公开(公告)号：WO2004047128A3

公开(公告)日：2004-11-18

申请号：PCT/US0336687

申请日：2003-11-17

Applicant: ADVANCED TECH MATERIALS

Inventor： DIMEO FRANK ,  CHEN PHILIP S

IPC: G01N27/12 ,  G01N33/00 ,  H01M8/04 ,  G01N7/00 ,  G01N9/00

CPC classification number: G01N27/125 ,  G01N33/005 ,  H01M8/04089

Abstract: A sensor (101) with a rare earth metal sensing layer (150) and a protective barrier (100) on a noble metal filter (160) convering the sensing layer.

Abstract translation: 在贵金属过滤器（160）上的具有稀土金属感测层（150）和保护屏障（100）的传感器（101），会聚在感测层上。

公开(公告)号：WO2004036175B1

公开(公告)日：2004-07-22

申请号：PCT/US0332521

申请日：2003-10-15

Applicant: ADVANCED TECH MATERIALS

Inventor： DIMEO FRANK ,  CHEN PHILIP S H ,  NEUNER JEFFREY W ,  WELCH JAMES ,  STAWASZ MICHELE ,  BAUM THOMAS H ,  KING MACKENZIE E ,  CHEN ING-SHIN ,  ROEDER JEFFREY F

IPC: G01N33/00 ,  G01N9/00

CPC classification number: G01N27/128 ,  H01J37/3244 ,  H01J37/32935 ,  H01J37/32981 ,  Y10T29/49007 ,  Y10T436/17 ,  Y10T436/19

Abstract: A gas detector (54) and process for detecting a fluorine-containing species in a gas containing same, e.g., an effluent of a semiconductor processing tool undergoing etch cleaning with HF, NF3, etc. The detector in a preferred structural arrangement employs a microelectromechanical system (MEMS)-based device structure and/or a free-standing metal element (8) that functions as a sensing component and optionally as a heat source when elevated temperature sensing is required. The free-standing metal element can be fabricated directly onto a standard chip carrier/device package (6) so that the package becomes a platform of the detector.

Abstract translation: 一种气体检测器（54）和用于检测含有它的气体中的含氟物质的方法，例如用HF，NF 3等进行蚀刻清洁的半导体加工工具的流出物。优选的结构布置中的检测器采用微机电 基于系统（MEMS）的器件结构和/或独立的金属元件（8），当需要高温感测时，其用作感测部件并且可选地作为热源。 独立的金属元件可以直接制造在标准芯片载体/器件封装（6）上，使得封装成为检测器的平台。

公开(公告)号：WO2007090104A2

公开(公告)日：2007-08-09

申请号：PCT/US2007061255

申请日：2007-01-29

Applicant: ADVANCED TECH MATERIALS ,  DIMEO FRANK ,  CARRUTHERS DONALD J ,  WODJENSKI MICHAEL J ,  MCMANUS JAMES V ,  MARZULLO JOSEPH ,  LURCOTT STEVEN M ,  SWEENEY JOSEPH D ,  KING MACKENZIE ,  BOBITA BRIAN

Inventor： DIMEO FRANK ,  CARRUTHERS DONALD J ,  WODJENSKI MICHAEL J ,  MCMANUS JAMES V ,  MARZULLO JOSEPH ,  LURCOTT STEVEN M ,  SWEENEY JOSEPH D ,  KING MACKENZIE ,  BOBITA BRIAN

IPC: B60K15/06

CPC classification number: B01D53/0415 ,  B01D53/0446 ,  B01D2253/102 ,  B01D2253/1122 ,  B01D2253/202 ,  B01D2253/308 ,  B01D2253/311 ,  B01D2253/342 ,  B01D2256/24 ,  B01D2257/30 ,  B01D2258/0216 ,  B01D2259/40096 ,  B01D2259/4146 ,  B01D2259/4525 ,  B01D2259/455 ,  B01J20/20 ,  B01J20/28011 ,  B01J20/28014 ,  B01J20/28023 ,  B01J20/28033 ,  B01J20/28042 ,  B01J20/28052 ,  B01J20/2808 ,  B01J20/28097 ,  B01J2220/66 ,  B82Y30/00 ,  C01B3/0021 ,  C01B13/0251 ,  C10G25/003 ,  C10G45/02 ,  C10G67/06 ,  C10G2300/1033 ,  C10G2300/1044 ,  C10G2300/1051 ,  C10G2300/1055 ,  C10G2300/202 ,  C10G2300/207 ,  F17C11/00 ,  F17C11/007 ,  Y02E60/321 ,  Y02E60/325 ,  Y10S95/903 ,  Y10T428/249956 ,  Y10T428/249957

Abstract: Carbonaceous materials are described, having utility for fluid storage/dispensing and desulfurization applications. The carbonaceous material in one implementation is a nanoporous carbon composite having porosity that is at least partially filled with material imparting to the composite an enhanced character with respect to characteristics selected from the group consisting of hardness, wear-resistance and toughness, as compared with the nanoporous carbon alone. Another implementation utilizes porous carbon material as a storage medium for chlorine gas. A further implementation utilizes porous carbon material as a hydrogen storage medium, e.g., for hydrogen fuel cells. In another implementation, porous carbon material is employed as a sorbent medium in a fluid storage and dispensing system, in an arrangement of multiple porous carbon articles, and positional stabilization structure is employed to restrain the arrangement against movement. Infrared emitter devices are described, which utilize carbon adsorbent to store silane for reaction with oxygen in a controlled manner. An arrangement in which carbon adsorbent is desorbed of residual fluid by resistive and/or inductive heating of the adsorbent is described. Also described is a method of increasing the loading capacity of a porous carbon adsorbent, by contacting of the carbon adsorbent with a swelling agent, followed by contacting of the carbon adsorbent with a pressurized gaseous penetration agent, and by removal of the swelling agent and penetration agent.

Abstract translation: 描述了碳质材料，其用于流体储存/分配和脱硫应用。 一种实施方案中的含碳材料是具有孔隙率的纳米多孔碳复合材料，其与至少部分填充有赋予复合材料的材料相比，与由硬度，耐磨性和韧性组成的组相比的特性相比具有增强特性 纳米多孔碳。 另一个实施方案是利用多孔碳材料作为氯气的储存介质。 另外的实施例使用多孔碳材料作为储氢介质，例如用于氢燃料电池。 在另一个实施方案中，多孔碳材料用作流体储存和分配系统中的吸附剂介质，在多个多孔碳制品的布置中，并且使用位置稳定结构来限制该装置的移动。 描述了红外发射器件，其利用碳吸附剂以可控的方式存储硅烷与氧反应。 描述了通过吸附剂的电阻和/或感应加热使碳吸附剂解吸剩余流体的布置。 还描述了一种通过使碳吸附剂与溶胀剂接触，然后使碳吸附剂与加压的气体渗透剂接触，并且通过除去溶胀剂和渗透物来增加多孔碳吸附剂的负载能力的方法 剂。

公开(公告)号：WO2004036175A3

公开(公告)日：2004-06-17

申请号：PCT/US0332521

申请日：2003-10-15

Applicant: ADVANCED TECH MATERIALS

Inventor： DIMEO FRANK ,  CHEN PHILIP S H ,  NEUNER JEFFREY W ,  WELCH JAMES ,  STAWASZ MICHELE ,  BAUM THOMAS H ,  KING MACKENZIE E ,  CHEN ING-SHIN ,  ROEDER JEFFREY F

IPC: G01N33/00 ,  G01N9/00

CPC classification number: G01N27/128 ,  H01J37/3244 ,  H01J37/32935 ,  H01J37/32981 ,  Y10T29/49007 ,  Y10T436/17 ,  Y10T436/19

Abstract: A gas detector (54) and process for detecting a fluorine-containing species in a gas containing same, e.g., an effluent of a semiconductor processing tool undergoing etch cleaning with HF, NF3, etc. The detector in a preferred structural arrangement employs a microelectromechanical system (MEMS)-based device structure and/or a free-standing metal element (8) that functions as a sensing component and optionally as a heat source when elevated temperature sensing is required. The free-standing metal element can be fabricated directly onto a standard chip carrier/device package (6) so that the package becomes a platform of the detector.

Abstract translation: 气体检测器（54）和用于检测含有气体的气体中的含氟物质的方法，例如用HF，NF3等进行蚀刻清洗的半导体加工工具的流出物。优选结构布置中的检测器采用微机电 系统（MEMS）的装置结构和/或自立式金属元件（8），其在需要高温感测时用作感测部件并且可选地作为热源。 独立金属元件可以直接制造在标准芯片载体/器件封装（6）上，使得封装成为检测器的平台。

公开(公告)号：AU2003291008A1

公开(公告)日：2004-06-15

申请号：AU2003291008

申请日：2003-11-17

Applicant: ADVANCED TECH MATERIALS

Inventor： DIMEO FRANK ,  CHEN PHILIP S

IPC: G01N27/12 ,  G01N33/00 ,  H01M8/04

Abstract: A sensor with a protective barrier on a noble metal filter. The barrier protects the noble metal filter from catalytic poisons and any overdose of target particles. The barrier may be a polymer or non-polymer.

公开(公告)号：AU2003301333A8

公开(公告)日：2004-05-04

申请号：AU2003301333

申请日：2003-10-15

Applicant: ADVANCED TECH MATERIALS

Inventor： STAWASZ MICHELE ,  CHEN SHIN ING ,  NEUNER JEFFREY W ,  KING MACKENZIE E ,  ROEDER JEFFREY F ,  WELCH JAMES ,  DIMEO FRANK ,  BAUM THOMAS H ,  CHEN PHILIP S H

IPC: G01N33/00 ,  G01N9/00

Abstract: A gas detector and process for detecting a fluorine-containing species in a gas containing same, e.g., an effluent of a semiconductor processing tool undergoing etch cleaning with HF, NF3, etc. The detector in a preferred structural arrangement employs a microelectromechanical system (MEMS)-based device structure and/or a free-standing metal element that functions as a sensing component and optionally as a heat source when elevated temperature sensing is required. The free-standing metal element can be fabricated directly onto a standard chip carrier/device package so that the package becomes a platform of the detector.

公开(公告)号：AU2003301333A1

公开(公告)日：2004-05-04

申请号：AU2003301333

申请日：2003-10-15

Applicant: ADVANCED TECH MATERIALS

Inventor： BAUM THOMAS H ,  KING MACKENZIE E ,  CHEN SHIN ING ,  ROEDER JEFFREY F ,  DIMEO FRANK ,  CHEN PHILIP S H ,  NEUNER JEFFREY W ,  WELCH JAMES ,  STAWASZ MICHELE

IPC: G01N33/00

Abstract: A gas detector and process for detecting a fluorine-containing species in a gas containing same, e.g., an effluent of a semiconductor processing tool undergoing etch cleaning with HF, NF3, etc. The detector in a preferred structural arrangement employs a microelectromechanical system (MEMS)-based device structure and/or a free-standing metal element that functions as a sensing component and optionally as a heat source when elevated temperature sensing is required. The free-standing metal element can be fabricated directly onto a standard chip carrier/device package so that the package becomes a platform of the detector.

公开(公告)号：EP1554561A4

公开(公告)日：2009-11-11

申请号：EP03809006

申请日：2003-10-15

Applicant: ADVANCED TECH MATERIALS

Inventor： DIMEO FRANK ,  CHEN PHILIP S H ,  NEUNER JEFFREY W ,  WELCH JAMES ,  STAWASZ MICHELE ,  BAUM THOMAS H ,  KING MACKENZIE E ,  CHEN ING-SHIN ,  ROEDER JEFFREY F

IPC: G01N33/00 ,  G01N27/12 ,  G01N9/00 ,  G01N27/16

CPC classification number: G01N27/128 ,  H01J37/3244 ,  H01J37/32935 ,  H01J37/32981 ,  Y10T29/49007 ,  Y10T436/17 ,  Y10T436/19

公开(公告)号：EP1984096A4

公开(公告)日：2009-08-19

申请号：EP07710375

申请日：2007-01-29

Applicant: ADVANCED TECH MATERIALS

Inventor： DIMEO FRANK ,  CARRUTHERS DONALD J ,  WODJENSKI MICHAEL J ,  MCMANUS JAMES V ,  MARZULLO JOSEPH ,  LURCOTT STEVEN M ,  SWEENEY JOSEPH D ,  KING MACKENZIE ,  BOBITA BRIAN

IPC: B01D53/02 ,  B01J20/20 ,  B01J20/28 ,  C01B31/08

CPC classification number: B01D53/0415 ,  B01D53/0446 ,  B01D2253/102 ,  B01D2253/1122 ,  B01D2253/202 ,  B01D2253/308 ,  B01D2253/311 ,  B01D2253/342 ,  B01D2256/24 ,  B01D2257/30 ,  B01D2258/0216 ,  B01D2259/40096 ,  B01D2259/4146 ,  B01D2259/4525 ,  B01D2259/455 ,  B01J20/20 ,  B01J20/28011 ,  B01J20/28014 ,  B01J20/28023 ,  B01J20/28033 ,  B01J20/28042 ,  B01J20/28052 ,  B01J20/2808 ,  B01J20/28097 ,  B01J2220/66 ,  B82Y30/00 ,  C01B3/0021 ,  C01B13/0251 ,  C10G25/003 ,  C10G45/02 ,  C10G67/06 ,  C10G2300/1033 ,  C10G2300/1044 ,  C10G2300/1051 ,  C10G2300/1055 ,  C10G2300/202 ,  C10G2300/207 ,  F17C11/00 ,  F17C11/007 ,  Y02E60/321 ,  Y02E60/325 ,  Y10S95/903 ,  Y10T428/249956 ,  Y10T428/249957

Abstract: Carbonaceous materials are described, having utility for fluid storage/dispensing. The carbonaceous material in one implementation is a nanoporous carbon composite having porosity that is at least partially filled with material imparting to the composite an enhanced character. Another implementation utilizes porous carbon material as a storage medium for chlorine gas. A further implementation utilizes porous carbon material as a hydrogen storage mediu e g, for hydrogen fuel cells. In another implementation, porous carbon material is employed as a sorbent medium in a fluid storage and dispensing system, in an arrangement of multiple porous carbon articles, and positional stabilization structure is employed to restrain the arrangement against movement. An arrangement in which carbon adsorbent is desorbed of residual fluid by resistive and/or inductive heating of the adsorbent is described.