公开(公告)号：SG11201404303PA

公开(公告)日：2014-09-26

申请号：SG11201404303P

申请日：2013-03-18

Applicant: MKS INSTR INC

Inventor： TRAN KEN ,  CHEN XING ,  NEWMAN RUSSELL L ,  LEE FRANKLIN

IPC: H02M7/48

Abstract: A power system for a dielectric barrier discharge system, such as used for generating ozone, can include a full bridge inverter stage and parallel resonant tank outputting a signal for powering a dielectric barrier discharge cell stack. The inverter stage is controlled using a combination of pulse width modulation (PWM) and frequency modulation (FM) to enable soft switching through all load conditions—from full load to light load. A current control loop error amplifier compensator can provide a duty cycle adjustment signal to a phase shift PWM controller chip that generates the switching signals for the inverter stage. A feedback signal is also used to adjust a clock frequency time constant of the PWM controller chip to provide the FM. In one embodiment, the feedback signal is an output of an inverting amplifier connected at an output of the current control loop error amplifier compensator.

公开(公告)号：SG173883A1

公开(公告)日：2011-09-29

申请号：SG2011062056

申请日：2009-04-13

Applicant: MKS INSTR INC

Inventor： BENZERROUK SOUHEIL ,  NAGARKATTI SIDDHARTH P ,  COWE ANDREW ,  SHAJII ALI ,  AMBROSINA JESSE E ,  TRAN KEN ,  CHEN XING

Abstract: Described are methods and apparatuses, including computer program products, for igniting and/or sustaining a plasma in a reactive gas generator. Power is provided from an ignition power supply to a plasma ignition circuit. A pre-ignition signal of the plasma ignition circuit is measured. The power provided to the plasma ignition circuit is adjusted based on the measured pre-ignition signal and an adjustable pre-ignition control signal. The adjustable pre-ignition control signal is adjusted after a period of time has elapsed.

公开(公告)号：DE602006015841D1

公开(公告)日：2010-09-09

申请号：DE602006015841

申请日：2006-11-03

Applicant: MKS INSTR INC

Inventor： MILLNER ALAN ,  ALEXANDER THOMAS ,  BYSTRYAK ILYA ,  TRAN KEN ,  JOSHI MADHUWANTI

IPC: H01J37/32