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    Sequencer for combining automated and manual-assistance jobs in a charged particle beam device
    12.
    发明公开
    Sequencer for combining automated and manual-assistance jobs in a charged particle beam device 有权
    定序器用于自动在带电粒子射线装置的组合和支持的任务手册

    公开(公告)号：EP2693457A3

    公开(公告)日：2015-01-28

    申请号：EP13176584.4

    申请日：2013-07-16

    Applicant: FEI COMPANY

    Inventor： Young, Richard ,  Tanner, Ryan ,  Warschauer, Reinier

    IPC: H01J37/28 ,  H01J37/26

    CPC classification number: H01J37/265 ,  H01J37/28 ,  H01J2237/221 ,  H01J2237/31749

    Abstract: A device for imaging and processing a workpiece having nanometric features through the use of at least one charged particle beam, by both fully automated procedures and manual assistance procedures. The device includes a user interface, including a schedule input entry device and a human operator ready input that can be placed in a first state or a second state and a procedure scheduler, accepting a schedule of procedures, including fully automated procedures and manual assistance procedures, from the schedule input entry device. Additionally, a procedure sequencer that, when the human operator ready input is in the second state, sequences through fully automated procedures until the human operator ready input is placed into the first state, at which time the sequencer begins sequencing the manual assistance procedures, after reaching a safe termination point for the fully automated procedures being performed.

    Plan view sample preparation
    13.
    发明公开
    Plan view sample preparation 审中-公开
    Vorbereitung einer Draufsichtprobe

    公开(公告)号：EP2818844A1

    公开(公告)日：2014-12-31

    申请号：EP14173606.6

    申请日：2014-06-24

    Applicant: FEI COMPANY

    Inventor： Young, Richard

    IPC: G01N1/32

    CPC classification number: H01J37/317 ,  G01N1/32 ,  H01J37/20 ,  H01J37/28 ,  H01J37/3023 ,  H01J37/3053 ,  H01J37/3178 ,  H01J2237/2802 ,  H01J2237/31745 ,  H01J2237/31749

    Abstract: A method and apparatus for altering the orientation of a charged particle beam sample is presented. Embodiments of the method includes providing a first work piece on a sample stage having a sample stage plane, the first work piece including a lamella plane in a first orientation. A sample is milled from the first work piece using an ion beam so that the sample is substantially free from the first work piece. A probe is attached to the sample, the probe including a shaft having a shaft axis, the shaft axis oriented at a shaft angle in relation to the sample stage plane, the shaft angle being non-normal to the sample stage plane. The probe is rotated about the shaft axis through a rotational angle so that the lamella plane is in a second orientation. The sample is attached to or placed on the sample on either the first work piece, the first work piece being the work piece from which the sample was milled, or on a second work piece, the second work piece being a work piece from which the sample was not milled. The sample is thinned using the ion beam to form a lamella, the lamella being oriented in the lamella plane.

    Abstract translation: 提出了一种用于改变带电粒子束样品取向的方法和装置。 该方法的实施例包括在具有样品台平面的样品台上设置第一工件，第一工件包括处于第一取向的薄片平面。 使用离子束从第一工件碾磨样品，使得样品基本上不含第一工件。 探针附着在样品上，探头包括轴，轴轴相对于样品台平面以轴角取向，轴角与样品台平面不正交。 探头围绕轴线旋转旋转角度，使得薄片平面处于第二取向。 样品在第一工件上附接或放置在样品上，第一工件是样品被研磨的工件，或在第二工件上，第二工件是工件， 样品未研磨。 使用离子束使样品变薄以形成薄片，薄片在薄片平面中取向。

    Stage assembly, particle-optical apparatus comprising such a stage assembly, and method of treating a sample in such an apparatus
    16.
    发明公开
    Stage assembly, particle-optical apparatus comprising such a stage assembly, and method of treating a sample in such an apparatus 审中-公开
    级装置，具有用于在这样的设备中处理的样品这样的装置和方法粒子光学设备

    公开(公告)号：EP1780764A1

    公开(公告)日：2007-05-02

    申请号：EP05110225.9

    申请日：2005-11-01

    Applicant: FEI COMPANY

    Inventor： Tappel, Hendrik Gezinus ,  van Hees, Ian Johannes Bernardus ,  Lankers, Danny ,  Giannuzzi, Lucille ,  van Veen, Gerard Nicolaas Anne ,  Young, Richard

    IPC: H01J37/20 ,  H01L21/68 ,  H01J37/30

    CPC classification number: H01L21/68 ,  G01R31/2898 ,  H01J37/20 ,  H01J37/3005 ,  H01J37/3056 ,  H01J2237/201 ,  H01J2237/202 ,  H01J2237/20207 ,  H01J2237/20214 ,  H01J2237/20221 ,  H01J2237/20242 ,  H01L21/68764

    Abstract: A particle-optical apparatus comprising:
    - A first source, for generating a first irradiating beam along a first axis;
    - A second source, for generating a second irradiating beam along a second axis that intersects the first axis at a beam intersection point, the first and second axes defining a beam plane,
    - A stage assembly (3) for positioning a sample in the vicinity of the beam intersection point, provided with:
    - A sample table (21) to which the sample can be mounted;
    - A set of actuators, arranged so as to effect translation of the sample table along directions substantially parallel to an X-axis perpendicular to the beam plane, a Y-axis parallel to the beam plane, and a Z-axis parallel to the beam plane, said X-axis, Y-axis and Z-axis being mutually orthogonal and passing through the beam intersection point, wherein the set of actuators is further arranged to effect:
    - rotation of the sample table about a rotation axis substantially parallel to the Z-axis, and;
    - rotation of the sample table about a flip axis substantially perpendicular to the Z-axis, whereby the flip axis can itself be rotated about the rotation axis.

    Abstract translation: 甲粒子光学设备，包括： - 第一源，用于产生沿着第一轴的第一照射束; - 第二源，用于沿第二轴线产生第二照射束确实相交的第一轴线在束交叉点，所述第一和第二轴线限定一个光束平面上， - 为在附近定位样品A级组件（3） 光束交点，设置有： - 以可安装样品的样品台（21）; - 一组致动器，布置成实现所述试样台的平移沿着方向基本上平行于在X轴垂直于光束平面，平行于束平面的Y轴，和平行Z轴的光束 规划所述X轴，Y轴和Z轴相互正交，并穿过分束交点，worin该组致动器进一步被布置成作用： - 样品台的旋转绕旋转轴线基本上平行于 Z轴，和; - 约倒装轴用的试样台大致垂直于所述Z轴，由此翻转轴线本身可以绕旋转轴线旋转。

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