公开(公告)号：KR1020090052835A

公开(公告)日：2009-05-26

申请号：KR1020087029718

申请日：2007-07-26

Applicant: 아사히 가라스 가부시키가이샤

Inventor： 이쿠타요시아키 ,  기쿠가와신야

IPC: C03B19/14 ,  C03C3/06

CPC classification number: C03B19/1453 ,  C03B2201/03 ,  C03B2201/12 ,  C03C3/06 ,  C03C2201/11 ,  C03C2201/12 ,  C03C2201/23 ,  Y10T428/166 ,  Y10T428/249969 ,  Y10T428/252

Abstract: 표면에 미세한 요철 패턴을 갖는 기재에 있어서, 석영 유리 기재의 수직방향으로 요철 패턴의 치수는 고정확도를 가지고 전체 기재 표면에 걸쳐서 균일하도록 조절된다. 석영 유리 기재는 최대 40 ℃ 의 가상 온도 분포와 400 ppm 미만의 할로겐 농도를 갖거나 최대 40 ℃ 의 가상 온도 분포와 적어도 400 ppm 의 할로겐 농도와 최대 400 ppm 의 할로겐 농도 분포를 갖도록 제조되었으며, 석영 유리 기재의 표면의 에칭 속도를 균일하게 하고, 석영 유리 기재의 수직 방향으로 요철 패턴의 치수는 양호한 정확도로 전체 기재 표면에 걸쳐 균일하도록 제어된다.
요철 패턴, 석영 유리 기재.

公开(公告)号：KR1020080107300A

公开(公告)日：2008-12-10

申请号：KR1020080052980

申请日：2008-06-05

Applicant: 신에쓰 가가꾸 고교 가부시끼가이샤

Inventor： 마이다,시게루 ,  오쯔까,히사또시

IPC: C03C8/12

CPC classification number: C03B19/1423 ,  B82Y10/00 ,  B82Y40/00 ,  C03B19/1453 ,  C03B2201/20 ,  C03B2201/23 ,  C03B2201/42 ,  C03C3/06 ,  C03C2201/11 ,  C03C2201/23 ,  G03F7/0002

Abstract: Titania doping quartz glass for molding a nanoimprint is provided to have a low internal transmittance distribution and a low thermal expansion coefficient in a mold and to have a low thermal expansibility. Titania doping quartz glass for molding a nanoimprint has an internal transmittance distribution to an ultraviolet ray of a wavelength 365 nm less than 10% and contains titania having 5-10 mass%. A concentration distribution of the titania is 3 mass% or less and includes no occluded materials. A concentration of chlorine is 500 ppm or less.

Abstract translation: 提供用于模塑纳米压印的二氧化钛掺杂石英玻璃以在模具中具有低内部透射率分布和低热膨胀系数并具有低热膨胀性。 用于模塑纳米压印的二氧化钛掺杂石英玻璃具有小于10％的波长365nm的紫外线的内部透射率分布，并且包含具有5-10质量％的二氧化钛。 二氧化钛的浓度分布为3质量％以下，不含有堵塞材料。 氯的浓度为500ppm以下。

公开(公告)号：KR1020070061414A

公开(公告)日：2007-06-13

申请号：KR1020060123770

申请日：2006-12-07

Applicant: 신에쓰 가가꾸 고교 가부시끼가이샤

Inventor： 마이다,시게루 ,  야마다,모또유끼

IPC: C03C17/00 ,  C03C17/06

CPC classification number: C03B19/1407 ,  B82Y10/00 ,  B82Y40/00 ,  C03B19/1415 ,  C03B19/1446 ,  C03B19/1453 ,  C03B19/1484 ,  C03B2201/42 ,  C03C3/06 ,  C03C2201/11 ,  C03C2201/21 ,  C03C2201/23 ,  C03C2201/42 ,  G03F1/24 ,  G03F1/60 ,  G21K2201/067

Abstract: Titania doped quartz glass for EUV lithographic material is provided to have high homogeneity sufficient to endow excellent surface precision to the lithographic material, and to make EUV lithographic material with planarity or thermal expansion property by comprising titania with desired content and defining specific apparent permeability of the glass. The titania doped quartz glass includes 3-12wt.% of titania with concentration gradient of less than 0.01wt.% /micron. The quartz glass has more than 30% of apparent permeability at 440nm in case thickness of the glass is 6.35mm, and also double refraction of less than 20nm/cm. The quartz glass has average line thermal expansion coefficient of -30 to +30ppb/deg.C at 10-30deg.C, distribution of OH group concentrations less than 400ppm and chlorine concentration of 1-500ppm. The quartz glass does not produce crystalline materials by annealing process at 700deg.C.

Abstract translation: 提供用于EUV平版印刷材料的二氧化钛掺杂石英玻璃以具有足够高的均匀性以赋予平版印刷材料优异的表面精度，并且通过包含具有期望含量的二氧化钛并且定义具有所需含量的特定表观渗透性来制备具有平面性或热膨胀性质的EUV平版印刷材料 玻璃。 掺杂二氧化钛的石英玻璃包括3-12重量％的浓度梯度小于0.01重量％/微米的二氧化钛。 在玻璃厚度为6.35mm的情况下，石英玻璃在440nm处具有超过30％的表观渗透率，并且双折射小于20nm / cm。 石英玻璃的平均线热膨胀系数为30〜30ppb /℃，10-30℃，OH基浓度分布小于400ppm，氯浓度为1-500ppm。 石英玻璃在700℃退火过程中不会产生结晶材料。

公开(公告)号：KR100653861B1

公开(公告)日：2006-12-05

申请号：KR1020057007709

申请日：2003-11-28

Applicant: 신에쯔 세끼에이 가부시키가이샤

Inventor： 사토타쯔히로 ,  카이토타카히로 ,  후지노키아키라 ,  카토토시유키 ,  세가와토흐루 ,  요시다노부마사

IPC: C03B20/00 ,  C03B8/04 ,  C03C3/06

CPC classification number: C03C3/06 ,  C03B19/1453 ,  C03B2201/03 ,  C03B2201/04 ,  C03B2201/07 ,  C03B2201/075 ,  C03B2201/20 ,  C03B2201/24 ,  C03C2201/02 ,  C03C2201/11 ,  C03C2201/23 ,  C03C2201/24 ,  C03C2201/26

Abstract: 첫 번째로, 불순물이 적고 천연 석영 유리와 동등 이상의 고온 점도 특성을 가지고, 고온 환경하에서도 변형하기 어려운 합성 석영 유리의 제조 방법, 특히 발포가 없고 치밀한 고내열성 합성 석영 유리의 제조 방법을 제공한다.
두 번째로, 본 발명의 제조 방법에 의하여 용이하게 얻어지는 고내열성 합성 석영 유리체, 특히 발포가 없고 치밀하며, 적외선 흡수율 및 방출율이 높고, 또 알칼리금속 확산 방지 효과가 대단히 높은 투명 또는 흑색 유리체를 제공한다.
245nm의 흡수 계수가 0.05cm
-1 이상인 고내열성 석영 유리체를 제조하는 방법으로, 실리카 다공질체를 환원 처리한 후, 소성해서 치밀한 유리체로 하도록 했다.
고내열성 합성 석영 유리, 실리카 다공질체, 환원 처리, 치밀한 유리체, 발포, 고온 점도 특성, 석영 유리 지그, 투명 석영 유리, 흑색 석영 유리, 실라잔, 휘발성 규소화합물

公开(公告)号：US20190062193A1

公开(公告)日：2019-02-28

申请号：US16061929

申请日：2016-12-16

Applicant: Heraeus Quarzglas GmbH & Co. KG

Inventor： Matthias OTTER ,  Walter LEHMANN ,  Michael HÜNERMANN ,  Nils Christian NIELSEN ,  Nigel Robert WHIPPEY ,  Boris GROMANN ,  Abdoul-Gafar KPEBANE ,  Matthias SÖHN

IPC: C03B20/00 ,  C03B17/04 ,  C03B37/012 ,  C03B37/027 ,  C03C3/06 ,  C03C1/02

CPC classification number: C03B20/00 ,  C03B17/04 ,  C03B19/106 ,  C03B19/1095 ,  C03B37/01211 ,  C03B37/027 ,  C03B2201/04 ,  C03C1/022 ,  C03C1/026 ,  C03C3/06 ,  C03C12/00 ,  C03C2201/02 ,  C03C2201/11 ,  C03C2201/23 ,  C03C2201/26 ,  C03C2201/32 ,  C03C2201/40 ,  C03C2201/54 ,  C03C2203/10 ,  C03C2203/40 ,  C03C2203/44 ,  C03C2203/50

Abstract: The invention relates to a process for the preparation of a quartz glass body comprising the process steps i.) Providing a silicon dioxide granulate, wherein the silicon dioxide granulate was made from pyrogenic silicon dioxide powder and the silicon dioxide granulate has a BET surface area in a range from 20 to 40 m2/g, ii.) Making a glass melt out of silicon dioxide granulate in an oven and iii.) Making a quartz glass body out of at least part of the glass melt, wherein the oven has at least a first and a further chamber connected to one another via a passage, wherein the temperature in the first chamber is lower than the temperature in the further chambers. The invention further relates to a quartz glass body which is obtainable by this process. The invention further relates to a light guide, an illuminant and a formed body, which are each obtainable by further processing of the quartz glass body.

公开(公告)号：US20180251397A1

公开(公告)日：2018-09-06

申请号：US15886982

申请日：2018-02-02

Applicant: OFS Fitel, LLC

Inventor： Man F. Yan ,  Peter I. Borel ,  Tommy Geisler ,  Rasmus V.S Jensen ,  Ole A. Levring ,  Jorgen Ostgaard Olsen ,  David W. Peckham ,  Dennis J. Trevor ,  Patrick W. Wisk ,  Benyuan Zhu

IPC: C03C13/04 ,  G02B6/036 ,  C03B37/012 ,  C03B37/027 ,  C03C4/10 ,  C03C3/06

CPC classification number: C03C13/046 ,  C03B37/01208 ,  C03B37/01853 ,  C03B37/027 ,  C03B2201/07 ,  C03B2201/08 ,  C03B2201/12 ,  C03B2201/20 ,  C03B2201/28 ,  C03B2201/50 ,  C03B2203/223 ,  C03B2203/23 ,  C03C3/06 ,  C03C4/10 ,  C03C13/045 ,  C03C2201/11 ,  C03C2201/12 ,  C03C2201/28 ,  C03C2201/50 ,  G02B6/03627 ,  G02B6/0365 ,  Y02P40/57

Abstract: An optical fiber has a core region that is doped with one or more viscosity-reducing dopants in respective amounts that are configured, such that, in a Raman spectrum with a frequency shift of approximately 600 cm−1, the fiber has a nanoscale structure having an integrated D2 line defect intensity of less than 0.025. Alternatively, the core region is doped with one or more viscosity-reducing dopants in respective amounts that are configured such that the fiber has a residual axial compressive stress with a stress magnitude of more than 20 MPa and a stress radial extent between 2 and 7 times the core radius.According to another aspect of the invention a majority of the optical propagation through the fiber is supported by an identified group of fiber regions comprising the core region and one or more adjacent cladding regions. The fiber regions are doped with one or more viscosity-reducing dopants in respective amounts and radial positions that are configured to achieve viscosity matching among the fiber regions in the identified group.

公开(公告)号：US20180057391A1

公开(公告)日：2018-03-01

申请号：US15797061

申请日：2017-10-30

Applicant: Heraeus Quarzglas GmbH & Co. KG

Inventor： Bodo KÜHN

IPC: C03C3/06 ,  G02B1/00 ,  C03B32/02 ,  G02B1/02 ,  C03B32/00 ,  C03B19/14 ,  C03C4/04

CPC classification number: C03C3/06 ,  C03B19/1453 ,  C03B32/00 ,  C03B32/02 ,  C03B2201/07 ,  C03B2201/075 ,  C03B2201/21 ,  C03B2201/23 ,  C03B2201/24 ,  C03C4/04 ,  C03C2201/11 ,  C03C2201/12 ,  C03C2201/21 ,  C03C2201/23 ,  C03C2201/24 ,  C03C2203/54 ,  C03C2204/00 ,  G02B1/00 ,  G02B1/02 ,  Y02P40/57

Abstract: An optical component made of synthetic quartz glass includes a glass structure substantially free of oxygen defect sites and having a hydrogen content of 0.1×1016 to 1.0×1018 molecules/cm3, an SiH group content of less than 2×1017 molecules/cm3, a hydroxyl group content of 0.1 to 100 wt. ppm, and an Active temperature of less than 1070° C. The optical component undergoes a laser-induced change in the refractive index in response to irradiation by a radiation with a wavelength of 193 nm using 5×109 pulses with a pulse width of 125 ns and a respective energy density of 500 μJ/cm2 at a pulse repetition frequency of 2000 Hz. The change totals a first measured value M193 nm when measured using the applied wavelength of 193 nm and a second measured value M633 nm when measured using a measured wavelength of 633 nm. The ratio M193 nm/M633 nm is less than 1.7.

公开(公告)号：US09878943B2

公开(公告)日：2018-01-30

申请号：US15471344

申请日：2017-03-28

Applicant: Corning Incorporated

Inventor： Dana Craig Bookbinder ,  Robert Brett Desorcie ,  Hazel Benton Matthews, III ,  Pushkar Tandon

IPC: G02B6/036 ,  C03C25/66 ,  C03C25/10

CPC classification number: C03C25/66 ,  C03B37/01205 ,  C03B37/01446 ,  C03B37/0146 ,  C03B37/027 ,  C03B2201/10 ,  C03B2201/12 ,  C03B2201/20 ,  C03B2201/22 ,  C03B2201/31 ,  C03B2201/32 ,  C03B2201/34 ,  C03B2201/42 ,  C03B2203/23 ,  C03B2203/24 ,  C03C3/06 ,  C03C13/045 ,  C03C25/1061 ,  C03C25/1068 ,  C03C2201/11 ,  C03C2201/22 ,  C03C2201/31 ,  C03C2203/54 ,  G02B6/02 ,  G02B6/021 ,  G02B6/03627 ,  G02B6/0365 ,  Y02P40/57

Abstract: The present disclosure is directed to a method of making an optical fiber with improved bend performance, the optical fiber having a core and at least one cladding layer, and a chlorine content in the in the last layer of the at least one cladding layer that is greater than 500 ppm by weight. The fiber is prepared using a mixture of a carrier gas, a gaseous chlorine source material and a gaseous reducing agent during the sintering of the last or outermost layer of the at least one cladding layer. The inclusion of the reducing gas into a mixture of the carrier gas and gaseous chlorine material reduces oxygen-rich defects that results in at least a 20% reduction in TTP during hydrogen aging testing.

公开(公告)号：US09817184B2

公开(公告)日：2017-11-14

申请号：US15290105

申请日：2016-10-11

Applicant: SUMITOMO ELECTRIC INDUSTRIES, LTD.

Inventor： Yoshiaki Tamura ,  Tetsuya Haruna ,  Masaaki Hirano ,  Hirotaka Sakuma

IPC: G02B6/02 ,  G02B6/036 ,  C03C13/04

CPC classification number: G02B6/03694 ,  C03C13/045 ,  C03C13/046 ,  C03C2201/11 ,  C03C2201/12 ,  C03C2201/50 ,  C03C2201/54 ,  C03C2213/00 ,  G02B6/03611

Abstract: An optical fiber having a reduced attenuation includes a silica glass core and a silica glass cladding. The silica glass core has substantially no germanium and includes a first core and a second core. The second core encloses the first core, the refractive index of the second core is larger than the refractive index of the first core, and the average value of halogen concentration of the second core is 5000 ppm or more. The silica glass cladding surrounds the second core and contains substantially no germanium. The refractive index of the cladding is smaller than the refractive index of the first core.

公开(公告)号：US20170205574A1

公开(公告)日：2017-07-20

申请号：US15314272

申请日：2015-05-21

Applicant: Fibercore Limited

Inventor： Christopher EMSLIE ,  Peter MATON ,  Laurence COOPER ,  Aurélien BERGONZO

IPC: G02B6/028 ,  C03B37/025 ,  C03B37/018

CPC classification number: G02B6/02 ,  C03B37/01853 ,  C03B37/01869 ,  C03B37/025 ,  C03B2201/12 ,  C03B2201/20 ,  C03B2201/28 ,  C03B2201/31 ,  C03B2201/32 ,  C03C2201/11 ,  G02B6/028

Abstract: An optical fiber package is described comprising a light transmitting core having a core diameter, a coating layer surrounding the core, and wherein the amount of chlorine in the light transmitting core region is homogeneous and comprises at least 3000 ppm. The fiber package is such that the optical fiber core exhibits a reduction in the hydrogen induced attenuation losses. A method for fabricating the optical fiber package is also disclosed.