公开(公告)号：JPS63172988A

公开(公告)日：1988-07-16

申请号：JP582687

申请日：1987-01-12

Applicant: CANON KK

Inventor： SAKINO SHIGEO ,  NEGISHI MASATO ,  HIGOMURA MAKOTO ,  MATSUSHITA KOICHI ,  HORIKOSHI YASUO

IPC: G12B5/00 ,  H01L21/68

公开(公告)号：JPS6375909A

公开(公告)日：1988-04-06

申请号：JP21940186

申请日：1986-09-19

Applicant: CANON KK

Inventor： TAKIZAWA NAOKI ,  HIGOMURA MAKOTO

IPC: G05D3/12 ,  H01L21/67 ,  H01L21/68

Abstract: PURPOSE:To obtain a superior rise characteristic, and non-oscillating response, by using an amplifier which adds a targeted position signal on an actuator directly, and a means which detects the speed and the position of a movable body, and amplifies and returns a detected signal. CONSTITUTION:In the titled device, the amplifier 14 which adds the targeted position signal on the actuator of the movable body 16 directly, and a control system including the means which detects the speed and the position of the movable body 16, and amplifies and returns the signals corresponding to the speed and the position, are used. Also, the amplifier 11 supplies a bias voltage to a piezoelectric element 15 to move the movable body 16 rapidly to the neighborhood of a targeted position, and an integrator 12 removes a quantity of aberration of the movable body 16, and also, holds the position of the movable body 16, that is a quantity of displacement of the piezoelectric element 15. Also, the piezoelectric element 15 acts as the actuator to drive the movable body 16. Thus, by adding the targeted position signal on the actuator of the movable body 16 directly through the amplifier 11, it is possible to realize the rise of a system at high speed, and by returning the signal, the oscillation of the movable body 16 can be suppressed.

公开(公告)号：JPS62229307A

公开(公告)日：1987-10-08

申请号：JP7070186

申请日：1986-03-31

Applicant: CANON KK

Inventor： HIGOMURA MAKOTO ,  IKEDA TAKASHI

IPC: G05D3/12

Abstract: PURPOSE:To shorten the positioning time for a movable object by detecting the speed of this object itself and feeding it back to an amplifier. CONSTITUTION:The control signal for movable object 11 is produced by a speed function generator 1 of the object 11 based on the difference between the target position of a target position register 3 and the value of a present position counter. Then a motor 9 incorporated to the object 11 is actuated and the object 11 is moved. The speed of the object 11 is fed back to an amplifier 8 via an F/V converter 18 and then a phase compensating circuit which functions to stabilize a feedback system. A switch 23 is changed over to a decelerating position deviation setting register 21 for control of deceleration when the difference between the target position and the present position reaches a fixed set level. Then the stop position can be accurately set since the speed of the object 11 itself is fed back to the amplifier.

公开(公告)号：JPS61180581A

公开(公告)日：1986-08-13

申请号：JP1943785

申请日：1985-02-04

Applicant: CANON KK

Inventor： TSUKIJI MASAAKI ,  HIGOMURA MAKOTO

IPC: G05D3/00 ,  G05D3/10 ,  H01L41/08 ,  H01L41/09 ,  H02N2/00

Abstract: PURPOSE:To enable to finely displace accurately at a high speed by adequately determining a voltage waveform to be applied to a piezoelectric effect element. CONSTITUTION:A voltage is applied from a controller 1 through an amplifier 2 to a piezoelectric effect element 3 displacing in response to an applied voltage. In this case, a voltage higher than the voltage to be applied to the element 3 is applied for the prescribed ultrashort time, the applied voltage is set to zero for the prescribed ultrashort time, a voltage slightly higher than the voltage corresponding to a desired displacement is then applied, the voltage corresponding to the desired displacement is applied to displace the element.

公开(公告)号：JPS54141623A

公开(公告)日：1979-11-05

申请号：JP5062078

申请日：1978-04-27

Applicant: CANON KK

Inventor： IWAFUNE TOSHIO ,  HIGOMURA MAKOTO ,  OKUMURA ICHIROU

IPC: G03B43/02

Abstract: PURPOSE:To measure image plane exposure simultaneously with the shutter speed of a focal plane shutter by providing slits in various parts of the image plane and transmitting the light passing therethrough to photo detector groups by means of optical fibers. CONSTITUTION:A diffusion liht source 101 of the uniform luminance, a camera body 103 mounted with a photographic lens 102 and a focal plane shutter 104 having front curtain, rear curtain and openings 104', 104'', 104''' at the running are disposed. A slit plate 105 is provided on the photosensitive face of the camera and further light diffusing plates 106 are disposed in close contact with the light incident faces of the respective slits and optical fibers 107. Hence, the quantity of light at each photo detector 108 linearly and since the linearity between these is maintained, the accurate measurement of the quantity of light may be performed. At the same time, the suitability of the shutter curtain speed and slit width may be tested.

公开(公告)号：JPS5481833A

公开(公告)日：1979-06-29

申请号：JP14965777

申请日：1977-12-13

Applicant: CANON KK

Inventor： OKUMURA ICHIROU ,  HIGOMURA MAKOTO ,  NARUMI KOUJI ,  SAWAAI RIYOUICHI

IPC: G03B43/02

Abstract: PURPOSE:To reduce the measurement error by providing a means which disposes each slit position of the slit plate on the optical path through which only the main light ray passes the center of the projectin pupil of a photographic lens. CONSTITUTION:Slits 7', 7'', 7''' of the second slit plate 7 are disposed at the position through which the main light ray from the point 0 on the lens projection pupil 1' passes each slit 6', 6'', 6''' of the first slit plate 6, and respective photo-electric elements 5 are placed at the rear thereof. Owing to the provision of the second slit plate 7, the main light ray only of the light pencil which passes the aperture of the shutter blind and passes also the slit of the first slit plate may be incident onto the photo-electric element. Even when the shutter speed is high and F value is small, the photo-electric element produces a photo-electric output due to the main light ray only.

公开(公告)号：JP2002345141A

公开(公告)日：2002-11-29

申请号：JP2001144991

申请日：2001-05-15

Applicant: CANON KK

Inventor： SAWAGUCHI KAZUYA ,  HIGOMURA MAKOTO

IPC: B23Q1/00 ,  B65H54/04 ,  H01R35/04 ,  H02G11/00

Abstract: PROBLEM TO BE SOLVED: To prevent entwining of a cable or tube, connected to a turning portion and production of discontinuous resistance during turning for accurate movement and positioning when power or air is supplied to an accurate turning and moving body. SOLUTION: A flat turning gear is provided with a support belt, which couples together a turning portion and a fixed portion, so that the support belt is bent in a loop between an arc-shaped guide and two guides formed on the turning portion and the fixed portion, respectively. A cable or the like is held on the support belt. Thus, when the turning portion is turned, the support belt moves smoothly along the guides. Therefore, accurate movement and positioning can be made.

公开(公告)号：JP2500259B2

公开(公告)日：1996-05-29

申请号：JP15850294

申请日：1994-07-11

Applicant: CANON KK

Inventor： YAMAMOTO SEKINORI ,  OOKAWA SHINKICHI ,  MATSUSHITA KOICHI ,  KAWAI YASUO ,  HIGOMURA MAKOTO ,  KARYA TAKUO

IPC: G01B21/00 ,  G03F7/20 ,  G12B5/00 ,  H01L21/027

公开(公告)号：JPH07109821B2

公开(公告)日：1995-11-22

申请号：JP15850194

申请日：1994-07-11

Applicant: CANON KK

Inventor： YAMAMOTO SEKINORI ,  OOKAWA SHINKICHI ,  MATSUSHITA KOICHI ,  KAWAI YASUO ,  HIGOMURA MAKOTO ,  KARYA TAKUO

IPC: G01B21/00 ,  G03F7/20 ,  G12B5/00 ,  H01L21/027

公开(公告)号：JPH07201696A

公开(公告)日：1995-08-04

申请号：JP15970494

申请日：1994-06-20

Applicant: CANON KK

Inventor： HIGOMURA MAKOTO ,  KAWAI YASUO

IPC: H01L21/027

Abstract: PURPOSE:To raise the working ratio of a device by organically coupling respective configuration devices to each other and optimizing operations of the entire device. CONSTITUTION:This embodiment comprises a SOR ring for generating synchrotron radiating beams; SOR ring controlling means 2 for controlling it; a plurality of aligners arranged radially surrounding the SOR ring; a plurality of aligner controlling means 4a to 4e for controlling these respectively; and communicating means 5 for connecting between the SOR ring controlling means 2 and a plurality aligner controlling means 4a to 4e to transfer data.