公开(公告)号：KR1020110132220A

公开(公告)日：2011-12-07

申请号：KR1020110036893

申请日：2011-04-20

Applicant: 도쿄엘렉트론가부시키가이샤

Inventor： 츠키노키와타루 ,  야마모토유이치

IPC: H01L21/677 ,  H01L21/027

CPC classification number: H01L21/67276 ,  H01L21/67745 ,  H01L21/67778 ,  H01L21/67721 ,  H01L21/0274

Abstract: PURPOSE: A substrate processing system and method are provided to efficiently manage processing timing by selecting a processing unit using a cluster controller and calculating estimated elapsed time. CONSTITUTION: An output port transfers a carrier to an automatic returning vehicle. An input port receives the carrier from the automatic returning vehicle. An exclusive returning unit returns the carrier between processing units which are adjacent. A cluster controller(21) manages a processor group(40). A group controller controls a carrier mobile load unit and the exclusive returning unit. A host computer(10) transmits a processing recipe about a substrate which is located in the carrier by the automatic returning vehicle to the group controller. The host computer comprises a program and a memory.

Abstract translation: 目的：提供一种基板处理系统和方法，通过使用集群控制器选择处理单元并计算估计的经过时间来有效地管理处理定时。 构成：输出端口将载体传送到自动返回车辆。 输入端口从自动返回车辆接收载体。 独立返回单元在相邻的处理单元之间返回载体。 集群控制器（21）管理处理器组（40）。 组控制器控制载波移动负载单元和专用返回单元。 主计算机（10）将通过自动返回车辆位于载体中的基板的处理配方发送到组控制器。 主机包括程序和存储器。

公开(公告)号：KR1020100074131A

公开(公告)日：2010-07-01

申请号：KR1020107005732

申请日：2008-08-21

Applicant: 도쿄엘렉트론가부시키가이샤

Inventor： 츠키노키와타루 ,  야마모토유이치

IPC: H01L21/677 ,  H01L21/02

CPC classification number: H01L21/67745 ,  H01L21/67276 ,  H01L21/67242 ,  G05B2219/45031 ,  H01L21/67778

Abstract: After a cassette is placed on a cassette placing section, a controller instructs a substrate processing apparatus to start processing the substrate in the cassette. Then, the controller instructs the substrate processing apparatus a cassette on the cassette placing section to which the substrate is to be transferred when processing is ended. When the number of remaining processing steps of the substrate is at a set number and the cassette to which the substrate is to be transferred when processing of the substrate is ended is not instructed, a warning is issued from the substrate processing apparatus. The controller is notified of the warning from the substrate processing apparatus, and the controller instructs a cassette to which the substrate is to be transferred.

Abstract translation: 在盒式磁带放置在盒放置部分上之后，控制器指示衬底处理设备开始处理盒中的衬底。 然后，控制器在处理结束时向衬底处理设备指示要放置衬底的盒放置部分上的盒。 当没有指示基板的剩余处理步骤的数量为设定数量，并且在处理基板时要传送基板的盒子结束时，从基板处理装置发出警告。 从基板处理装置通知控制器的警告，并且控制器指示要传送基板的盒。

公开(公告)号：KR1020090056831A

公开(公告)日：2009-06-03

申请号：KR1020080114599

申请日：2008-11-18

Applicant: 도쿄엘렉트론가부시키가이샤

Inventor： 야마모토유이치

IPC: H01L21/027 ,  H01L21/677

CPC classification number: H01L21/67225 ,  G03F7/0035 ,  G03F7/70975 ,  G03F7/7075 ,  H01L21/67712

Abstract: A substrate process system and a method of the same are provided to perform patterning on a target film a plurality of times by including a plurality of coating units and a developing unit. A substrate process system includes a carrier block(S1), a process block(S2), an interface block(S3), and a transfer unit. The process block consists of a first coating unit(31) for a first coating process, a first developing unit(41) for a first developing process, a second coating unit(32) for a second coating process, and a second developing unit(42) for a second developing process. The interface block transfers a substrate between the process block and a light exposure apparatus.

Abstract translation: 提供了一种基板处理系统及其方法，用于通过包括多个涂布单元和显影单元多次对目标薄膜进行图案化。 基板处理系统包括载体块（S1），处理块（S2），接口块（S3）和传送单元。 处理块由用于第一涂布工艺的第一涂布单元（31），用于第一显影处理的第一显影单元（41），用于第二涂布过程的第二涂布单元（32）和第二显影单元 42）用于第二显影过程。 接口块在处理块和曝光装置之间传送衬底。

公开(公告)号：KR1020090004452A

公开(公告)日：2009-01-12

申请号：KR1020080034634

申请日：2008-04-15

Applicant: 도쿄엘렉트론가부시키가이샤

Inventor： 우에다이세이 ,  하야시다야스시 ,  미야타아키라 ,  야마모토겐세이 ,  야마모토유이치 ,  마츠시타미치아키

IPC: H01L21/027 ,  H01L21/00 ,  H01L21/677

CPC classification number: H01L21/67769 ,  Y10S414/139

Abstract: A substrate processing system is provided to improve the process efficiency of the substrate by using the latency time of substrate. A cassette standby block(6) is connected to a carrying block of the coating and developing processing system. A cassette carrying port(110), a cassette standby unit(111), and a cassette conveying section(112) and a wafer processing unit(113) are installed at the cassette standby block. The cassette carrying port, and a cassette return device(120) and a wafer carrying apparatus(121) are installed at the cassette standby block. The cassette(C) is returned by the cassette return device between the cassette standby unit and the cassette conveying section. The wafer is returned by the wafer carrying apparatus between the cassette standby unit and the wafer processing unit.

Abstract translation: 提供了一种衬底处理系统，通过使用衬底的延迟时间来提高衬底的工艺效率。 盒式备用块（6）连接到涂层和显影处理系统的承载块。 盒式磁带承载端口（110），盒式备用单元（111）和盒式磁带传送部分（112）和晶片处理单元（113）安装在盒式备用块上。 盒式磁带携带端口和盒式磁带返回装置（120）和晶片承载装置（121）安装在磁带备用块上。 盒式磁带（C）由磁带盒备用单元和磁带盒传送部分之间的磁带盒返回装置返回。 晶片由晶片承载装置返回到盒备用单元和晶片处理单元之间。