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    Microelectromechanical inertial sensor, in particular for free-fall detection applications
    11.
    发明授权
    Microelectromechanical inertial sensor, in particular for free-fall detection applications 有权
    微机电惯性传感器，尤其是用于自由落体应用

    公开(公告)号：EP1879034B1

    公开(公告)日：2009-11-18

    申请号：EP06425485.7

    申请日：2006-07-14

    Applicant: STMicroelectronics S.r.l.

    Inventor： Merassi, Angelo ,  Zerbini, Sarah ,  Lasalandra, Ernesto ,  Vigna, Benedetto

    IPC: G01P15/08 ,  G01P15/125 ,  G11B19/04

    CPC classification number: G11B19/04 ,  G01P15/0891 ,  G01P15/125 ,  G01P15/18 ,  G01P2015/082

    Abstract: Described herein is an inertial sensor (1) provided with a detection structure (9, 19) sensitive to a first, a second and a third component of acceleration (a x , a y , a z ) along respective directions of detection (x, y, z), and generating respective electrical quantities as a function of said components of acceleration. The detection structure (9, 19) supplies at output a resultant electrical quantity (C) obtained as combination of said electrical quantities, and correlated to the value of a resultant acceleration (a) acting on the inertial sensor (1), given by a vector sum of the components of acceleration (a x , a y , a z ) . In particular, the detection structure (9, 19) is of a microelectromechanical type, and comprises a mobile portion (2, 12) made of semiconductor material forming with a fixed portion (8, 18) a first, a second and a third detection capacitor, and an electrical-interconnection portion (10, 20), connecting the detection capacitors in parallel; the resultant electrical quantity (C) being the capacitance obtained from said connection in parallel.

    Microelectromechanical inertial sensor, in particular for free-fall detection applications
    12.
    发明公开
    Microelectromechanical inertial sensor, in particular for free-fall detection applications 有权
    微机电惯性传感器，尤其是用于自由落体应用

    公开(公告)号：EP1879034A9

    公开(公告)日：2008-05-14

    申请号：EP06425485.7

    申请日：2006-07-14

    Applicant: STMicroelectronics S.r.l.

    Inventor： Merassi, Angelo ,  Zerbini, Sarah ,  Lasalandra, Ernesto ,  Vigna, Benedetto

    IPC: G01P15/08 ,  G01P15/125 ,  G11B19/04

    CPC classification number: G11B19/04 ,  G01P15/0891 ,  G01P15/125 ,  G01P15/18 ,  G01P2015/082

    Abstract: Described herein is an inertial sensor (1) provided with a detection structure (9, 19) sensitive to a first, a second and a third component of acceleration (a x , a y , a z ) along respective directions of detection (x, y, z), and generating respective electrical quantities as a function of said components of acceleration. The detection structure (9, 19) supplies at output a resultant electrical quantity (C) obtained as combination of said electrical quantities, and correlated to the value of a resultant acceleration (a) acting on the inertial sensor (1), given by a vector sum of the components of acceleration (a x , a y , a z ) . In particular, the detection structure (9, 19) is of a microelectromechanical type, and comprises a mobile portion (2, 12) made of semiconductor material forming with a fixed portion (8, 18) a first, a second and a third detection capacitor, and an electrical-interconnection portion (10, 20), connecting the detection capacitors in parallel; the resultant electrical quantity (C) being the capacitance obtained from said connection in parallel.

    Micro-electromechanical Inertial Sensor, in Particular for Free-fall Detection Applications
    13.
    发明公开
    Micro-electromechanical Inertial Sensor, in Particular for Free-fall Detection Applications 有权
    米克罗 - 电力机械师惯性传感器，Frefinall-Anwendungen的insbesondere

    公开(公告)号：EP1879034A1

    公开(公告)日：2008-01-16

    申请号：EP06425485.7

    申请日：2006-07-14

    Applicant: STMicroelectronics S.r.l.

    Inventor： Merassi, Angelo ,  Zerbini, Sarah ,  Lasalandra, Ernesto ,  Vigna, Benedetto

    IPC: G01P15/08 ,  G01P15/125 ,  G11B19/04

    CPC classification number: G11B19/04 ,  G01P15/0891 ,  G01P15/125 ,  G01P15/18 ,  G01P2015/082

    Abstract: Described herein is an inertial sensor (1) provided with a detection structure (9, 19) sensitive to a first, a second and a third component of acceleration (a x , a y , a z ) along respective directions of detection (x, y, z), and generating respective electrical quantities as a function of said components of acceleration. The detection structure (9, 19) supplies at output a resultant electrical quantity (C) obtained as combination of said electrical quantities, and correlated to the value of a resultant acceleration (a) acting on the inertial sensor (1), given by a vector sum of the components of acceleration (a x , a y , a z ) . In particular, the detection structure (9, 19) is of a microelectromechanical type, and comprises a mobile portion (2, 12) made of semiconductor material forming with a fixed portion (8, 18) a first, a second and a third detection capacitor, and an electrical-interconnection portion (10, 20), connecting the detection capacitors in parallel; the resultant electrical quantity (C) being the capacitance obtained from said connection in parallel.

    Abstract translation: 这里描述的是具有对沿着检测方向（x，y，z）的加速度（ax，ay，az）的第一，第二和第三分量敏感的检测结构（9,19）的惯性传感器（1） ），并且产生作为所述加速度分量的函数的相应的电量。 检测结构（9,19）在输出端提供作为所述电量的组合获得的合成电量（C），并与作用在惯性传感器（1）上的合成加速度（a）的值相关，由 加速度分量（ax，ay，az）的矢量和。 特别地，检测结构（9,19）是微机电类型的，并且包括由形成有固定部分（8,18）的半导体材料制成的可移动部分（2,12），第一，第二和第三检测 电容器和电连接部分（10,20），并联连接检测电容器; 所得电量（C）是从所述连接并联获得的电容。

    Free fall detector device and free fall detection method
    14.
    发明公开
    Free fall detector device and free fall detection method 有权
    Freifalldetektor und Freifalldetektionsverfahren

    公开(公告)号：EP1811309A1

    公开(公告)日：2007-07-25

    申请号：EP06425026.9

    申请日：2006-01-20

    Applicant: STMicroelectronics S.r.l.

    Inventor： Lasalandra, Ernesto ,  Ungaretti, Tommaso

    IPC: G01P15/125 ,  G01P15/18 ,  G01P15/13 ,  G01D5/24 ,  G11B19/04

    CPC classification number: G11B19/043 ,  G01P15/0891 ,  G01P15/125 ,  G01P15/131 ,  G01P15/18 ,  G11B21/12

    Abstract: A free-fall detector device includes an inertial sensor (8), a detection circuit (21) associated to the inertial sensor (8), and a signal source (20) for supplying a read signal to the inertial sensor (8). The device moreover includes: a storage element (30), selectively connectable to the detection circuit (21) for storing a feedback signal (V FBX ) generated by the detection circuit (21) in response to the read signal supplied to the inertial sensor (8); and a feedback circuit (32a, 32b, 24, 36) coupled to the storage element (30) for supplying the feedback signal (V FBX ) to the inertial sensor (8) so that the detection circuit (21) generates at least one detection signal (V XO ) in response to the feedback signal (V FBX ) supplied to the inertial sensor (8).

    Abstract translation: 自由落体检测器装置包括惯性传感器（8），与惯性传感器（8）相关联的检测电路（21）和用于向惯性传感器（8）提供读取信号的信号源（20）。 该装置还包括：存储元件（30），其可选择地连接到检测电路（21），用于响应于提供给惯性传感器的读取信号而存储由检测电路（21）产生的反馈信号（V FBX） 8）; 以及耦合到所述存储元件（30）的用于将所述反馈信号（V FBX）提供给所述惯性传感器（8）的反馈电路（32a，32b，24,36），使得所述检测电路（21）产生至少一个检测 信号（V XO）响应于提供给惯性传感器（8）的反馈信号（V FBX）。

    Device and method for reading a capacitive sensor, in particular of a micro-electromechanical type
    15.
    发明公开
    Device and method for reading a capacitive sensor, in particular of a micro-electromechanical type 有权
    装置和方法，用于读取电容性传感器，尤其是微机电传感器

    公开(公告)号：EP1793497A1

    公开(公告)日：2007-06-06

    申请号：EP05425863.7

    申请日：2005-12-02

    Applicant: STMicroelectronics S.r.l.

    Inventor： Ungaretti, Tommaso ,  Lasalandra, Ernesto

    IPC: H03K17/96 ,  G01P15/125

    CPC classification number: G01P15/125

    Abstract: A read device of a capacitive sensor includes: a signal source (104, C1, C2) supplying an electrical read signal (V RD ) for driving the capacitive sensor (101); and a discrete-time sense circuit (107) for generating an electrical output signal (V OM ), correlated to variations of capacitance (ΔC S ) of the capacitive sensor (101), in response to variations of the electrical read signal (V RD ). The device moreover includes: a modulator stage (105, 106) for generating a modulated electrical read signal (V RDM ) on the basis of the electrical read signal (V RD ) and supplying the modulated electrical read signal (V RDM ) to the capacitive sensor (101); a demodulator stage (110), connected to the sense circuit (107), for demodulating the electrical output signal (V OM ) and generating a demodulated electrical output signal (V OM ); and a lowpass filtering stage (112) for generating a filtered electrical output signal (V OC ), on the basis of the modulated electrical output signal (V OM ).

    Abstract translation: 电容传感器的读装置包括：一信号源（104，C1，C2）提供给电读取信号（V RD），用于驱动所述电容性传感器（101）; 并在电输出信号（V OM），关联于电容性传感器（101）的电容（“CS）的变化产生一个离散时间感测电路（107），（响应于所述电读取信号V RD的变化 ）。 该装置更上方，包括：用于电读取信号（V RD）的基础上产生一个调制电读取信号（V RDM）和调制电读取信号（V RDM）供给到所述电容的调制器级（105,106） 传感器（101）; 连接到用于解调的电输出信号（V OM），并产生解调的电输出信号（V OM）的感测电路（107）的解调器级（110）; 和用于产生经滤波的电输出信号（V OC），经调制的电输出信号（V OM）的基础上的低通滤波级（112）。

    Microelectomechanical gyroscope with open loop reading device and control method of a microelectromechanical gyroscope
    17.
    发明公开
    Microelectomechanical gyroscope with open loop reading device and control method of a microelectromechanical gyroscope 有权
    具有用于控制微机电陀螺仪的开环方法微机电陀螺仪检测装置

    公开(公告)号：EP1962054A1

    公开(公告)日：2008-08-27

    申请号：EP07425075.4

    申请日：2007-02-13

    Applicant: STMicroelectronics S.r.l.

    Inventor： Caminada, Carlo ,  Prandi, Luciano ,  Lasalandra, Ernesto

    IPC: G01C19/56

    CPC classification number: G01C19/5712 ,  G01C19/5726 ,  G01C19/5762

    Abstract: A microelectromechanical gyroscope includes: a first mass (107) oscillatable according to a first axis (X); an inertial sensor (6), including a second mass (108), drawn along by the first mass (107) and constrained so as to oscillate according to a second axis (Y), in response to a rotation (Ω) of the gyroscope (100); a driving device (103), coupled to the first mass (107) so as to form a feedback control loop (105) and configured to maintain the first mass (107) in oscillation at a resonance frequency (ω R ); and an open-loop reading device (104), coupled to the inertial sensor (6) for detecting displacements of the second mass (108) according to the second axis (Y). The driving device (103) includes a read signal generator (130), for supplying to the inertial sensor (6) at least one read signal (V S ) having the form of a square-wave signal of amplitude that sinusoidally varies with the resonance frequency (ω R ).

    Abstract translation: 一种微机电陀螺仪，包括：第一质量块（107）可振荡根据第一轴线（X）; 惯性传感器（6）包括一个第二质量（108），沿着由第一质量（107）吸入并约束，以摆动雅丁到第二轴（Y）的，响应于所述陀螺仪的旋转（©） （100）; 的驱动装置（103），耦合到所述第一质量块（107），以便形成一反馈控制回路（105）和配置成用于维持振荡第一质量（107）在谐振频率（E R）; 以及耦合到所述惯性传感器（6），用于检测所述第二质量块（108）雅鼎的位移到第二轴（Y）的开环读出装置（104）。 的驱动装置（103）包括用于供给到所述惯性传感器（6）的至少一个读出信号具有振幅的方波信号的形状（VS）的读信号发生器（130）做正弦与共振频率变化 （E R）。

    Microelectromechanical gyroscope with suppression of capacitive coupling spurious signals and control method of a microelectromechanical gyroscope
    18.
    发明公开
    Microelectromechanical gyroscope with suppression of capacitive coupling spurious signals and control method of a microelectromechanical gyroscope 审中-公开
    一种微机电陀螺仪，非谐波补偿寄生电容耦合的和微机电陀螺仪的控制方法

    公开(公告)号：EP1959234A1

    公开(公告)日：2008-08-20

    申请号：EP07425077.0

    申请日：2007-02-13

    Applicant: STMicroelectronics S.r.l.

    Inventor： Prandi, Luciano ,  Caminada, Carlo ,  Lasalandra, Ernesto

    IPC: G01C19/56

    CPC classification number: G01C19/5762 ,  G01C19/5726

    Abstract: A microelectromechanical gyroscope includes: a microstructure (102) having a first mass (107), which can oscillate according to a first axis (X), and a second mass (108), constrained to the first mass (107) so as to oscillate according to a second axis (Y) in response to a rotation (Ω) of the microstructure (102); and a driving device (103), coupled to the microstructure (102) to maintain the first mass (107) in oscillation at a resonance frequency (ω R ). The driving device (103) is provided with a low-pass filter, (114) having a passband (PB) such that the resonance frequency (ω R ) is comprised in the passband (PB), and a disturbance frequency (ω D ) associated to disturbance signals (I ADD (t), V AO (t)) due to coupling between the first mass (107) and the second mass (108) is not comprised in the passband (PB).

    Abstract translation: 一种微机电陀螺仪，包括：微结构（102），其具有第一质量（107），其可摆动雅丁于第一轴（X）和第二块（108），限制到所述第一质量块（107），以便振荡 gemäß到第二轴（Y）响应于所述微结构（102）的旋转（©）; 和耦合到所述微观结构（102）的驱动装置（103），以保持在振荡第一质量（107）在谐振频率（E R）。 驱动装置（103）设置有具有通带（PB）的低通滤波器（114）检查那样的共振频率（E R）在通带（PB）是由和扰动频率（E D） 相关联的对干扰信号（I ADD（t）的，V AO（t））的归因于第一质量（107）和所述第二质量块（108）的通带（PB）不是由之间的耦合。

    Microelectromechanical gyroscope with self-test function and control method of a microelectromechanical gyroscope
    19.
    发明公开
    Microelectromechanical gyroscope with self-test function and control method of a microelectromechanical gyroscope 审中-公开
    微机电Gyroskop mit Selbsttestfunktion und Steuerungverfahren eines microelectromechanical Gyroskops

    公开(公告)号：EP1959233A1

    公开(公告)日：2008-08-20

    申请号：EP07425076.2

    申请日：2007-02-13

    Applicant: STMicroelectronics S.r.l.

    Inventor： Prandli, Luciano ,  Caminada, Carlo ,  Lasalandra, Ernesto

    IPC: G01C19/56

    CPC classification number: G01C23/005 ,  G01C19/5726 ,  G01C19/5762

    Abstract: A microelectromechanical gyroscope includes a microstructure (102), comprising a first mass (107) and a second mass (108), wherein the first mass (107) is oscillatable according to a first axis (X) and the second mass (108) is constrained to the first mass (107) so as to be drawn along by the first mass (107) according to the first axis (X) and to oscillate according to a second axis (Y), in response to a rotation (Ω) of the microstructure (102). A driving device (103) is coupled to the microstructure (102) to maintain the first mass (107) in oscillation at the driving frequency (ω R ), and a reading device (104) detects displacements of the second mass (108) according to the second axis (Y). The gyroscope is provided with a self-test actuation system (6d, 6e, 6h, 106) coupled to the second mass (108) for applying an electrostatic force (F E ) at the driving frequency (ω R ) so as to move the second mass (108) according to the second axis (Y).

    Abstract translation: 微机电陀螺仪包括微结构（102），其包括第一质量块（107）和第二质量块（108），其中所述第一质量块（107）可根据第一轴线（X）振荡，所述第二质量块 约束到第一质量（107），以便根据第一轴线（X）沿着第一质量块（107）拉伸，并且响应于第二轴线（Y）的旋转（©），根据第二轴线 微结构（102）。 驱动装置（103）联接到微结构（102）以保持第一质量块（107）在驱动频率（ÉR）处振荡，并且读取装置（104）根据以下步骤检测第二质量块（108）的位移： 到第二轴（Y）。 陀螺仪设置有耦合到第二质量块（108）的自检致动系统（6d，6e，6h，106），用于在驱动频率（ÉR）处施加静电力（FE），以便移动第二 质量（108）根据第二轴（Y）。

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