump. Another embodiment forms a composite silicone/parylene membrane. Another feature uses a valve seat that has concentric grooves for better sealing operation.
Abstract:
PURPOSE: A modeling of a micro-pump and a simulation method thereof are provided to control minute quantity of fluid flow and read velocity field about the pump movement. CONSTITUTION: An automatic grid and a rim are formed inside a micro-pump. A pressing difference modeling method of the pump is performed when a numerical analysis method is used and a node forming method is performed. The movement analysis is performed under a MEMS movement condition through the pressing difference modeling method.
Abstract:
A micropump is provided to increase actuating force of an IPMC(Ionic Polymer Metal Composite) actuator without reducing actuating displacement by supporting the IPMC actuator using PDMS having flexible coefficient of elasticity. A micropump(100) comprises first to sixth plates(110~160). The first plate is provided with a first inlet hole(a1) and a first outlet hole(b1) for the inflow and discharge of fluid. The second plate is provided with a second inlet hole(a2) to pass the fluid from the first inlet hole, and a second outlet hole(b2) to pass the fluid discharged from the third plate. The third plate is provided with a third inlet hole(a3) to pass the fluid from the second inlet hole, and a third outlet hole(b3) to pass the fluid discharged from the fourth plate. The fourth plate is provided with a fourth inlet hole(a4) to pass the fluid from the third inlet hole, and a fourth discharge hole(b4) to pass the fluid discharged from the fifth plate. The fifth plate made of PDMS(Polydimethylsilioxane) materials is provided with a through hole that defines a circular space at its center, wherein the fifth plate supports the outer periphery of the IPMC inserted in the through hole. The sixth plate is provided with a through hole that defines a circular space at its center.
Abstract:
본 발명은 기포의 생성과 소멸에 의하여 다이어프램을 작동시켜 정량의 유체를 공급하는 버블형 마이크로펌프용 마이크로히터를 개시한다. 본 발명의 마이크로펌프는 펌핑챔버의 유체와 다이어프램에 의하여 격리되어 있으며, 마이크로히터는 버블링챔버의 작동유체를 가열 및 냉각하여 기포의 생성과 소멸을 발생한다. 또한, 마이크로히터는 버블링챔버의 작동유체와 접촉하며 서로 평행하도록 이격되어 있는 직선형의 제1 및 제2 메인전극과, 제1 및 제2 메인전극 각각으로부터 서로 대응하도록 연장되어 있으며 서로 이격되어 있는 직선형의 제1 및 제2 브렌치전극과, 제1 및 제2 브렌치전극의 말단을 연결하고 작동유체를 가열하여 기포를 단 하나로 생성하는 직선형의 버블링전극으로 구성된다. 본 발명에 의하면, 짧고 가는 버블링전극에 의하여 짧은 거리에서 큰 전위차를 발생하여 단일의 기포를 일정한 크기로 정밀하고 정확하게 제어하여 생성함으로써, 정량의 유체를 공급할 수 있으며, 전극의 전기분해를 최소화시켜 신뢰성을 크게 향상킬 수 있는 효과가 있다.
Abstract:
PURPOSE: A micro pump and a manufacturing method thereof are provided to allow for a mass production and reduction of manufacturing costs, while permitting silicon semiconductor elements to be integrated on a single chip. CONSTITUTION: A micro pump comprises a lower substrate(100); a heat generating layer formed into a predetermined pattern on the lower substrate so as to generate a heat and control the pressure of the fluid; a cavity(170) formed on the heat generating layer; membranes(140,150,160) formed on the cavity in such a manner that the membranes expand by the heat generated from the heat generating layer; a fluid transfer path(230) including the membranes and an upper substrate as a boundary; and the upper substrate which is patterned to form the boundary of the fluid transfer path. The membranes expands by heating a certain part of the heat generating layer formed beneath a fluid outlet port(310), and the fluid is transferred by using expansions of the membranes.