公开(公告)号：WO2006071936A2

公开(公告)日：2006-07-06

申请号：PCT/US2005047257

申请日：2005-12-28

Applicant: CORNING INC ,  BOOKBINDER DANA C ,  FIACCO RICHARD M ,  HRDINA KENNETH E ,  TANDON PUSHKAR ,  BLEAKING DANIEL J ,  MAXON JOHN E ,  WILBERT KIMBERLY A

Inventor： BOOKBINDER DANA C ,  FIACCO RICHARD M ,  HRDINA KENNETH E ,  TANDON PUSHKAR ,  BLEAKING DANIEL J ,  MAXON JOHN E ,  WILBERT KIMBERLY A

IPC: C03C3/06 ,  C03B19/14 ,  C03C4/00

CPC classification number: C03C3/06 ,  C03B19/1453 ,  C03B2201/03 ,  C03B2201/04 ,  C03B2201/07 ,  C03B2201/075 ,  C03B2201/21 ,  C03B2201/23 ,  C03C2201/12 ,  C03C2201/21 ,  C03C2201/23

Abstract: Disclosed are high purity synthetic silica glass material having a high OH concentration homogeneity in a plane perpendicular to the optical axis, and process of making the same. The glass has high refractive index homogeneity. The glass can have high internal transmission of at least 99.65%/cm at 193 nm. The process does not require a post-sintering homogenization step. The controlling factors for high compositional homogeneity, thus high refractive index homogeneity, include high initial local soot density uniformity in the soot preform and slow sintering, notably isothermal treatment during consolidation.

Abstract translation: 公开了在垂直于光轴的平面内具有高OH浓度均匀性的高纯度合成石英玻璃材料及其制造方法。 玻璃具有高折射率均匀性。 该玻璃在193nm下可以具有至少99.65％/ cm的高内部透射率。 该方法不需要烧结后均化步骤。 高成分均匀性因此高折射率均匀性的控制因素包括在烟灰预制棒中的初始局部烟灰密度均匀性和慢速烧结，特别是在固结期间的等温处理。

公开(公告)号：WO03077038A2

公开(公告)日：2003-09-18

申请号：PCT/US0306825

申请日：2003-03-04

Applicant: CORNING INC

Inventor： HRDINA KENNETH E ,  MAXON JOHN E ,  MCLEAN BRENT R

IPC: G02B1/00 ,  C03B8/04 ,  C03B19/14 ,  C03B20/00 ,  C03C3/06 ,  C03C4/00 ,  G03F1/24 ,  G03F7/20 ,  H01L21/027

CPC classification number: B82Y10/00 ,  B82Y40/00 ,  C03B19/1446 ,  C03B19/1484 ,  C03B2201/42 ,  C03B2207/62 ,  C03B2207/66 ,  C03C3/06 ,  C03C4/0085 ,  C03C2201/42 ,  C03C2203/40 ,  G03F1/24 ,  G03F7/70958

Abstract: Titania-containing silica glass bodies and extreme ultraviolet elements having low levels of striae are disclosed. Methods and apparatus for manufacturing and measuring striae in glass elements and extreme ultraviolet elements are also disclosed.

Abstract translation: 公开了含有二氧化钛的二氧化硅玻璃体和具有低水平条纹的极紫外线元件。 还公开了用于制造和测量玻璃元件和极紫外元件中的条纹的方法和装置。

公开(公告)号：EP1441994A4

公开(公告)日：2008-09-03

申请号：EP02761645

申请日：2002-09-13

Applicant: CORNING INC

Inventor： DOMEY JEFFREY JOHN ,  HESLIN MICHAEL ROBERT ,  LADISON JULIE L ,  LINDER MICHAEL WERNER ,  MAXON JOHN E ,  MOLL JOHANNES ,  PAVLIK JR ROBERT S ,  SEMPOLINSKI DANIEL R

IPC: G02B3/00 ,  C03B20/00 ,  C03C3/06 ,  G03F7/20

CPC classification number: G03F7/70966 ,  C03C3/06 ,  C03C2201/21 ,  C03C2201/23 ,  G03F7/70958

Abstract: Fused silica members having high internal transmission and low birefringence are disclosed. Methods of making such fused silica members are also disclosed. According to the present invention, fused silica members having an internal transmission equal to or greater than 99.65%/cm at 193 nm and having an absolute maximum birefringence along the use axis of less than or equal to 0.75 nm/cm are provided.

公开(公告)号：EP0850202A4

公开(公告)日：2002-03-13

申请号：EP96930815

申请日：1996-09-11

Applicant: CORNING INC

Inventor： MAXON JOHN E

IPC: C03B8/04 ,  C03B19/14 ,  C03B20/00 ,  C03C3/06 ,  C03B19/00 ,  C03B19/06 ,  C03B37/018

CPC classification number: C03B19/1484 ,  C03B19/1423 ,  C03B2203/22 ,  C03B2207/50 ,  C03B2207/66 ,  C03B2207/70 ,  Y10S501/90

Abstract: Oscillation/rotation patterns for improving the off axis homogeneity of fused silica boules are provided. The patterns reduce the optical effects of periodic off-axis striae by decreasing the ratio of Δnstriae to Δzstriae, where Δnstriae is the average peak-to-valley magnitude of the striae and Δzstriae is their average peak-to-peak period. The oscillation/rotation patterns have long repeat periods and cause soot-producing burners to trace out substantially spiral-shaped patterns on the surface of the boule.

Abstract translation: 提供了用于改善熔融硅石球晶轴的离轴均匀性的振荡/旋转模式。 这些图案通过降低Δstriae与Δzstriae的比率来减少周期性轴外条纹的光学效应，其中Δnstriae是条纹的平均峰谷值，Δzstriae是它们的平均峰值到峰值期间。 振荡/旋转图案具有长的重复周期并且导致产生烟灰的燃烧器在晶锭表面上追踪出大致螺旋形状的图案。

公开(公告)号：EP0850201A4

公开(公告)日：1998-12-02

申请号：EP96930773

申请日：1996-09-11

Applicant: CORNING INC

Inventor： MAXON JOHN E

IPC: C03B19/01 ,  C03B8/04 ,  C03B19/14 ,  C03C3/06

CPC classification number: C03C3/06 ,  C03B19/1407 ,  C03B19/1423 ,  C03B19/1453 ,  C03B19/1492 ,  C03B2207/52 ,  Y10S65/08 ,  Y10S501/90

Abstract: Fused silica boules (19) having improved homogeneity are produced by causing the boule (19) to flow radially during its formation to achieve local mixing between portions of the boule which may have experienced different laydown conditions. The mixing is achieved by one or a combination of: 1) use of a containment vessel (13) having a gently sloping containment wall (22); 2) use of a containment vessel (13) whose inner radius (rv) is substantially larger than the outermost radius (rb) of the burners used to produce the boule (19); and/or 3) maintaining the boule (19) at a sufficiently high temperature during laydown so that radial flow is achieved with a minimum head height of glass. Large blanks having high homogeneity can be made from such boules, e.g., blanks having diameters above 200 millimeters and Δn values of less than 0.25 x 10-6.