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公开(公告)号：JPH06349414A
公开(公告)日：1994-12-22
申请号：JP13706193
申请日：1993-06-08
Applicant: NEC CORP
Inventor： MAKISHIMA HIDEO
IPC: H01J23/06 , H01J3/02 , H01J23/065 , H01J23/38
Abstract: PURPOSE:To obtain a density modulation electron beam with a high coefficient of modulation, which enables the operation at a high frequency, by setting the height of an field emission type cold cathode higher than the height of a control electrode, and using a negative electrode and a positive electrode as a part of the inner wall of an input cavity. CONSTITUTION:At the time of operating a density modulation electron gun, a positive low voltage is applied to a control electrode 10 on the basis of a potential of an emitter 8, which forms a negative electrode 3 with a negative electrode power source 6, to reduce a discharge of the electron remarkably under the condition that RF is not input. A positive electrode power source 5 is used to apply the voltage at several KV in comparison with the potential of the input cavity 1 and the control electrode 10 to a positive electrode 4, and even if the electric field formed in the tip of the emitter 8 is influenced by the voltage of the electrodes 10, 4, since a distance between the emitter 8 and the electrode 10 is set at about 0.5m, the only influence of the potential of the electrode 10 is put out strongly. The positive electrode 4 is formed into the mesh so as to function as a cavity in relation with the RF input signal, and the electron from the positive electrode 3 is passed through the positive electrode 4 without colliding the mesh, and discharged from the electron gun.
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公开(公告)号：JPH11232995A
公开(公告)日：1999-08-27
申请号：JP2973198
申请日：1998-02-12
Applicant: NEC CORP
Inventor： MAKISHIMA HIDEO , TAKEMURA HISASHI
IPC: H01J9/44 , H01J1/304 , H01J3/02 , H01J3/18 , H01J23/06 , H01J29/04 , H01J29/48 , H01J29/84 , H01J1/30
Abstract: PROBLEM TO BE SOLVED: To provide a method for operating an electron tube capable of protecting an electron emission region and preventing the deterioration of emission current during a process, in which the degree of vacuum in the tube does nor become sufficiently high and a large quantity of positive ions is generated. SOLUTION: This method is for operating an electron tube, comprising emitters 6 having sharp tips and formed on a substrate 2, gate electrodes 4 surrounding the emitters 6, and peripheral electrodes surrounding electron emitting regions constituted of a plurality of the emitters 6, and a plurality of gate electrodes 4 and insulated from the emitters 6 and the gate electrodes 4. The method includes a process of applying a voltage to the peripheral electrodes which is lower than that applied to the gate electrodes 4.
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公开(公告)号：JPH10134702A
公开(公告)日：1998-05-22
申请号：JP29145396
申请日：1996-11-01
Applicant: NEC CORP
Inventor： MAKISHIMA HIDEO , TAKAHASHI MASAAKI
Abstract: PROBLEM TO BE SOLVED: To provide a cold negative electrode electron gun which form 5 an electron beam with a small ripple as well as a high current density by converging electrons emitted from its cold negative electrode. SOLUTION: This apparatus comprises a negative electrode substrate 5 in with at least one of its surfaces is electrically conductive; and an emitter 10 which is formed on the substrate 5 and sharpened in its tip; and an insulation layer 6 laminated on the substrate 5 except the emitter 10 and its vicinity; and a ringed gate electrode 7 laminated in the insulation layer 6 with an opening surrounding the emitter 10; and an inner electrode 8 laminated on the insulation layer 6 and formed at the inside of the gate of electrode 7; and an outer electrode 9 laminated on the insulation layer 6 and formed at the outside of the gate electrode 7. On the condition that each applied voltage to the gate electrode 7, the inner electrode 8 and the outer electrode 9 are respectively termed EG, EI, and Eo in the basis of the electric potential of the emitter 10 EG>=EI, and besides EG>=EO are obtained.
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公开(公告)号：JPH0982248A
公开(公告)日：1997-03-28
申请号：JP23745895
申请日：1995-09-14
Applicant: NEC CORP
Inventor： MAKISHIMA HIDEO
Abstract: PROBLEM TO BE SOLVED: To provide a cold cathode, and an electron gun and an electron beam device using the cold cathode, capable of changing the modulation frequency of an electron beam to a high frequency. SOLUTION: An electron emission zone 47 made of many micro cold cathodes 46 consisting of a cathode 41, an emitter 44 and a gate electrode 45, is formed on an insulating substrate. Furthermore, insulation layers 42a to 42d under the gate electrode 45 are made stepwise thicker in a direction from the electron emission zone 47 toward the surrounding area thereof, and the cathode 41 is formed to have the minimum size required to form the electron emission zone 47. Also, the gate electrode 45 is kept in direct contact with an electrode 51 forming an electron gun, and electron beam modulated voltage is applied to the cathode 41. An electron beam device such as a picture tube and a travelling- wave tube is formed, using the electron gun as an electron source.
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公开(公告)号：JPH08293244A
公开(公告)日：1996-11-05
申请号：JP11770795
申请日：1995-04-20
Applicant: NEC CORP
Inventor： MAKISHIMA HIDEO
Abstract: PURPOSE: To restrain beams from spreading out so as to reduce current- modulated voltages by eliminating the need for using high-precision lithography techniques. CONSTITUTION: Recesses are provided in a matrix in a substrate 1 made of a metal or a semiconductor, and an electron-emitting layer 5 made of a thin film of diamond is formed over the bottom surface of each recess. Each projected part of the substrate 1 serves as a beam-forming electrode 2, thereby restraining beams from spreading out. An electron-drawing gate electrode 4 is formed over the beam-forming electrode 2 via an insulating layer 3.
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Patent Agency Ranking
公开(公告)号：JPH0830220A
公开(公告)日：1996-02-02
申请号：JP16686494
申请日：1994-07-19
Applicant: NEC CORP
Inventor： MAKISHIMA HIDEO
IPC: H01J1/304 , G09G1/00 , G09G3/20 , G09G3/22 , H01J1/30 , H01J1/308 , H01J1/312 , H01J29/04 , H01J37/04
Abstract: PURPOSE:To eliminate a current noise and unstability by transducing an electronic beam current into voltage information, comparing it with an input modulation signal incorporating a high frequency signal component and controlling a voltage or a current applied to a cold cathode element so that both are equalized. CONSTITUTION:The voltage in proportion to the current of the electronic beam 6 is generated on both ends of a detection resistor 9, and the voltage is inputted to an inversion input (-) of an error amplifier 10. On the other hand, the signal of an amplifier 15 is inputted to the noninverted input (+) of the error amplifier 10. The error amplifier 10 forms an output voltage so that the noninversion input voltage is equal to the inversion input voltage, and the voltage is applied to a control electrode 3. Thus, the current waveform of the electronic beam 6 becomes one following up an input voltage waveform. When the surface condition of an emitter 4 is changed, and electron emission is facilitated, the output voltage of the error amplifier 10 is reduced, and the voltage of the control electrode 3 is lowered, and the electronic beam of the current following up the input voltage is formed.
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公开(公告)号：JPH07201273A
公开(公告)日：1995-08-04
申请号：JP33742893
申请日：1993-12-28
Applicant: NEC CORP , KANSAI NIPPON ELECTRIC
Inventor： IMURA HIRONORI , MAKISHIMA HIDEO , TOMIHARI YOSHINORI
Abstract: PURPOSE:To omit wire bonding for power supply to the gate electrode of a field emission cold cathode and make a cathode structure furnished with the field emission cold cathode smaller, design-free, environment-resistant and reliable. CONSTITUTION:Drawing electrodes 6, 8 for a gate electrode 3 is provided on the back of a substrate 1 furnished with a field emission cold cathode to supply cathode operating power from the back of the substrate. The drawing electrodes 6, 8 provided on the back is conducted to the gate electrode 3 through a conductor 7 formed in a contact hole 5 made through the substrate and insulated from the substrate 1. The contact hole 5 is in an angularly conical shape and the conductor 7 insulated by an insulating layer 2 formed with thin film formation is formed on the contact hole 5 in the process of conductive thin film formation.
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公开(公告)号：JPH0636681A
公开(公告)日：1994-02-10
申请号：JP18484392
申请日：1992-07-13
Applicant: NEC CORP
Inventor： MAKISHIMA HIDEO , TOMIHARI YOSHINORI
Abstract: PURPOSE:To provide an electron gun which is stable, of high reliability, and has a low power consumption rate and high current density for an electron beam. CONSTITUTION:A cold cathode 1 uses a cold cathode chip 5 derived from vacuum microelectronics technique and has a structure in which the end of an emitter 10 from which electrons are emitted is projected beyond the gate electrode 9 of the cold cathode chip 5. A G1 electrode 2 for applying either a positive or negative voltage to the emitter 10 of the cold cathode chip 5 and a G2 electrode 3 for applying a positive voltage to the emitter 10 are provided.
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公开(公告)号：JPH05314891A
公开(公告)日：1993-11-26
申请号：JP11863792
申请日：1992-05-12
Applicant: NEC CORP
Inventor： MAKISHIMA HIDEO , IMURA HIRONORI , YAMADA KEIZO , KURIYAMA TOSHIHIDE
Abstract: PURPOSE:To realize a field emission cold cathode which is easy to manufacture and good at reproducibility and uniformity and has high stability and reliability by forming a linear electron emission source using an emitter obtained when a thin film whose thickness is controlled with high accuracy is formed perpendicular to a substrate. CONSTITUTION:(a) Common conductors 2 are accumulated on an insulating substrate 1 and oxide films 3 are accumulated and vertically etched; (b) three layers of conductors 4 are accumulated. Of the three layers, the middle conductor is an emitter layer 5 and the remaining two are support layers 6 (the layer 5 is a thin film of thickness in an order of ten to hundred A;) (c) oxide films 7 are accumulated and subjected to flattening process; (d) the cross section 8 of the conductor thin film is exposed by polishing; (e) a mask 9 is patterned in the sectional area; (f) the oxide films are removed to obtain a vertical structure of electrodes; (g) conductors constituting oxide film 10 and control electrode 11 are accumulated in order to obtain a control electrode; (h) oxide film 12 and conductor layer 13 are removed; (i) unnecessary oxide film 14 is removed to obtain emitter 15.
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公开(公告)号：JP2000200555A
公开(公告)日：2000-07-18
申请号：JP145899
申请日：1999-01-06
Applicant: NEC CORP
Inventor： MAKISHIMA HIDEO
IPC: H01J23/06 , H01J3/02 , H01J23/087 , H01J25/34
Abstract: PROBLEM TO BE SOLVED: To restrict the periodic expansion of the electron beam in the continuous periodic magnetic field by providing magnets for forming a magnetic field in parallel with a negative electrode and the center axis of an electrode while using the negative electrode magnetic flux density having the minimum value at the maximum value of the beam radius of the electron beam occupying the predetermined ratio of the current among the whole current forming the electron beam. SOLUTION: Negative voltage is applied to a negative electrode substrate 2, and positive voltage in relation to the negative electrode 1 is applied to a positive electrode 8, and positive or negative voltage in relation to the negative electrode substrate 2 is applied to a Wehnelt electrode 7. In this condition when the positive voltage applied between the negative electrode substrate 2 and a gate electrode 5 is increased, electron is emitted from an emitter 6. The electron emitted from multiple emitters 6 is focused for acceleration by an electric field and a magnetic field in an electron gun area, and formed into the narrow electron beam 10 so as to pass through an opening of the positive electrode 8. The electron beam 10 is focused to the narrow electron beam and maintained by the periodic magnetic field formed by magnets 11 and pole pieces 12.
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