公开(公告)号：JPH1126526A

公开(公告)日：1999-01-29

申请号：JP15783998

申请日：1998-06-05

Applicant: CASCADE MICROTECH INC

Inventor： PETERS RON A ,  HAYDEN LEONARD A ,  HAWKINS JEFFREY A ,  DOUGHERTY R MARK

IPC: G01R31/26 ,  G01R1/04 ,  G01R1/06 ,  G01R31/28 ,  H01L21/66

Abstract: PROBLEM TO BE SOLVED: To provide a compact probe station which does not cause a spurious current. SOLUTION: This probe station 10 comprises a chuck device 14, having a chuck element 42 having a support face 42a supporting a tester and a conductive outer shield encloser 12 which encloses at least a part of the chuck element 42 and is insulated against the chuck element 42. A conductive inner shield encloser 52 is inserted into between the conductive outer shield encloser 12 and the chuck element 42, so as to insulate the above. This conductive inner shield encloser 52 encloses at least a part of the chuck element 4. A shield conductor of a 3-axis cable 37 is connected to the conductive inner shield encloser 52 and a center conductor of the 3-axis cable 37 is connected to the chuck element 42, so that the conductive inner shield encloser 52 and the chuck element 42 have a multually independent potential.

公开(公告)号：JPH10339743A

公开(公告)日：1998-12-22

申请号：JP14754298

申请日：1998-05-28

Applicant: CASCADE MICROTECH INC

Inventor： RANDY SCHWINDT

IPC: G01R1/073 ,  G01R1/067 ,  G01R19/00 ,  G01R31/28 ,  G01R35/00 ,  H01L21/66 ,  H01R11/18

Abstract: PROBLEM TO BE SOLVED: To provide a low current measuring system reducing a noise level. SOLUTION: A probe device for the low current measuring system has a dielectric blade 60 having 1st and 2nd side faces, slender conductive route 64 on the 1st side face, probe needle 68 connected to one end of this conductive route so as to be protruded from the dielectric base in the form of beam held on one side, and a conductive domain on the 2nd side face of dielectric base. A probe housing 50 is hung on the probe device attachably and detachably, and the probe housing is hung on both a force cable having a force lead wire 72 surrounded by a guard lead wire and a sense cable having a sense lead wire 74 surrounded by the guard lead wire. When the probe device is hung on the probe housing, a 1st coupler electrically connects the force lead wire 72, sense lead wire 74 and conductive route 64 one and another and a 2nd coupler electrically connects the force cable, the guard lead wire of sense cable and the conductive domain.

公开(公告)号：JPH09178775A

公开(公告)日：1997-07-11

申请号：JP31778096

申请日：1996-11-28

Applicant: CASCADE MICROTECH INC

Inventor： RANDEI JIEI SHIYUBUINTO

IPC: G01R1/073 ,  G01R1/18 ,  G01R31/02 ,  G01R31/28 ,  H01L21/66

Abstract: PROBLEM TO BE SOLVED: To provide an inexpensive probe card for measuring ultra-low current reaching femto-ampere region. SOLUTION: The edge part of a plurality of ceramic probing devices 34 in blade-shaped body is mounted to the surrounding of the opening of a dielectric board 26 made of glass - epoxy material and the tip of the probe fixed to the tip part of the blade-shaped body is located on the probe pattern of a test device under the opening. A probe card has a plurality of cables 24 for connecting the card 20 and the channel of a testing device. A board upper part 30 of the cables 24 is in coaxial type and includes an inner layer for suppressing the friction electrical effect between an inner dielectric and an external conductor. An inner conductive region and the rear surface conductor of the probing devices 34 are set to a guard potential through the external conductor, thus guarding a signal path at the other side of the probing device 34. An introduction part 28 of the cables 24 is connected to a board upper part 30 with a connector, is in coaxial type, and has an inner layer and a shield layer between the inner dielectric and the external conductor. A conductor cover 70 and a side conductive region shield parts on the card 20.

公开(公告)号：JPH02300672A

公开(公告)日：1990-12-12

申请号：JP8763490

申请日：1990-04-03

Applicant: CASCADE MICROTECH INC

Inventor： ANDORIYUU SHII DEBITSUDOSON

IPC: G01R29/26

Abstract: PURPOSE: To decide the noise parameter of a receiver by measuring the noise power of the receiver to a plurality of known power source admittance at first power source noise temperature. CONSTITUTION: The method for deciding noise parameter comprises the steps of measuring the noise power of a receiver at known four different power source terminals having first noise temperature, and deciding one set of the first noise power measurement thereby. The method further comprises the steps of measuring the noise power of the receiver at another known power source terminal having second noise temperature, deciding the another noise power measurement thereby, then deciding relative gains for the power source terminals, and deciding the ratios to the sets of the first noise power measurement for the relative gains. The method further comprises the steps of substituting the ratios into the noise characteristic equation, then calculating the four parameters in the form of scale with the two constants of the parameters, and then utilizing the another noise power measurement for deciding the constant.

公开(公告)号：JPH02240579A

公开(公告)日：1990-09-25

申请号：JP2455590

申请日：1990-02-05

Applicant: CASCADE MICROTECH INC

Inventor： UOOREN KEE HAAUTSUDO ,  KIISU II JIYOONZU ,  DANIERU DERESAATO

IPC: G01R31/00 ,  G01R1/04 ,  H01P5/08

Abstract: PURPOSE: To quick and secure connect and disconnect a launcher and a strip to and from each other by providing a couple of launchers, provided for individual moving bodies which can be adjusted in position in a common plane, and a connector and its positioning mechanism which cooperate with the launchers. CONSTITUTION: A connector positioning mechanism is composed of X- and Y-axial connector driving shafts 104 and 94, X-and Y-axial moving bodies 44 and 32, etc., so as to operate synchronously during connection. Then a grounding surface conductor 13 fitted to the launchers 110 and 112 pushes up a microstrip 114 on a horizontal contact surface 139 through the operation of the positioning mechanism to bring the upper conductor 122 of the strip 114 into contact with inside conductors 124 and 126 of the launchers 110 and 112 and also moves respective connectors finely and horizontally to connect the vertical contact surface of the conductor 130 to the vertical connect surfaces 220 of the outside conductors of the launchers 110 and 112. Once the connection is completed, a probe conductor 118 is lowered on the top surface of the strip 114 and coaxial cables 106 and 108 are electrically connected to conduct a test.

公开(公告)号：JPH02181665A

公开(公告)日：1990-07-16

申请号：JP29012789

申请日：1989-11-09

Applicant: CASCADE MICROTECH INC

Inventor： BAANAADO DABURIYUU RIIKU ,  ANDORIYUU SHII DEBITSUDOSON

IPC: G01R21/06 ,  G01R23/00 ,  G01R29/26

Abstract: PURPOSE: To compensate the error by sequentially sending signals having different frequencies, and measuring the inaccuracy of measured frequency of from the noise current of a DUT by the frequency measured at a scattered parameter. CONSTITUTION: The input terminal of a unit DUT 12 during testing is connected to a source admittance 14, and the output terminal is connected to a noise wattmeter 16. In this case, signals having the same power and different frequencies are successively sent from the input terminal to the wattmeter 16. The signals are amplified in the selected narrow frequency range by a frequency converting stage 18. The wattmeter 16 individually measures the power for the signals having the various different frequencies, and measures the central frequency of the signals. Thus, the power measured and larger individually than the threshold measured in the frequency range is obtained. In this case, the difference of the desired measuring frequency, central frequency can be measured. The signal from the DUT 12 is moved by the difference, and the measurement error can be compensated.

公开(公告)号：JPH02170060A

公开(公告)日：1990-06-29

申请号：JP27619389

申请日：1989-10-25

Applicant: CASCADE MICROTECH INC

Inventor： ERITSUKU DABURIYUU SUTORITSUDO ,  BAANAADO DABURIYUU RIIKU

IPC: G01R21/01 ,  G01R29/26

Abstract: PURPOSE: To measure a noise power being used simultaneously by combining the 1port tuners of a device being tested and measuring the noise power at different frequencies. CONSTITUTION: A noise parameter system 10 has an automatic circuit analyzer 12, an input box 14, an output box 18, a power distributor 20, a plurality of noise meters 22, and a calibrated sound sources 24. Also, a down-converter stage 19 is provided between the output box 18 and the power distributor 20, and further a device (DUT) 16 being tested is provided between the input box 14 and the output box 18. The input box 14 has a 1-port tuner 28 and connects a 3-position switch 30 to the input port of the DUT 16 via a terminal 31, thus connecting a circuit net analyzer 12 or a noise source 24 selectively. In this manner, the noise of the device being tested is measured within a different frequency range.

公开(公告)号：JPS63313832A

公开(公告)日：1988-12-21

申请号：JP1436588

申请日：1988-01-25

Applicant: CASCADE MICROTECH INC

Inventor： ERITSUKU DABURIYU SUTORITSUDO ,  KINBARII AARU GURIISON

IPC: G01R31/26 ,  G01R1/073 ,  G01R31/28 ,  H01L21/00 ,  H05K13/08

公开(公告)号：JP2008306215A

公开(公告)日：2008-12-18

申请号：JP2008230799

申请日：2008-09-09

Applicant: Cascade Microtech Inc ,  カスケード マイクロテック インコーポレイテッドCascade Microtech,Incorporated

Inventor： DUNKLEE JOHN

IPC: G01R31/26 ,  H01L21/66 ,  G01R1/06 ,  G01R31/28 ,  H01L21/68 ,  H01L21/683

CPC classification number: H01L21/68785 ,  G01R31/2887 ,  Y10T279/11 ,  Y10T279/35

Abstract: PROBLEM TO BE SOLVED: To provide a chuck, such that an upper part chuck assembly element for supporting a wafer will not lose flatness, when a probe is loaded on a wafer. SOLUTION: A chuck includes an upper part chuck assembly element 180 having an upper face 198 for supporting a wafer. Between the upper part chuck assembly element and a central chuck assembly element 182 thereunder, three independent pins 200,202, and 204 are provided forming spacing. A chuck alienating device is provided, connected to the upper part chuck assembly element 180. The chuck alienation device includes an insulated U-shaped member 246 having a first face which pushes to engage into the upper face 224 of the central chuck assembly element and a second face which pushes, to be engaged into a first face of a conductive U-shaped member 244. A second face of the conductive U-shaped member 244 pushes to be engaged into a lower face of the upper part chuck assembly element. The first face of the insulated U-shaped member is thinner than one third of the thickness of the conductive U-shaped member. COPYRIGHT: (C)2009,JPO&INPIT

Abstract translation: 要解决的问题：为了提供卡盘，当将探针装载在晶片上时，用于支撑晶片的上部卡盘组件元件不会失去平坦度。 解决方案：卡盘包括具有用于支撑晶片的上表面198的上部卡盘组件元件180。 在上部卡盘组件元件和下面的中心卡盘组件元件182之间，形成间隔的三个独立的销钉200,202和204。 提供了一种卡盘疏散装置，连接到上部卡盘组件元件180.卡盘异物装置包括绝缘的U形构件246，其具有推动接合到中心卡盘组件元件的上表面224中的第一面，以及 推动接合到导电U形构件244的第一面的第二面。导电U形构件244的第二面被推入以与上部卡盘组件的下表面接合。 绝缘的U形构件的第一面比导电U形构件的厚度的三分之一薄。 版权所有（C）2009，JPO＆INPIT

公开(公告)号：JP2002243761A

公开(公告)日：2002-08-28

申请号：JP2001369651

申请日：2001-12-04

Applicant: CASCADE MICROTECH INC

Inventor： HAYDEN LEONARD ,  MARTIN JOHN ,  ANDREWS MIKE

IPC: G01R31/26 ,  G01R1/06 ,  G01R1/073 ,  H01L21/66

Abstract: PROBLEM TO BE SOLVED: To propose a multi-contact type probe easy to construct, used for high-frequency test of an integrated circuit or other microelectronic elements. SOLUTION: This probe is equipped with a substantially rigid support part and a multitude of contact fingers supported by and extending from the support part. The contact fingers are disposed as an integral assembly, thereby keeping the multitude of contact fingers in a prescribed arrangement when they are mounted on the support body.