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公开(公告)号：DE602004032117D1
公开(公告)日：2011-05-19
申请号：DE602004032117
申请日：2004-02-23
Applicant: KLA TENCOR TECH CORP
Inventor： MIEHER WALTER D , LEVY ADY , GOLOVANEVSKY BORIS , FRIEDMANN MICHAEL , SMITH IAN , ADEL MICHAEL , FABRIKANT ANATOLY , BEVIS CHRISTOPHER F , FIELDEN JOHN , BAREKET NOAH , GROSS KENNETH P , ZALICKI PIOTR , WACK DAN , DECECCO PAOLA , GHINOVKER MARK , KNOLL NOAM , MOSHE BARUCH
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