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    IMPROVED MICROVALVE DEVICE
    16.
    发明申请
    IMPROVED MICROVALVE DEVICE 审中-公开
    改进的微型设备

    公开(公告)号：WO2010019329A2

    公开(公告)日：2010-02-18

    申请号：PCT/US2009050063

    申请日：2009-07-09

    Applicant: MICROSTAQ INC ,  HUNNICUTT HARRY

    Inventor： HUNNICUTT HARRY

    IPC: B81B7/00 ,  F16K31/00

    CPC classification number: F16K99/0001 ,  B81B3/0051 ,  B81B2201/054 ,  F16K99/0044 ,  F16K2099/0074 ,  F16K2099/008

    Abstract: A microvalve device includes a body, a valve element supported for movement relative to the body, and an actuator operatively coupled to the valve element for moving the valve element in a normal range of travel. A travel limiting structure operatively cooperates with at least one of the valve element and the actuator to effectively limit the magnitude of movement of the valve element or the actuator outside the normal range of travel to prevent failure of the body, the valve element, or the actuator due to exceeding failure stress limits. A method of forming a microvalve with such a travel limiting structure is also disclosed.

    Abstract translation: 微型阀装置包括主体，被支撑用于相对于主体运动的阀元件，以及可操作地联接到阀元件的致动器，用于在正常行驶范围内移动阀元件。 行程限制结构与阀元件和致动器中的至少一个可操作地配合以有效地限制阀元件或致动器在正常行程范围内的运动的大小，以防止阀体，阀元件或 由于超过故障应力极限，执行器。 还公开了一种用这种行程限制结构形成微型阀的方法。

    SWITCH STRUCTURES OR THE LIKE BASED ON A THERMORESPONSIVE POLYMER
    17.
    发明申请
    SWITCH STRUCTURES OR THE LIKE BASED ON A THERMORESPONSIVE POLYMER 审中-公开
    基于热稳定聚合物开关结构或类似方式

    公开(公告)号：WO2006057797A2

    公开(公告)日：2006-06-01

    申请号：PCT/US2005/040198

    申请日：2005-11-03

    Applicant: INTEL CORPORATION ,  CHEE, Choong, Kooi

    Inventor： CHEE, Choong, Kooi

    IPC: H01H37/00 ,  F16K1/00 ,  G02B26/08 ,  B81B5/00 ,  A61M5/00 ,  C09J133/00 ,  C09J135/00

    CPC classification number: B81B3/0024 ,  A61M5/16881 ,  A61M5/1723 ,  A61M2205/0266 ,  B81B2201/018 ,  B81B2201/045 ,  B81B2201/054 ,  H01H2037/008 ,  Y10T137/8242

    Abstract: Briefly, in accordance with one embodiment of the invention, a switch structure or the like such as a valve, motor, or optical switch, may be constructed based on a thermoresponsive polymer. At a first temperature the thermoresponsive polymer may be in a first volume state, and at a second temperate the thermoresponsive polymer may be in a second volume state. The change in volume of the thermoresponsive polymer may be operative to push or pull the mechanical structures of the switch, valve, motor, optical switch, and so on, to effectuate operation of the structures.

    Abstract translation: 简而言之，根据本发明的一个实施例，可以基于热能聚合物构建诸如阀，电动机或光开关的开关结构等。 在第一温度下，热可聚合物可以处于第一体积状态，并且在第二温度下，热可聚合物可以处于第二体积状态。 热反应聚合物的体积变化可以用于推动或拉动开关，阀门，电机，光学开关等的机械结构，以实现结构的操作。

    MICROELECTROMECHANICAL FLEXIBLE MEMBRANE ELECTROSTATIC VALVE DEVICE AND RELATED FABRICATION METHODS
    18.
    发明申请
    MICROELECTROMECHANICAL FLEXIBLE MEMBRANE ELECTROSTATIC VALVE DEVICE AND RELATED FABRICATION METHODS 审中-公开
    微电子机械柔性膜静电阀装置及其制造方法

    公开(公告)号：WO02022492A2

    公开(公告)日：2002-03-21

    申请号：PCT/US2001/028608

    申请日：2001-09-14

    IPC: B81B3/00 ,  B81B7/04 ,  B81C1/00 ,  F15C5/00 ,  F16K15/16 ,  F16K31/02 ,  F16K99/00 ,  B81B

    CPC classification number: F16K99/0001 ,  B81B3/0021 ,  B81B2201/054 ,  B81B2203/0127 ,  B81B2203/04 ,  F15C5/00 ,  F16K99/0007 ,  F16K99/0028 ,  F16K99/0051 ,  F16K2099/0074 ,  F16K2099/008 ,  H01H2059/0081

    Abstract: A MEMS valve device driven by electrostatic forces is provided. The MEMS valve device includes a substrate having an aperture formed therein, a substrate electrode, a moveable membrane that overlies the aperture and has an electrode element and a biasing element. Additionally, at least one resiliently compressible dielectric layer is provided to insure electrical isolation between the substrate electrode and electrode element of the moveable membrane. In operation, a voltage differential is established between the substrate electrode and the electrode element of the moveable membrane to move the membrane relative to the aperture to thereby controllably adjust the portion of the aperture that is covered by the membrane. In another embodiment the resiliently compressible dielectric layer(s) have a textured surface; either at the valve seat, the valve seal or at both surfaces. In another embodiment of the invention a pressure-relieving aperture is defined within the substrate and is positioned to underlie the moveable membrane.

    Abstract translation: 本发明涉及由静电力控制的MEMS（微机电系统）阀装置。 这种阀门装置可以快速操作，具有较大的阀门力，并允许在使用最小功率的情况下实现大位移。 该MEMS阀装置由形成有开口的基板，基板电极，覆盖该开口的可动膜，电极部件以及施力部件构成。 。 另外，至少一个可弹性压缩的介电层可用于确保衬底电极和可动膜电极元件之间的电隔离。 在操作期间，在基板的电极和可移动​​薄膜的电极元件之间建立电压差，以便相对于开口移动薄膜，从而以受控的方式调节该部分 被膜覆盖的开口。 其他实施例具有可弹性压缩的介电层以在基板的电极上或者在基板上和可移动膜上形成，并提供一个或两个 阀门表面和阀门密封表面。 根据又一个实施例，所述一个或多个弹性可压缩介电层具有在阀座，阀密封处或两个表面上的颗粒表面。 在另一个实施例中，压力释放开口被限定在基底内并被定位成支撑可移动膜。 另外，其他实施例具有由静电力控制的MEMS阀阵列。 MEMS阀网络包括具有限定在其中的多个开口的衬底。 本发明还涉及一种制造该MEMS阀装置的方法。

    MICROELECTROMECHANICAL POSITIONING APPARATUS
    19.
    发明申请
    MICROELECTROMECHANICAL POSITIONING APPARATUS 审中-公开
    微电子机械定位器

    公开(公告)号：WO99024783A1

    公开(公告)日：1999-05-20

    申请号：PCT/US1998/023588

    申请日：1998-11-05

    IPC: G01B21/00 ,  B25J7/00 ,  B81B3/00 ,  B81B7/02 ,  F03G7/06 ,  G01B7/004 ,  G01B7/34 ,  G01N27/00 ,  G02B6/38 ,  G02B6/42 ,  H01H1/00 ,  H01H9/14 ,  H01H61/00

    CPC classification number: F03G7/06 ,  B81B3/0024 ,  B81B2201/032 ,  B81B2201/054 ,  B81B2203/0109 ,  B81B2203/051 ,  G02B6/3803 ,  G02B6/4226 ,  H01H1/0036 ,  H01H9/14 ,  H01H61/00 ,  H01H2001/0042 ,  H01H2001/0068 ,  H01H2061/006

    Abstract: A microelectromechanical (MEMS) positioning apparatus is provided that can precisely microposition an object in each of the X, Y and Z directions. The MEMS positioning apparatus includes a reference surface, a support disposed in a fixed position to the reference surface, and a stage defining a XY plane that is suspended adjacent to the support and over at least a portion of the reference surface. The MEMS positioning apparatus also includes at least one and, more typically, several actuators for precisely positioning the stage and, in turn, objects carried by the stage. For example, the MEMS positioning apparatus can include first and second MEMS actuators for moving the stage in the XY plane upon actuation. In addition, the MEMS positioning apparatus can include a Z actuator, such as a thermal bimorph structure, for moving the stage in the Z direction.

    Abstract translation: 本发明涉及微机电定位器（MEMS），其能够根据轴线X精确地定位的物体，Y和Z.该定位器包括一个基准表面，布置在相对于所述基准表面的固定位置的支撑件，和 限定沿着X和Y的平面的板，悬置在支撑件上并且在参考表面的至少一部分上方。 该微机电定位器还包括至少一个致动器，但更一般地包括多个用于精确定位板的致动器，并因此包括由板承载的物体。 因此，微机电定位器可包括第一和第二致动器确保板的翻译根据X和Y此外，微机电定位器可以根据Z，如用于移动板的热生物形态的结构包括致动器 沿着Z轴。

    마이크로 바이오칩에 사용 가능한 열공압형 마이크로펌프칩 및 이의 제조방법
    20.
    发明公开
    마이크로 바이오칩에 사용 가능한 열공압형 마이크로펌프칩 및 이의 제조방법 无效
    热式气动执行微型泵芯片及其制造方法

    公开(公告)号：KR1020080067797A

    公开(公告)日：2008-07-22

    申请号：KR1020070005147

    申请日：2007-01-17

    Applicant: 한양대학교 산학협력단

    Inventor： 안유민 ,  조웅 ,  고용준 ,  주진경

    IPC: B81B3/00 ,  B81B7/00 ,  B81C1/00

    CPC classification number: B81B3/0018 ,  B81B3/0035 ,  B81B7/008 ,  B81B2201/0214 ,  B81B2201/036 ,  B81B2201/054 ,  B81B2201/06

    Abstract: A thermo-pneumatic micro pump chip applicable to a micro bio chip and a manufacturing method thereof are provided to increase precision of flow control of a pump by bonding a poly dimethyl siloxane(PDMS) chip with a glass chip integrally. A thermo-pneumatic micro pump chip(100) that is applicable to a micro bio chip comprises a glass chip(10) and a PDMS chip(20) that are integrally bonded to each other. The glass chip is equipped with a heater(11) and a sensor. In addition, the PDMS chip is formed on an upper surface of the glass chip and moves fluid sample in a desired direction.

    Abstract translation: 提供了适用于微生物芯片的热气动微型泵芯片及其制造方法，以通过将聚二甲基硅氧烷（PDMS）芯片与玻璃芯片整体结合来提高泵的流量控制精度。 适用于微生物芯片的热气动微型泵芯片（100）包括彼此一体地结合的玻璃芯片（10）和PDMS芯片（20）。 玻璃芯片配有加热器（11）和传感器。 此外，PDMS芯片形成在玻璃芯片的上表面上，并使流体样品沿期望的方向移动。

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