公开(公告)号：US07631518B2

公开(公告)日：2009-12-15

申请号：US10904909

申请日：2004-12-03

Applicant: Toivo T. Kodas ,  Mark J. Hampden-Smith ,  James Caruso ,  Quint H. Powell ,  Audunn Ludviksson

Inventor： Toivo T. Kodas ,  Mark J. Hampden-Smith ,  James Caruso ,  Quint H. Powell ,  Audunn Ludviksson

IPC: C03B19/10

CPC classification number: B82Y30/00 ,  A61K6/0276 ,  A61K6/08 ,  A61K6/083 ,  B01J13/02 ,  B01J19/10 ,  B01J19/2405 ,  B01J2219/00112 ,  B01J2219/00155 ,  B01J2219/00159 ,  B01J2219/00162 ,  B01J2219/00166 ,  B01J2219/00171 ,  B01J2219/00186 ,  B24B37/044 ,  C01B13/18 ,  C01B13/185 ,  C01B17/20 ,  C01F17/0043 ,  C01G23/003 ,  C01P2002/60 ,  C01P2004/03 ,  C01P2004/32 ,  C01P2004/34 ,  C01P2004/50 ,  C01P2004/52 ,  C01P2004/61 ,  C01P2004/62 ,  C01P2006/22 ,  C03B19/106 ,  C03B2201/07 ,  C03C8/16 ,  C03C11/002 ,  C03C12/00 ,  C03C14/004 ,  C03C17/30 ,  C03C2214/08 ,  C09G1/02 ,  C09K3/1436 ,  C09K3/1463 ,  C09K11/584 ,  C09K11/595 ,  C09K11/623 ,  C09K11/642 ,  C09K11/643 ,  C09K11/644 ,  C09K11/662 ,  C09K11/666 ,  C09K11/672 ,  C09K11/7701 ,  C09K11/7708 ,  C09K11/7729 ,  C09K11/7769 ,  C09K11/7776 ,  C09K11/7784 ,  C09K11/7786 ,  C09K11/7787 ,  H01L21/3212 ,  Y02P40/57 ,  Y10T428/29 ,  Y10T428/2982 ,  Y10T428/2991 ,  Y10T428/2995 ,  Y10T428/2996 ,  C08L33/00

Abstract: Methods for producing glass powders are provided. The methods include generating an aerosol stream comprising droplets that include a liquid and a glass precursor. Glass particles are formed in the aerosol stream having a small average particle size. The powders can also have a small particle size, narrow size distribution, a high density and a spherical morphology. The invention also includes devices and products formed from the glass powders.

Abstract translation: 提供制造玻璃粉末的方法。 所述方法包括产生包括液滴和玻璃前体的液滴的气溶胶流。 在具有小平均粒度的气溶胶流中形成玻璃颗粒。 粉末也可以具有小的粒度，窄的分布尺寸，高密度和球形的形态。 本发明还包括由玻璃粉末形成的装置和产品。

公开(公告)号：US20090203512A1

公开(公告)日：2009-08-13

申请号：US12364083

申请日：2009-02-02

Applicant: Richard Michael Fiacco ,  Kenneth Edward Hrdina ,  Rostislav Radievich Khrapko ,  Lisa Anne Moore ,  Charlene Marie Smith

Inventor： Richard Michael Fiacco ,  Kenneth Edward Hrdina ,  Rostislav Radievich Khrapko ,  Lisa Anne Moore ,  Charlene Marie Smith

IPC: C03C3/06 ,  B05D5/06

CPC classification number: C03B19/1453 ,  C03B2201/07 ,  C03B2201/075 ,  C03B2201/21 ,  C03B2201/22 ,  C03C3/06 ,  C03C4/0071 ,  C03C4/0085 ,  C03C2201/21 ,  C03C2201/22 ,  C03C2201/23 ,  C03C2203/54 ,  G03F7/70966

Abstract: A fused silica glass having a refractive index homogeneity of less or equal to about 5 ppm over an aperture area of at least about 50 cm2. The fused silica glass is also substantially free of halogens and has an adsorption edge of less than about 160 nm. The glass is dried by exposing a silica soot blank to carbon monoxide before consolidation, reducing the combined concentration of hydroxyl (i.e., OH, where H is protium (11H) and deuteroxyl (OD), where D is deuterium (12H)) of less than about 20 ppm by weight in one embodiment, less than about 5 ppm by weight in another embodiment, and less than about 1 ppm by weight in a third embodiment.

Abstract translation: 在至少约50cm 2的开口面积上具有小于或等于约5ppm的折射率均匀性的熔融石英玻璃。 熔融石英玻璃也基本上不含卤素并具有小于约160nm的吸附边。 玻璃通过在固化前将二氧化硅烟炱坯料暴露于一氧化碳而干燥，降低羟基（即OH，其中H为铑（11H）和氘氧基（OD），其中D为氘（12H））的组合浓度较小 在一个实施方案中约20重量ppm，在另一个实施方案中小于约5重量ppm，在第三个实施方案中小于约1重量ppm。

公开(公告)号：US20090163344A1

公开(公告)日：2009-06-25

申请号：US12226861

申请日：2007-09-04

Applicant: Juergen Weber ,  Tatsuhiro Sato ,  Ralf Schneider ,  Achim Hofmann ,  Christian Gebauer

Inventor： Juergen Weber ,  Tatsuhiro Sato ,  Ralf Schneider ,  Achim Hofmann ,  Christian Gebauer

IPC: C03C3/04 ,  C03B19/06 ,  C03B20/00

CPC classification number: C03C3/06 ,  C03B19/06 ,  C03B19/066 ,  C03B20/00 ,  C03B2201/07 ,  C03B2201/075 ,  C03B2201/24 ,  C03B2201/34 ,  C03B2201/36 ,  C03C4/20 ,  C03C2201/23 ,  C03C2201/24 ,  C03C2201/3411 ,  C03C2201/3435 ,  C03C2203/10 ,  C03C2203/54

Abstract: The invention starts from a known component of quartz glass for use in semiconductor manufacture, which component at least in a near-surface region shows a co-doping of a first dopant and of a second oxidic dopant, said second dopant containing one or more rare-earth metals in a concentration of 0.1-3% by wt. each (based on the total mass of SiO2 and dopant). Starting from this, to provide a quartz glass component for use in semiconductor manufacture in an environment with etching action, which component is distinguished by both high purity and high resistance to dry etching and avoids known drawbacks caused by co-doping with aluminum oxide, it is suggested according to the invention that the first dopant should be nitrogen and that the mean content of metastable hydroxyl groups of the quartz glass is less than 30 wtppm.

Abstract translation: 本发明从用于半导体制造的石英玻璃的已知组件开始，至少在近表面区域中的该组分表现出第一掺杂剂和第二氧化物掺杂剂的共掺杂，所述第二掺杂剂含有一种或多种稀有金属 - 浓度为0.1-3重量％的矿物金属。 每个（基于SiO 2和掺杂剂的总质量）。 从此开始，为了在具有蚀刻作用的环境中提供用于半导体制造的石英玻璃组分，该组分通过高纯度和高耐干蚀刻性而被区分，并避免了与氧化铝共掺杂引起的已知缺点。 根据本发明建议第一掺杂剂应为氮，并且石英玻璃的亚稳态羟基的平均含量小于30重量ppm。

公开(公告)号：US20090148627A1

公开(公告)日：2009-06-11

申请号：US12370693

申请日：2009-02-13

Applicant: Dana Craig Bookbinder ,  Richard Michael Fiacco ,  Ulrich Wilhelm Heinz Neukirch

Inventor： Dana Craig Bookbinder ,  Richard Michael Fiacco ,  Ulrich Wilhelm Heinz Neukirch

IPC: B05D1/00

CPC classification number: C03C3/06 ,  C03B19/06 ,  C03B19/066 ,  C03B19/12 ,  C03B19/14 ,  C03B19/1453 ,  C03B20/00 ,  C03B32/00 ,  C03B2201/07 ,  C03B2201/075 ,  C03B2201/08 ,  C03B2201/12 ,  C03B2201/22 ,  C03B2201/23 ,  C03B2201/32 ,  C03B2201/42 ,  C03C4/0085 ,  C03C2201/11 ,  C03C2201/12 ,  C03C2201/22 ,  C03C2201/23

Abstract: What is disclosed includes OD-doped synthetic silica glass capable of being used in optical elements for use in lithography below about 300 nm. OD-doped synthetic silica glass was found to have significantly lower polarization-induced birefringence value than non-OD-doped silica glass with comparable concentration of OH. Also disclosed are processes for making OD-doped synthetic silica glasses, optical member comprising such glasses, and lithographic systems comprising such optical member. The glass is particularly suitable for immersion lithographic systems due to the exceptionally low polarization-induced birefringence values at about 193 nm.

Abstract translation: 公开的内容包括能够用于低于约300nm的光刻中的光学元件的OD掺杂合成石英玻璃。 发现OD掺杂的合成二氧化硅玻璃具有比具有相当浓度的OH的非OD掺杂的石英玻璃具有显着更低的偏振诱导双折射值。 还公开了制造掺杂OD的合成二氧化硅玻璃，包含这种玻璃的光学构件以及包括这种光学构件的光刻系统的方法。 由于在约193nm处极度低的偏振诱发双折射值，该玻璃特别适用于浸没式光刻系统。

公开(公告)号：US20080053150A1

公开(公告)日：2008-03-06

申请号：US11891984

申请日：2007-08-14

Applicant: Lisa Anne Moore ,  Charlene Marie Smith

Inventor： Lisa Anne Moore ,  Charlene Marie Smith

IPC: C03B19/00 ,  C03C3/04

CPC classification number: C03B19/1461 ,  C03B19/12 ,  C03B19/14 ,  C03B19/1453 ,  C03B2201/07 ,  C03B2201/075 ,  C03B2201/12 ,  C03B2201/21 ,  C03B2201/23 ,  C03C3/061 ,  C03C2201/11 ,  C03C2201/12 ,  C03C2201/21 ,  C03C2201/22 ,  C03C2201/40 ,  C03C2201/50 ,  Y02P40/57

Abstract: An F-doped silica glass, a process for making the glass, an optical member comprising the glass, and an optical system comprising such optical member. The glass material comprises 0.1-5000 ppm by weight of fluorine. The glass material according to certain embodiments of the present invention has low polarization-induced birefringence, low LIWFD and low induced absorption at 193 nm.

Abstract translation: F掺杂石英玻璃，制造玻璃的方法，包括玻璃的光学构件和包括这种光学构件的光学系统。 玻璃材料包含0.1-5000ppm重量的氟。 根据本发明的某些实施方案的玻璃材料在193nm处具有低偏振诱发双折射，低LIWFD和低诱导吸收。

公开(公告)号：US20070066477A1

公开(公告)日：2007-03-22

申请号：US11521683

申请日：2006-09-15

Applicant: Brian Harper ,  Kenneth Hrdina ,  John LaSala

Inventor： Brian Harper ,  Kenneth Hrdina ,  John LaSala

IPC: C03B19/06 ,  C03C3/06 ,  C03B32/00

CPC classification number: C03C3/06 ,  C03B19/1453 ,  C03B32/00 ,  C03B2201/07 ,  C03B2201/075 ,  C03B2201/21 ,  C03B2201/23 ,  C03C2201/21 ,  C03C2201/23 ,  C03C2203/54 ,  G03F7/708 ,  Y10S501/905

Abstract: Disclosed are methods for hydrogen loading silica glass and silica glass comprising loaded H2. The methods can lead to H2 gradient in the glass material. Alternatively, the method may involve the use of varying H2 partial pressure of H2 in the atmosphere. Both can result in expedited hydrogen loading process.

Abstract translation: 公开了用于氢气加载石英玻璃和包含加载H 2 N 2的二氧化硅玻璃的方法。 这些方法可导致玻璃材料中的H 2 2梯度。 或者，该方法可以涉及在气氛中使用H 2 H 2 H 2 H 2分压的变化。 两者都可以产生加速氢气加载过程。

公开(公告)号：US07184636B2

公开(公告)日：2007-02-27

申请号：US11074886

申请日：2005-03-07

Applicant: A. Joseph Antos ,  Dana C. Bookbinder ,  Richard M. Fiacco ,  Kevin B. Sparks

Inventor： A. Joseph Antos ,  Dana C. Bookbinder ,  Richard M. Fiacco ,  Kevin B. Sparks

IPC: G02B6/02 ,  C03B37/018 ,  C02C13/04

CPC classification number: G02B6/03694 ,  C03B37/01446 ,  C03B37/01853 ,  C03B2201/07 ,  C03B2201/10 ,  C03B2201/12 ,  C03B2201/22 ,  C03B2201/23 ,  C03B2201/31 ,  C03B2203/22 ,  C03C13/045 ,  C03C13/047 ,  C03C2201/22 ,  G02B6/02 ,  G02B6/03622 ,  G02B6/2835 ,  Y02P40/57

Abstract: A method of manufacturing a glassy optical preform is disclosed that includes providing a preform having a silica soot layer and then sintering the soot layer into a glassy layer, and water is selectively added to the preform by exposing the soot layer to a gaseous water-containing atmosphere during the sintering step. The preform is controllably doped with water.

Abstract translation: 公开了一种制造玻璃状光学预型件的方法，其包括提供具有二氧化硅烟灰层的预制件，然后将烟灰层烧结成玻璃状层，并通过将烟灰层暴露于含气体的含水层 烧结过程中的气氛。 预制件可控制地掺入水中。

公开(公告)号：US07155098B2

公开(公告)日：2006-12-26

申请号：US10502455

申请日：2003-08-20

Applicant: Ki-Wan Jang ,  Lae-Hyuk Park ,  Chan-Joo Lee

Inventor： Ki-Wan Jang ,  Lae-Hyuk Park ,  Chan-Joo Lee

IPC: G02B6/02

CPC classification number: C03B37/01853 ,  C03B2201/07 ,  C03B2201/075 ,  C03B2201/28 ,  C03B2201/31 ,  G02B6/02

Abstract: Disclosed is a method of manufacturing an optical fiber perform using MCVD including dehydration and dechlorination, which executes the following process repeatedly with changing the composition of soot generation gas according to the refractive index profile, the process including the steps of: forming a soot layer having pores on an inner wall of a deposition tube at a temperature lower than the soot sintering temperature with putting soot generation gas and oxygen gas into the rotating deposition tube; removing hydroxyl groups with keeping the pores by putting dehydration gas into the deposition tube; removing chlorine impurities existing in the soot layer with keeping the pores by putting dehydration gas into the deposition tube; and sintering the soot layer by heating the deposition tube at a temperature over the soot sintering temperature.

Abstract translation: 本发明公开了一种使用包括脱水和脱氯在内的MCVD进行的光纤的制造方法，其通过根据折射率分布改变烟灰发生气体的组成而重复地执行以下处理，该方法包括以下步骤：形成具有 在低于烟灰烧结温度的温度下在沉积管的内壁上的孔，将烟灰产生气体和氧气放入旋转沉积管中; 通过将脱水气体放入沉积管中，保持孔隙去除羟基; 通过将脱水气体放入沉积管中来除去存在于烟灰层中的氯杂质，同时保持孔; 并且通过在超过烟灰烧结温度的温度下加热沉积管来烧结烟灰层。

公开(公告)号：US07082790B2

公开(公告)日：2006-08-01

申请号：US10310279

申请日：2002-12-05

Applicant: Bodo Kühn ,  Bruno Uebbing ,  Martin Trommer ,  Stefan Ochs ,  Gero Fischer ,  Ulla Holst

Inventor： Bodo Kühn ,  Bruno Uebbing ,  Martin Trommer ,  Stefan Ochs ,  Gero Fischer ,  Ulla Holst

IPC: C03B8/04

CPC classification number: C03B19/1469 ,  C03B19/1415 ,  C03B19/1453 ,  C03B2201/07 ,  C03B2201/21 ,  C03B2201/23 ,  C03C3/06 ,  C03C4/0071 ,  C03C4/0085 ,  C03C2201/21 ,  C03C2201/23 ,  C03C2203/40 ,  C03C2203/52 ,  C03C2203/54 ,  Y02P40/57

Abstract: The present invention relates to a quartz glass blank for an optical component for transmission of ultraviolet radiation of a wavelength of 250 nm or shorter, and to a use of the quartz glass blank in microlithography in combination with ultraviolet radiation of a wavelength of 250 nm or shorter. Moreover, the invention relates to a procedure for manufacture of the quartz glass blank. A quartz glass blank of the described type should show little induced absorption and be optimized with respect to compaction and decompaction. The quartz glass blank according to the invention is characterized by the following properties: a glass structure essentially free of oxygen defect sites, an H2-content in the range of 0.1×1016 molecules/cm3 to 4.0×1016 molecules/cm3, an OH-content in the range of 125 wt-ppm to 450 wt-ppm, an SiH group-content of less than 5×1016 molecules/cm3, a refractive index inhomogeneity, Δn, of less than 2 ppm, and a stress birefringence of less than 2 nm/cm. In the use according to the invention, the quartz glass blank complies with dimensioning rules (2), (3), and (4) in terms of its OH-content, minimal and maximal hydrogen contents, COH, CH2min, and CH2max, respectively, with P being the pulse number and ε being the energy density: COH [wt-ppm]=1,700×ε[mJ/cm2]0.4±50,  (2) CH2min [molecules/cm3]=1×106ε2 P,  (3) CH2max [molecules/cm3]=2×1018ε.  (4) The procedure according to the invention is characterized in that a mixed quartz glass is generated from a first and a second quartz glass by mixing the two quartz glasses.

公开(公告)号：US20060130530A1

公开(公告)日：2006-06-22

申请号：US11019721

申请日：2004-12-21

Applicant: James Anderson ,  Adam Ellison ,  Susan Schiefelbein

Inventor： James Anderson ,  Adam Ellison ,  Susan Schiefelbein

IPC: C03B37/027 ,  C03B32/00

CPC classification number: C03B37/01807 ,  C03B37/01892 ,  C03B2201/03 ,  C03B2201/04 ,  C03B2201/07 ,  C03B2201/075 ,  C03B2201/12 ,  C03B2201/20 ,  C03B2201/28 ,  C03B2201/31 ,  C03B2201/32 ,  C03B2201/50 ,  C03B2201/54 ,  C03B2207/85 ,  C03B2207/90

Abstract: A method of making an optical fiber precursor includes generating vapors from an alkali metal source comprising compound containing oxygen and one or more alkali metals and applying the vapors to a surface of a glass article comprising silica at a temperature that promotes diffusion of the alkali metal into the surface of the glass article. An optical fiber has a core comprising silica and an alkali metal oxide of the form X2O, where X is selected from the group consisting of K, Na, Li, Cs, and Rb, wherein a concentration of the alkali metal oxide along a length of the core is uniform.

Abstract translation: 制造光纤前体的方法包括从包含氧和一种或多种碱金属的化合物的碱金属源生成蒸气，并且在促进碱金属扩散的温度下将蒸气施加到包含二氧化硅的玻璃制品的表面 玻璃制品的表面。 光纤具有包含二氧化硅和X 2 O 2形式的碱金属氧化物的核，其中X选自K，Na，Li，Cs和Rb，其中浓度 的碱金属氧化物沿核心的长度是均匀的。