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    ION IMPLANTATION APPARATUS
    251.
    发明申请
    ION IMPLANTATION APPARATUS 失效
    离子植入装置

    公开(公告)号：US20110073781A1

    公开(公告)日：2011-03-31

    申请号：US12894229

    申请日：2010-09-30

    Applicant: William H. Leavitt ,  Theodore H. Smick ,  Joseph Daniel Gillespie ,  William H. Park ,  Paul Eide ,  Drew Arnold ,  Geoffrey Ryding

    Inventor： William H. Leavitt ,  Theodore H. Smick ,  Joseph Daniel Gillespie ,  William H. Park ,  Paul Eide ,  Drew Arnold ,  Geoffrey Ryding

    IPC: H01L21/265

    CPC classification number: H01J37/20 ,  H01J37/3171 ,  H01J2237/2001 ,  H01J2237/2007 ,  H01J2237/201

    Abstract: An ion implanter has an implant wheel with a plurality of wafer carriers distributed about a periphery of the wheel. Each wafer carrier has a heat sink for removing heat from a wafer on the carrier during the implant process by thermal contact between the wafer and the heat sink. The wafer carriers have wafer retaining fences formed as cylindrical rollers with axes in the respective wafer support planes of the wafer carriers. The cylindrical surfaces of the rollers provide wafer abutment surfaces which can move transversely to the wafer support surfaces so that no transverse loading is applied by the fences to wafer edges as the wafer is pushed against the heat sink by centrifugal force. The wafer support surfaces comprise layers of elastomeric material and the movable abutment surfaces of the fences allow even thermal coupling with the heat sink over the whole area of the wafer.

    Abstract translation: 离子注入机具有植入轮，其具有围绕轮的周边分布的多个晶片载体。 每个晶片载体具有散热器，用于在植入过程期间通过晶片和散热器之间的热接触从载体上的晶片去除热量。 晶片载体具有晶片保持栅栏，其形成为具有在晶片载体的相应晶片支撑平面中的轴线的圆柱形辊。 辊的圆柱形表面提供可以横向移动到晶片支撑表面的晶片邻接表面，使得当晶片通过离心力推靠在散热片上时，栅栏不会向晶片边缘施加横向负载。 晶片支撑表面包括弹性体材料层，并且栅栏的可移动邻接表面允许在晶片的整个区域上均匀地与散热器的热耦合。

    Protein Layers And Their Use In Electron Microscopy
    252.
    发明申请
    Protein Layers And Their Use In Electron Microscopy 审中-公开
    蛋白质层及其在电子显微镜中的应用

    公开(公告)号：US20100202672A1

    公开(公告)日：2010-08-12

    申请号：US12602248

    申请日：2008-04-23

    Applicant: John Charles Sinclair ,  Martin Edward Mäntylä Noble

    Inventor： John Charles Sinclair ,  Martin Edward Mäntylä Noble

    IPC: G06K9/62 ,  C07K14/00 ,  C40B40/04 ,  C07H21/00 ,  C12N15/74 ,  C12N5/10 ,  G01N23/00 ,  G01N23/207

    CPC classification number: H01J37/222 ,  C07K14/001 ,  C07K14/24 ,  C07K14/36 ,  C07K14/47 ,  C07K14/7151 ,  C07K19/00 ,  C07K2319/00 ,  G01N33/6803 ,  H01J37/20 ,  H01J37/261 ,  H01J37/295 ,  H01J2237/201 ,  H01J2237/2802 ,  H01J2237/2803

    Abstract: Protein layers (1) repeating regularly in two dimensions comprise protein protomers (2) which each comprise at least two monomers (5), (6) genetically fused together. The monomers (5), (6) are monomers of respective oligomer assemblies (3), (4) into which the monomers are assembled to assembly of the protein layer. The first oligomer assembly (3) belongs to a dihedral point group of order O, where O equals (3), (4) or (6) and has a set of O rotational symmetry axes of order (2). The second oligomer assembly (4) has a rotational symmetry axis of order (2). Due to the symmetry of the oligomer assemblies (3), (4), the rotational symmetry axes of each second oligomer assembly (4) is aligned with one of said set of O rotational symmetry axes of a first oligomer assembly (3) with (2) protomers being arranged symmetrically therearound. Thus, an 2-fold fusion between the oligomer assemblies (3), (4) is produced and the arrangements of the rotational symmetry axes of the oligomer assemblies (3), (4) cause the protein layer to repeat regularly. The protein layer has many uses, for example to support molecular entities for biosensing, x-ray crystallography or electron microscopy.

    Abstract translation: 在二维中规则重复的蛋白质层（1）包含蛋白质反转录剂（2），其每个包含至少两个基因融合在一起的单体（5），（6）。 单体（5），（6）是各自的低聚物组件（3），（4）的单体，其中单体组装成蛋白质层的组装。 第一低聚物组件（3）属于阶数为O的二面点组，其中O等于（3），（4）或（6），并具有一组O旋转对称轴（2）。 第二低聚物组件（4）具有顺序（2）的旋转对称轴。 由于低聚物组件（3），（4）的对称性，每个第二低聚物组件（4）的旋转对称轴线与第一低聚物组件（3）的所述一组O旋转对称轴线之一与（ 2）检测器在其周围对称布置。 因此，产生低聚物组件（3），（4）之间的2倍融合，并且低聚物组件（3），（4）的旋转对称轴的布置导致蛋白质层定期重复。 蛋白质层具有许多用途，例如用于支持用于生物传感，X射线晶体学或电子显微镜的分子实体。

    System and methods for preparing microscopy samples
    253.
    发明授权
    System and methods for preparing microscopy samples 有权
    制备显微镜样品的系统和方法

    公开(公告)号：US07663101B2

    公开(公告)日：2010-02-16

    申请号：US11752239

    申请日：2007-05-22

    Applicant: Steven L. Goodman

    Inventor： Steven L. Goodman

    IPC: G01N1/28 ,  H01J37/20

    CPC classification number: G01N1/31 ,  B01L3/0275 ,  B01L3/502 ,  B01L2300/042 ,  B01L2300/0609 ,  B01L2300/0681 ,  G01N1/36 ,  G01N2035/0427 ,  G01N2035/1048 ,  G02B21/34 ,  H01J2237/20 ,  H01J2237/2007 ,  H01J2237/201

    Abstract: A device, method and system for preparing and storing samples for microscopic analysis is disclosed. The device provides a reservoir that can be attached to a displacement pipette thereby filling the reservoir with reagents desired for preparing the samples for microscopic analysis. In some embodiments, the specimen may be contained on a transmission electron microscope (TEM) grid. In other embodiments, the sample may be a light microscope (LM) specimen or a scanning electron microscope (SEM) specimen. In yet another embodiment, the invention provides a method of preparing samples for microscopic examination including a device for preparing TEM grids with, a device for preparing TEM, SEM or LM specimens with and a device for storing both grids and specimens in. In yet another embodiment, the invention provides a system for tracking the preparation, analysis and histological evaluation of multiple samples while also providing for their long term storage.

    Abstract translation: 公开了用于制备和存储用于显微镜分析的样品的装置，方法和系统。 该装置提供一个可以连接到移液移液管的储液器，从而用准备用于显微镜分析的样品所需的试剂填充储存器。 在一些实施例中，样品可以包含在透射电子显微镜（TEM）网格上。 在其他实施方案中，样品可以是光学显微镜（LM）样品或扫描电子显微镜（SEM）样品。 在另一个实施方案中，本发明提供了一种制备用于显微镜检查的样品的方法，包括用于制备TEM格栅的装置，用于制备TEM，SEM或LM样品的装置以及用于储存两个栅格和标本的装置。另外 本发明提供了一种用于跟踪多个样品的制备，分析和组织学评估的系统，同时也提供其长期储存。

    GRID HOLDER FOR STEM ANALYSIS IN A CHARGED PARTICLE INSTRUMENT
    254.
    发明申请
    GRID HOLDER FOR STEM ANALYSIS IN A CHARGED PARTICLE INSTRUMENT 审中-公开
    用于在充电颗粒仪器中进行STEM分析的网格保持器

    公开(公告)号：US20100025580A1

    公开(公告)日：2010-02-04

    申请号：US12533565

    申请日：2009-07-31

    Applicant: Matthew Hammer ,  Gonzalo Amador

    Inventor： Matthew Hammer ,  Gonzalo Amador

    IPC: H01J37/26 ,  H01J37/20

    CPC classification number: H01J37/26 ,  H01J37/20 ,  H01J37/3056 ,  H01J2237/201 ,  H01J2237/20207 ,  H01J2237/206 ,  H01J2237/31745 ,  H01J2237/31749

    Abstract: A grid holder for STEM analysis in a charged-particle instrument has a base jaw and a pivoting jaw. Both jaws have a substantially congruent inclined portion. The base jaw has a flat portion for mounting the holder on the sample carousel of a charged-particle instrument, such as a dual beam FIB. The inclined portion of the jaws is inclined to the flat portion of the holder at an angle A approximately equal to the difference between 90 degrees and the angle between the electron beam and the ion beam in the charged-particle instrument. The inclined portion of the jaws has a pocket for receiving and holding a sample grid. When a sample is mounted on the grid and the grid is held by the grid holder, the sample will be correctly oriented for ion-beam thinning when the sample carousel is horizontal. The thinned sample may then be placed perpendicular to the electron beam for STEM analysis by tilting the sample carousel by the same angle A.

    Abstract translation: 带电粒子仪器中STEM分析的格栅支架具有基座卡爪和枢转卡爪。 两个钳口具有大致一致的倾斜部分。 基座钳具有用于将支架安装在带电粒子仪器（例如双光束FIB）的样品转盘上的平坦部分。 钳口的倾斜部分以大致等于带电粒子仪器中的90度与电子束和离子束之间的角度的角度A相对于保持器的平坦部分倾斜。 夹爪的倾斜部分具有用于接收和保持样品网格的口袋。 当样品安装在栅格上并且格栅由栅格保持器保持时，样品转盘水平时样品将被正确定向以进行离子束变薄。 然后可以将样品转盘垂直于电子束放置以进行STEM分析，将样品转盘倾斜相同的角度A.

    SPECIMAN HOLDER AND SPECIMAN HOLDER MOVEMENT DEVICE
    255.
    发明申请
    SPECIMAN HOLDER AND SPECIMAN HOLDER MOVEMENT DEVICE 有权
    样品架和样品架移动装置

    公开(公告)号：US20100006771A1

    公开(公告)日：2010-01-14

    申请号：US12491363

    申请日：2009-06-25

    Applicant: Hiroya Miyazaki

    Inventor： Hiroya Miyazaki

    IPC: G21K5/10

    CPC classification number: H01J37/20 ,  H01J2237/201 ,  H01J2237/20207 ,  H01J2237/20221 ,  H01J2237/20264

    Abstract: It is an object of the present invention to provide a significantly beneficial specimen holder which allows mounting one or more specimens, for example, a specimen to be examined and a standard adjustment specimen for aberration correction in one specimen holder at the same time, thereby observing each specimens. The present invention is a specimen holder having a specimen holder movement mechanism for driving the specimen holder, wherein the specimen holder movement mechanism makes it possible to move the specimen holder approximately along the longer side of the specimen holder. In a preferred embodiment of the specimen holder according to the present invention, the specimen holder is characterized in that the specimen holder movement mechanism makes it possible to vary an insertion depth of the specimen holder into a tube for holding the specimen holder, with no relation to another specimen holder movement mechanism set for driving the specimen holder approximately along the longer side of the specimen holder.

    Abstract translation: 本发明的目的是提供一种显着有益的样本保持器，其允许在一个样本保持器中同时安装一个或多个样本，例如待检查样本和用于像差校正的标准调整样本，从而观察 每个标本。 本发明是具有用于驱动试样保持器的检体保持架移动机构的检体保持架，其中，检体保持架移动机构能够沿检体保持架的长边大致移动检体保持架。 在本发明的试样保持器的优选实施方式中，试样保持器的特征在于，试样保持架移动机构能够将试样保持器的插入深度变更为保持试样架的管，无关 到另一个样本保持器移动机构，用于大致沿着样本保持器的较长侧驱动样本保持器。

    Particle beam device and method for use in a particle beam device
    256.
    发明申请
    Particle beam device and method for use in a particle beam device 有权
    用于粒子束装置的粒子束装置和方法

    公开(公告)号：US20090014648A1

    公开(公告)日：2009-01-15

    申请号：US12156954

    申请日：2008-06-05

    Applicant: Ulrike Zeile ,  Andreas Schertel

    Inventor： Ulrike Zeile ,  Andreas Schertel

    IPC: G01N23/00

    CPC classification number: H01J37/20 ,  H01J37/26 ,  H01J37/3056 ,  H01J2237/201 ,  H01J2237/20207 ,  H01J2237/206 ,  H01J2237/31745 ,  H01J2237/31749

    Abstract: A particle beam device includes a movable carrier element with at least one receiving element for receiving a specimen and in which the receiving element is situated on the carrier element. In various embodiments, the receiving element may be situated removably on the carrier element and/or multiple receiving elements may be situated on the carrier element in such a way that a movement of the carrier element causes a movement of the multiple receiving elements in the same spatial direction or around the same axis. The carrier element may be movable in three spatial directions situated perpendicular to one another and rotatable around a first axis which is parallel to an optical axis of the particle beam device and around a second axis which is situated perpendicular to the optical axis. A method for using the particle beam device in connection with specimen study and preparation is also disclosed.

    Abstract translation: 粒子束装置包括具有至少一个用于接收样本的接收元件的可移动的载体元件，并且其中接收元件位于载体元件上。 在各种实施例中，接收元件可以可拆卸地位于载体元件上和/或多个接收元件可以位于载体元件上，使得载体元件的移动导致多个接收元件在同一移动中的移动 空间方向或围绕同一轴线。 载体元件可以在三个空间方向上移动，该三个空间方向彼此垂直并可围绕平行于粒子束装置的光轴并围绕垂直于光轴定位的第二轴线的第一轴线旋转。 还公开了与样品研究和制备相关的使用粒子束装置的方法。

    Stage assembly, particle-optical apparatus comprising such a stage assembly, and method of treating a sample in such an apparatus
    257.
    发明授权
    Stage assembly, particle-optical apparatus comprising such a stage assembly, and method of treating a sample in such an apparatus 有权
    舞台组装，包括这种舞台组件的粒子光学装置以及在这种装置中处理样品的方法

    公开(公告)号：US07474419B2

    公开(公告)日：2009-01-06

    申请号：US11590583

    申请日：2006-10-31

    Applicant: Hendrik Gezinus Tappel ,  Ian Johannes Bernardus van Hees ,  Danny Lankers ,  Gerard Nicolaas Anne van Veen ,  Richard Young ,  Lucille Ann Giannuzzi

    Inventor： Hendrik Gezinus Tappel ,  Ian Johannes Bernardus van Hees ,  Danny Lankers ,  Gerard Nicolaas Anne van Veen ,  Richard Young ,  Lucille Ann Giannuzzi

    IPC: G01B11/14

    CPC classification number: H01L21/68 ,  G01R31/2898 ,  H01J37/20 ,  H01J37/3005 ,  H01J37/3056 ,  H01J2237/201 ,  H01J2237/202 ,  H01J2237/20207 ,  H01J2237/20214 ,  H01J2237/20221 ,  H01J2237/20242 ,  H01L21/68764

    Abstract: A particle-optical apparatus comprising: A first source, for generating a first irradiating beam (E) along a first axis (A1); A second source, for generating a second irradiating beam (I) along a second axis (A2) that intersects the first axis at a beam intersection point, the first and second axes (A1, A2) defining a beam plane, A stage assembly (3) for positioning a sample in the vicinity of the beam intersection point, provided with: A sample table (21) to which the sample can be mounted; A set of actuators, arranged so as to effect translation of the sample table along directions substantially parallel to an X-axis perpendicular to the beam plane, a Y-axis parallel to the beam plane, and a Z-axis parallel to the beam plane, said X-axis, Y-axis and Z-axis being mutually orthogonal and passing through the beam intersection point, wherein the set of actuators is further arranged to effect: rotation of the sample table about a rotation axis (RA) substantially parallel to the Z-axis, and; rotation of the sample table about a flip axis (FA) substantially perpendicular to the Z-axis, whereby the flip axis (FA) can itself be rotated about the rotation axis (RA).

    Abstract translation: 一种粒子光学装置，包括：第一源，用于沿第一轴线（A1）产生第一照射光束（E）; 第二源，用于沿着与光束交叉点处的第一轴相交的第二轴线（A2）产生第二辐射光束（I），所述第一和第二轴线（A1，A2）限定光束平面，A级组件 3）用于将样品定位在光束交叉点附近，具有：可以安装样品的样品台（21）; 一组致动器，被布置成使得样品台沿着与垂直于光束平面的X轴基本平行的方向，平行于光束平面的Y轴和平行于光束平面的Z轴实现平移 所述X轴，Y轴和Z轴相互正交并穿过所述光束交叉点，其中所述致动器组进一步布置成实现：所述样品台绕旋转轴线（RA）大致平行于 Z轴，和; 样品台围绕基本上垂直于Z轴的翻转轴（FA）旋转，由此翻转轴（FA）本身可绕旋转轴线（RA）旋转。

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