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公开(公告)号:FR2838563B1
公开(公告)日:2004-07-09
申请号:FR0204690
申请日:2002-04-15
Applicant: ST MICROELECTRONICS SA
Inventor: GENDRIER PHILIPPE , DRAY CYRILLE , FOURNEL RICHARD
IPC: H01L21/336 , H01L21/8247 , H01L27/115 , H01L29/788 , G11C16/02
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公开(公告)号:FR2840444A1
公开(公告)日:2003-12-05
申请号:FR0206651
申请日:2002-05-30
Applicant: ST MICROELECTRONICS SA
Inventor: GENDRIER PHILIPPE , CASPAR DANIEL
IPC: G11C8/02 , G11C17/16 , G11C17/14 , H01L27/115
Abstract: The memory device comprises a memory matrix (MM) of memory cells (CLij), each comprising an access transistor and a capacitor whose dielectric is compatible with a technology of type dynamic random-access memory (DRAM). Each row comprises a group of cells (CLi) whose gates of transistors are connected together by a first metallization (WLAi), and whose upper electrodes (ES) of capacitors are connected together by a second metallization (WLPi). Each column comprises a group of cells (CLj) whose sources of transistors are connected together by a third metallization (BLj). The memory control means (MCM) can apply the chosen voltages to the first, second and third metallizations in a manner to program selectively only one cell by breaking down its dielectric without programming other cells and without breaking down the transistors of all cells. A memory cell (CLij) is programmed by applying a gate voltage (Vg) to the first metallization (WLAi), and by applying a voltage difference sufficient to break down the dielectric of capacitor to the second (WLPi) and third (BLj) metallizations; the voltages applied to other metallizations are designed so to block the transistors of other cells of the memory matrix. The transistors of cells are of type n-MOS. The memory control means can apply the chosen voltages to the first, second and third metallizations in a manner to read selectively the logic contents of only one memory cell (CLij) without reading the contents of other memory cells. The memory device (claimed) is implemented in the form of an integrated circuit.
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公开(公告)号:FR2838563A1
公开(公告)日:2003-10-17
申请号:FR0204690
申请日:2002-04-15
Applicant: ST MICROELECTRONICS SA
Inventor: GENDRIER PHILIPPE , DRAY CYRILLE , FOURNEL RICHARD
IPC: H01L21/336 , H01L21/8247 , H01L27/115 , H01L29/788 , G11C16/02
Abstract: The semiconductor memory device comprises a transistor with a floating gate (FG) and a control gate formed by the regions of source (S), drain (D) and channel of the transistor. The memory cell comprises a dielectric zone (ZTN) laid out between a first part (P1) of the layer of gate material and a first active zone (RG1) electrically insulated from a second active zone (RG2) incorporating the control gate. The dielectric zone forms a tunnel zone (ZTN) for transferring the charges stored in the floating gate towards the first active zone at the time of erasing the memory cell. The transistor has a ring gate (FG), and the gate material comprises a linking part (PL) extended between the first part and the ring gate. The first active zone (RG1) and the second active zone (RG2) are electrically insulated one from the other by the p-n junctions polarized in reverse, and on the surface by a region of shallow trench isolation (STI). The two regions of substrate (RG1,RG2) are of the first conductivity type, and the intermediate region (RG3) is of the second conductivity type. The isolation region (RG3) comprises an opening for a contact zone (PSB). The first region of substrate (RG1) comprises a contact zone (PC1) of the first conductivity type. The device also comprises the polarization means possessing the states of programming, reading and erasing the memory cell. The erasing of type Fowler-Nordheim is by applying a voltage to the first active zone much higher than to the regions of source, drain and substrate of the transistor. The programming is by hot carriers at the level of transistor. The programming of type Fowler-Nordheim is by applying to the region of source, drain and substrate the voltages much higher than to the first active zone. The device comprises a memory array incorporating several memory cells, where each memory cell is associated with an access transistor. An integrated circuit comprises the device as claimed.
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公开(公告)号:DE60330130D1
公开(公告)日:2009-12-31
申请号:DE60330130
申请日:2003-01-31
Applicant: ST MICROELECTRONICS SA
Inventor: GENDRIER PHILIPPE , DRAY CYRILLE , FOURNEL RICHARD , POIRIER SEBASTIEN , CASPAR DANIEL , CANDELIER PHILIPPE
IPC: H01L29/788 , H01L21/336 , H01L21/8247 , H01L27/115 , H01L29/792
Abstract: The semiconductor memory device comprises a transistor with floating gate (FG) and a control gate, where the regions of source (S), drain (D) and channel of the floating-gate transistor form the control gate, and the memory cell comprises a dielectric zone (ZTN) laid out between a part (P1) of the layer of gate material and an active semiconductor zone (RG1) electrically insulated from another active zone (RG2) incorporating the control gate. The dielectric zone forms a tunnel zone (ZTN) for transferring the charges stored in the floating gate at the time of erasing the memory cell. The capacitive value of tunnel zone (ZTN) is below or equal to 30% of the total capacitive value between the layer of gate material and the set of active zones of the memory cell. The transistor has a ring gate (FG), and the gate material comprises a linking part (PL) connecting the first part (P1) and the ring gate. The active zones (RG1,RG2) are electrically insulated by the p-n junctions polarized in reverse, and the two zones are electrically insulated on the surface by a region of shallow trench isolation (STI). A memory array comprises several memory cells, each memory cell is associated with an access transistor, and the access transistor partly surrounds the floating-gate transistor of the memory cell resulting in a memory array of reduced size and lower programming currents. The device comprises the polarization means possessing the states of programming, reading and erasing the memory cell, where the erasing is of type Fowler-Nordheim and applies a voltage on the first active zone which is much higher than that applied in the regions of source, drain and substrate of the transistor. The programming of type Fowler-Nordheim applies to the regions of source, drain and substrate of the transistor voltages which are much higher than those applied to the first active zone. In the reading state the difference between the drain/source voltages is limited to 1 V in absolute value. An integrated circuit comprises the device as claimed.
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公开(公告)号:AT449424T
公开(公告)日:2009-12-15
申请号:AT03709915
申请日:2003-01-31
Applicant: ST MICROELECTRONICS SA
Inventor: GENDRIER PHILIPPE , DRAY CYRILLE , FOURNEL RICHARD , POIRIER SEBASTIEN , CASPAR DANIEL , CANDELIER PHILIPPE
IPC: H01L29/788 , H01L21/336 , H01L21/8247 , H01L27/115 , H01L29/792
Abstract: The semiconductor memory device comprises a transistor with floating gate (FG) and a control gate, where the regions of source (S), drain (D) and channel of the floating-gate transistor form the control gate, and the memory cell comprises a dielectric zone (ZTN) laid out between a part (P1) of the layer of gate material and an active semiconductor zone (RG1) electrically insulated from another active zone (RG2) incorporating the control gate. The dielectric zone forms a tunnel zone (ZTN) for transferring the charges stored in the floating gate at the time of erasing the memory cell. The capacitive value of tunnel zone (ZTN) is below or equal to 30% of the total capacitive value between the layer of gate material and the set of active zones of the memory cell. The transistor has a ring gate (FG), and the gate material comprises a linking part (PL) connecting the first part (P1) and the ring gate. The active zones (RG1,RG2) are electrically insulated by the p-n junctions polarized in reverse, and the two zones are electrically insulated on the surface by a region of shallow trench isolation (STI). A memory array comprises several memory cells, each memory cell is associated with an access transistor, and the access transistor partly surrounds the floating-gate transistor of the memory cell resulting in a memory array of reduced size and lower programming currents. The device comprises the polarization means possessing the states of programming, reading and erasing the memory cell, where the erasing is of type Fowler-Nordheim and applies a voltage on the first active zone which is much higher than that applied in the regions of source, drain and substrate of the transistor. The programming of type Fowler-Nordheim applies to the regions of source, drain and substrate of the transistor voltages which are much higher than those applied to the first active zone. In the reading state the difference between the drain/source voltages is limited to 1 V in absolute value. An integrated circuit comprises the device as claimed.
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公开(公告)号:DE602006003605D1
公开(公告)日:2008-12-24
申请号:DE602006003605
申请日:2006-09-22
Inventor: BOUCHAKOUR RACHID , BIDAL VIRGINIE , CANDELIER PHILIPPE , FOURNEL RICHARD , GENDRIER PHILIPPE , LAFFONT ROMAIN , MASSON PASCAL , MIRABEL JEAN-MICHEL , REGNIER ARNAUD
IPC: H01L29/423 , H01L29/788
Abstract: The memory point has a floating gate (103) placed above a P-type semiconductor substrate (100) and comprising a central portion (110) and end portions (111, 112) respectively insulated from the substrate by a thin insulating layer (102) and an insulating area (107). The central portion is by majority doped with P-type doping and the end portions comprise N-type doped zone constituting a part of a PN junction. The end portions form electron wells so that electrons injected into the gate are stored at level of the end portions.
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公开(公告)号:FR2891398A1
公开(公告)日:2007-03-30
申请号:FR0552849
申请日:2005-09-23
Inventor: BOUCHAKOUR RACHID , BIDAL VIRGINIE , CANDELIER PHILIPPE , FOURNEL RICHARD , GENDRIER PHILIPPE , LAFFONT ROMAIN , MASSON PASCAL , MIRABEL JEAN MICHEL , REGNIER ARNAUD
IPC: H01L27/115 , H01L21/8247
Abstract: L'invention concerne un point mémoire non volatil incluant une grille flottante placée au-dessus d'un substrat semiconducteur, la grille flottante comprenant des portions actives isolées du substrat par des couches isolantes fines, et des portions inactives isolées du substrat par des couches isolantes épaisses non traversables par des électrons, les portions actives étant majoritairement dopées de type P et les portions inactives comprenant au moins une zone dopée de type N constituant une partie d'une jonction PN.
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公开(公告)号:FR2837023A1
公开(公告)日:2003-09-12
申请号:FR0202853
申请日:2002-03-06
Applicant: ST MICROELECTRONICS SA
Inventor: DRAY CYRILLE , GENDRIER PHILIPPE , FOURNEL RICHARD
IPC: H01L21/336 , H01L21/8247 , H01L27/115 , H01L29/788 , H01L29/792
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