Abstract:
A parallel resonant circuit is realized by stacking first to fourth wiring patterns (MS21,MS22,MS23,MS24) each having at least an inductance element. One of the adjacent first and second wiring patterns is set to a signal input node (Nin) and the other thereof is set to a signal output node (Nout). Then, the signal input node is connected to the signal output node via inductance elements of the first wiring pattern, third wiring pattern, fourth wiring pattern and second wiring pattern in order. By adjacently forming wiring layers of the signal input and output nodes, a capacitance value between the input and output nodes is increased compared to that when they are separated. Also, by increasing the line width of the first and second wiring patterns, the capacitance value can be further increased. Therefore, it is possible to achieve a large capacitance value in a small area and downsizing of the electronic device.
Abstract:
A plurality of floating gates (7) are formed on a principal surface of a semiconductor substrate (1) that constitutes a nonvolatile semiconductor memory device through a first gate dielectric film (4). An auxiliary gate (9) formed on the principal surface of the semiconductor substrate through a third gate dielectric film (6) is formed on one adjacent side of the floating gates (7). A groove is formed on the other adjacent side of the floating gate, and an n-type diffusion layer (3) is formed on a bottom side of the groove. A data line of the nonvolatile semiconductor memory device is constituted by an inversion layer formed on the principal surface of the semiconductor substrate to be opposed to an auxiliary gate by applying desired voltage to the auxiliary gate, and the n-type diffusion layer.
Abstract:
The present invention provides a high frequency amplifier suitable for use in a wireless communication system which performs detection of an output level necessary for feedback control by a current detection system, wherein control sensitivity in an area low in transmit request level is lowered so that an output level can be controlled over the whole control range with satisfactory accuracy. There is provided a high frequency power amplification electric part constituting a wireless communication system, which performs detection of an output level necessary for feedback control of output power by a current detection system, compares the output level detected signal and an output level designation signal and generates a bias voltage for a high frequency power amplifier according to the difference therebetween to thereby control gain, wherein an nth root converter or a logarithm converter is provided between a current detector and a current-voltage converter.
Abstract:
A plurality of floating gates (7) are formed on a principal surface of a semiconductor substrate (1) that constitutes a nonvolatile semiconductor memory device through a first gate dielectric film (4). An auxiliary gate (9) formed on the principal surface of the semiconductor substrate through a third gate dielectric film (6) is formed on one adjacent side of the floating gates (7). A groove is formed on the other adjacent side of the floating gate, and an n-type diffusion layer (3) is formed on a bottom side of the groove. A data line of the nonvolatile semiconductor memory device is constituted by an inversion layer formed on the principal surface of the semiconductor substrate to be opposed to an auxiliary gate by applying desired voltage to the auxiliary gate, and the n-type diffusion layer.
Abstract:
A high dielectric gate insulating film (106) having the structure that a high-nitrogen layer, a low-nitrogen layer, and a high-nitrogen layer are layered in this order from a silicon-substrate (102) side.
Abstract:
The present invention provides a high-quality semiconductor device in which deterioration in transistor characteristics and an increase in interface layer due to a gate insulating film are suppressed, and a method for manufacturing the same. In the present invention, an interface layer, a diffusion suppressing layer and a high dielectric constant insulating film are formed sequentially in this order on one surface of a silicon substrate.
Abstract:
This invention provides a method for forming a semiconductor device, capable of preventing as many impurities as possible, which cause deterioration in film quality, from existing in an gate insulating film. In this invention, a step of forming an insulating film so as to have a thickness in the range of 0.3 to 2 nm and a step of removing impurities from the insulating film are repeated a plurality of times, to form an insulating film having a prescribed thickness.
Abstract:
An atomic layer deposition (ALD) apparatus capable of forming a conformal ultrathin-film layer with enhanced step coverage is disclosed. The apparatus includes an ALD reactor (101) supporting therein a wafer (102), and a main pipe (105) coupled thereto for constant supply of a carrier gas. This pipe (105) has two parallel branch pipes (105a-105b). Raw material sources (106a-106c) are connected by three-way valves (108a-108c) to one branch pipe (105a) through separate pipes (107a-107c), respectively. Similarly, oxidant/reducer sources (109a-109c) are coupled by three-way valves (111a-111c) to the other branch pipe (105b) via independent pipes (110a-110c). ALD works by introducing one reactant gas at a time into the reactor (101) while being combined with the carrier gas. The gas is "chemisorped" onto the wafer surface, creating a monolayer deposited. During the supply of a presently selected material gas from its source (106a) to a corresponding branch pipe (105a), this gas passes through its own pipe (107a) independently of the others. An ALD method is also disclosed.
Abstract:
A portable device having a communication function composed of a plurality of LSIs operated in synchronization with a clock, such as a baseband LSI and a logic LSI such as an application processor, can synchronize the baseband LSI with the logic LSI without lowering the performance of the logic LSI. In a portable device having a communication function composed of a plurality of LSIs operated in synchronization with different clocks of a baseband LSI performing processing of modulating transmitted data and demodulating received data and an application processor performing processing of compressing transmitted data and decompressing received data, the baseband LSI has a function of detecting a frequency drift of the clock signal based on time information for synchronization included in received data and a terminal or an interface for outputting a signal including its own time information to the outside, the application processor has a terminal or an interface for inputting a signal including time information from the outside, and the signal including time information is fed from the baseband LSI to the application processor.