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    CATHODE ARRANGEMENT, ELECTRON GUN, AND LITHOGRAPHY SYSTEM COMPRISING SUCH ELECTRON GUN
    11.
    发明申请
    CATHODE ARRANGEMENT, ELECTRON GUN, AND LITHOGRAPHY SYSTEM COMPRISING SUCH ELECTRON GUN 审中-公开
    电子装置，电子枪和包含这种电子枪的平移系统

    公开(公告)号：WO2015101538A4

    公开(公告)日：2015-08-27

    申请号：PCT/EP2014078995

    申请日：2014-12-22

    Applicant: MAPPER LITHOGRAPHY IP BV

    Inventor： DINU-GÜRTLER LAURA ,  HOGERVORST ERIC PETRUS

    IPC: H01J3/02 ,  H01J1/28 ,  H01J1/46 ,  H01J37/07

    CPC classification number: H01J37/3174 ,  G03F7/70058 ,  H01J1/15 ,  H01J1/28 ,  H01J3/027 ,  H01J3/029 ,  H01J37/075 ,  H01J37/3177 ,  H01J2229/481 ,  H01J2237/061

    Abstract: The invention relates to a cathode arrangement (20) comprising: • - a thermionic cathode comprising an emission portion (30) provided with an emission surface for emitting electrons, and a reservoir (38) for holding a material, wherein the material, when heated, releases work function lowering particles that diffuse towards the emission portion and emanate at the emission surface at a first evaporation rate; • - a focusing electrode (40) comprising a focusing surface for focusing the electrons emitted from the emission surface of the cathode; and • - an adjustable heat source (50) configured for keeping the focusing surface at a temperature at which accumulation of work function lowering particles on the focusing surface is prevented.

    Abstract translation: 本发明涉及一种阴极装置（20），包括： - 一个热离子阴极，包括一个设有发射电子的发射表面的发射部分（30）和一个用于保持材料的储存器（38），其中该材料在被加热时 释放功能降低颗粒，其朝向发射部分扩散并以第一蒸发速率发射在发射表面; •聚焦电极（40），包括用于聚焦从阴极的发射表面发射的电子的聚焦表面; 和 - 可调热源（50），其被配置用于将聚焦表面保持在降低聚焦表面上的颗粒的功函数累积的温度。

    ZERO-BIAS GRIDDED GUN
    12.
    发明申请
    ZERO-BIAS GRIDDED GUN 审中-公开

    公开(公告)号：WO1980000282A1

    公开(公告)日：1980-02-21

    申请号：PCT/US1979000456

    申请日：1979-06-27

    Applicant: VARIAN ASS INC

    Inventor： VARIAN ASS INC ,  MIRAM G ,  KUEHNE G

    IPC: H01J29/46

    CPC classification number: H01J23/065 ,  H01J1/46 ,  H01J3/029

    Abstract: A gun for a linear-beam electron tube has a control grid (40) for modulating the beam current which consists of an array of conductive web elements (50, 52) whose spacing from each other is much larger than their spacing from the concave emissive surface (31) of the cathode (30). It was found that when this condition is met, the grid (40) can be operated at cathode potential while beam current is being drawn without distorting the electric accelerating field enough to ruin the focusing of the beam. Thus, when the grid (40) is used to pulse the beam current on and off, it can have zero bias in the "on" condition, whereby the pulse modulator can be greatly simplified.

    ELECTRON-OPTICAL DEVICE HAVING TWO ELONGATE EMITTING REGIONS
    15.
    发明公开
    ELECTRON-OPTICAL DEVICE HAVING TWO ELONGATE EMITTING REGIONS 失效
    与两个细长的发光区域的电子光学器件

    公开(公告)号：EP0795193A1

    公开(公告)日：1997-09-17

    申请号：EP96927153.0

    申请日：1996-08-29

    Applicant: PHILIPS ELECTRONICS N.V.

    Inventor： GEHRING, Frederik, Christiaan ,  VAN ZUTPHEN, Tom ,  MANENSCHIJN, Albert

    IPC: H01J29 ,  H01J3

    CPC classification number: H01J29/488 ,  H01J3/029 ,  H01J2201/308

    Abstract: Electron-optical device having two elongate emitting regions arranged symmetrically with respect to a longitudinal axis for producing two electron beams having an elongate cross section. By means of electron grids, the two beams are focused at the same point of an electron target arranged transversely to the longitudinal axis and having a short central axis and a long central axis. The elongate emitting regions have their smallest cross section parallel to the scanning direction of a device, cooperating with the electron-optical device, for scanning a target arranged transversely to the longitudinal axis.

    Electron beam columns
    16.
    发明公开
    Electron beam columns 审中-公开
    Elektronenstrahlsäule

    公开(公告)号：EP1102303A2

    公开(公告)日：2001-05-23

    申请号：EP00310038.5

    申请日：2000-11-10

    Applicant: Etec Systems, Inc.

    Inventor： Veneklasen, Lee H.

    IPC: H01J37/06 ,  H01J3/02

    CPC classification number: H01J37/063 ,  H01J3/029

    Abstract: A tetrode (four electrode) gun (202) is described which allows the adjustment of both variable high brightness and illumination uniformity in the profile of the electron beam. This is achieved by providing an electrostatic focusing electrode (18) between the cathode (2) and the anode (8) within the electron gun. The focusing electrode is positively biased to a few keV and allows the image of the cathode to be focused at infinity. The addition of a focusing electrode enables both variable brightness and illumination uniformity by adjustment of the bias of a grid (4) which is mounted below the cathode to maintain constant emission, while adjusting the bias of the focusing electrode to obtain the optimal beam cross-sectional uniformity.

    Abstract translation: 描述了四极（四电极）枪（202），其允许调整电子束轮廓中的可变高亮度和照明均匀性两者。 这通过在电子枪内的阴极（2）和阳极（8）之间设置静电聚焦电极（18）来实现。 聚焦电极被正偏压到几keV，并允许阴极的图像被无限远地聚焦。 通过调整安装在阴极下方的栅极（4）的偏置来保持恒定的发射，同时调节聚焦电极的偏压以获得最佳的光束横截面，添加聚焦电极使得能够实现可变亮度和照明均匀性， 截面均匀性。

    Cathode ray tubes
    17.
    发明公开
    Cathode ray tubes 失效
    阴极射线管

    公开(公告)号：EP0214816A3

    公开(公告)日：1988-11-23

    申请号：EP86306667

    申请日：1986-08-28

    Applicant: SONY CORPORATION

    Inventor： Kakizaki, Takehiro c/o Patent Division ,  Kusuda, Koumei c/o Patent Division ,  Furui, Koichi c/o Patent Division

    IPC: H01J29/48 ,  H01J03/02

    CPC classification number: H01J29/488 ,  H01J3/029

    Abstract: In a cathode ray tube provided with a limiting aperture (LA) in an electron gun, the axial potential between the limiting aperture (LA) and an electrode (SG) arranged at the rear stage of the limiting aperture (LA) is lower than a potential of the limiting aperture (LA) by several tens of volts, so that secondary electrons generated from the limiting aperture (LA) are hindered from reaching a fluorescent screen (1) or a target screen of the cathode ray tube.

    Abstract translation: 在电子枪中设置有限制孔径（LA）的阴极射线管中，限制孔径（LA）和设置在限制孔径（LA）后级的电极（SG）之间的轴向电势低于 限制孔径（LA）的电势减少几十伏特，从而限制从限制孔径（LA）产生的二次电子到达荧光屏（1）或阴极射线管的目标屏幕。

    ZERO-BIAS GRIDDED GUN
    18.
    发明授权
    ZERO-BIAS GRIDDED GUN 失效

    公开(公告)号：EP0018402B1

    公开(公告)日：1988-09-14

    申请号：EP79900835.4

    申请日：1979-06-27

    Applicant: VARIAN ASSOCIATES, INC.

    Inventor： MIRAM, George Valentine ,  KUEHNE, Gerhard Berthold

    IPC: H01J23/065

    CPC classification number: H01J23/065 ,  H01J1/46 ,  H01J3/029

    Abstract: A gun for a linear-beam electron tube has a control grid (40) for modulating the beam current which consists of an array of conductive web elements (50, 52) whose spacing from each other is much larger than their spacing from the concave emissive surface (31) of the cathode (30). It was found that when this condition is met, the grid (40) can be operated at cathode potential while beam current is being drawn without distorting the electric accelerating field enough to ruin the focusing of the beam. Thus, when the grid (40) is used to pulse the beam current on and off, it can have zero bias in the "on" condition, whereby the pulse modulator can be greatly simplified.

    Abstract translation: 用于线性束电子管的枪具有用于调制射束电流的控制栅格（40），该控制栅格由导电纤维网元件（50,52）的阵列组成，所述导电纤维网元件（50,52）的距离远大于它们与凹面发射 （30）的表面（31）。 已经发现，当满足这个条件时，可以在阴极电势下操作栅极（40），同时汲取电子束电流而不扭曲电加速场足以破坏光束的聚焦。 因此，当电网（40）用于脉冲打开和关闭射束电流时，它可以在“开启”状态下具有零偏压，由此可以大大简化脉冲调制器。

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