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    FABRICATION OF ULTRA-SHALLOW CHANNELS FOR MICROFLUIDIC DEVICES AND SYSTEMS
    21.
    发明专利
    FABRICATION OF ULTRA-SHALLOW CHANNELS FOR MICROFLUIDIC DEVICES AND SYSTEMS 未知

    公开(公告)号：AU2003216254A1

    公开(公告)日：2003-09-04

    申请号：AU2003216254

    申请日：2003-02-12

    Applicant: KIONIX INC

    Inventor： MOON JAMES E ,  YOUNG LINCOLN C

    IPC: B01F5/06 ,  B01F13/00 ,  B01J19/00 ,  B01L3/00 ,  B81B1/00 ,  B81C1/00 ,  G01N30/60

    Abstract: A method for etching an ultra-shallow channel includes using an etch process that is selective for one material to etch a different material in order to achieve a very precise channel depth in the different material. Channels as shallow as 10 nm can be fabricated in silicon with precision of 5 nm or better using the method. Stepped channels can be fabricated where each segment is a different depth, with the segments being between 10 nm and 1000 nm in depth. The method is applied to create a fluidic channel which includes a channel substrate to which is bonded a lid substrate to confine fluids to the fluidic channels so fabricated.

    Accelerometer
    22.
    发明专利
    Accelerometer 未知

    公开(公告)号：AU2002353816A1

    公开(公告)日：2003-05-06

    申请号：AU2002353816

    申请日：2002-10-16

    Applicant: KIONIX INC

    Inventor： JOHNSON WENDY JO H ,  MILLER SCOTT A ,  ADAMS SCOTT G

    IPC: G01P9/04 ,  G01P15/125 ,  G01P15/08 ,  H01L29/00

    Abstract: An accelerometer. A silicon wafer is etched to form a fixed portion, a movable portion, and a resilient coupling between, the fixed and movable portions generally arranged in the plane of the wafer, the mass of the movable portion being concentrated on one side of the resilient coupling. One of the fixed and moveable portions of the silicon structure includes a first electrode. The other of the fixed and moveable portions includes a second electrode oriented parallel to the axis of acceleration, and an electrically-conductive layer electrically connected as a third electrode coplanar and mechanically coupled with the second electrode. The second and third electrodes are arranged in capacitive opposition to the first electrode, the capacitance between the first electrode and third electrode increasing as the movable portion moves in a direction along the axis of acceleration relative to the fixed portion and decreasing as the movable portion moves in an opposite direction. A resilient coupling retains the first and third electrodes in capacitive opposition to each other across a capacitance gap while allowing motion of the first electrode relative to the second and third electrodes in response to acceleration along an axis of acceleration perpendicular to the plane of the wafer, and resiliently restores the first electrode to an equilibrium position when the acceleration ceases. The second electrode is in opposition to a majority of the surface area of the first electrode when the electrodes are in the equilibrium position. Capacitance between the first and third electrodes is measured to obtain a measurement of acceleration along the axis.

    具有方均根（ＲＭＳ）的輸出的加速度計
    23.
    发明专利
    具有方均根（ＲＭＳ）的輸出的加速度計 审中-公开
    具有方均根（ＲＭＳ）的输出的加速度计

    公开(公告)号：TW202026643A

    公开(公告)日：2020-07-16

    申请号：TW108140216

    申请日：2019-11-06

    Applicant: 日商羅姆股份有限公司 ,  ROHM CO., LTD. ,  美商凱歐尼克斯公司 ,  KIONIX, INC.

    Inventor： 山謬爾森 布萊恩湯姆士 ,  SAMUELSON, BRIAN THOMAS ,  德肯 理查艾倫 ,  DEKEN, RICHARD ALAN ,  山城洋 ,  YAMASHIRO, YO

    IPC: G01P15/18 ,  G01P15/125

    Abstract: 本文描述了具有RMS輸出的加速度計。例如，示例加速度計可以包括MEMS裝置和ASIC。MEMS裝置包括具有響應於物體加速度而改變的屬性的結構。ASIC至少部分地基於屬性的改變來決定物體的加速度。ASIC包括類比電路系統、ADC和韌體。類比電路系統測量屬性的變化，並生成表示屬性變化的類比信號。ADC將類比信號轉換為數位信號。韌體包括RMS韌體。RMS韌體對數位信號的表示執行RMS計算，以提供表示物體加速度量的RMS值。

    Abstract in simplified Chinese: 本文描述了具有RMS输出的加速度计。例如，示例加速度计可以包括MEMS设备和ASIC。MEMS设备包括具有响应于物体加速度而改变的属性的结构。ASIC至少部分地基于属性的改变来决定物体的加速度。ASIC包括模拟电路系统、ADC和固件。模拟电路系统测量属性的变化，并生成表示属性变化的模拟信号。ADC将模拟信号转换为数码信号。固件包括RMS固件。RMS固件对数码信号的表示运行RMS计算，以提供表示物体加速度量的RMS值。

    使用磁力儀及加速度儀之角速度估計
    27.
    发明专利
    使用磁力儀及加速度儀之角速度估計 审中-公开
    使用磁力仪及加速度仪之角速度估计

    公开(公告)号：TW201428297A

    公开(公告)日：2014-07-16

    申请号：TW102143323

    申请日：2013-11-27

    Applicant: 奇奧尼公司 ,  KIONIX, INC.

    Inventor： 安德森 艾瑞克 ,  ANDERSON, ERIK

    IPC: G01P3/44

    CPC classification number: G01P3/44 ,  G06F17/00

    Abstract: 本發明提供一種用於估計角速度之系統及方法。代替使用呈9軸感測器融合之一陀螺儀，該系統及方法使用一加速度儀及磁力儀來估計一角速度以估計角定向。最終角速度估計由兩個部分地獨立角速度估計構成，一個估計使用僅磁力儀量測且另一估計使用僅加速度儀量測。每一部分角速度估計之不可觀測部分由來自使用加速度儀及磁力儀資料兩者之一第三完整估計之一投影提供。

    Abstract in simplified Chinese: 本发明提供一种用于估计角速度之系统及方法。代替使用呈9轴传感器融合之一陀螺仪，该系统及方法使用一加速度仪及磁力仪来估计一角速度以估计角定向。最终角速度估计由两个部分地独立角速度估计构成，一个估计使用仅磁力仪量测且另一估计使用仅加速度仪量测。每一部分角速度估计之不可观测部分由来自使用加速度仪及磁力仪数据两者之一第三完整估计之一投影提供。

    SYSTEM AND METHOD FOR DETECTION OF FREEFALL WITH SPIN USING TWO TRI-AXIS ACCELEROMETERS
    29.
    发明申请
    SYSTEM AND METHOD FOR DETECTION OF FREEFALL WITH SPIN USING TWO TRI-AXIS ACCELEROMETERS 审中-公开
    使用两个三轴加速度计检测旋转的系统和方法

    公开(公告)号：WO2008121739A8

    公开(公告)日：2010-02-18

    申请号：PCT/US2008058522

    申请日：2008-03-27

    Applicant: KIONIX INC ,  KIM DONG YOON ,  MILLER SCOTT A

    Inventor： KIM DONG YOON ,  MILLER SCOTT A

    IPC: G01P15/18

    CPC classification number: G01P15/0891 ,  G11B19/043

    Abstract: A system (10) and method detect freefall associated with an object that is spinning or tumbling as it falls. Two tri-axis accelerometers (14, 16) provide inputs to an algorithm (28) that detects the freefall of a spinning object that would not otherwise be detected by a conventional freefall detection system, due to the centrifugal and centripetal forces being placed on the falling object as it spins. The system can be used to detect the freefall of portable devices with onboard memory or hard disk drives, allowing the devices to have time to park the read/write head and reduce the potential of losing data that can be damaged by impact. This freefall detection system may be applied to such portable devices as notebook computers, PDAs, MP3 players, digital cameras, mobile phones and even automobiles.

    Abstract translation: 一种系统（10）和方法，用于检测与下降时正在旋转或翻滚的对象相关联的自由落体。 两个三轴加速度计（14,16）为算法（28）提供输入，该算法（28）检测纺丝物体的自由落体，由于离心力和向心力被放置在 坠落的物体，因为它旋转。 该系统可用于检测具有板载内存或硬盘驱动器的便携式设备的自由落体，从而允许设备有时间停放读/写头，并减少丢失可能受到影响而损坏的数据的可能性。 这种自由落体检测系统可以应用于诸如笔记本电脑，PDA，MP3播放器，数码相机，移动电话甚至汽车的便携式设备。

    MICROFLUIDIC MEMBRANE PUMP AND VALVE
    30.
    发明申请
    MICROFLUIDIC MEMBRANE PUMP AND VALVE 审中-公开

    公开(公告)号：WO2007064404A3

    公开(公告)日：2007-06-07

    申请号：PCT/US2006/039135

    申请日：2006-10-03

    Applicant: KIONIX, INC. ,  YOUNG, Lincoln ,  ZHOU, Peng

    Inventor： YOUNG, Lincoln ,  ZHOU, Peng

    IPC: B01L3/00 ,  F04B43/04 ,  B32B27/00 ,  F04B53/10

    Abstract: Plastic microfluidic structures having a substantially rigid diaphragm that actuates between a relaxed state wherein the diaphragm sits against the surface of a substrate and an actuated state wherein the diaphragm is moved away from the substrate. As will be seen from the following description, the microfluidic structures formed with this diaphragm provide easy to manufacture and robust systems, as well readily made components such as valves and pumps.

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