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公开(公告)号:CA1305872C
公开(公告)日:1992-08-04
申请号:CA548420
申请日:1987-10-01
Applicant: IBM
Inventor: DUERIG URS T , GIMZEWSKI JAMES K , GRESCHNER JOHANN , POHL WOLFGANG D , WOLTER OLAF
IPC: G01B7/34 , G01B7/00 , G01B21/30 , G01D5/04 , G01L1/00 , G01L1/04 , G01N13/00 , G01N23/00 , G01N37/00 , G01Q20/04 , G01Q40/00 , G01Q60/38 , G01Q70/14 , H01J37/26 , H01J37/28
Abstract: The micromechanical sensor head is designed to measure forces down to 10-13 N. It comprises a common base from which a cantilever beam and a beam member extend in parallel. The cantilever beam carries a sharply pointed tip of a hard material, dielectric or not, for interaction with the surface of a sample to be investigated. Bulges forming a tunneling junction protrude from facing surfaces of said beams, the gap between said bulges being adjustable by means of electrostatic forces generated by a potential (Vd) applied to a pair of electrodes respectively coated onto parallel surfaces of said beams. The sensor head consists of one single piece of semiconductor material, such as silicon or gallium arsenide (or any other compounds thereof) which is fabricated to the dimensions required for the application by means of conventional semiconductor chip manufacturing techniques. SZ9-86-002
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公开(公告)号:CA1283733C
公开(公告)日:1991-04-30
申请号:CA534217
申请日:1987-04-08
Applicant: IBM
Inventor: POHL WOLFGANG D , DUERIG URS T , GIMZEWSKI JAMES K
IPC: G01B7/34 , G01B21/30 , G01Q20/04 , G01Q80/00 , G11B9/00 , G11B9/08 , G11B9/14 , G11B17/34 , G11B19/20 , G11B21/00 , G11B25/04
Abstract: Direct Access Storage Unit The storage unit comprises an array of tunnel tips (13) arranged at tunneling distance from a storage medium (2) which is capable of permitting digital information to be written or read through variations of the tunneling current. Each tunnel tip (13) is supported on its own cantilever beam (12) extending across a cavity (14) formed in a common substrate (15). Each cantilever beam (12) as well as the bottom of each cavity (14) are covered with an electrically conducting layer (16, 18) enabling the distance between each one of the tunnel tips (13) and the surface of the storage medium (2) to be electrostatically controlled. The storage medium (2) is attached to the free end of a piezoceramic bender, the end in operation performing a circular motion so that each tunnel tip (13) scans its associated area of the storage medium (2) along a circular track.
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公开(公告)号:CA2868577C
公开(公告)日:2021-08-17
申请号:CA2868577
申请日:2013-04-25
Applicant: IBM
Inventor: DUERIG URS T , HOLZNER FELIX , KNOLL ARMIN W , RIESS WALTER HEINRICH
IPC: H01L21/768
Abstract: The present invention is notably directed to apparatuses and methods for positioning nano- objects (20) on a surface. The method comprises: providing (S10 S50) two surfaces (15, 17) including a first surface (15) and a second surface (17) in vis-à-vis, wherein at least one of the two surfaces exhibits one or more positioning structures (16, 16a) having dimensions on the nanoscale; and a ionic liquid suspension (30) of the nano-objects between the two surfaces, wherein each of the surfaces forms an electrical double layer with the ionic liquid suspension, each of the two surfaces having a same electrical charge sign; and letting (S60) nano-objects in the suspension position according to a potential energy (31) resulting from the electrical charge of the two surfaces and depositing (S70) one or more of the nano-objects on the first surface according to the positioning structures, by shifting minima (32) of the potential energy towards the first surface.
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公开(公告)号:DE112013001196B4
公开(公告)日:2016-04-14
申请号:DE112013001196
申请日:2013-04-25
Applicant: IBM
Inventor: DUERIG URS T , HOLZNER FELIX , KNOLL ARMIN W , RIESS WALTER HEINRICH
IPC: H01L21/768 , B82B3/00 , B82Y40/00 , C25D13/02
Abstract: Verfahren zur Positionierung von Nanoobjekten (20) auf einer Oberfläche, wobei das Verfahren aufweist: Bereitstellen (S10 bis S50): zweier einander gegenüberliegender Oberflächen (15, 17) einschließlich einer ersten Oberfläche (15) und einer zweiten Oberfläche (17), wobei mindestens eine der zwei Oberflächen eine oder mehrere Positionierungsstrukturen (16, 16a) mit Abmessungen im Nanometerbereich aufweist; und einer ionischen Flüssigkeitssuspension (30) der Nanoobjekte zwischen den zwei Oberflächen, wobei die Suspension zwei elektrische Doppelschichten aufweist, die jeweils an einer Grenzfläche zu einer jeweiligen der zwei Oberflächen gebildet sind, wobei die elektrischen Oberflächenladungen der zwei Oberflächen dasselbe Vorzeichen haben; und Sich-positionieren-lassen (S60) der Nanoobjekte (20) in der Suspension entsprechend einer potentiellen Energie (31), die aus der elektrischen Ladung der zwei Oberflächen resultiert, und Abscheiden (S70) eines oder mehrerer der Nanoobjekte auf der ersten Oberfläche den Positionierungsstrukturen gemäß durch Verschieben von Minima (32) der potentiellen Energie zur ersten Oberfläche hin.
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公开(公告)号:GB2518075A
公开(公告)日:2015-03-11
申请号:GB201420143
申请日:2013-06-11
Applicant: IBM
Inventor: DUERIG URS T , LOVCHIK ROBERT
IPC: B81B3/00
Abstract: A microfluidic surface processing device (10a-10h), comprising: a microfluidic probe head (16) with at least one aperture (11) on a face (17) thereof, said at least one aperture (11) comprising at least an outlet aperture (11); and a surface processing structure (21, 21a, 22) extending outwardly and perpendicularly with respect to said face (17), the processing structure being further dimensioned and located with respect to the outlet aperture (11) such that it can intercept a flowpath of liquid (15) dispensed via the outlet aperture, in operation. Related apparatuses and methods are provided.
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公开(公告)号:GB2516183A
公开(公告)日:2015-01-14
申请号:GB201418276
申请日:2013-03-05
Applicant: IBM
Inventor: DING FEI , DUERIG URS T , KNOLL ARMIN W , MAHRT RAINER F , STOEFERLE THILO HERMANN
Abstract: A method of fabrication of a micro-optics device (1), the method comprising: -providing a layer (300) of material; -patterning said layer of material by locally unzipping and/or desorbing molecules therefore, with a nano-scale dimensione probe, to obtain a curved surface (s2) of layer of material, the curved surface having a curved profile (21, 21', 22) in at leas a plane section ((y, z), (x, z)); and -comprising a layer structure by providing one or more additional layers of material in contact with the curved surface, to obtain the micro-optics device (1), the latter having said layer structure, a given layer (10) therefore comprising a defect (20), said defect delimited by two surfaces, wherein one of said two surface is the curved surface (s2) and said at least one plane section ((y, z), (x, z)) is perpendicular to the layer structure.
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公开(公告)号:AU2013282831A1
公开(公告)日:2014-11-13
申请号:AU2013282831
申请日:2013-06-11
Applicant: IBM
Inventor: DUERIG URS T , LOVCHIK ROBERT
Abstract: A microfluidic surface processing device (10a-10h), comprising: a microfluidic probe head (16) with at least one aperture (11) on a face (17) thereof, said at least one aperture (11) comprising at least an outlet aperture (11); and a surface processing structure (21, 21a, 22) extending outwardly and perpendicularly with respect to said face (17), the processing structure being further dimensioned and located with respect to the outlet aperture (11) such that it can intercept a flowpath of liquid (15) dispensed via the outlet aperture, in operation. Related apparatuses and methods are provided.
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公开(公告)号:GB2487156A
公开(公告)日:2012-07-11
申请号:GB201206335
申请日:2010-11-08
Applicant: IBM
Inventor: DUERIG URS T , GOTSMANN BERND W , KNOLL ARMIN W , LANTZ MARK A
Abstract: The invention concerns a method for scanning a surface (52) of a material (50) with a scanning probe microscope or SPM (10), the SPM having a cantilever sensor (100) configured to exhibit distinct spring behaviors (C, Ck), the method comprising: - operating the SPM in contact mode, whereby the sensor is scanned on the material surface and a first spring behavior (C) of the sensor (e.g. a fundamental mode of flexure thereof) is excited by deflection of the sensor by the material surface; and - exciting with excitation means a second spring behavior (Ck) of the sensor at a resonance frequency thereof (e.g. one or more higher-order resonant modes) of the cantilever sensor to modulate an interaction of the sensor and the material surface and thereby reduce the wearing of the material surface.
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公开(公告)号:IN4834CHN2014A
公开(公告)日:2015-09-18
申请号:IN4834CHN2014
申请日:2014-06-25
Applicant: IBM
Inventor: DUERIG URS T , HOLZNER FELIX , KNOLL ARMIN W , RIESS WALTER HEINRICH
IPC: H01L21/768
Abstract: The present invention is notably directed to apparatuses and methods for positioning nano objects (20) on a surface. The method comprises: providing (S10 S50) two surfaces (15 17) including a first surface (15) and a second surface (17) in vis à vis wherein at least one of the two surfaces exhibits one or more positioning structures (16 16a) having dimensions on the nanoscale; and a ionic liquid suspension (30) of the nano objects between the two surfaces wherein each of the surfaces forms an electrical double layer with the ionic liquid suspension each of the two surfaces having a same electrical charge sign; and letting (S60) nano objects in the suspension position according to a potential energy (31) resulting from the electrical charge of the two surfaces and depositing (S70) one or more of the nano objects on the first surface according to the positioning structures by shifting minima (32) of the potential energy towards the first surface.
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公开(公告)号:GB2516183B
公开(公告)日:2015-07-15
申请号:GB201418276
申请日:2013-03-05
Applicant: IBM
Inventor: DING FEI , DUERIG URS T , KNOLL ARMIN W , MAHRT RAINER F , STOEFERLE THILO HERMANN
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