公开(公告)号：WO2016067039A1

公开(公告)日：2016-05-06

申请号：PCT/GB2015/053259

申请日：2015-10-29

Applicant: OMNIPROBE, INC ,  OXFORD INSTRUMENTS NANOTECHNOLOGY TOOLS LIMITED

Inventor： HAMMER, Mike ,  DAWSON, Michael ,  HARTFIELD, Cheryl

IPC: G01N1/32 ,  H01J37/20 ,  H01J37/305

CPC classification number: H01J37/3056 ,  G01N1/32 ,  H01J37/20 ,  H01J37/285 ,  H01J2237/202 ,  H01J2237/204 ,  H01J2237/31745 ,  H01J2237/31749

Abstract: A method for TEM sample preparation with backside milling of a sample extracted from a workpiece in an energetic-beam instrument is disclosed, where the energetic-beam instrument comprises: a focused ion beam, a stage capable of motion and tilting, a TEM grid held in a fixed holder on the stage, the TEM grid having a plane and the holder mounted in a fixed orientation with respect to the stage, and a probe tip rotatably connected to a nanomanipulator; the sample having a top surface and a backside and a required plane for the TEM sample that is normal to the top surface of the sample, and the sample being attached to the probe tip; the method comprising: rotating the probe tip by an angle calculated according to the geometry of the apparatus; moving the stage to position the TEM grid so that the plane of the TEM grid is substantially parallel to the required plane for the TEM sample; attaching the extracted sample to the TEM grid and removing the attachment of the probe tip to the extracted sample; and, tilting the stage by a stage-tilt angle, while maintaining the holder in the fixed orientation with respect to the stage, so that the axis of the ion beam is made substantially parallel to the required plane for the TEM sample; thereby placing the extracted sample into position for allowing backside milling by the focused ion beam to prepare a thinned cross-sectional sample for TEM viewing.

Abstract translation: 公开了一种用于在能量束仪器中从工件提取的样品进行背面研磨的TEM样品制备方法，其中能量束仪器包括：聚焦离子束，能够运动和倾斜的台架，保持有TEM网格 在舞台上的固定支架中，TEM格架具有平面，并且保持器以相对于平台的固定方向安装，以及可旋转地连接到纳米操纵器的探针尖端; 所述样品具有垂直于样品顶表面的TEM样品的顶表面和背面以及所需平面，并且样品附着到探针尖端; 所述方法包括：使所述探针尖端旋转根据所述装置的几何形状计算的角度; 移动舞台以定位TEM格栅，使得TEM格子的平面基本上平行于TEM样品的所需平面; 将提取的样品附着到TEM网格上，并将探针尖端附着到提取的样品上; 并且使台架相对于台架保持固定姿态，同时使台架倾斜角度，使得离子束的轴线基本上平行于TEM样品的所需平面; 从而将提取的样品放置在位置，以允许通过聚焦离子束的背面研磨以制备用于TEM观察的变薄的横截面样品。

公开(公告)号：WO2009114112A2

公开(公告)日：2009-09-17

申请号：PCT/US2009/001480

申请日：2009-03-06

Applicant: OMNIPROBE, INC. ,  KRUGER, Rocky ,  SMITH, Aaron ,  MOORE, Thomas

Inventor： KRUGER, Rocky ,  SMITH, Aaron ,  MOORE, Thomas

IPC: C23C16/455 ,  C23C16/48

CPC classification number: C23C16/4481 ,  C23C16/45561 ,  C23C16/48 ,  C23C16/52 ,  C23C16/54

Abstract: A precursor delivery system for an irradiation beam instrument having a vacuum chamber includes an injection tube (340) for injecting gasses into the vacuum chamber of the instrument and a main gas line (290) having an inlet (295) and an outlet 335). The outlet (335)is connected to the injection tube, (340) and the inlet (295) is connected to a sequential pair of valves (120, 125) connected to a carrier gas source (150). A crucible (190) for holding precursor material is selectively connected to the main gas line (290) at a location between the pair of valves (120, 125) and the injection tube (340). The source (150) of carrier gas may be selectively connected to the inlet (295) by sequential operation of the pair of carrier gas valves (120, 125), so that pulses of carrier gas assist the flow of precursor material to the injection tube (340). Rapid purging of the system between precursors is enabled by a valve (110) selectively connecting the main line (290) to an envelope (300) in communication with the instrument vacuum. Methods of CVD and etching using the system are also disclosed.

Abstract translation: 用于具有真空室的照射束仪器的前体输送系统包括用于将气体注入仪器的真空室中的注入管（340）和具有入口（295）和出口335的主气体管线（290）。 出口（335）连接到注射管（340），并且入口（295）连接到连接到载气源（150）的顺序一对阀（120,125）。 用于保持前体材料的坩埚（190）在一对阀（120,125）和注射管（340）之间的位置处选择性地连接到主气体管线（290）。 载气的源（150）可以通过一对载气阀（120,125）的顺序操作选择性地连接到入口（295），使得载气的脉冲帮助前体材料流到注射管 （340）。 通过选择性地将主线（290）连接到与仪器真空连通的封套（300）的阀门（110）能够快速清洗前体之间的系统。 还公开了使用该系统的CVD和蚀刻的方法。

公开(公告)号：WO2006050494A3

公开(公告)日：2006-12-14

申请号：PCT/US2005039940

申请日：2005-11-03

Applicant: OMNIPROBE INC ,  MOORE THOMAS M ,  ZAYKOVA-FELDMAN LYUDMILA

Inventor： MOORE THOMAS M ,  ZAYKOVA-FELDMAN LYUDMILA

IPC: G01J1/04 ,  H01J3/14

CPC classification number: H01J37/22 ,  B82Y35/00 ,  H01J37/20 ,  H01J37/3056 ,  H01J2237/20 ,  H01J2237/202 ,  H01J2237/204 ,  H01J2237/206 ,  H01J2237/208 ,  H01J2237/2482 ,  H01J2237/28 ,  H01J2237/31745

Abstract: We disclose an apparatus and method for detecting probe-tip (120) contact with a surface, generally inside a focused ion-beam instrument, where the probe tip (120) is attached to a capsule (130), and the capsule (130) is movably secured in a probe shaft (140). There is a fiber-optic cable (150) having a first end and a second end; a beam splitter (115) having first and second output ports; and a light source (100) connected to the beam splitter (115). The first output port of the beam splitter (115) is connected to the first end of the fiber-optic cable (150), and the second output port of the beam splitter (115) is connected to a photodiode (110). The second end of the fiber-optic cable (150) has a mirror (155) for reflecting incident light at approximately a ninety-degree angle to the axis of the optical path in the fiber-optic cable (150) and onto the capsule (130), so that the intensity of the light reflected back from the capsule (130) through the fiber-optic cable (150) is proportional to the deflection of the capsule (130) as the probe tip (120) makes contact with the surface.

Abstract translation: 我们公开了一种用于检测探针尖端（120）与通常在聚焦离子束仪器内部的表面接触的装置和方法，其中探针尖端（120）连接到胶囊（130），并且胶囊（130） 可移动地固定在探针轴（140）中。 存在具有第一端和第二端的光纤电缆（150） 分束器（115），其具有第一和第二输出端口; 和连接到分束器（115）的光源（100）。 分束器（115）的第一输出端口连接到光缆（150）的第一端，分束器（115）的第二输出端口连接到光电二极管（110）。 光纤电缆（150）的第二端具有反射镜（155），用于以大约90度的角度将入射光反射到光纤电缆（150）中的光路的轴线上并且反射到胶囊上 从而当探针尖端（120）与表面（130）接触时，从胶囊（130）通过光纤电缆（150）反射回来的光的强度与胶囊（130）的偏转成比例 。

公开(公告)号：WO2006096549A2

公开(公告)日：2006-09-14

申请号：PCT/US2006/007700

申请日：2006-03-03

Applicant: OMNIPROBE, INC. ,  ZAYKOVA-FELDMAN, Lyudmila ,  MOORE, Thomas M.

Inventor： ZAYKOVA-FELDMAN, Lyudmila ,  MOORE, Thomas M.

IPC: G06K9/00

CPC classification number: G01R31/2881 ,  G01M7/08 ,  G01N3/00 ,  G01N3/307 ,  G01N3/313 ,  G01N2203/0044 ,  G01N2203/005 ,  G01N2203/0057 ,  G01N2203/0296 ,  G01N2203/0676 ,  G01R31/2868 ,  H01L21/67011

Abstract: An apparatus for testing flip-chip packages has a programmed computer (100), a test-engine stage (130) for applying an impact to at least one package (110) under test, and a monitoring stage (140). The test-engine stage (130) causes an impact on the package (110) on the side opposite its ball-grid array. The test-engine stage (130) has actuators connected to the test-engine stage (130) and the computer (100), for moving and aligning the test-engine stage (130). The monitoring stage (140) has a digital camera (300) connected to the computer (100) for transmitting digital images from the ball-grid array side of the package (110) to the computer (100). A microscope (290) is preferably connected to the digital camera (300). A sample stage (120) located between the test-engine stage (130) and the monitoring stage (140) holds the package (110 under test. The sample stage (120) has an acoustic transducer (190) capable of being removably connected to the package (110) under test. The acoustic transducer (190) is connected to the computer (100) for transmitting signals from the acoustic transducer (190) to the computer (100).

Abstract translation: 用于测试倒装芯片封装的装置具有编程计算机（100），用于对被测试的至少一个封装（110）施加冲击的测试引擎级（130）和监视级（140）。 测试引擎级（130）在与球栅阵列相对的一侧上引起对包装（110）的冲击。 测试发动机级（130）具有连接到测试引擎级（130）和计算机（100）的致动器，用于移动和对准测试引擎级（130）。 监视级（140）具有连接到计算机（100）的数字照相机（300），用于将数字图像从包装（110）的球栅阵列侧传送到计算机（100）。 显微镜（290）优选地连接到数字照相机（300）。 位于测试引擎级（130）和监控级（140）之间的样品台（120）保持被测试的包装（110）。样品台（120）具有能够可移除地连接到 声学换能器（190）连接到计算机（100），用于将信号从声换能器（190）发送到计算机（100）。

公开(公告)号：WO2014011292A8

公开(公告)日：2015-02-26

申请号：PCT/US2013036554

申请日：2013-04-15

Applicant: OMNIPROBE INC

Inventor： KRUGER ROCKY ,  SMITH AARON ,  HARTFIELD CHERYL

IPC: C23C16/455 ,  C23C16/44

CPC classification number: H01J37/08 ,  C23C16/448 ,  C23C16/48 ,  C23C16/52 ,  C23C16/56 ,  G01N1/28 ,  H01J37/02 ,  H01J2237/006 ,  H01J2237/317 ,  Y10T137/0329 ,  Y10T137/0352

Abstract: A gas injection system for an energetic-beam instrument having a vacuum chamber. The system has a cartridge containing a chemical serving as a source for an output gas to be delivered into the vacuum chamber. The cartridge has a reservoir containing the chemical, which rises to a fill line having a level defined by an amount of the chemical present in the reservoir at a given time, An outlet from the reservoir is coupled to an output passage through an outlet valve and configured so that when the system is tilted the outlet remains above the level of the fill line. Embodiments include isolation valves allowing the cartridge to be disconnected without destroying system vacuum.

Abstract translation: 一种用于具有真空室的能量束仪器的气体注入系统。 该系统具有一个包含化学物质的药筒，作为输出气体的来源，被输送到真空室中。 药筒具有容纳化学物质的储存器，其在给定时间上升到具有由储存器中存在的化学物质量限定的水平的填充管线。储存器的出口通过出口阀联接到输出通道， 配置成使得当系统倾斜时，出口保持在填充线的水平面上方。 实施例包括隔离阀，允许筒被断开而不破坏系统真空。

公开(公告)号：WO2013022917A3

公开(公告)日：2013-04-11

申请号：PCT/US2012049908

申请日：2012-08-08

Applicant: OMNIPROBE INC ,  HARTFIELD CHERYL ,  MOORE THOMAS ,  MILLER BRIAN

Inventor： HARTFIELD CHERYL ,  MOORE THOMAS ,  MILLER BRIAN

IPC: G01N1/36 ,  G01B9/04 ,  H01J37/20

CPC classification number: G01N1/32 ,  B82Y10/00 ,  B82Y40/00 ,  G01N1/286 ,  G01N2001/2886 ,  G02B21/32 ,  H01J37/20 ,  H01J2237/0216 ,  H01J2237/208 ,  H01J2237/31745

Abstract: A method for processing a sample in a charged-particle beam microscope. A sample is collected from a substrate and the sample is attached to the tip of a nanomanipulator. The sample is optionally oriented to optimize further processing. The nanomanipulator tip is brought into contact with a stabilizing support to minimize drift or vibration of the sample. The attached sample is then stabilized and available for preparation and analysis.

Abstract translation: 一种在带电粒子束显微镜中处理样品的方法。 从基底收集样品并将样品附着到纳米操纵器的尖端。 该样本可选地被定向以优化进一步的处理。 纳米操纵器尖端与稳定支架接触以使样品的漂移或振动最小化。 附着的样品然后稳定并可用于制备和分析。

公开(公告)号：WO2012138738A2

公开(公告)日：2012-10-11

申请号：PCT/US2012/032141

申请日：2012-04-04

Applicant: OMNIPROBE, INC. ,  HARTFIELD, Cheryl

Inventor： HARTFIELD, Cheryl

IPC: G01N1/28 ,  G02B21/34 ,  H01J37/20

CPC classification number: F25D3/107 ,  G01N1/42 ,  H01J37/20 ,  H01J2237/2002 ,  H01J2237/208 ,  H01J2237/31745

Abstract: A method for attaching a frozen specimen to a manipulator probe tip typically inside a charged-particle beam microscope. The method comprises cooling the probe tip to a temperature at or below that of the frozen specimen, where the temperature of the frozen specimen is preferably at or below the vitrification temperature of water; bringing the probe tip into contact with the frozen specimen, and bonding the probe tip to the frozen specimen by flowing water vapor onto the region of contact between the probe tip and the frozen specimen. The bonded probe tip and specimen may be moved to a support structure such as a TEM grid and bonded to it by similar means. The probe tip can then be disconnected by heating the probe tip or applying a charged-particle beam.

Abstract translation: 通常在带电粒子束显微镜内部将冷冻样品附着到机械手探针尖端的方法。 该方法包括将探针尖端冷却至等于或低于冷冻样品的温度，其中冷冻样品的温度优选在水或玻璃化温度以下; 使探针尖端与冷冻的样品接触，并且通过将水蒸气流到探针尖端和冷冻样品之间的接触区域将探针尖端结合到冷冻样品。 结合的探针尖端和样本可以移动到诸如TEM格栅的支撑结构，并通过类似的方式结合到支架结构。 然后可以通过加热探针尖端或施加带电粒子束来断开探针尖端。

公开(公告)号：WO2010025317A2

公开(公告)日：2010-03-04

申请号：PCT/US2009/055286

申请日：2009-08-28

Applicant: OMNIPROBE, INC. ,  MARCHMAN, Herschel ,  MOORE, Thomas ,  KRUGER, Rocky

Inventor： MARCHMAN, Herschel ,  MOORE, Thomas ,  KRUGER, Rocky

IPC: H01J37/26

CPC classification number: H01J37/226 ,  H01J37/3045 ,  H01J2237/2482 ,  H01J2237/317 ,  H01J2237/31749

Abstract: A single-channel optical processing system for an energetic-beam instrument has separate sources for processing radiation (170) and illumination radiation (180) that are combined in a single optical path and directed to a sample surface (140) through a selffocusing rod lens (130). The self-focusing rod lens (130) thus has a working distance from the sample surface (140) that will not interfere with typical arrangements of ion beams (100) and electron beams (110) in such instruments. A combination of polarizers (220) and beam splitters (240) allows separation of the combined incident radiation (150) and the reflected radiation (160) from the sample surface (140) and returned through the same optical channel, so that the reflected radiation (160) may be directed to an optical detector (370), such as a camera or spectrometer.

Abstract translation: 用于能量束仪器的单通道光学处理系统具有用于处理辐射（170）和照射辐射（180）的分开的源，所述辐射（170）和照射辐射（180）被组合在单个光路中并且被引导到样本表面 （140）通过自聚焦透镜（130）。 因此，自聚焦棒透镜（130）具有距样品表面（140）的工作距离，其不会干扰这种仪器中的离子束（100）和电子束（110）的典型布置。 偏振器（220）和分束器（240）的组合允许组合的入射辐射（150）和反射辐射（160）从样品表面（140）分离并且通过相同的光学通道返回，使得反射的辐射 （160）可以被引导至光学检测器（370），例如照相机或光谱仪。

公开(公告)号：WO2006050495A2

公开(公告)日：2006-05-11

申请号：PCT/US2005/039942

申请日：2005-11-03

Applicant: OMNIPROBE, INC. ,  MOORE, Thomas, M. ,  ZAYKOVA-FELDMAN, Lyudmila

Inventor： MOORE, Thomas, M. ,  ZAYKOVA-FELDMAN, Lyudmila

IPC: H01J37/08

CPC classification number: H01J37/302 ,  B82Y15/00 ,  G01N1/32 ,  H01J37/20 ,  H01J37/22 ,  H01J37/3056 ,  H01J2237/20 ,  H01J2237/202 ,  H01J2237/204 ,  H01J2237/206 ,  H01J2237/208 ,  H01J2237/2482 ,  H01J2237/28 ,  H01J2237/30411 ,  H01J2237/30472 ,  H01J2237/31745

Abstract: An apparatus for performing automated in-situ lift-out of a sample (150) from a specimen (125) includes a computer (100) having a memory with computer-readable instructions, a stage (120) for a specimen (125) and a nano-manipulator (130). The stage (120) and the nano-manipulator (130) are controlled by motion controllers (110) connected to the computer (100). The nano-manipulator (130) has a probe tip (140) for attachment to samples (150) excised from the specimen (125). The computer-readable instructions include instructions to cause the stage motion controllers (110) and the nano-manipulator motion controllers (110), as well as an ion-beam source (170), to automatically perform in-situ lift-out of a sample (150) from the specimen (125).

Abstract translation: 用于从样本（125）进行样品（150）的自动原位取出的设备包括具有计算机可读指令的存储器的计算机（100），用于样本（125）的级（120）和 纳米操纵器（130）。 舞台（120）和纳米机械手（130）由连接到计算机（100）的运动控制器（110）控制。 纳米操纵器（130）具有用于附接到从样本（125）切除的样品（150）的探针尖端（140）。 所述计算机可读指令包括使所述载物台运动控制器（110）和所述纳米机械手运动控制器（110）以及离子束源（170）自动执行原位取出的指令 来自样品（125）的样品（150）。

公开(公告)号：WO2005046851A2

公开(公告)日：2005-05-26

申请号：PCT/US2004036560

申请日：2004-11-03

Applicant: OMNIPROBE INC ,  MOORE THOMAS

Inventor： MOORE THOMAS

IPC: B01F20060101 ,  H01J37/20 ,  B01F

CPC classification number: H01J37/20 ,  G01N1/286 ,  H01J37/26 ,  H01J37/3056 ,  H01J37/31 ,  H01J2237/31745 ,  H01J2237/31749

Abstract: A coupon (100) for preparing a TEM sample holder (170) comprises a sheet of material (120) that includes a TEM sample holder form (170). There is at least one section of the sheet (120) connecting the TEM sample holder form (170) to other portions of the sheet (120). A TEM sample holder (170) is formed by cutting the TEM sample holder form (170) from the coupon in a press. The cutting joins the tip point (160) of a nano-manipulator probe tip (150) with the formed TEM sample holder (170). The tip point (160) of the probe (150) has a sample (140) attached for inspection in a TEM.

Abstract translation: 用于制备TEM样本保持器（170）的优惠券（100）包括包含TEM样本保持器形式（170）的片材（120）。 片材120的至少一部分将TEM样品保持器模板170连接到片材120的其他部分。 TEM样品保持器（170）通过在压机中从样品切割TEM样品保持器模板（170）而形成。 切割将纳米操纵器探针尖端（150）的尖端点（160）与形成的TEM样本保持器（170）连接。 探针（150）的尖端点（160）具有用于在TEM中进行检查的样本（140）。