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11.发明公开
公开(公告)号：EP3076421A1
公开(公告)日：2016-10-05
申请号：EP16162513.2
申请日：2016-03-29
Applicant: FEI Company
Inventor： Martin, Aiden , McCredie, Geoff , Toth, Milos
IPC: H01J37/305 , H01J37/317 , H01J37/18
CPC classification number: H01J37/32 , H01J37/18 , H01J37/3002 , H01J37/3056 , H01J37/3178 , H01J2237/002 , H01J2237/006 , H01J2237/022 , H01J2237/2003 , H01J2237/24445 , H01J2237/30472 , H01J2237/317
Abstract: A cold trap is provided to reduce contamination gases that react with the beam during operations that use a process gas. The cold trap is set to a temperature that condenses the contamination gas but does not condense the process gas. Cold traps may be used in the sample chamber and in the gas line.
Abstract translation: 提供冷阱以减少在使用工艺气体的操作期间与梁发生反应的污染气体。 冷阱被设置为冷凝污染气体但不冷凝工艺气体的温度。 冷阱可用于样品室和气体管线中。
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公开(公告)号：EP2814050A2
公开(公告)日：2014-12-17
申请号：EP14171293.5
申请日：2014-06-05
Applicant: FEI Company
Inventor： Martin, Aiden , Toth, Milos
IPC: H01J37/244 , H01J37/305
CPC classification number: H01J37/3053 , C23F4/02 , H01J37/3002 , H01J2237/0206 , H01J2237/2001 , H01J2237/24445 , H01J2237/2608 , H01J2237/31732 , H01J2237/31749 , H01L21/3065 , H01L21/465
Abstract: In one embodiment, electron-beam or ion-beam induced etching of a work piece at a temperature below room temperature in a precursor gas is disclosed. The beam-induced etching may use a work piece maintained at a temperature near the boiling point of a precursor material, e.g. NF 3 , but the temperature is sufficiently high to desorb reaction byproducts.
In another embodiment, NF 3 is used for generating a ionization cascade to amplify the number of secondary electrons for detection in a charged particle beam system for processing a work piece.Abstract translation: 在一个实施例中，公开了电子束或离子束在前体气体中在低于室温的温度下对工件的蚀刻。 光束诱导蚀刻可以使用保持在接近于前体材料的沸点的温度的工件，例如， NF 3，但温度足够高以解吸反应副产物。 在另一个实施例中，NF 3用于产生电离级联以放大用于处理工件的带电粒子束系统中用于检测的二次电子的数量。
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公开(公告)号：EP2450934A3
公开(公告)日：2013-01-23
申请号：EP11187990.4
申请日：2011-11-07
Applicant: FEI Company
Inventor： Toth, Milos , Emerson, Mark , Straw, Marcus
IPC: H01J37/18 , H01J37/20 , H01J37/244 , H01J37/305
CPC classification number: H01J37/20 , H01J37/18 , H01J37/244 , H01J2237/024 , H01J2237/2001 , H01J2237/2003 , H01J2237/2445
Abstract: An environmental cell for a charged particle beam system allows relative motion between the cell mounted on an X-Y stage and the optical axis of the focusing column, thereby eliminating the need for a sub-stage within the cell. A flexible cell configuration, such as a retractable lid, permits a variety of processes, including beam-induced and thermally-induced processes. Photon yield spectroscopy performed in a charged particle beam system and using gas cascade amplification of the photoelectrons allows analysis of material in the cell and monitoring of processing in the cell. Luminescence analysis can be also performed using a retractable mirror.
Abstract translation: 用于带电粒子束系统的环境单元允许安装在X-Y平台上的单元和聚焦柱的光轴之间的相对运动，从而消除了对单元内的子级的需要。 灵活的电池配置，例如可伸缩的盖子，可实现多种工艺，包括光束诱导和热诱导工艺。 在带电粒子束系统中进行的光子产率光谱学以及使用光电子的气体级联放大允许分析电池中的材料并监测电池中的处理。 发光分析也可以使用可伸缩镜子进行。
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公开(公告)号：EP2481828A1
公开(公告)日：2012-08-01
申请号：EP12152789.9
申请日：2012-01-27
Applicant: FEI Company
Inventor： Botman, Aurelien , Randolph, Steve , Toth, Milos
CPC classification number: C23C16/0263 , C23C16/10 , C23C16/14 , C23C16/4488 , C23C16/48 , C23C16/486 , C23C16/52
Abstract: Material is deposited in a desired pattern by spontaneous deposition of precursor gas at regions of a surface that are prepared using a beam to provide conditions to support the initiation of the spontaneous reaction. One the reaction is initiated, it continues in the absence of the beam at the regions of the surface at which the reaction was initiated.
Abstract translation: 通过在使用光束制备的表面的区域处自发沉积前体气体以提供支持自发反应开始的条件，将材料沉积成所需的图案。 一个反应开始，它在反应开始的表面区域没有光束的情况下继续。
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公开(公告)号：EP2450934A2
公开(公告)日：2012-05-09
申请号：EP11187990.4
申请日：2011-11-07
Applicant: FEI Company
Inventor： Toth, Milos , Emerson, Mark , Straw, Marcus
IPC: H01J37/18 , H01J37/20 , H01J37/244 , H01J37/305
CPC classification number: H01J37/20 , H01J37/18 , H01J37/244 , H01J2237/024 , H01J2237/2001 , H01J2237/2003 , H01J2237/2445
Abstract: An environmental cell for a charged particle beam system allows relative motion between the cell mounted on an X-Y stage and the optical axis of the focusing column, thereby eliminating the need for a sub-stage within the cell. A flexible cell configuration, such as a retractable lid, permits a variety of processes, including beam-induced and thermally-induced processes. Photon yield spectroscopy performed in a charged particle beam system and using gas cascade amplification of the photoelectrons allows analysis of material in the cell and monitoring of processing in the cell. Luminescence analysis can be also performed using a retractable mirror.
Abstract translation: 用于带电粒子束系统的环境单元允许安装在X-Y平台上的单元和聚焦柱的光轴之间的相对运动，从而消除对单元内的子级的需要。 柔性电池配置，例如可伸缩盖，允许多种工艺，包括光束诱导和热诱导工艺。 在带电粒子束系统中进行的光子产率光谱和使用光电子的气体级联放大，可以分析细胞中的物质并监测细胞中的处理。 也可以使用可伸缩镜进行发光分析。
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Patent Agency Ranking
公开(公告)号：EP2182546A3
公开(公告)日：2011-03-30
申请号：EP09174824.4
申请日：2009-11-03
Applicant: FEI COMPANY
Inventor： Knowles, William , Toth, Milos
IPC: H01J37/244 , H01J37/28
CPC classification number: H01J37/244 , H01J37/28 , H01J2237/2002 , H01J2237/2444 , H01J2237/24445 , H01J2237/2449 , H01J2237/2605 , H01J2237/2802
Abstract: A scanning transmission electron microscope (100) operated with the sample (114) in a high pressure environment (116). A preferred detector (120,122) uses gas amplification by converting either scattered or unscattered transmitted electrons to secondary electrons for efficient gas amplification.
Abstract translation: 扫描透射电子显微镜（100）与样品（114）一起在高压环境（116）下操作。 优选的检测器（120,122）通过将散射或未散射的透射电子转换成二次电子来使用气体放大，以有效地进行气体放大。
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公开(公告)号：EP2284524A2
公开(公告)日：2011-02-16
申请号：EP10171817.9
申请日：2010-08-04
Applicant: FEI Company
Inventor： Toth, Milos , Scheinfein, Michael , Narum, David , Silver, Eric
IPC: G01N23/20
CPC classification number: G01N23/20033 , H01J37/244 , H01J37/256 , H01J2237/2442
Abstract: An improved microcalorimeter-type energy dispersive x-ray spectrometer provides sufficient energy resolution and throughput for practical high spatial resolution x-ray mapping of a sample at low electron beam energies. When used with a dual beam system that provides the capability to etch a layer from the sample, the system can be used for three-dimensional x-ray mapping. A preferred system uses an x-ray optic having a wide-angle opening to increase the fraction of x-rays leaving the sample that impinge on the detector and multiple detectors to avoid pulse pile up.
Abstract translation: 改进的微量热仪型能量色散x射线谱仪为低电子束能量下样品的实际高空间分辨率x射线映射提供足够的能量分辨率和通量。 当与双光束系统一起使用时，该系统可提供从样品中蚀刻一层的能力，该系统可用于三维X射线测绘。 一个优选的系统使用具有广角开口的X射线光学器件来增加离开样品的X射线的射入检测器和多个检测器的部分，以避免脉冲堆积。
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公开(公告)号：EP2283960A1
公开(公告)日：2011-02-16
申请号：EP10171819.5
申请日：2010-08-04
Applicant: FEI Company
Inventor： Straw, Marcus , Toth, Milos
CPC classification number: B29C35/08 , B23K26/0624 , B23K26/12 , B23K26/126 , B23K26/127 , B23K26/16 , B23K26/36 , B41M5/24
Abstract: An improved method for laser processing that prevents material redeposition during laser ablation but allows material to be removed at a high rate. In a preferred embodiment, laser ablation is performed in a chamber (140, 501) filled with high pressure precursor (etchant) gas so that sample particles ejected during laser ablation will react with the precursor gas in the gas atmosphere of the sample chamber. When the ejected particles (108) collide with precursor gas particles (202), the precursor is dissociated, forming a reactive component that binds the ablated material. In turn, the reaction between the reactive dissociation by-product and the ablated material forms a new, volatile compound (204) that can be pumped away in a gaseous state rather than redepositing onto the sample (104).
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公开(公告)号：EP2450934B1
公开(公告)日：2016-04-20
申请号：EP11187990.4
申请日：2011-11-07
Applicant: FEI Company
Inventor： Toth, Milos , Emerson, Mark , Straw, Marcus
IPC: H01J37/18 , H01J37/20 , H01J37/244 , H01J37/305
CPC classification number: H01J37/20 , H01J37/18 , H01J37/244 , H01J2237/024 , H01J2237/2001 , H01J2237/2003 , H01J2237/2445
Abstract: An environmental cell for a charged particle beam system allows relative motion between the cell mounted on an X-Y stage and the optical axis of the focusing column, thereby eliminating the need for a sub-stage within the cell. A flexible cell configuration, such as a retractable lid, permits a variety of processes, including beam-induced and thermally-induced processes. Photon yield spectroscopy performed in a charged particle beam system and using gas cascade amplification of the photoelectrons allows analysis of material in the cell and monitoring of processing in the cell. Luminescence analysis can be also performed using a retractable mirror.
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公开(公告)号：EP2283960B1
公开(公告)日：2014-04-23
申请号：EP10171819.5
申请日：2010-08-04
Applicant: FEI Company
Inventor： Straw, Marcus , Toth, Milos
CPC classification number: B29C35/08 , B23K26/0624 , B23K26/12 , B23K26/126 , B23K26/127 , B23K26/16 , B23K26/36 , B41M5/24
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