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    MICROMACHINED ELECTROSTATIC ACTUATOR WITH AIR GAP
    275.
    发明公开
    MICROMACHINED ELECTROSTATIC ACTUATOR WITH AIR GAP 有权
    具有空气隙的微观力学静电驱动器

    公开(公告)号：EP1183566A1

    公开(公告)日：2002-03-06

    申请号：EP00930822.2

    申请日：2000-05-19

    Applicant: MCNC

    Inventor： GOODWIN-JOHANSSON, Scott, Halden

    IPC: G02B26/02

    CPC classification number: B81C1/00666 ,  B81B2201/032 ,  B81B2203/0118 ,  B81C2201/0167 ,  G02B6/353 ,  G02B6/3566 ,  G02B6/357 ,  G02B6/3594 ,  H01H59/0009 ,  H01H2059/0081

    Abstract: A MEMS (Micro Electro Mechanical System) electrostatic device operated with lower and more predictable operating voltages is provided. An electrostatic actuator, an electrostatic attenuator of electromagnetic radiation, and a method for attenuating electromagnetic radiation are provided. Improved operating voltage characteristics are achieved by defining a non increasing air gap between the substrate electrode and flexible composite electrode within the electrostatic device. A medial portion of a multilayer flexible composite overlying the electromechanical substrate is held in position regardless of the application of electrostatic force, thereby sustaining the defined air gap. The air gap is relatively constant in separation from the underlying microelectronic surface when the medial portion is cantilevered in one embodiment. A further embodiment provides an air gap that decreases to zero when the medial portion approaches and contacts the underlying microelectronic surface. A moveable distal portion of the flexible composite is biased to curl naturally due to differences in thermal coefficients of expansion between the component layers. In response to electrostatic forces, the distal portion moves and thereby alters the distance separating the flexible composite from the underlaying microelectronic surface. Structures and techniques for controlling bias in the medial portion and the resulting air gap are provided. The electrostatic device may be disposed to selectively clear or intercept the path of electromagnetic radiation. Materials used in the attenuator can be selected to pass, reflect, or absorb various types of electromagnetic radiation. A plurality of electromagnetic attenuators may be disposed in an array and selectively activated in subsets.

    Actuators including serpentine arrangements of alternating actuating and opposing segments and related methods
    276.
    发明公开
    Actuators including serpentine arrangements of alternating actuating and opposing segments and related methods 审中-公开
    与蛇形排列和交替地操作和反向段和相关联的致动器的方法

    公开(公告)号：EP1130446A2

    公开(公告)日：2001-09-05

    申请号：EP01300503.8

    申请日：2001-01-19

    Applicant: Cronos Integrated Microsystems, Inc.

    Inventor： Hill, Edward Arthur ,  Dhuler, Vijayakumar Rudrappa

    IPC: G02B26/08 ,  G02B7/182 ,  B81B3/00

    CPC classification number: B81B3/004 ,  B81B2201/032 ,  B81B2203/0109 ,  B81B2203/033 ,  B81B2203/058 ,  G02B7/1821 ,  G02B26/0816 ,  H01H1/0036 ,  H01H61/00 ,  H01H2001/0063 ,  H01H2061/006

    Abstract: A micromechanical system can include a substrate, an actuator, and an actuated element. In particular, the actuator can include a serpentine arrangement of alternating actuating and opposing segments anchored at a first end thereof to the substrate wherein the actuating segments deflect in response to actuation thereof so that a second end of the serpentine arrangement moves relative to the substrate upon deflection of the actuating segments. The actuated element is attached to the second end of the serpentine arrangement so that the actuated element moves relative to the substrate upon deflection of the actuating segments. Related methods and actuators are also discussed.

    Abstract translation: 一种微机械系统可以包括一个基片，致动器的元件，并且在致动。 特别地，致动器可以包括交替的主动和反向在第一端锚固段的盘旋结构其于基板worin主动段响应偏转到致动其如此做了盘旋结构的第二端在移动相对于所述基板 致动段的偏转。 受动元件安装于盘旋结构，以便DASS模致动的第二端部元件在主动段的偏转移动相对于所述基片。 因此相关的方法和致动器进行了讨论。

    Array of thin film actuated mirrors and method for the manufacture thereof
    277.
    发明公开
    Array of thin film actuated mirrors and method for the manufacture thereof 失效
    Matrixanordnung von gesteuertenDünnschichtspiegelnund Verfahren zu deren Herstellung

    公开(公告)号：EP0712021A1

    公开(公告)日：1996-05-15

    申请号：EP95116566.1

    申请日：1995-10-20

    Applicant: DAEWOO ELECTRONICS CO., LTD

    Inventor： Min, Yong-Ki, Video Research Center

    IPC: G02B26/08

    CPC classification number: B81C1/00214 ,  B81B2201/032 ,  B81B2201/042 ,  B81C1/00174 ,  B81C2201/0109 ,  G02B26/0858 ,  H04N9/30

    Abstract: An array (100) of M x N thin film actuated mirrors (101) includes an active matrix (120) having a substrate (122) with an array of M x N connecting terminals (124) and an array of M x N transistors, and an array of M x N actuating structures (111), wherein each of the actuating structures (111) being a bimorph structure, includes a second thin film electrode (165), a lower electrodisplacive member (185), an intermediate thin film electrode (135), an upper electrodisplacive member (175) and a first thin film electrode (155). Furthermore, there is disclosed a method for the manufacture thereof, the method comprising the steps of: providing an active matrix; forming a thin film sacrificial layer on top of the active matrix; removing selectively the thin film sacrificial layer; forming a second thin film electrode layer thereon; removing selectively the second thin film electrode layer; depositing a lower electrodisplacive layer; forming an intermediate electrode layer; depositing an upper electrodisplacive layer; forming a first thin film electrode layer, thereby forming a multiple layered structure; patterning the multiple layered structure into an array of M x N semifinished actuating structures; and removing the thin film sacrificial layer.

    Abstract translation: M×N薄膜致动反射镜（101）的阵列（100）包括有源矩阵（120），有源矩阵（120）具有带有M×N个连接端子（124）和M×N个晶体管阵列的衬底（122） 以及M x N致动结构（111）的阵列，其中每个致动结构（111）是双压电晶片结构，包括第二薄膜电极（165），下部电致位移部件（185），中间薄膜电极 （135），上部电致位移元件（175）和第一薄膜电极（155）。 此外，公开了一种制造方法，该方法包括以下步骤：提供有源矩阵; 在有源矩阵的顶部形成薄膜牺牲层; 选择性地去除薄膜牺牲层; 在其上形成第二薄膜电极层; 选择性地去除第二薄膜电极层; 沉积较低的电致位移层; 形成中间电极层; 沉积上部电致位移层; 形成第一薄膜电极层，从而形成多层结构; 将多层结构图案化成M×N半成品致动结构的阵列; 并去除薄膜牺牲层。

    MEMBRANE BONDING WITH PHOTORESIST
    278.
    发明申请
    MEMBRANE BONDING WITH PHOTORESIST 审中-公开
    膜与胶片粘合

    公开(公告)号：WO2016187481A1

    公开(公告)日：2016-11-24

    申请号：PCT/US2016/033372

    申请日：2016-05-19

    Applicant: UBEAM INC.

    Inventor： JOYCE, Andrew ,  TAFFLER, Sean ,  REYNOLDS, Paul ,  NEMETH, Nicolas Lavada ,  ELHADAD, Adam Stephen ,  FARAJI, Boozarjomehr

    IPC: B06B1/02 ,  H04R17/00 ,  H04R31/00 ,  G01H11/06 ,  G01S7/521

    CPC classification number: B81C1/00182 ,  B81B2201/0271 ,  B81B2201/032 ,  B81B2203/0127 ,  B81C2203/032 ,  F16B11/006 ,  G03F7/00 ,  H01L21/00

    Abstract: Systems and techniques are provided for membrane bonding. A photoresist may be applied to an ultrasonic device. A portion of the photoresist may be removed. A bonding agent may be applied a portion of the photoresist that is not removed. A membrane may be placed on the ultrasonic device such that the membrane is in contact with the ultrasonic device through the bonding agent and the photoresist. The membrane and the ultrasonic device may be placed in between a first flat plate and a second flat plate, such that the second flat plate rests on top of the membrane. Light pressure may be applied to the membrane. The light pressure may be applied by one or more of the weight of the second flat plate and a pressure providing device applying pressure to either or both of the first flat plate and the second flat plate.

    Abstract translation: 提供了用于膜结合的系统和技术。 可以将光致抗蚀剂施加到超声波装置。 光刻胶的一部分可以被去除。 粘合剂可以施加未被除去的光致抗蚀剂的一部分。 膜可以放置在超声波装置上，使得膜通过粘合剂和光致抗蚀剂与超声波装置接触。 膜和超声波装置可以放置在第一平板和第二平板之间，使得第二平板位于膜的顶部上。 可以对膜施加轻微的压力。 轻压力可以通过第二平板的一个或多个重量和对第一平板和第二平板中的任一个或两者施加压力的压力提供装置施加。

    圧電デバイスの製造方法
    279.
    发明申请
    圧電デバイスの製造方法 审中-公开
    制造压电器件的方法

    公开(公告)号：WO2016114173A1

    公开(公告)日：2016-07-21

    申请号：PCT/JP2016/050123

    申请日：2016-01-05

    Applicant: 株式会社村田製作所

    Inventor： 羽田　拓生 ,  山本　観照

    IPC: H01L41/253 ,  B81C1/00 ,  H01L41/09 ,  H01L41/113 ,  H04R17/00 ,  H04R31/00

    CPC classification number: H01L41/09 ,  B81B2201/0271 ,  B81B2201/032 ,  B81C1/00682 ,  H01L41/094 ,  H01L41/0973 ,  H01L41/113 ,  H01L41/253 ,  H01L41/33 ,  H04R17/00 ,  H04R17/10 ,  H04R31/006 ,  H04R2201/003

    Abstract: 　圧電デバイスの製造方法は、基板（４）と、基板（４）によって直接または間接的に支持され、基板（４）より上側に配置されたメンブレン状または梁状である振動部とを備え、前記振動部は圧電体層（６）を含む、圧電デバイスの製造方法であって、前記振動部を形成する工程と、前記振動部の少なくとも一部を含む領域に対して局所的に熱処理を施すことによって前記振動部の共振周波数を調整する工程とを含む。

    Abstract translation: 本发明提供一种压电装置的制造方法，其特征在于，包括基板（4）和由所述基板（4）直接或间接支撑并具有布置在所述基板（4）的上侧的膜形状或梁状的振动部件， 所述振动部件包括压电层（6），其中所述方法包括用于形成所述振动部件的步骤，以及用于对包括所述振动部件的至少一部分的区域进行局部热处理的步骤，以调节所述共振 振动部分的频率。

    POP-UP LAMINATE STRUCTURE INCLUDING MINIATURE OPTICAL COMPONENTS
    280.
    发明申请
    POP-UP LAMINATE STRUCTURE INCLUDING MINIATURE OPTICAL COMPONENTS 审中-公开
    包括微型光学部件的弹出式层压结构

    公开(公告)号：WO2016060778A2

    公开(公告)日：2016-04-21

    申请号：PCT/US2015050366

    申请日：2015-09-16

    Applicant: HARVARD COLLEGE

    Inventor： TEOH ZHI ERN ,  KARPELSON MICHAEL ,  WOOD ROBERT

    IPC: F21V14/02

    CPC classification number: G02B26/085 ,  B81B3/0051 ,  B81B2201/032 ,  B81B2201/047 ,  B81C1/00007 ,  F21V14/02 ,  G02B26/0858 ,  H01L41/0933 ,  H02K15/00 ,  H02K26/00 ,  H02K33/16 ,  H02K99/20

    Abstract: A pop-up laminate structure includes rigid layers, at least one flexible layer, at least one optical component, and an actuator. At least one of the rigid layers defines gaps extending there through to form a plurality of rigid segments separated by the gaps in the rigid layer. The flexible layer is bonded to the rigid segments to form joints for folding. The optical component is mounted to a rigid layer and configured to generate, capture or alter a light beam. The actuator is mounted to at least one of the rigid layers and configured to displace at least one rigid segment that, in turn, displaces the optical component. At least some of the layers are bonded to adjacent layers only at selected locations forming islands of inter-layer bonds to allow expansion of the laminate into an expanded three-dimensional structure.

    Abstract translation: 弹出叠层结构包括刚性层，至少一个柔性层，至少一个光学部件和致动器。 至少一个刚性层限定延伸穿过的间隙，以形成由刚性层中的间隙分开的多个刚性段。 柔性层粘合到刚性部分以形成用于折叠的接缝。 光学部件被安装到刚性层并被配置为产生，捕获或改变光束。 致动器被安装到至少一个刚性层并且被配置为移位至少一个刚性段，该刚性段继而移位光学部件。 至少一些层仅在形成层间结合岛的选定位置处结合到相邻层，以允许层合物膨胀成扩展的三维结构。

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