公开(公告)号：US20110240663A1

公开(公告)日：2011-10-06

申请号：US13131987

申请日：2010-06-25

Applicant: Shigeru Yamagata ,  Tomomi Usui

Inventor： Shigeru Yamagata ,  Tomomi Usui

IPC: B65D6/00 ,  C03B19/09 ,  B32B1/02

CPC classification number: C03B19/095 ,  C03B2201/07 ,  C03B2201/075 ,  C03B2201/32 ,  C30B15/10 ,  C30B29/06 ,  C30B35/002 ,  Y10T428/131 ,  Y10T428/1317 ,  Y10T428/2982

Abstract: A method for producing a silica container having a rotational symmetry is provided. The method includes, forming a preliminarily molded article by feeding a powdered substrate's raw material to an inner wall of an outer frame having aspiration holes with rotating the frame, and forming a silica substrate. The preliminarily molded article is aspirated from an outer peripheral side with controlling a humidity inside the outer frame by ventilating gases present in the outer frame with charging from inside the preliminarily molded article a gas mixture comprised of an O2 gas and an inert gas and made below a prescribed dew-point temperature by dehumidification, and at the same time heated from inside the preliminarily molded article by a discharge-heat melting method with carbon electrodes, thereby making an outer peripheral part of the preliminarily molded article to a sintered body while an inner peripheral part to a fused glass body.

Abstract translation: 提供了具有旋转对称性的二氧化硅容器的制造方法。 该方法包括：通过将粉末状基材的原料供给到具有旋转框架的抽吸孔的外框架的内壁，形成二氧化硅基板来形成预成型品。 从外周侧抽吸预成型品，通过从外部框架内部充填从O 2气体和惰性气体构成的气体混合物从外部框架内的气体通风来控制外框内的湿度， 通过除湿规定的露点温度，同时用碳电极通过放电加热熔融法从预成型体内部加热，由此使预成型品的外周部分成为烧结体，而内部 周边部分为熔融玻璃体。

公开(公告)号：US07994083B2

公开(公告)日：2011-08-09

申请号：US11521683

申请日：2006-09-15

Applicant: Brian Lee Harper ,  Kenneth Edward Hrdina ,  John Edward LaSala

Inventor： Brian Lee Harper ,  Kenneth Edward Hrdina ,  John Edward LaSala

IPC: C03C3/06 ,  C03B19/01 ,  C03B19/09 ,  C03B19/06 ,  C03B19/00

CPC classification number: C03C3/06 ,  C03B19/1453 ,  C03B32/00 ,  C03B2201/07 ,  C03B2201/075 ,  C03B2201/21 ,  C03B2201/23 ,  C03C2201/21 ,  C03C2201/23 ,  C03C2203/54 ,  G03F7/708 ,  Y10S501/905

Abstract: Disclosed are methods for hydrogen loading silica glass and silica glass comprising loaded H2. The methods can lead to H2 gradient in the glass material. Alternatively, the method may involve the use of varying H2 partial pressure of H2 in the atmosphere. Both can result in expedited hydrogen loading process.

Abstract translation: 公开了负载二氧化硅玻璃和含有负载H2的石英玻璃的氢的方法。 这些方法可能导致玻璃材料中的H2梯度。 或者，该方法可以涉及在大气中使用H 2的变化的H 2分压。 两者都可以产生加速氢气加载过程。

公开(公告)号：US20110162413A1

公开(公告)日：2011-07-07

申请号：US13042352

申请日：2011-03-07

Applicant: Tetsuya OTOSAKA

Inventor： Tetsuya OTOSAKA

IPC: C03B37/014

CPC classification number: C03B37/01446 ,  C03B37/01237 ,  C03B37/0124 ,  C03B37/01426 ,  C03B37/0146 ,  C03B37/01466 ,  C03B2201/075 ,  C03B2201/12 ,  C03B2201/31 ,  C03B2203/23 ,  C03B2203/24 ,  C03B2203/26 ,  C03B2207/50

Abstract: Provided is a method of manufacturing an optical fiber base material having at least four layer including a core, a first cladding, a second cladding containing fluorine, and a third cladding. The manufacturing method comprises preparing a starting base material that includes the core and the first cladding; forming a porous intermediate glass base material by supplying glass raw material and oxygen to a high-frequency induction thermal plasma torch to synthesize glass fine particles that are then deposited on a surface of the starting base material; forming an intermediate glass base material that includes the core, the first cladding, and the second cladding containing fluorine, by heating and vitrifying the porous intermediate glass base material in an atmosphere containing fluorine; and providing the third cladding on the outer surface of the intermediate glass base material.

Abstract translation: 提供一种制造具有至少四层的光纤基材的方法，该层包括芯，第一包层，含氟的第二包层和第三包层。 制造方法包括制备包括芯和第一包层的起始基材; 通过向高频感应热等离子体焰炬提供玻璃原料和氧气来合成玻璃微粒，形成多孔中间玻璃基材，然后沉积在起始基材的表面上; 通过在含氟气氛中加热和玻璃化多孔中间玻璃基材，形成包含芯，第一包层和含氟的第二包层的中间玻璃基材; 以及在中间玻璃基材的外表面上设置第三包层。

公开(公告)号：US07964522B2

公开(公告)日：2011-06-21

申请号：US11891984

申请日：2007-08-14

Applicant: Lisa Anne Moore ,  Charlene Marie Smith

Inventor： Lisa Anne Moore ,  Charlene Marie Smith

IPC: C03C3/06 ,  C03C3/112 ,  C03B19/06 ,  C03B15/00 ,  C03B32/00 ,  C03B17/00

CPC classification number: C03B19/1461 ,  C03B19/12 ,  C03B19/14 ,  C03B19/1453 ,  C03B2201/07 ,  C03B2201/075 ,  C03B2201/12 ,  C03B2201/21 ,  C03B2201/23 ,  C03C3/061 ,  C03C2201/11 ,  C03C2201/12 ,  C03C2201/21 ,  C03C2201/22 ,  C03C2201/40 ,  C03C2201/50 ,  Y02P40/57

Abstract: An F-doped silica glass, a process for making the glass, an optical member comprising the glass, and an optical system comprising such optical member. The glass material comprises 0.1-5000 ppm by weight of fluorine. The glass material according to certain embodiments of the present invention has low polarization-induced birefringence, low LIWFD and low induced absorption at 193 nm.

Abstract translation: F掺杂石英玻璃，制造玻璃的方法，包括玻璃的光学构件和包括这种光学构件的光学系统。 玻璃材料包含0.1-5000ppm重量的氟。 根据本发明的某些实施方案的玻璃材料在193nm处具有低偏振诱发双折射，低LIWFD和低诱导吸收。

公开(公告)号：US20100323872A1

公开(公告)日：2010-12-23

申请号：US12869035

申请日：2010-08-26

Applicant: Akio KOIKE ,  Yasutomi IWAHASHI ,  Shinya KIKUGAWA ,  Yuko TACHIBANA

Inventor： Akio KOIKE ,  Yasutomi IWAHASHI ,  Shinya KIKUGAWA ,  Yuko TACHIBANA

IPC: C03C3/04

CPC classification number: C03B19/1453 ,  B82Y10/00 ,  B82Y40/00 ,  C03B2201/075 ,  C03B2201/21 ,  C03B2201/23 ,  C03B2201/42 ,  C03C3/06 ,  C03C3/076 ,  C03C4/0071 ,  C03C4/0085 ,  C03C2201/21 ,  C03C2201/23 ,  C03C2201/42 ,  C03C2203/44 ,  C03C2203/52 ,  C03C2203/54 ,  G03F1/24 ,  G03F7/70958 ,  Y02P40/57

Abstract: The present invention provides a TiO2—SiO2 glass in which when used as an optical member for an exposure tool for EUVL, a thermal expansion coefficient is substantially zero at the time of irradiation with high-EUV energy light, and physical properties of a multilayer can be kept over a long period of time by releasing hydrogen from the glass. The present invention relates to a TiO2-containing silica glass having a fictive temperature of 1,100° C. or lower, a hydrogen molecule concentration of 1×1016 molecules/cm3 or more, and a temperature, at which a linear thermal expansion coefficient is 0 ppb/° C., falling within the range of from 40 to 110° C.

Abstract translation: 本发明提供了一种TiO 2 -SiO 2玻璃，其中当用作用于EUVL的曝光工具的光学部件时，在高EUV能量光照射时热膨胀系数基本上为零，并且多层罐的物理性能 通过从玻璃中释放氢气，保持很长一段时间。 本发明涉及一种假想温度为1100℃或更低，氢分子浓度为1×1016分/厘米3或更高的含钛二氧化硅玻璃以及线性热膨胀系数为0的温度 ppb /℃，在40〜110℃的范围内。

公开(公告)号：US20100260949A1

公开(公告)日：2010-10-14

申请号：US12820001

申请日：2010-06-21

Applicant: Oliver Ganz ,  Ralph Sattmann ,  Jan Vydra

Inventor： Oliver Ganz ,  Ralph Sattmann ,  Jan Vydra

IPC: B32B1/08 ,  C03C15/00

CPC classification number: C03C3/06 ,  C03B19/1453 ,  C03B19/1469 ,  C03B37/0124 ,  C03B37/01892 ,  C03B2201/04 ,  C03B2201/075 ,  Y10T428/13

Abstract: Known synthetic quartz glass tubes for the production of a preform have an inner bore with a surface layer produced without using tools in the molten state and an inner zone. The aim of the invention is to provide a tube which does not release any OH groups to the surroundings. For this purpose, the surface layer (30) has a thickness of 10 μm and an average OH content of not more than 5 ppm by weight and an average surface roughness Ra of not more than 0.1 μm. The inner zone (34) that starts on the surface layer (30) and terminates 10 μm before the outer wall has an average OH content of not more than 0.2 ppm by weight. A simple and inexpensive method for producing a quartz tube of the above type is to continuously draw a tube strand from a softened quartz glass mass in a vertical drawing process. A scavenging gas is circulated through the inner bore of the tube, said gas having a water content of less than 100 ppb per weight. The front end of the tube strand (19) is closed by a flow obstacle (26) that is permeable the scavenging gas and that reduces the amount of scavenging gas (23) flowing through.

Abstract translation: 用于生产预成型件的已知的合成石英玻璃管具有内孔，其具有在不使用处于熔融状态的工具和内部区域的情况下制备的表面层。 本发明的目的是提供一种不会向周围释放任何OH基团的管。 为此，表面层（30）的厚度为10μm，平均OH含量为5重量ppm以下，平均表面粗糙度Ra为0.1μm以下。 在表层（30）上开始并在外壁之前终止10μm的内部区域（34）具有不大于0.2重量ppm的平均OH含量。 用于生产上述类型的石英管的简单和便宜的方法是在垂直拉伸过程中连续地从软化的石英玻璃块抽取管束。 清除气体通过管的内孔循环，所述气体的含水量小于100ppb /重量。 管股（19）的前端由能够吸收清除气体的流动障碍物（26）封闭，并减少流过的清除气体（23）的量。

公开(公告)号：US07749930B2

公开(公告)日：2010-07-06

申请号：US11630405

申请日：2006-03-30

Applicant: Juergen Weber ,  Tobias Pogge ,  Martin Trommer ,  Bodo Kuehn ,  Ulrich Kirst ,  Waltraud Werdecker

Inventor： Juergen Weber ,  Tobias Pogge ,  Martin Trommer ,  Bodo Kuehn ,  Ulrich Kirst ,  Waltraud Werdecker

IPC: C03C3/06 ,  C03C3/04 ,  C03C15/00 ,  C03B19/00 ,  C03B21/00 ,  C03B32/00 ,  C03B25/00

CPC classification number: C03C3/06 ,  C03B19/06 ,  C03B19/09 ,  C03B32/00 ,  C03B2201/07 ,  C03B2201/075 ,  C03B2201/24 ,  C03B2201/32 ,  C03C15/00 ,  C03C19/00 ,  C03C23/0025 ,  C03C23/006 ,  C03C2201/11 ,  C03C2201/12 ,  C03C2201/23 ,  C03C2201/24 ,  C03C2201/32 ,  C03C2201/50 ,  C03C2203/54 ,  C30B25/12 ,  C30B31/14 ,  C30B35/00 ,  Y02P40/57

Abstract: An ideal quartz glass for a wafer jig for use in an environment having an etching effect is distinguished by both high purity and high resistance to dry etching. To indicate a quartz glass that substantially fulfills these requirements, it is suggested according to the invention that the quartz glass is doped with nitrogen at least in a near-surface area, has a mean content of metastable hydroxyl groups of less than 30 wt ppm and that its fictive temperature is below 1250° C. and its viscosity is at least 1013 dPa·s at a temperature of 1200° C. An economic method for producing such a quartz glass comprises the following method steps: melting an SiO2 raw material to obtain a quartz glass blank, the SiO2 raw material or the quartz glass blank being subjected to a dehydration measure, heating the SiO2 raw material or the quartz glass blank to a nitriding temperature in the range between 1050° C. and 1850° C. in an ammonia-containing atmosphere, a temperature treatment by means of which the quartz glass of the quartz glass blank is set to a fictive temperature of 1250° C. or less, and a surface treatment of the quartz glass blank with formation of the quartz glass jig.

Abstract translation: 用于具有蚀刻效果的环境中的晶片夹具的理想石英玻璃的特征在于高纯度和高耐干蚀刻性。 为了表明基本满足这些要求的石英玻璃，根据本发明提出，石英玻璃至少在近表面积中掺杂氮，其平均含量小于30重量ppm， 其虚拟温度低于1250℃，在1200℃的温度下其粘度至少为1013dPa·s。制备这种石英玻璃的经济方法包括以下方法步骤：将SiO 2原料熔化得到 将石英玻璃坯料，SiO 2原料或石英玻璃坯料进行脱水处理，将SiO2原料或石英玻璃坯料加热至1050℃〜1850℃的氮化温度， 含有氨的气氛，将石英玻璃坯料的石英玻璃设定为1250℃以下的假想温度的温度处理，以及格式化的石英玻璃坯料的表面处理 在石英玻璃夹具上。

公开(公告)号：US07524780B2

公开(公告)日：2009-04-28

申请号：US11046435

申请日：2005-01-28

Applicant: Laura J. Ball ,  Bruno P. M. Baney ,  Dana C. Bookbinder ,  Keith L. House ,  Rostislav R. Khrapko ,  Lisa A. Moore ,  Susan L. Schiefelbein

Inventor： Laura J. Ball ,  Bruno P. M. Baney ,  Dana C. Bookbinder ,  Keith L. House ,  Rostislav R. Khrapko ,  Lisa A. Moore ,  Susan L. Schiefelbein

IPC: C03C13/04 ,  C03C3/076 ,  C03C3/06

CPC classification number: C03C3/06 ,  C03B37/01211 ,  C03B37/01228 ,  C03B37/01426 ,  C03B37/01807 ,  C03B37/01861 ,  C03B37/01892 ,  C03B2201/03 ,  C03B2201/04 ,  C03B2201/07 ,  C03B2201/075 ,  C03B2201/12 ,  C03B2201/20 ,  C03B2201/28 ,  C03B2201/31 ,  C03B2201/32 ,  C03B2201/50 ,  C03B2201/54 ,  C03B2203/26 ,  C03B2207/30 ,  C03B2207/90 ,  C03C25/602 ,  C03C25/607 ,  C03C25/68 ,  C03C2201/11 ,  C03C2201/23 ,  C03C2201/50 ,  C03C2203/50 ,  G02B6/02

Abstract: A method of forming an alkali metal oxide-doped optical fiber by diffusing an alkali metal into a surface of a glass article is disclosed. The silica glass article may be in the form of a tube or a rod, or a collection of tubes or rods. The silica glass article containing the alkali metal, and impurities that may have been unintentionally diffused into the glass article, is etched to a depth sufficient to remove the impurities. The silica glass article may be further processed to form a complete optical fiber preform. The preform, when drawn into an optical fiber, exhibits a low attenuation.

Abstract translation: 公开了一种通过将碱金属扩散到玻璃制品的表面中形成掺杂碱金属氧化物的光纤的方法。 石英玻璃制品可以是管或棒的形式，或者是管或棒的集合。 含有碱金属的二氧化硅玻璃制品和可能已经无意地扩散到玻璃制品中的杂质被蚀刻到足以除去杂质的深度。 石英玻璃制品可以进一步加工以形成完整的光纤预型件。 当预成型件被拉入光纤时，表现出低的衰减。

公开(公告)号：US20090004088A1

公开(公告)日：2009-01-01

申请号：US12148338

申请日：2008-04-18

Applicant: Bodo Kuehn ,  Steffen Kaiser ,  Denis Kassube ,  Kerstin Merget

Inventor： Bodo Kuehn ,  Steffen Kaiser ,  Denis Kassube ,  Kerstin Merget

IPC: C01B33/12 ,  C03B25/00

CPC classification number: C03B25/02 ,  C03B19/1453 ,  C03B32/00 ,  C03B2201/075 ,  C03B2201/21 ,  C03C3/06 ,  C03C4/0085 ,  C03C2201/21 ,  C03C2201/23 ,  C03C2203/42 ,  C03C2203/52 ,  Y02P40/57

Abstract: To optimize an optical component of synthetic quartz glass, in the case of which a quartz glass blank is subjected to a multistage annealing treatment, with respect to compaction and central birefringence, the present invention suggests a method comprising the following steps: (a) a first treatment phase during which the quartz glass blank is treated in an upper temperature range between 1130° C. and 1240° C., (b) cooling the quartz glass blank at a first-higher-mean cooling rate to a quenching temperature below 1100° C., a fictive temperature with a high mean value of 1100° C. or more being reached in the quartz glass, (c) a second treatment phase which comprises cooling of the quartz glass blank at a second-lower-mean cooling rate, and in which the quartz glass blank is treated in a lower temperature range between 950° C. and 1100° C. such that a fictive temperature is reached in the quartz glass with a low mean value which is at least 50° C. lower than the high mean value of the fictive temperature according to method step (b).

Abstract translation: 为了优化合成石英玻璃的光学部件，在石英玻璃坯料进行多段退火处理的情况下，关于压实和中心双折射，本发明提出了一种方法，包括以下步骤：（a） 第一处理阶段，其中在1130℃和1240℃之间的较高温度范围内处理石英玻璃坯料，（b）以第一高平均冷却速率将石英玻璃坯料冷却至低于1100℃的淬火温度 在石英玻璃中达到1100℃或更高平均值的假想温度，（c）第二处理阶段，其包括以第二低平均冷却速度冷却石英玻璃坯料 ，其中在950℃至1100℃的较低温度范围内处理石英玻璃坯料，使得石英玻璃中具有低至少50℃的低平均值的假想温度降低 比平均值高 根据方法步骤（b）的假想温度。

公开(公告)号：US20080287279A1

公开(公告)日：2008-11-20

申请号：US12151172

申请日：2008-05-05

Applicant: Dana Craig Bookbinder ,  Richard Michael Fiacco ,  Kenneth Edward Hrdina ,  Rostislav Radievich Khrapko

Inventor： Dana Craig Bookbinder ,  Richard Michael Fiacco ,  Kenneth Edward Hrdina ,  Rostislav Radievich Khrapko

IPC: C03C3/04 ,  C03B29/00

CPC classification number: C03C3/06 ,  C03B19/1453 ,  C03B2201/07 ,  C03B2201/075 ,  C03B2201/12 ,  C03B2201/20 ,  C03B2201/21 ,  C03B2201/22 ,  C03B2201/23 ,  C03B2201/31 ,  C03C2201/22 ,  C03C2201/23 ,  C03C2203/54

Abstract: A fused silica glass and a fused silica article having a combined concentration of at least one of OH and OD of up to about 50 ppm. The fused silica glass is formed by drying a fused silica soot blank or preform in an inert atmosphere containing a drying agent, followed by removal of residual drying agent from the dried soot blank by heating the dried soot blank in an atmosphere comprising an inert gas and of oxygen.

Abstract translation: 熔融石英玻璃和熔融二氧化硅制品，其具有高达约50ppm的OH和OD中的至少一种的组合浓度。 熔融二氧化硅玻璃通过在含有干燥剂的惰性气氛中干燥熔融二氧化硅烟灰坯料或预型体而形成，然后通过在包含惰性气体的气氛中加热干燥的烟灰坯料从干燥的烟灰坯中除去残留的干燥剂， 的氧气。