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公开(公告)号：AU2002364064A1
公开(公告)日：2003-07-24
申请号：AU2002364064
申请日：2002-12-19
Applicant: ADVANCED TECH MATERIALS
Inventor： SCHOMBURG CORY , ROBERTSON PETER , KING MACKENZIE E , BELLA RICHARD
IPC: G01N21/35 , G01N27/416 , G01N27/42 , C25D21/12
Abstract: The present invention relates to methods for removing the matrix effects caused by variance in copper concentration and acidity during measurement of the organic additive concentration in a sample copper plating solution.
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12.发明公开APPARATUS AND PROCESS FOR SENSING FLUORO SPECIES IN SEMICONDUCTOR PROCESSING SYSTEMS 审中-公开设备和工艺半导体加工系统中检测FLUOROSPEZIES
公开(公告)号：EP1554561A4
公开(公告)日：2009-11-11
申请号：EP03809006
申请日：2003-10-15
Applicant: ADVANCED TECH MATERIALS
Inventor： DIMEO FRANK , CHEN PHILIP S H , NEUNER JEFFREY W , WELCH JAMES , STAWASZ MICHELE , BAUM THOMAS H , KING MACKENZIE E , CHEN ING-SHIN , ROEDER JEFFREY F
CPC classification number: G01N27/128 , H01J37/3244 , H01J37/32935 , H01J37/32981 , Y10T29/49007 , Y10T436/17 , Y10T436/19
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