公开(公告)号：US20170362115A1

公开(公告)日：2017-12-21

申请号：US15529583

申请日：2015-11-24

Applicant: Corning Incorporated

Inventor： Steven Bruce Dawes ,  Douglas Hull Jennings ,  Pushkar Tandon

IPC: C03C3/06 ,  C03B37/014 ,  C03B25/02 ,  C03B19/14 ,  C03B37/012 ,  G02B6/036 ,  C03B37/018

CPC classification number: C03C3/06 ,  C03B19/066 ,  C03B19/1453 ,  C03B19/1461 ,  C03B25/02 ,  C03B37/01282 ,  C03B37/014 ,  C03B37/01446 ,  C03B37/01453 ,  C03B37/01853 ,  C03B2201/075 ,  C03B2201/12 ,  C03B2201/20 ,  C03B2201/42 ,  G02B6/036

Abstract: A method of forming an optical element is provided. The method includes producing silica-based soot particles using chemical vapor deposition, the silica-based soot particles having an average particle size of between about 0.05 μm and about 0.25 μm. The method also includes forming a soot compact from the silica-based soot particles and doping the soot compact with a halogen in a closed system by contacting the silica-based soot compact with a halogencontaining gas in the closed system at a temperature of less than about 1200° C.

公开(公告)号：US09834468B2

公开(公告)日：2017-12-05

申请号：US14769382

申请日：2014-02-19

Applicant: Heraeus Quarzglas GmbH & Co. KG

Inventor： Bodo Kuehn

IPC: F21V9/00 ,  G02B5/02 ,  G02C7/10 ,  G02F1/361 ,  G03B11/00 ,  C03C3/06 ,  C03B19/14 ,  C03B32/00 ,  G02B1/00 ,  G02B1/02 ,  C03B32/02 ,  C03C4/04 ,  C03C15/00

CPC classification number: C03C3/06 ,  C03B19/1453 ,  C03B32/00 ,  C03B32/02 ,  C03B2201/07 ,  C03B2201/075 ,  C03B2201/21 ,  C03B2201/23 ,  C03B2201/24 ,  C03C4/04 ,  C03C2201/11 ,  C03C2201/12 ,  C03C2201/21 ,  C03C2201/23 ,  C03C2201/24 ,  C03C2203/54 ,  C03C2204/00 ,  G02B1/00 ,  G02B1/02 ,  Y02P40/57

Abstract: An optical component made of synthetic quartz glass includes a glass structure substantially free of oxygen defect sites and having a hydrogen content of 0.1×1016 to 1.0×1018 molecules/cm3, an SiH group content of less than 2×1017 molecules/cm3, a hydroxyl group content of 0.1 to 100 wt. ppm, and an Active temperature of less than 1070° C. The optical component undergoes a laser-induced change in the refractive index in response to irradiation by a radiation with a wavelength of 193 nm using 5×109 pulses with a pulse width of 125 ns and a respective energy density of 500 μJ/cm2 at a pulse repetition frequency of 2000 Hz. The change totals a first measured value M193 nm when measured using the applied wavelength of 193 nm and a second measured value M633 nm when measured using a measured wavelength of 633 nm. The ratio M193 nm/M633 nm is less than 1.7.

公开(公告)号：US20170129800A1

公开(公告)日：2017-05-11

申请号：US15412283

申请日：2017-01-23

Applicant: Cornng Incorporated

Inventor： Amanda Lee Billings ,  Dana Craig Bookbinder ,  Robert Brett Desorcie ,  Liam Ruan dePaor ,  Pushkar Tandon ,  Li Yang

IPC: C03B37/014 ,  C03B37/027 ,  G02B6/036 ,  C03B37/012

CPC classification number: C03B37/01446 ,  C03B37/01211 ,  C03B37/01248 ,  C03B37/027 ,  C03B2201/075 ,  C03B2201/20 ,  C03B2203/23 ,  G02B6/02 ,  G02B6/021 ,  G02B6/03627 ,  G02B6/0365 ,  Y02P40/57

Abstract: A method for forming an optical fiber preform and fibers drawn from the preform. The method includes forming a soot cladding monolith, inserting a consolidated core cane into the internal cavity, and processing the resulting core-cladding assembly to form a preform. Processing may include exposing the core-cladding assembly to a drying agent and/or dopant precursor, and sintering the core-cladding assembly in the presence of a reducing agent to densify the soot cladding monolith onto the core cane to form a preform. The preform features low hydroxyl content and low sensitivity to hydrogen. Fibers drawn from the preform exhibit low attenuation losses from absorption by the broad band centered near 1380 nm.

公开(公告)号：US09611169B2

公开(公告)日：2017-04-04

申请号：US14958024

申请日：2015-12-03

Applicant: Corning Incorporated

Inventor： Sezhian Annamalai ,  Carlos Alberto Duran ,  Kenneth Edward Hrdina

IPC: C03C3/06 ,  C03B19/14 ,  C03B25/02 ,  C03C3/112 ,  C03C4/00

CPC classification number: C03C3/06 ,  C03B19/1453 ,  C03B19/1461 ,  C03B25/02 ,  C03B2201/07 ,  C03B2201/075 ,  C03B2201/12 ,  C03B2201/14 ,  C03B2201/23 ,  C03B2201/32 ,  C03B2201/40 ,  C03B2201/42 ,  C03B2201/50 ,  C03B2201/54 ,  C03C3/112 ,  C03C4/00 ,  C03C2201/12 ,  C03C2201/14 ,  C03C2201/32 ,  C03C2201/40 ,  C03C2201/42 ,  C03C2201/50 ,  C03C2201/54 ,  C03C2203/52

Abstract: A doped silica-titania glass article is provided that includes a glass article having a glass composition comprising (i) a silica-titania base glass, (ii) a fluorine dopant, and (iii) a second dopant. The fluorine dopant has a concentration of fluorine of up to 5 wt. % and the second dopant comprises one or more oxides selected from the group consisting of Al, Nb, Ta, B, Na, K, Mg, Ca and Li oxides at a total oxide concentration from 50 ppm to 6 wt. %. Further, the glass article has an expansivity slope of less than 0.5 ppb/K2 at 20° C. The second dopant can be optional. The composition of the glass article may also contain an OH concentration of less than 100 ppm.

公开(公告)号：US09568818B2

公开(公告)日：2017-02-14

申请号：US14862707

申请日：2015-09-23

Applicant: Heraeus Quarzglas GmbH & Co. KG

Inventor： Stefan Ochs ,  Klaus Becker

IPC: C03C3/06 ,  G03F1/22 ,  C03B19/06 ,  C03C3/04 ,  C03B19/14 ,  C03C23/00 ,  C03B32/00 ,  G03F7/00

CPC classification number: G03F1/22 ,  C03B19/06 ,  C03B19/14 ,  C03B19/1453 ,  C03B19/1461 ,  C03B32/00 ,  C03B2201/075 ,  C03B2201/12 ,  C03B2201/23 ,  C03B2201/42 ,  C03C3/04 ,  C03C3/06 ,  C03C21/007 ,  C03C23/00 ,  C03C23/007 ,  C03C2201/12 ,  C03C2201/23 ,  C03C2201/42 ,  C03C2203/40 ,  C03C2203/54 ,  G03F1/24 ,  G03F1/60 ,  G03F7/00

Abstract: A method for producing a silica glass blank co-doped with titanium and fluorine for use in EUV lithography includes (a) producing a TiO2—SiO2 soot body by flame hydrolysis of silicon- and titanium-containing precursor substances, (b) fluorinating the TiO2—SiO2 soot body to form a fluorine-doped TiO2—SiO2 soot body, (c) treating the fluorine-doped TiO2—SiO2 soot body in a water vapor-containing atmosphere to form a conditioned soot body, and (d) vitrifying the conditioned soot body to form the blank. The blank has an internal transmission of at least 60% in the wavelength range of 400 to 700 nm at a sample thickness of 10 mm, a mean OH content in the range of 10 to 100 wt. ppm and a mean fluorine content in the range of 2,500 to 10,000 wt. ppm. Titanium is present in the blank in the oxidation forms Ti3+ and Ti4+.

Abstract translation: 用于EUV光刻的共同掺杂钛和氟的二氧化硅玻璃毛坯的制造方法包括（a）通过含硅和钛的前体物质的火焰水解制备TiO 2 -SiO 2烟炱体，（b）氟化TiO 2 -SiO2烟灰体，形成氟掺杂的TiO 2 -SiO 2烟炱体，（c）在含水蒸气的气氛中处理氟掺杂的TiO 2 -SiO 2烟炱体以形成调节的烟灰体，（d） 烟灰体形成空白。 空白样品厚度为10mm时，在400〜700nm的波长范围内具有至少60％的内透射率，10〜100wt。范围内的平均OH含量。 ppm，平均氟含量在2500至10,000重量％的范围内。 ppm。 钛在氧化形式Ti3 +和Ti4 +中存在于坯料中。

公开(公告)号：US09540271B2

公开(公告)日：2017-01-10

申请号：US14748344

申请日：2015-06-24

Applicant: Heraeus Quarzglas GmbH & Co. KG

Inventor： Klaus Becker ,  Stefan Ochs ,  Stephan Thomas

IPC: C03C3/06 ,  C03B23/04 ,  C03B19/14 ,  G03F1/24 ,  C03B19/06 ,  G03F7/20

CPC classification number: C03B23/04 ,  C03B19/066 ,  C03B19/1453 ,  C03B19/1469 ,  C03B2201/06 ,  C03B2201/075 ,  C03B2201/42 ,  C03C3/06 ,  C03C2201/42 ,  C03C2203/10 ,  C03C2203/50 ,  G03F1/24 ,  G03F7/70316 ,  G03F7/7095

Abstract: A blank made of titanium-doped silica glass for a mirror substrate for use in EUV lithography is provided. The blank includes a surface portion to be provided with a reflective film and having an optically used area (CA) over which a coefficient of thermal expansion (CTE) has a two-dimensional inhomogeneity (dCTE) distribution profile averaged over a thickness of the blank. A maximum inhomogeneity (dCTEmax) of less than 5 ppb/K is defined as a difference between a CTE maximum value and a CTE minimum value. The dCTEmax is at least 0.5 ppb/K. The CA forms a non-circular area having a centroid. The dCTE distribution profile is not rotation-symmetrical and is defined over the CA, such that straight profile sections normalized to a unit length and extending through the centroid of the area yield a dCTE family of curves forming a curve band with a bandwidth of less than 0.5×dCTEmax.

Abstract translation: 提供了一种用于EUV光刻的用于镜面基板的掺钛石英玻璃的空白件。 坯料包括具有反射膜并具有光学用途区域（CA）的表面部分，在该区域上的热膨胀系数（CTE）在坯料的厚度上平均的二维不均匀性（dCTE）分布分布平均 。 小于5ppb / K的最大不均匀性（dCTEmax）定义为CTE最大值和CTE最小值之间的差。 dCTEmax至少为0.5 ppb / K。 CA形成具有质心的非圆形区域。 dCTE分布轮廓不是旋转对称的，并且在CA上定义，使得被归一化为单位长度并延伸穿过该区域的质心的直线剖面产生了形成带宽小于的曲线的dCTE曲线族 0.5×dCTEmax。

公开(公告)号：US20160009589A1

公开(公告)日：2016-01-14

申请号：US14734122

申请日：2015-06-09

Applicant: Corning Incorporated

Inventor： Amanda Lee Billings ,  Dana Craig Bookbinder ,  Robert Brett Desorcie ,  Liam Ruan de Paor ,  Pushkar Tandon ,  Li Yang

IPC: C03B37/014 ,  C03B37/027 ,  G02B6/02 ,  C03B37/012

CPC classification number: C03B37/01446 ,  C03B37/01211 ,  C03B37/01248 ,  C03B37/027 ,  C03B2201/075 ,  C03B2201/20 ,  C03B2203/23 ,  G02B6/02 ,  G02B6/021 ,  G02B6/03627 ,  G02B6/0365 ,  Y02P40/57

Abstract: A method for forming an optical fiber preform and fibers drawn from the preform. The method includes forming a soot cladding monolith, inserting a consolidated core cane into the internal cavity, and processing the resulting core-cladding assembly to form a preform. Processing may include exposing the core-cladding assembly to a drying agent and/or dopant precursor, and sintering the core-cladding assembly in the presence of a reducing agent to densify the soot cladding monolith onto the core cane to form a preform. The preform features low hydroxyl content and low sensitivity to hydrogen. Fibers drawn from the preform exhibit low attenuation losses from absorption by the broad band centered near 1380 nm.

Abstract translation: 一种用于形成光纤预制棒的方法和从所述预成型件拉出的纤维。 该方法包括形成烟灰包覆整料，将固结的芯棒插入内部空腔中，以及处理所得到的芯 - 包层组件以形成预制件。 处理可以包括将芯包层组件暴露于干燥剂和/或掺杂剂前体，以及在还原剂存在下烧结芯 - 包层组件以将烟炱包覆整料致密化到芯棒上以形成预制件。 该预制件具有低羟基含量和对氢的低敏感性。 从预制件中抽出的纤维，由1380nm附近的宽带吸收而产生的衰减损耗低。

公开(公告)号：US20150274577A1

公开(公告)日：2015-10-01

申请号：US14662508

申请日：2015-03-19

Applicant: SUMITOMO ELECTRIC INDUSTRIES, LTD.

Inventor： Tetsuya NAKANISHI ,  Takashi SASAKI

IPC: C03B37/012 ,  G02B6/255 ,  C03B37/025 ,  G02B6/02

CPC classification number: C03B37/01222 ,  C03B37/01231 ,  C03B37/025 ,  C03B37/0253 ,  C03B37/02736 ,  C03B37/02754 ,  C03B2201/04 ,  C03B2201/075 ,  C03B2201/12 ,  C03B2201/20 ,  C03B2203/34 ,  C03B2205/12 ,  G02B6/02042 ,  G02B6/255

Abstract: A manufacturing method according to an embodiment of the invention includes a step of calculating Pj0.1 satisfying (62.6×JOH+1175)×Pj=0.1, where Pj is an optical power ratio at the wavelength 1383 nm of a portion corresponding to a cladding material of an MCF after drawn, and an outer diameter ratio Pcc0.1 of core portions to core rods to obtain Pj0.1. The core rods have an outer diameter 2R0.1 satisfying the condition that a ratio Pcc is not less than the ratio Pcc0.1, and the cladding material has holes formed in a diameter larger by C (not less than 0.15 mm and not more than 1.5 mm) than the outer diameter of the core rods.

Abstract translation: 根据本发明实施例的制造方法包括计算满足（62.6×JOH + 1175）×Pj = 0.1的Pj0.1的步骤，其中Pj是对应于包层的部分的波长1383nm的光功率比 拉伸后的MCF的材料，芯部与芯棒的外径比Pcc0.1获得Pj0.1。 芯棒具有外径2R0.1，满足Pcc比不小于Pcc0.1的比例，并且包层材料具有形成为直径大于C（不小于0.15mm且不大于 1.5mm）比芯棒的外径。

公开(公告)号：US09085481B2

公开(公告)日：2015-07-21

申请号：US13583605

申请日：2011-03-10

Applicant: Ralph Sattmann ,  Jan Vydra ,  Michael Huenermann

Inventor： Ralph Sattmann ,  Jan Vydra ,  Michael Huenermann

IPC: C03B23/047 ,  C03B37/012 ,  C03B37/027 ,  C03C13/04 ,  G02B6/036

CPC classification number: C03B37/02754 ,  C03B37/01211 ,  C03B37/01228 ,  C03B37/01242 ,  C03B37/018 ,  C03B37/027 ,  C03B2201/075 ,  C03B2201/12 ,  C03B2201/20 ,  C03B2201/30 ,  C03B2201/31 ,  C03B2203/22 ,  C03B2203/23 ,  C03B2205/30 ,  C03C13/045 ,  C03C2201/12 ,  G02B6/03633 ,  G02B6/0365 ,  Y10T428/2935

Abstract: Methods for producing an optical fiber by elongating a silica glass blank or a coaxial group of silica glass components, on the basis of which a fiber is obtained that comprises a core zone, an inner jacket zone enclosing the core zone and a ring zone surrounding the inner jacket zone, are known. In order to provide, proceeding from this, a method, a tubular semi-finished product and a group of coaxial components for the cost-effective production of an optical fiber, which is characterized by a high quality of the boundary between the core and jacket and by low bending sensitivity, according to the invention, the silica glass of the ring zone is provided in the form of a ring zone tube made of silica glass having a mean fluorine content of at least 6000 weight ppm and the tube has an inner tube surface and an outer tube surface, wherein via the wall of the ring zone tube, a radial fluorine concentration profile is adjusted which has an inner fluorine depletion layer with a layer thickness of at least 1 μm and no more than 10 μm, in which the fluorine content decreases toward the inner tube surface and is no more than 3000 weight ppm in a region close to the surface which has a thickness of 1 μm.

Abstract translation: 通过使二氧化硅玻璃坯料或同轴的二氧化硅玻璃成分体组织进行拉伸来制造光纤的方法，基于该光纤获得包含芯部区域的纤维，包围芯部区域的内部护套区域和围绕该区域的环形区域 内护套区域，已知。 为了提供一种用于成本有效地生产光纤的方法，管状半成品和一组同轴部件，其特征在于芯和夹套之间的边界质量高 并且通过低弯曲灵敏度，根据本发明，环区的石英玻璃以平均氟含量为至少6000重量ppm的石英玻璃制成的环形管的形式提供，并且管具有内管 表面和外管表面，其中通过环带管的壁，调节径向氟浓度分布，其具有层厚度为至少1μm且不大于10μm的内氟耗尽层，其中 氟含量向内管表面减少，并且在接近表面厚度为1μm的区域中不超过3000重量ppm。

公开(公告)号：US09067814B2

公开(公告)日：2015-06-30

申请号：US12688332

申请日：2010-01-15

Applicant: Shigeru Maida ,  Hisatoshi Otsuka

Inventor： Shigeru Maida ,  Hisatoshi Otsuka

IPC: C03B20/00 ,  C03B19/14

CPC classification number: C03B19/1453 ,  C03B19/1469 ,  C03B2201/075 ,  C03B2201/21 ,  C03B2207/20 ,  Y02P40/57

Abstract: Disclosed is a method of producing a synthetic quartz glass for excimer laser by depositing on a target silica particulates obtained by subjecting a silica raw material to vapor-phase hydrolysis or oxidative decomposition in an oxyhydrogen flame in a vacuum sintering furnace to form a porous silica base material, vitrifying the porous silica base material, and subjecting the vitrified material to hot forming, an annealing treatment and a hydrogen doping treatment, wherein the vitrification of the porous silica base material includes: (a) a step of holding a vacuum pressure at or below 20.0 Pa in a temperature range from 400° C., inclusive, to 900° C., exclusive; (b) a step of holding a vacuum pressure at or below 10.0 Pa in a temperature range from 900° C., inclusive, to 1100° C., exclusive; and (c) a step of holding a vacuum pressure at or below 3.0 Pa in a temperature range from 1100° C. to a transparent-vitrification temperature.

Abstract translation: 公开了一种通过在真空烧结炉中在氧氢火焰中使二氧化硅原料进行气相水解或氧化分解而获得的目标二氧化硅微粒上沉积以制备准分子激光的合成石英玻璃的方法，以形成多孔二氧化硅基质 材料，玻璃化多孔二氧化硅基材，以及对玻璃化材料进行热成型，退火处理和氢掺杂处理，其中多孔二氧化硅基材的玻璃化包括：（a）将真空压力保持在或 低于20.0Pa，温度范围为400℃，至900℃，独占; （b）在900℃以上至1100℃的温度范围内保持真空压力为10.0Pa以下的工序。 和（c）在1100℃的温度范围内保持真空压力等于或低于3.0Pa的步骤至透明玻璃化温度。