公开(公告)号：CA2690791C

公开(公告)日：2012-10-30

申请号：CA2690791

申请日：2008-06-25

Applicant: SAINT GOBAIN CERAMICS

Inventor： TANIKELLA BRAHMANANDAM V ,  ARCONA CHRISTOPHER ,  GINDHART DAVID I ,  JONES CHRISTOPHER D ,  SIMPSON MATTHEW A

IPC: C30B33/00 ,  B24B7/22 ,  B24B49/12

Abstract: A method of changing the crystallographic orientation of a single crystal body is disclosed that includes the steps of characterizing a crystallographic orientation of the single crystal body and calculating a misorientation angle between a select crystallographic direction of the single crystal body and a projection of the crystallographic direction along a plane of a first exterior major surface of the single crystal body. The method further includes removing material from at least a portion of the first exterior major surface to change the misorientation angle.

公开(公告)号：CA2673523C

公开(公告)日：2012-10-09

申请号：CA2673523

申请日：2007-12-21

Applicant: SAINT GOBAIN CERAMICS

Inventor： TANIKELLA BRAHMANANDAM V ,  CHINNAKARUPPAN PALANIAPPAN ,  RIZZUTO ROBERT A ,  CHERIAN ISAAC K ,  VEDANTHAM RAMANUJAM

IPC: B24B1/00 ,  B24B7/22

Abstract: A method of machining a sapphire substrate comprises grinding a first surface of a sapphire substrate using a first fixed abrasive and grinding said first surface of the sapphire substrate using a second fixed abrasive, wherein the second fixed abrasive has a smaller average grain size than the first fixed abrasive, and wherein the second, fixed abrasive is self -dressing.

公开(公告)号：UA98967C2

公开(公告)日：2012-07-10

申请号：UAA201000722

申请日：2008-06-25

Applicant: SAINT GOBAIN CERAMICS

Inventor： TANIKELLA BRAHMANANDAM V ,  ARCONA CHRISTOPHER ,  GINDHART DAVID I ,  JONES CHRISTOPHER D ,  SIMPSON MATTHEW A

IPC: B24B7/00 ,  B24B49/00 ,  B28D5/00

Abstract: Предлагаетсяспособизменениякристаллографическойориентациимонокристаллическоготела, которыйвключаетэтапыизучениякристаллографическойориентациимонокристаллическоготелаи вычисленияугланесогласованнойориентациимеждувыбраннымкристаллографическимнаправлениемданногомонокристаллическоготелаи проекциейэтогокристаллографическогонаправлениянаплоскостьпервойвнешнейосновнойповерхностимонокристаллическоготела. Этотспособдополнительновключаетудалениематериалас, покрайнеймере, частиуказаннойпервойвнешнейосновнойповерхностидляизмененияугланесогласованнойориентации.

公开(公告)号：CA2690791A1

公开(公告)日：2008-12-31

申请号：CA2690791

申请日：2008-06-25

Applicant: SAINT GOBAIN CERAMICS

Inventor： TANIKELLA BRAHMANANDAM V ,  ARCONA CHRISTOPHER ,  GINDHART DAVID I ,  JONES CHRISTOPHER D ,  SIMPSON MATTHEW A

IPC: B24B7/22 ,  B24B49/12 ,  B28D5/00

Abstract: A method of changing the crystallographic orientation of a single crystal body is disclosed that includes the steps of characterizing a crystallographic orientation of the single crystal body and calculating a misorientation angle between a select crystallographic direction of the single crystal body and a projection of the crystallographic direction along a plane of a first exterior major surface of the single crystal body. The method further includes removing material from at least a portion of the first exterior major surface to change the misorientation angle.

公开(公告)号：DE60001958T2

公开(公告)日：2004-03-04

申请号：DE60001958

申请日：2000-06-06

Applicant: SAINT GOBAIN CERAMICS

Inventor： GARG AJAY K ,  TANIKELLA BRAHMANANDAM V ,  KHAUND ARUP

IPC: B24B37/00 ,  C01F17/00 ,  C09K3/14 ,  H01L21/304 ,  H01L21/306

Abstract: A polishing slurry, useful in optical or CMP applications, comprises a ceria with a BET surface area of at least 10 m2/gm. The slurry may be made by subjecting a commercial ceria slurry comprising agglomerates to a mechano-chemical treatment at a pH of from 9 to 11 using media that are low purity alpha alumina or zirconia. Preferred slurries maintain a positive surface charge at all pH values. CMP slurries preferably comprise in addition an anionic surfactant to aid in removal of surface residues.

公开(公告)号：AU752038B2

公开(公告)日：2002-09-05

申请号：AU5464700

申请日：2000-06-06

Applicant: SAINT GOBAIN CERAMICS

Inventor： GARG AJAY K ,  TANIKELLA BRAHMANANDAM V ,  KHAUND ARUP

IPC: B24B37/00 ,  C01F17/00 ,  C09K3/14 ,  H01L21/304 ,  H01L21/306

Abstract: A polishing slurry, useful in optical or CMP applications, comprises a ceria with a BET surface area of at least 10 m2/gm. The slurry may be made by subjecting a commercial ceria slurry comprising agglomerates to a mechano-chemical treatment at a pH of from 9 to 11 using media that are low purity alpha alumina or zirconia. Preferred slurries maintain a positive surface charge at all pH values. CMP slurries preferably comprise in addition an anionic surfactant to aid in removal of surface residues.

公开(公告)号：CA2383504A1

公开(公告)日：2001-04-26

申请号：CA2383504

申请日：2000-08-30

Applicant: SAINT GOBAIN CERAMICS

Inventor： GARG AJAY K ,  DELANEY WILLIAM R ,  TANIKELLA BRAHMANANDAM V

IPC: B24B57/02 ,  B24B37/24 ,  B24D3/00 ,  B24D3/28 ,  B24D3/34 ,  C09G1/02 ,  C09K3/14 ,  H01L21/304

Abstract: Abrasive materials comprising silica-coated transitional alumina particles with an average particle size of less than 50 nanometers and a BET surface area of at least 50 m2/gm are useful in CMP processes either in the form of slurries or as fixed abrasives.

公开(公告)号：CA2673662C

公开(公告)日：2012-07-24

申请号：CA2673662

申请日：2007-12-21

Applicant: SAINT GOBAIN CERAMICS

Inventor： TANIKELLA BRAHMANANDAM V ,  SIMPSON MATTHEW A ,  CHINNAKARUPPAN PALANIAPPAN ,  RIZZUTO ROBERT A ,  VEDANTHAM RAMANUJAM

IPC: B24B7/22 ,  H01L33/00

Abstract: A sapphire substrate includes a generally planar surface having a crystallographic orientation selected from the group consisting of a-plane, r-plane, m-plane, and c-plane orientations, and having a nTTV of not greater than about 0.037 µm/cm2, wherein nTTV is total thickness variation normalized for surface area of teh generally planar surface, the substrate having a diameter not less than about 9.0 cm.

公开(公告)号：UA97969C2

公开(公告)日：2012-04-10

申请号：UAA200906860

申请日：2007-12-21

Applicant: SAINT GOBAIN CERAMICS

Inventor： TANIKELLA BRAHMANANDAM V ,  SIMPSON MATTHEW A ,  CHINNAKARUPPAN PALANIAPPAN ,  RIZZUTO ROBERT A ,  CHERIAN ISAAC K ,  VEDANTHAM RAMANUJAM

IPC: C30B29/20

Abstract: Описанасапфирнаяоснова, котораяимеетв целомплоскуюповерхностьс кристаллографическойориентацией, выбраннойизгруппы, котораясостоитиза-плоскостной, r-плоскостной, m-плоскостнойи с-плоскостнойориентаций, ивеличиной nTTV неболее, чемприблизительно 0,037 мкм/см, где nTTV являетсяобщейвариациейтолщины, нормированнойк площадиповерхностиуказаннойв целомплоскойповерхности, гдеуказанаосноваимеетдиаметрнеменее, чемприблизительно .

公开(公告)号：UA97126C2

公开(公告)日：2012-01-10

申请号：UAA200906861

申请日：2007-12-21

Applicant: SAINT GOBAIN CERAMICS

Inventor： TANIKELLA BRAHMANANDAM V ,  CHINNAKARUPPAN PALANIAPPAN ,  RIZZUTO ROBERT A ,  CHERIAN ISAAC K ,  VEDANTHAM RAMANUJAM

IPC: B24B1/00 ,  B24B7/00

Abstract: Процессмеханическойобработкисапфирнойосновывключает: шлифовкупервойповерхностисапфирнойосновыс помощьюпервогофиксированногоабразиваи шлифованияуказаннойпервойповерхностисапфирнойосновыс помощьювторогофиксированногоабразива, гдевторойфиксированныйабразивимеетменьшийсреднийразмерзерна, чемпервыйфиксированныйабразиви являетсясамозатачивающимся.