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Patent Agency Ranking
公开(公告)号：KR1020050018319A
公开(公告)日：2005-02-23
申请号：KR1020030055628
申请日：2003-08-12
Applicant: 삼성전자주식회사
Inventor： 최정현
IPC: H01L21/68
Abstract: PURPOSE: A carrier box for transferring a wafer is provided to easily take out the carrier including a plurality of wafers by preventing the carrier from colliding with a carrier box in mounting or taking out the carrier and avoid contamination of a wafer caused by dropped particles. CONSTITUTION: A wafer mounting carrier(20) is horizontally mounted or taken out through the open front surface of a box body(22). A door(24) is connected to the open front surface of the box body to selectively open/shut the box body. A guide part(30a,30b) guides the sliding position of the carrier when the door is opened, formed in the bottom of the box body. A fixing part(32) selectively maintains the shut state of the door with respect to the box body, installed in the periphery of the edge of the open portion of the box body.
Abstract translation: 目的：提供用于传送晶片的载体盒，以便通过防止载体在安装或取出载体时与载体碰撞而容易地取出包括多个晶片的载体，并避免由滴下的颗粒引起的晶片污染。 构成：晶片安装架（20）通过箱体（22）的敞开的前表面水平安装或取出。 门（24）连接到箱体的敞开的前表面以选择性地打开/关闭箱体。 引导部件（30a，30b）在门打开时引导托架的滑动位置，形成在箱体的底部。 固定部分（32）选择性地保持门相对于盒体的关闭状态，该关闭状态安装在箱体的开口部分的边缘的周边。
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公开(公告)号：KR1020040038998A
公开(公告)日：2004-05-10
申请号：KR1020020066613
申请日：2002-10-30
Applicant: 삼성전자주식회사
IPC: H01L21/66
CPC classification number: H01L21/67253 , G01N21/9503 , G01N21/95607 , G01N2021/0162 , G01N2021/0187 , G01N2021/1736 , G01N2021/1772 , G01N2021/8411 , G01N2021/8896 , G01N2021/95615 , G01N2201/103 , G01N2201/1087
Abstract: PURPOSE: A substrate inspecting apparatus is provided to be capable of carrying out many kinds of inspecting processes. CONSTITUTION: A substrate inspecting apparatus(100) is provided with the first stage(160) for supporting a substrate, the first image capture part(110) for capturing the first image of the substrate edge portion, the second stage(170) for supporting the substrate transferred from the first stage, the second image capture part(120) for capturing the second image of the substrate, and a transfer part(180) for transferring the substrate from the first stage to the second stage. The substrate inspecting apparatus further includes a data processing part(144) connected with the first and second image capture part for inspecting the results of an EBR(Edge Bead Removal) process and an EEW(Edge Exposure of Wafer) process for the substrate by using the first image of the substrate and detecting the pattern defect generated on the substrate by using the second image of the substrate.
Abstract translation: 目的：提供一种能够进行多种检查过程的基板检查装置。 构成：衬底检查装置（100）具有用于支撑衬底的第一工作台（160），用于捕获衬底边缘部分的第一图像的第一图像捕获部分（110），用于支撑衬底边缘部分的第二工作台（170） 从第一阶段转移的基板，用于捕获基板的第二图像的第二图像捕获部分（120）和用于将基板从第一阶段转移到第二阶段的转移部分（180）。 基板检查装置还包括与第一和第二图像捕获部分连接的数据处理部分（144），用于通过使用用于检查基板的EBR（边缘珠去除）处理和EEW（晶片的边缘曝光）处理的结果来检查 衬底的第一图像，并且通过使用衬底的第二图像来检测在衬底上产生的图案缺陷。
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公开(公告)号：KR1020170011802A
公开(公告)日：2017-02-02
申请号：KR1020150105092
申请日：2015-07-24
Applicant: 삼성전자주식회사
IPC: G06F11/14
CPC classification number: H04L67/1095 , G06F21/53 , H04L63/08 , H04L63/102 , H04L67/02 , H04W4/50 , H04W4/80 , H04W8/18 , H04W12/06 , H04W12/08
Abstract: 전자장치가개시된다. 상기전자장치는일반모드를제공하는명령어를저장하기위한제1 메모리영역및 보안모드를제공하는명령어를저장하기위한제2 메모리영역을갖는메모리; 및프로세서로구현가능한보안모드관리모듈을포함하고, 상기보안모드관리모듈은, 적어도하나의외부전자장치로부터상기보안모드와관련된설정정보를수신하고, 상기설정정보에기반하여, 상기설정정보에대응하는적어도하나의기능을상기제2 메모리영역에저장하여상기적어도하나의기능을제공할수 있다. 이외에도명세서를통해파악되는다양한실시예가가능하다.
Abstract translation: 提供电子设备。 电子设备包括具有用于存储提供正常操作模式的指令的第一存储区域和用于存储提供安全操作模式的指令的第二存储区域的存储器，以及被配置为实现安全模式管理模块的处理器， 被配置为从至少一个外部电子设备接收与所述安全操作模式相关联的配置信息，并且将与所述配置信息相对应的至少一个功能存储在所述第二存储器区域中。
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