公开(公告)号：US08315493B2

公开(公告)日：2012-11-20

申请号：US13317476

申请日：2011-10-19

Applicant: Lance Gibson ,  David Peckham ,  Robert Lingle, Jr.

Inventor： Lance Gibson ,  David Peckham ,  Robert Lingle, Jr.

IPC: G02B6/036

CPC classification number: G02B6/03683 ,  C03B37/01211 ,  C03B37/01228 ,  C03B37/014 ,  C03B37/018 ,  C03B2201/04 ,  C03B2201/075 ,  C03B2201/12 ,  C03B2201/31 ,  C03B2203/22

Abstract: The specification describes an improved optical fiber produced by a hybrid VAD/MCVD process. The core of the fiber is produced using VAD and the inner cladding layer has a depressed index and is produced using MCVD. In preferred embodiments, the optical power envelope is essentially entirely contained in VAD produced core material and the MCVD produced depressed index cladding material. Optical loss is minimized by confining most of the optical power to the VAD core where OH presence is low, as well as by maximizing the optical power in the un-doped silica region. The MCVD substrate tube material is essentially devoid of optical power.

Abstract translation: 本说明书描述了通过混合VAD / MCVD工艺生产的改进的光纤。 使用VAD制造纤维的芯，并且内包层具有凹陷指数，并且使用MCVD制造。 在优选实施例中，光功率包层基本上完全包含在VAD生产的芯材料中，并且MCVD产生凹陷的折射率包层材料。 通过将大部分光功率限制在其中OH存在低的VAD核心以及通过使未掺杂二氧化硅区域中的光功率最大化来将光损耗最小化。 MCVD衬底管材料基本上没有光学功率。

公开(公告)号：US20120198892A1

公开(公告)日：2012-08-09

申请号：US13363748

申请日：2012-02-01

Applicant: Yoshiaki TAMURA ,  Masaaki Hirano ,  Tetsuya Haruna

Inventor： Yoshiaki TAMURA ,  Masaaki Hirano ,  Tetsuya Haruna

IPC: C03B37/012

CPC classification number: C03B37/01861 ,  C03B37/01228 ,  C03B37/01869 ,  C03B2201/07 ,  C03B2201/075 ,  C03B2201/12 ,  C03B2201/20 ,  C03B2201/50

Abstract: A method for producing an optical fiber preform according to the present invention includes an etching step of heating a silica-based glass tube using a heat source continuously traversed in the longitudinal direction of the glass tube to etch the inner surface portion of the glass tube containing impurities while an etching gas is allowed to flow into the glass tube. The glass tube has a maximum alkali metal concentration of 500 to 20,000 atomic ppm, a maximum chlorine concentration of 0 to 1000 atomic ppm, and a maximum fluorine concentration of 0 to 10,000 atomic ppm. In the etching step, the maximum temperature of the outer surface of the glass tube is in the range of 1900° C. to 2250° C., and the heating time is set to a time equal to or less than a time (min) given by ( 7 - alkai   metal   concentration   ppm 5000 ) .

Abstract translation: 根据本发明的光纤预制棒的制造方法包括：蚀刻步骤，使用在玻璃管的纵向连续穿过的热源来加热二氧化硅基玻璃管，以蚀刻含有玻璃管的玻璃管的内表面部分 允许蚀刻气体流入玻璃管中的杂质。 玻璃管的碱金属浓度最高为500〜20,000原子ppm，最大氯浓度为0〜1000原子ppm，最大氟浓度为0〜10,000原子ppm。 在蚀刻步骤中，玻璃管的外表面的最高温度在1900℃至2250℃的范围内，加热时间设定为等于或小于时间（分钟）的时间， 由（7-烷烃金属浓度ppm ppm 5000）给出。

公开(公告)号：US20120087625A1

公开(公告)日：2012-04-12

申请号：US13327736

申请日：2011-12-15

Applicant: Qingrong HAN ,  Chen YANG ,  Yongtao LIU ,  Jie LUO ,  Matai RADJJ

Inventor： Qingrong HAN ,  Chen YANG ,  Yongtao LIU ,  Jie LUO ,  Matai RADJJ

IPC: G02B6/028 ,  C03B37/027 ,  C03B37/018 ,  B32B17/02 ,  C03B37/075

CPC classification number: C03B37/01211 ,  C03B2201/075 ,  C03B2201/12 ,  C03B2203/22 ,  Y02P40/57 ,  Y10T428/2949

Abstract: A fiber preform, including: a fiber core rod and an outer cladding layer. The ratio of the diameter of the fiber core rod to the diameter of the core layer thereof is 2.1-2.8. The fiber core rod and a small fluorine-doped quartz glass tube are melted to form a core rod assembly. The ratio of the diameter difference between the core rod assembly and the fiber core rod to the diameter of the core layer is 0.5-2.2. The relative refractive index difference of fluorine-doped quartz glass relative to purified quartz glass ΔF is −0.20% to −0.35%. The core rod assembly is arranged with a large purified quartz glass tube, or directly deposited with a SiO2 glass cladding layer. A ratio of an effective diameter of the fiber preform to the diameter of the core rod assembly is 2.0-5.6. Methods for manufacturing the preform and a fiber are also provided.

Abstract translation: 一种纤维预制件，包括：纤维芯棒和外包层。 纤维芯棒的直径与其芯层直径的比为2.1-2.8。 纤维芯棒和小的氟掺杂石英玻璃管被熔化以形成芯棒组件。 芯棒组件和纤维芯棒之间的直径差与芯层直径之比为0.5-2.2。 氟掺杂石英玻璃相对于纯化石英玻璃与Dgr F的相对折射率差为-0.20％至-0.35％。 芯棒组件布置有大的纯化石英玻璃管，或直接沉积有SiO 2玻璃包层。 纤维预制棒的有效直径与芯棒组件的直径之比为2.0-5.6。 还提供了用于制造预成型件和纤维的方法。

公开(公告)号：US08006518B2

公开(公告)日：2011-08-30

申请号：US10959331

申请日：2004-10-07

Applicant: Dennis Robert Simons ,  Jelle Philip Terpsma ,  Frans Gooijer

Inventor： Dennis Robert Simons ,  Jelle Philip Terpsma ,  Frans Gooijer

IPC: C03B37/018

CPC classification number: C03B37/01807 ,  C03B37/01413 ,  C03B37/0183 ,  C03B2201/04 ,  C03B2201/075

Abstract: The present invention relates to a method for manufacturing a preform for optical fibers, wherein deposition of glass-forming compounds on the substrate takes place. The present invention furthermore relates to a method for manufacturing optical fibers, wherein one end of a solid preform is heated, after which an optical fibre is drawn from said heated end.

Abstract translation: 本发明涉及一种用于制造光纤预制棒的方法，其中玻璃化合物在基片上的沉积发生。 本发明还涉及一种制造光纤的方法，其中固体预成型件的一端被加热，之后从所述加热端拉出光纤。

公开(公告)号：US07934390B2

公开(公告)日：2011-05-03

申请号：US11748151

申请日：2007-05-14

Applicant: Eric Eva

Inventor： Eric Eva

IPC: C03C21/00 ,  C03C19/00

CPC classification number: C03C3/06 ,  C03B23/0013 ,  C03B23/0026 ,  C03B32/00 ,  C03B2201/07 ,  C03B2201/075 ,  C03B2201/21 ,  C03B2201/23 ,  C03C2201/21 ,  C03C2201/23 ,  C03C2203/54

Abstract: The invention relates to a method for the manufacture of a lens of synthetic quartz glass with increased H2 content, in particular for a lens for an optical system with an operating wavelength of less than 250 nm, in particular less than 200 nm, with the steps: providing a precursor product of synthetic quartz glass, in particular with a first H2 content of less than 2·1015 molecules/cm3, with a circumferential border surface and two base surfaces lying on opposite sides, wherein at least one partial surface of at least one of said base surfaces has a curvature, and treating the precursor product in an H2-containing atmosphere in order to produce a precursor product of synthetic quartz glass with a second H2 content that is increased in relation to the first H2 content, in particular with a second H2 content of more than 1016 molecules/cm3, and measuring at least one optical property of said precursor product with said second H2 content.

Abstract translation: 本发明涉及一种用于制造具有增加的H 2含量的合成石英玻璃透镜的方法，特别是用于具有小于250nm，特别是小于200nm的工作波长的光学系统的透镜，步骤 ：提供合成石英玻璃的前体产物，特别是具有小于2×1015分子/ cm 3的第一H 2含量，周边边界表面和位于相对侧上的两个基底表面，其中至少一个部分表面至少 所述基面之一具有曲率，并且在含H2气氛中处理前体产物，以便产生具有相对于第一H 2含量增加的第二H 2含量的合成石英玻璃的前体产物，特别是与 大于1016分子/ cm 3的第二H 2含量，并测量所述前体产物与所述第二H 2含量的至少一种光学性质。

公开(公告)号：US20100179047A1

公开(公告)日：2010-07-15

申请号：US12718776

申请日：2010-03-05

Applicant: Akio KOIKE ,  Chikaya Tamitsuji ,  Kunio Watanabe ,  Tomonori Ogawa

Inventor： Akio KOIKE ,  Chikaya Tamitsuji ,  Kunio Watanabe ,  Tomonori Ogawa

IPC: C03C3/06 ,  C03C10/00

CPC classification number: C03C3/06 ,  C03B19/1423 ,  C03B19/1453 ,  C03B19/1461 ,  C03B25/02 ,  C03B2201/075 ,  C03B2201/12 ,  C03B2201/42 ,  C03B2207/36 ,  C03C4/0085 ,  C03C2201/12 ,  C03C2201/23 ,  C03C2201/42 ,  C03C2203/54

Abstract: The present invention relates to an optical member including a TiO2-containing silica glass having: a TiO2 concentration of from 3 to 10% by mass; a Ti3+ concentration of 100 wt ppm or less; a thermal expansion coefficient at from 0 to 100° C., CTE0-100, of 0±150 ppb/° C.; and an internal transmittance in the wavelength range of 400 to 700 nm per a thickness of 1 mm, T400-700, of 80% or more, in which the optical member has a ratio of variation of Ti3+ concentration to an average value of the Ti3+ concentration, ΔTi3+/Ti3+, on an optical use surface, is 0.2 or less.

Abstract translation: 本发明涉及一种含有TiO2含量为3〜10质量％的含TiO 2的二氧化硅玻璃的光学构件， Ti3 +浓度为100重量ppm以下; 0-100℃的热膨胀系数，CTE0-100，为0±150ppb /℃。 并且在400〜700nm的波长范围内的内部透射率，每1mm厚度，T400〜700，为80％以上，其中光学部件具有Ti 3+浓度的变化比与Ti 3+的平均值的比值， 在光学用表面上的浓度＆Dgr; Ti 3+ / Ti 3+为0.2以下。

公开(公告)号：US20100091360A1

公开(公告)日：2010-04-15

申请号：US12449790

申请日：2008-02-20

Applicant: Bodo Kuehn ,  Stefan Ochs ,  Juergen Weber

Inventor： Bodo Kuehn ,  Stefan Ochs ,  Juergen Weber

IPC: G02B13/14 ,  C03C17/00 ,  G02B1/02

CPC classification number: C03B19/1453 ,  C03B2201/075 ,  C03B2201/10 ,  C03B2201/21 ,  C03B2201/23 ,  C03B2201/24 ,  C03B2201/32 ,  C03B2201/34 ,  C03B2201/40 ,  C03C3/06 ,  C03C2201/10 ,  C03C2201/21 ,  C03C2201/23 ,  C03C2201/24 ,  C03C2201/32 ,  C03C2201/3411 ,  C03C2201/3441 ,  C03C2201/40 ,  G03F7/70958

Abstract: To provide an optical component of quartz glass for use in a projection objective for immersion lithography at an operating wavelength below 250 nm, which component is optimized for use with linearly polarized UV laser radiation and particularly with respect to compaction and birefringence induced by anisotropic density change, it is suggested according to the invention that the quartz glass should contain hydroxyl groups in the range of from 1 wtppm to 60 wtppm and chemically bound nitrogen, and that the mean hydrogen content of the quartz glass should be in the range of 5×1015 molecules/cm to 1×1017 molecules/cm3.

Abstract translation: 为了提供石英玻璃的光学部件，用于在250nm以下的工作波长下用于浸没式光刻的投影物镜，该成分被优化用于线偏振UV激光辐射，特别是关于由各向异性密度变化引起的压实和双折射 根据本发明，建议石英玻璃应含有1〜60重量ppm的羟基和化学键合的氮，石英玻璃的平均氢含量应在5×1015的范围内 分子/ cm至1×1017分子/ cm 3。

公开(公告)号：US07635658B2

公开(公告)日：2009-12-22

申请号：US11583619

申请日：2006-10-19

Applicant: Dana Craig Bookbinder ,  Richard Michael Fiacco ,  Ulrich Wilhelm Heinz Neukirch

Inventor： Dana Craig Bookbinder ,  Richard Michael Fiacco ,  Ulrich Wilhelm Heinz Neukirch

IPC: C03C3/06 ,  C03C15/00 ,  C03B19/06 ,  C03B37/00 ,  C03B37/014

CPC classification number: C03C3/06 ,  C03B19/06 ,  C03B19/066 ,  C03B19/12 ,  C03B19/14 ,  C03B19/1453 ,  C03B20/00 ,  C03B32/00 ,  C03B2201/07 ,  C03B2201/075 ,  C03B2201/08 ,  C03B2201/12 ,  C03B2201/22 ,  C03B2201/23 ,  C03B2201/32 ,  C03B2201/42 ,  C03C4/0085 ,  C03C2201/11 ,  C03C2201/12 ,  C03C2201/22 ,  C03C2201/23

Abstract: What is disclosed includes OD-doped synthetic silica glass capable of being used in optical elements for use in lithography below about 300 nm. OD-doped synthetic silica glass was found to have significantly lower polarization-induced birefringence value than non-OD-doped silica glass with comparable concentration of OH. Also disclosed are processes for making OD-doped synthetic silica glasses, optical member comprising such glasses, and lithographic systems comprising such optical member. The glass is particularly suitable for immersion lithographic systems due to the exceptionally low polarization-induced birefringence values at about 193 nm.

Abstract translation: 公开的内容包括能够用于低于约300nm的光刻中的光学元件的OD掺杂合成石英玻璃。 发现OD掺杂的合成二氧化硅玻璃具有比具有相当浓度的OH的非OD掺杂的石英玻璃具有显着更低的偏振诱导双折射值。 还公开了制造掺杂OD的合成二氧化硅玻璃，包含这种玻璃的光学构件以及包括这种光学构件的光刻系统的方法。 由于在约193nm处极度低的偏振诱发双折射值，该玻璃特别适用于浸没式光刻系统。

公开(公告)号：US07589039B2

公开(公告)日：2009-09-15

申请号：US11241075

申请日：2005-09-30

Applicant: Douglas Clippinger Allan ,  Dana Craig Bookbinder ,  Ulrich W H Neukirch ,  Charlene Marie Smith

Inventor： Douglas Clippinger Allan ,  Dana Craig Bookbinder ,  Ulrich W H Neukirch ,  Charlene Marie Smith

IPC: C03C3/06 ,  C03B19/00

CPC classification number: C03B19/1453 ,  C03B2201/075 ,  C03B2201/21 ,  C03B2201/23 ,  C03C3/06 ,  C03C2201/23 ,  C03C2203/54

Abstract: Disclosed are synthetic silica glass having a low polarization-induced birefringence, process for making the glass and lithography system comprising optical element made of the glass. The silica glass has a polarization-induced birefringence measured at 633 nm of less than about 0.1 nm/cm when subjected to excimer laser pulses at about 193 nm having a fluence of about 40 μJ·cm−2·pulse−1 and a pulse length of about 25 ns for 5×109 pulses.

Abstract translation: 公开了具有低偏振诱发双折射的合成石英玻璃，用于制造玻璃的方法和包含由玻璃制成的光学元件的光刻系统。 当经受约193nm的准分子激光脉冲时，石英玻璃在633nm处测量的偏振诱发双折射小于约0.1nm / cm，具有约40μJ·cm -2脉冲-1的注量和脉冲长度 对于5x109个脉冲，约25ns。

公开(公告)号：US20090098370A1

公开(公告)日：2009-04-16

申请号：US12249616

申请日：2008-10-10

Applicant: Tatsuhiro Sato ,  Nobumasa Yoshida

Inventor： Tatsuhiro Sato ,  Nobumasa Yoshida

IPC: B32B17/06 ,  C03C15/00

CPC classification number: C03C3/06 ,  C03B19/1453 ,  C03B2201/07 ,  C03B2201/075 ,  C03B2201/20 ,  C03C4/02 ,  C03C4/082 ,  C03C23/008 ,  C03C2201/02 ,  C03C2201/26 ,  C03C2203/54 ,  Y10T428/261

Abstract: To provide a black synthetic quartz glass with a transparent layer, which has high emissivity in the far infrared region, has excellent light-shielding properties, maintains the same degree of purity as synthetic quartz glass in terms of metal impurities, has high-temperature viscosity characteristics comparable to natural quartz glass, can undergo high-temperature processing like welding, and does not release carbon from its surface; together with a method for the production thereof.A porous silica glass body containing hydroxyl groups is subjected to a gas phase reaction in a volatile organosilicon compound atmosphere at a temperature between 100° C. and 1200° C. and, following the reaction, evacuation is commenced and, on reaching a degree of vacuum exceeding 10 mmHg (1343 Pa), heating is carried out at a temperature between 1200° C. and 2000° C. to produce a compact glass body.

Abstract translation: 为了提供具有透明层的黑色合成石英玻璃，其在远红外区域具有高发射率，具有优异的遮光性能，在金属杂质方面保持与合成石英玻璃相同的纯度，具有高温粘度 与天然石英玻璃相当的特性，可进行焊接等高温加工，不会从表面释放碳; 以及其生产方法。 含有羟基的多孔二氧化硅玻璃体在100℃〜1200℃的温度下在挥发性有机硅化合物气氛中进行气相反应，反应开始后，达到一定程度的 真空度超过10mmHg（1343Pa），在1200℃〜2000℃的温度下进行加热，生成紧凑的玻璃体。