公开(公告)号：KR1019930003162A

公开(公告)日：1993-02-23

申请号：KR1019910012382

申请日：1991-07-19

Applicant: 삼성전자주식회사

Inventor： 배명호 ,  전동수

IPC: G11C29/00

公开(公告)号：KR1019930003143A

公开(公告)日：1993-02-23

申请号：KR1019910012632

申请日：1991-07-23

Applicant: 삼성전자주식회사

Inventor： 석용식 ,  전동수

IPC: G11C11/407

公开(公告)号：KR100051307B1

公开(公告)日：1992-05-06

申请号：KR1019890007068

申请日：1989-05-26

Applicant: 삼성전자주식회사

Inventor： 배명호 ,  전동수

IPC: G05F1/56

公开(公告)号：KR100032327B1

公开(公告)日：1990-03-23

申请号：KR1019860009864

申请日：1986-11-21

Applicant: 삼성전자주식회사

Inventor： 전동수

IPC: H03F3/00 ,  G11C7/00

公开(公告)号：KR100030727B1

公开(公告)日：1989-12-14

申请号：KR1019860009912

申请日：1986-11-24

Applicant: 삼성전자주식회사

Inventor： 전동수

IPC: G11C11/34

公开(公告)号：KR101254721B1

公开(公告)日：2013-04-15

申请号：KR1020110028819

申请日：2011-03-30

Applicant: 주식회사 싸이맥스 ,  삼성전자주식회사

Inventor： 손창수 ,  박세운 ,  김상효 ,  박강욱 ,  전동수 ,  조정훈 ,  이규상

IPC: H01L21/677

Abstract: 본 발명은 EFEM(Equipment Front End Module) 장치에서 가공 처리된 웨이퍼를 다음 공정 단계의 EFEM으로 전달하는 EFEM 버퍼 모듈로서, 대향하도록 배치된 2개의 고정 브라켓; 상기 고정 브라켓 상에 각각 결합되고 개폐 가능하도록 설치된 셔터를 포함하는 셔터 하우징; 상기 2개의 고정 브라켓을 연결하고 웨이퍼가 적층되는 카세트가 안착되는 카세트 안착부를 포함하는 배치판; 상기 버퍼 하우징의 상측변을 연결하는 탑 커버; 상기 버퍼 하우징의 양측변을 각각 연결하는 사이드 커버; 를 포함함으로써, 상기 셔터가 폐쇄된 경우 내부에 밀폐 공간을 형성하는 EFEM 버퍼 모듈에 관한 것이다. 본 발명에 따르면, EFEM 장치들 간에 웨이퍼의 청정 상태를 유지하며 다음 공정 단계의 EFEM 장치 내부에 웨이퍼가 투입될 수 있는 EFEM 버퍼 모듈을 제공할 수 있다.

公开(公告)号：KR1020120110752A

公开(公告)日：2012-10-10

申请号：KR1020110028819

申请日：2011-03-30

Applicant: 주식회사 싸이맥스 ,  삼성전자주식회사

Inventor： 손창수 ,  박세운 ,  김상효 ,  박강욱 ,  전동수 ,  조정훈 ,  이규상

IPC: H01L21/677

CPC classification number: H01L21/67769 ,  H01L21/67389 ,  H01L21/67772

Abstract: PURPOSE: An EFEM(Equipment Front End Module) buffer module is provided to stably input a wafer into an EFEM device by keeping the wafer clean between the EFEM devices. CONSTITUTION: An EFEM buffer module delivers a processed wafer to an EFEM. Two fixing brackets(210) are arranged to face each other. A buffer housing(220) is respectively combined with the fixing brackets and includes a shutter(221). An arrangement plate connects the fixing brackets and includes a cassette mounting unit mounting a cassette with the wafer. A top cover(240) connects an upper side of the buffer housing. A side cover(250) respectively connects both sides of the buffer housing.

Abstract translation: 目的：提供一个EFEM（设备前端模块）缓冲模块，通过在EFEM设备之间保持晶片清洁，将晶片稳定地输入到EFEM设备中。 构成：EFEM缓冲模块将处理后的晶片提供给EFEM。 两个固定支架（210）被布置成彼此相对。 缓冲器壳体（220）分别与固定支架组合并且包括挡板（221）。 安装板连接固定托架，并且包括安装盒与盒的盒安装单元。 顶盖（240）连接缓冲壳体的上侧。 侧盖（250）分别连接缓冲壳体的两侧。

公开(公告)号：KR1019960006285B1

公开(公告)日：1996-05-13

申请号：KR1019930028377

申请日：1993-12-18

Applicant: 삼성전자주식회사

Inventor： 유제환 ,  전동수

IPC: G11C11/40

CPC classification number: G11C11/406

Abstract: The method and circuit self-refreshes memory cells of the semiconductor memory device such as DRAM(dynamic random access memory device) in order to conserve the data stored in them. The self-refreshing is the operation to sense the time passed after a waiting mode starts and refresh the memory cells although not transmiting external control signal. The method comprises the steps of : generating the self refresh control signal; refreshing all the memory cells by sequentially activating all the word lines for the 1st periodic cycle when the self refresh control signals are sensed; a step of refreshing the memory cells again by activating them for the 2nd periodic cycle during the enabling period of the the self refresh control signal.

Abstract translation: 该方法和电路自动刷新诸如DRAM（动态随机存取存储器件）之类的半导体存储器件的存储单元，以便节省存储在其中的数据。 自刷新是在等待模式开始之后感测时间的过程，并且刷新存储器单元而不发送外部控制信号的操作。 该方法包括以下步骤：产生自刷新控制信号; 当感测到自刷新控制信号时，通过依次激活所述第一周期周期的所有字线来刷新所有存储单元; 通过在自刷新控制信号的使能周期期间通过激活它们进行第二周期性周期来再次刷新存储器单元的步骤。

公开(公告)号：KR1019950004853B1

公开(公告)日：1995-05-15

申请号：KR1019910014100

申请日：1991-08-14

Applicant: 삼성전자주식회사

Inventor： 석용식 ,  민동선 ,  전동수 ,  노재구

IPC: G11C11/407

CPC classification number: G11C8/12

Abstract: The device has a number of main blocks that are each subdivided into a number of sub-blocks that are separately activated. Block selectors use line and column address signals to identify specific locations. The line address signals are tied to specific inputs of AND gates, such that combinations may be sued to identify specific memory blocks. Once selected, the column address signals may be used to identify locations within the blocks.

Abstract translation: 该设备具有多个主块，每个主块分别被分成多个分别激活的子块。 块选择器使用行和列地址信号来标识特定位置。 线路地址信号被连接到与门的特定输入端，使得组合可以被起诉以识别特定的存储器块。 一旦选择，列地址信号可以用于识别块内的位置。

公开(公告)号：KR1019950004559B1

公开(公告)日：1995-05-02

申请号：KR1019920011242

申请日：1992-06-26

Applicant: 삼성전자주식회사

Inventor： 최도찬 ,  석용식 ,  이동재 ,  전동수

IPC: G11C11/407

Abstract: The semiconductor memory device with bootstrapping circuits includes: a pumping voltage node connected to a circuit using a pumping voltage; a pumping circuit for generating pumping voltage of a designated level during a power-up cycle; an isolating means for transmitting the pumping voltage to the pumping voltage node in response to the pumping voltage; an active kicker for compensating for the level of the pumping voltage by the decreased value of a designated level of pumping voltage; a detector; and a clamper for dropping the pumping voltage by the increased value of a designated level of the pumping voltage.

Abstract translation: 具有自举电路的半导体存储器件包括：使用泵浦电压连接到电路的泵浦电压节点; 用于在上电周期期间产生指定电平的泵浦电压的泵浦电路; 用于响应于所述泵浦电压将所述泵浦电压传输到所述泵浦电压节点的隔离装置; 用于通过指定的泵送电压值的减小的值来补偿泵浦电压的电平的主动启动器; 检测器 以及用于将泵送电压降低指定级别的泵浦电压的增加值的钳位器。