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公开(公告)号：US09568371B2
公开(公告)日：2017-02-14
申请号：US14375065
申请日：2013-01-29
Applicant: MITSUBISHI MATERIALS CORPORATION
Inventor： Kazuyoshi Tari , Mototaka Ishikawa , Keiji Shirata , Kenzo Nakamura
IPC: G01J5/00 , G01J5/10 , G01J5/08 , G01J5/06 , H05K1/02 , H01L37/02 , G01J5/20 , H01L27/144 , G03G15/20 , H05K1/18
CPC classification number: G01J5/10 , G01J5/0022 , G01J5/06 , G01J5/0803 , G01J2005/103 , G01J2005/206 , G03G15/2039 , G03G2215/00772 , H01L27/144 , H01L37/02 , H05K1/0271 , H05K1/189 , H05K2201/068 , H05K2201/09136 , H05K2201/09781
Abstract: Provided is an infrared sensor which is capable of measuring a temperature of an object to be measured with high accuracy even when lead wires are connected to one side thereof. The infrared sensor includes an insulating film; a first and a second heat sensitive element which are provided on one face of the insulating film; a first and a second wiring film that are respectively connected to the first and the second heat sensitive element; an infrared reflecting film; a plurality of terminal electrodes; and a thermal resistance adjusting film which is provided on the other face of the insulating film, is in opposition to at least a portion of the longer one of the first or the second wiring film in wiring distance from the terminal electrodes, and is formed of a material with greater heat dissipation than the insulating film.
Abstract translation: 提供一种能够即使在将引线连接到其一侧时也能够以高精度测量被测量物体的温度的红外线传感器。 红外线传感器包括绝缘膜; 第一和第二热敏元件，设置在绝缘膜的一个面上; 分别连接到第一和第二热敏元件的第一和第二布线膜; 红外反射膜; 多个端子电极; 并且设置在所述绝缘膜的另一面上的热电阻调节膜与所述端子电极的布线距离处于与所述第一或第二布线膜中较长的一个的至少一部分相对，并且由所述热电阻调节膜形成为 具有比绝缘膜更大散热的材料。
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公开(公告)号：US12040416B2
公开(公告)日：2024-07-16
申请号：US17955854
申请日：2022-09-29
Applicant: PIXART IMAGING INC.
Inventor： Yi-Chang Chang , Yen-Hsin Chen , Chi-Chih Shen
IPC: H01L31/0203 , G01J5/00 , G01J5/04 , G01J5/20 , H01L27/146 , H01L31/0236 , H01L31/0216 , H01L31/024 , H01L31/09
CPC classification number: H01L31/0203 , G01J5/00 , G01J5/0025 , G01J5/045 , G01J5/20 , H01L27/14625 , H01L27/14685 , H01L31/02363 , G01J2005/206 , H01L27/14601 , H01L31/02164 , H01L31/024 , H01L31/095
Abstract: An optical component packaging structure is provided. The optical component packaging structure includes a substrate, a far-infrared sensor chip, a metal covering cap and a light filter. The far-infrared sensor chip is disposed on the substrate and electrically connected to the substrate. The metal covering cap is disposed on the substrate and accommodating the far-infrared sensor chip. The metal covering cap has an opening exposing the far-infrared sensor chip. The light filter is disposed out of the opening and on the inner surface for covering the opening to filter the far-infrared light passing through. The far-infrared sensor chip is surrounded by the metal covering cap, the substrate and the light filter, and the metal covering cap is directly connected with the substrate.
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公开(公告)号：US12007283B2
公开(公告)日：2024-06-11
申请号：US17347467
申请日：2021-06-14
Inventor： Kouhei Takahashi , Naoki Tambo , Kunihiko Nakamura , Masaki Fujikane , Yasuyuki Naito
CPC classification number: G01J5/22 , H10N19/00 , G01J2005/206
Abstract: Each of first and second beams has a connection portion connected to a base substrate and a separated portion away from the base substrate, and is physically joined to an infrared receiver at the separated portion. The infrared receiver is supported by the first and second beams, and includes lower electrode, upper electrode, and a resistance change film. The resistance change film is sandwiched by the lower electrode and upper electrode in a thickness direction, each of the lower and upper electrodes is electrically connected to the resistance change film, the lower and upper electrodes are electrically connected to first wiring and second wiring, respectively, at least one electrode selected from the lower electrode and the upper electrode has a line-and-space structure, and an infrared reflection film is provided at a position on a surface of the base substrate facing the infrared receiver.
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公开(公告)号：US20160146672A1
公开(公告)日：2016-05-26
申请号：US14553203
申请日：2014-11-25
Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
Inventor： Qizhi LIU , Anthony K. STAMPER , Ronald F. WALLER
IPC: G01J5/20 , H01L37/00 , H01J37/317
CPC classification number: G01J5/20 , G01J5/024 , G01J2005/202 , G01J2005/206 , H01J37/3171 , H01J2237/31701 , H01L37/00
Abstract: A microbolometer device integrated with CMOS and BiCMOS technologies and methods of manufacture are disclosed. The method includes forming a microbolometer unit cell, comprises damaging a portion of a substrate to form a damaged region. The method further includes forming infrared (IR) absorbing material on the damaged region. The method further includes isolating the IR absorbing material by forming a cavity underneath the IR absorbing material.
Abstract translation: 公开了与CMOS和BiCMOS技术以及制造方法集成的微测辐射计装置。 该方法包括形成微量热计单元电池，包括损坏基板的一部分以形成受损区域。 该方法还包括在损伤区域上形成红外（IR）吸收材料。 该方法还包括通过在IR吸收材料下形成空腔来隔离IR吸收材料。
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公开(公告)号：WO2017067711A1
公开(公告)日：2017-04-27
申请号：PCT/EP2016/071411
申请日：2016-09-12
Applicant: ROBERT BOSCH GMBH
Inventor： HERRMANN, Ingo , GROSS, David , UTERMOEHLEN, Fabian
CPC classification number: G01J5/20 , G01J1/429 , G01J5/0853 , G01J5/0896 , G01J2005/066 , G01J2005/206
Abstract: Die Erfindung betrifft einen Strahlungssensoranordnung (21), umfassend einen Strahlungssensor (2), umfassend ein freitragendes Element (5), welches einen optischen Absorber (6) und eine Widerstandsstruktur (3) umfasst und eine Haltestruktur (4), welche das freitragende Element (5) in einem Abstand zu einem Substrat (1) hält und welche eine Verbindung zwischen dem freitragenden Element (5) und dem Substrat (1) darstellt, sowie eine Auswerteeinheit zur Ermittlung einer absorbierten Strahlung aus der Änderung eines elektrischen Widerstands der Widerstandsstruktur (3) gekennzeichnet durch eine wellenlängenselektive Auslegung des optischen Absorbers (6).
Abstract translation:
本发明涉及一种包括辐射传感器的放射线传感器装置（21）（2），包括自支承元件（5）包括光吸收体（6）和一个电阻器结构（3）和支撑结构（ 4）从LT并且以一定距离从衬底的悬臂元件（5）（1）HANDS构成用于确定吸收的辐射的自支承元件（5）和基片（1），以及评估单元之间的连接 通过光学吸收体（6）的波长选择性设计表征的电阻结构（3）的电阻的变化，
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Patent Agency Ranking
公开(公告)号：WO2013114861A1
公开(公告)日：2013-08-08
申请号：PCT/JP2013/000467
申请日：2013-01-29
Applicant: 三菱マテリアル株式会社
CPC classification number: G01J5/10 , G01J5/0022 , G01J5/06 , G01J5/0803 , G01J2005/103 , G01J2005/206 , G03G15/2039 , G03G2215/00772 , H01L27/144 , H01L37/02 , H05K1/0271 , H05K1/189 , H05K2201/068 , H05K2201/09136 , H05K2201/09781
Abstract: 片側にリード線が接続されていても、熱バランスを崩さずに測定対象物の温度を高精度に測定可能な赤外線センサを提供する。絶縁性フィルム２と、絶縁性フィルムの一方の面に設けられた第１の感熱素子３Ａ及び第２の感熱素子３Ｂと、絶縁性フィルムの一方の面に形成され第１の感熱素子に接続された第１の配線膜４Ａ及び第２の感熱素子に接続された第２の配線膜４Ｂと、第２の感熱素子に対向して絶縁性フィルムの他方の面に設けられた赤外線反射膜５と、絶縁性フィルムの同じ端部側に設けられ対応する第１の配線膜及び第２の配線膜に接続された複数の端子電極６と、絶縁性フィルムの他方の面に設けられ第１の配線膜と第２の配線膜とのうち端子電極からの配線距離の長い方の少なくとも一部に対向して絶縁性フィルムよりも熱放散性の高い材料で形成された熱抵抗調整膜７とを備えている。
Abstract translation: 提供了一种红外传感器，即使在将引线连接到一侧时，也可以对待测对象进行高精度的温度测量而不破坏热平衡。 红外传感器包括：绝缘膜（2）; 设置在所述绝缘膜的一个面上的第一热敏元件（3A）和第二热敏元件（3B） 连接到第一热敏元件的第一布线膜（4A）和与第二热敏元件连接的第二布线膜（4B），所述布线膜形成在绝缘膜的一个面上; 设置在所述绝缘膜的与所述第二热敏元件相反的另一面上的红外线反射膜（5）; 多个端子电极（6），其设置在所述绝缘膜的同一端部侧，并且与所述第一布线膜和所述第二布线膜连接; 和设置在所述绝缘膜的另一面上的热电阻调节膜（7），所述隔热膜与所述端子电极的布线距离处于与所述第一布线膜和所述第二布线膜的长度的至少一部分相对的位置 并且其由比绝缘膜更大的散热材料形成。
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公开(公告)号：JP5892368B2
公开(公告)日：2016-03-23
申请号：JP2012019431
申请日：2012-02-01
Applicant: 三菱マテリアル株式会社
CPC classification number: G01J5/10 , G01J5/0022 , G01J5/06 , G01J5/0803 , H05K1/0271 , G01J2005/103 , G01J2005/206 , G03G15/2039 , G03G2215/00772 , H01L27/144 , H01L37/02 , H05K1/189 , H05K2201/068 , H05K2201/09136 , H05K2201/09781
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公开(公告)号：JP2013156235A
公开(公告)日：2013-08-15
申请号：JP2012019431
申请日：2012-02-01
Applicant: Mitsubishi Materials Corp , 三菱マテリアル株式会社
Inventor： TASATO KAZUYOSHI , ISHIKAWA MOTOTAKA , SHIRATA TAKAHARU , NAKAMURA KENZO
CPC classification number: G01J5/10 , G01J5/0022 , G01J5/06 , G01J5/0803 , G01J2005/103 , G01J2005/206 , G03G15/2039 , G03G2215/00772 , H01L27/144 , H01L37/02 , H05K1/0271 , H05K1/189 , H05K2201/068 , H05K2201/09136 , H05K2201/09781
Abstract: PROBLEM TO BE SOLVED: To provide an infrared sensor capable of measuring a temperature of a measuring object with high accuracy without losing a heat balance even if lead wire is coupled to one side.SOLUTION: An infrared sensor includes: an insulation film 2; a first heat sensitive element 3A and a second heat sensitive element 3B, each provided on one side of the insulation film; a first wiring film 4A coupled to the first heat sensitive element and a second wiring film 4B coupled to the second heat sensitive element, each provided on the one side of the insulation film; an infrared reflection film 5 provided on the other side of the insulation film opposite to the second heat sensitive element; a plurality of terminal electrodes 6 provided at a same end of the insulation film and coupled to the corresponding first wiring film and second wiring film; and heat resistance adjustment film 7 provided on the other side of the insulation film, arranged opposite to at least part of the first wiring film or the second wiring film having a longer wiring distance from a terminal electrode and made of a material having higher heat dissipation property than the insulation film.
Abstract translation: 要解决的问题：提供一种能够以高精度测量测量对象的温度而不失去热平衡的红外传感器，即使引线耦合到一侧。解决方案：红外传感器包括：绝缘膜2; 第一热敏元件3A和第二热敏元件3B，其分别设置在绝缘膜的一侧; 耦合到第一热敏元件的第一布线膜4A和耦合到第二热敏元件的第二布线膜4B，每个设置在绝缘膜的一侧上; 设置在与第二热敏元件相反的绝缘膜的另一侧的红外线反射膜5; 设置在绝缘膜的同一端并耦合到相应的第一布线膜和第二布线膜的多个端子电极6; 以及设置在所述绝缘膜的另一侧上的与所述第一布线膜或所述第二布线膜的至少一部分相对的距离端子电极具有较长布线距离并且由具有较高散热性的材料制成的所述绝缘膜的另一侧的耐热调节膜7 性能比绝缘膜。
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公开(公告)号：EP2811271A1
公开(公告)日：2014-12-10
申请号：EP13743471.8
申请日：2013-01-29
Applicant: Mitsubishi Materials Corporation
Inventor： TARI, Kazuyoshi , ISHIKAWA, Mototaka , SHIRATA, Keiji , NAKAMURA, Kenzo
CPC classification number: G01J5/10 , G01J5/0022 , G01J5/06 , G01J5/0803 , G01J2005/103 , G01J2005/206 , G03G15/2039 , G03G2215/00772 , H01L27/144 , H01L37/02 , H05K1/0271 , H05K1/189 , H05K2201/068 , H05K2201/09136 , H05K2201/09781
Abstract: Provided is an infrared sensor which is capable of measuring a temperature of an object to be measured with high accuracy even when lead wires are connected to one side thereof. The infrared sensor includes an insulating film; a first and a second heat sensitive element which are provided on one face of the insulating film; a first and a second wiring film that are respectively connected to the first and the second heat sensitive element; an infrared reflecting film; a plurality of terminal electrodes; and a thermal resistance adjusting film which is provided on the other face of the insulating film, is in opposition to at least a portion of the longer one of the first or the second wiring film in wiring distance from the terminal electrodes, and is formed of a material with greater heat dissipation than the insulating film.
Abstract translation: 提供一种红外线传感器，其即使在将导线连接到其一侧时也能够以高精度测量被测量物体的温度。 红外传感器包括绝缘膜; 第一和第二热敏元件，设置在绝缘膜的一个面上; 分别连接到第一和第二热敏元件的第一和第二布线膜; 红外反射膜; 多个端子电极; 并且设置在所述绝缘膜的另一面上的热电阻调节膜与所述端子电极的布线距离处于与所述第一或第二布线膜中较长的一个的至少一部分相对，并且由所述热电阻调节膜形成为 具有比绝缘膜更大散热的材料。
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20.发明授权
公开(公告)号：EP0149819B1
公开(公告)日：1989-07-19
申请号：EP84115783.7
申请日：1984-12-19
IPC: G01J5/20
CPC classification number: G01J5/20 , G01J2005/202 , G01J2005/206
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