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21.发明授权
公开(公告)号：KR101262544B1
公开(公告)日：2013-05-08
申请号：KR1020110059512
申请日：2011-06-20
Applicant: 한국에너지기술연구원
CPC classification number: Y02E10/50 , Y02P70/521
Abstract: 실리콘계나노입자포집및 보관용기,및이를이용한실리콘계나노입자박막증착장치및 방법이제공된다. 본발명의일 실시예에따른실리콘계나노입자포집및 보관용기는상기용기의일 측에연결되어, 캐리어가스에의하여나노입자가유입되는제 1 유입라인; 상기용기의타 측에연결되어, 상기유입된나노입자가외부로배출되는제 2 유입라인; 상기용기내에구비되는필터스크린; 및상기필터스크린을통과한캐리어가스를외부로배출시키도록상기용기에연결된배출라인을포함하는것을특징으로하며, 별도의나노입자이송수단을사용하지않고서도나노입자를포집시키기위하여제공되는캐리어가스를이용하여, 기판에나노입자를효과적으로증착시킬수 있고. 더나아가, 증착장치와나노입자보관용기의분리가가능하므로나노입자의지속적인주입이가능하고, 아울러유지보수가간편하다. 또한, 기존의장치에도본 발명에따른나노입자보관용기를연결시킴으로써효과적인실리콘계나노입자박막의증착이가능하다.
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公开(公告)号：KR1020130022487A
公开(公告)日：2013-03-07
申请号：KR1020110084785
申请日：2011-08-24
Applicant: 한국에너지기술연구원
CPC classification number: B01D46/54 , B01D46/10 , H01L31/0445 , Y02E10/50
Abstract: PURPOSE: A silicon nanoparticle collection system and a nanoparticle collection/storage container used for the same are provided to supply nanoparticles to a deposition system which is collected and stored, after a nanoparticle container in which nanoparticles are collected is separated from an inlet system for collecting the nanoparticles inflowing with carrier gas into multiple nanoparticle containers which is connected to one inlet line. CONSTITUTION: A silicon nano particle collection system comprises an inlet line, multiple nanoparticle collection/storage containers(10), and a carrier gas discharge line. The inlet line flows nanoparticles and carrier gas in. The multiple nanoparticle collection/storage containers are connected to the inlet line. The carrier gas discharge line discharges the carrier gas which is flowing through the inlet line from the nanoparticle collection/storage containers. The nanoparticle collection/storage containers comprise a nano particle inlet unit(11), a filter screen(13), and a carrier gas discharge unit(14). The nanoparticle inlet unit is connected to the inlet line, and is installed on one side of the nanoparticle collection/storage containers. The filter screen is equipped in the nanoparticle collection/storage containers. The carrier gas discharge unit is installed in the nanoparticle collection/storage container to discharge the carrier gas which is passing through the filter screen, and is connected to the carrier gas discharge line.
Abstract translation: 目的：提供一种硅纳米颗粒收集系统和用于其的纳米颗粒收集/储存容器，以将纳米颗粒供应到沉积系统，该沉积系统在收集纳米颗粒的纳米颗粒容器与入口系统分离后收集和储存，用于收集 纳米颗粒通过载气流入多个纳米颗粒容器，其连接到一个入口管线。 构成：硅纳米颗粒收集系统包括入口管线，多个纳米颗粒收集/储存容器（10）和载气排放管线。 入口管线流过纳米颗粒和载气。多个纳米颗粒收集/储存容器连接到入口管线。 载气排出管线从纳米颗粒收集/储存容器排出流过入口管线的载气。 纳米颗粒收集/储存容器包括纳米颗粒入口单元（11），过滤网（13）和载气排出单元（14）。 纳米颗粒入口单元连接到入口管线，并且安装在纳米颗粒收集/储存容器的一侧。 过滤网装在纳米颗粒收集/储存容器中。 载气排出单元安装在纳米颗粒收集/储存容器中以排出通过过滤网的载气，并与载气排出管连接。
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公开(公告)号：KR1020120097150A
公开(公告)日：2012-09-03
申请号：KR1020110016546
申请日：2011-02-24
Applicant: 한국에너지기술연구원
IPC: H01L31/0445 , H01L31/0236
CPC classification number: Y02E10/50 , H01L31/0445 , H01L31/0236
Abstract: PURPOSE: A method and apparatus for texturing a thin-film solar cell using droplets and the thin-film solar cell textured by the same are provided to perform a environment-friendly process using a plasma reactor in which the process is easily controlled. CONSTITUTION: Textured solutions of droplets are formed. The texturing solution of the droplet is injected in a plasma reactor in which plasma is formed. A thin film solar cell is textured. The texturing solutions of the droplets are formed by an ultrasonic droplet generator. The texturing solution can be methanol or ethanol. [Reference numerals] (AA) Making droplets from texturing solutions; (BB) Injection of the droplets into a reactor
Abstract translation: 目的：提供使用液滴对薄膜太阳能电池进行纹理化的方法和装置，并且使用由其构成的薄膜太阳能电池来执行使用等离子体反应器的环境友好的方法，其中该方法易于控制。 构成：形成液滴的纹理溶液。 将液滴的纹理溶液注入形成等离子体的等离子体反应器中。 薄膜太阳能电池有纹理。 液滴的纹理溶液由超声波液滴发生器形成。 纹理溶液可以是甲醇或乙醇。 （标号）（AA）从纹理溶液制作液滴; （BB）将液滴注入反应器
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公开(公告)号：KR1020120044473A
公开(公告)日：2012-05-08
申请号：KR1020100105758
申请日：2010-10-28
Applicant: 한국에너지기술연구원
IPC: H01L31/18 , H01L31/0445 , H01L21/205
CPC classification number: C23C16/4582 , C23C16/44 , C23C16/455 , C23C16/54 , H01L31/0747 , H01L31/202 , Y02E10/50 , Y02P70/521
Abstract: PURPOSE: An apparatus, a method, and a system for depositing a solar cell thin film are provided to reduce the number of equipment pieces by performing a fixed dual deposition of a substrate without rotation. CONSTITUTION: A plurality of unit chambers(110a, 110b) are divided based on a substrate(W). A deposition gas spraying unit(120) independently sprays deposition gas(G1, G2) to the plurality of unit chambers. A dissolving unit(130) dissolves the deposition gas and is separated from one side of the substrate. A support unit(140) supports the substrate.
Abstract translation: 目的：提供用于沉积太阳能电池薄膜的装置，方法和系统，以通过不旋转地执行基板的固定双重沉积来减少设备件的数量。 构成：基于基板（W）分割多个单元室（110a，110b）。 沉积气体喷射单元（120）独立地将沉积气体（G1，G2）喷射到多个单元室。 溶解单元（130）溶解沉积气体并从衬底的一侧分离。 支撑单元（140）支撑基板。
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公开(公告)号：KR1020100088321A
公开(公告)日：2010-08-09
申请号：KR1020090007470
申请日：2009-01-30
Applicant: 한국에너지기술연구원
IPC: H01L31/18 , H01L31/0445
CPC classification number: Y02E10/52 , Y02P70/521
Abstract: PURPOSE: A CIS system compound thin film manufacturing device is provided to form a uniform thin film by preventing the heat loss and the damage of a substrate due to contact. CONSTITUTION: A vacuum chamber(20) includes a boat containing elements such as Cu, In, Ga. A heating part(30) comprises a body, a tray and a heating source. A pyrometer(40) measures the temperature of the substrate placed in the tray. A controller receives a signal which is measured from the pyrometer. The pyrometer is installed inside the body of the heating part and measures the temperature of the back side of the substrate.
Abstract translation: 目的：提供CIS系统复合薄膜制造装置，通过防止由于接触导致的热损失和基板的损坏而形成均匀的薄膜。 构成：真空室（20）包括容纳诸如Cu，In，Ga的元件的舟皿。加热部件（30）包括主体，托盘和加热源。 高温计（40）测量放置在托盘中的基板的温度。 控制器接收从高温计测量的信号。 高温计安装在加热部件的主体内，并测量基板背面的温度。
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Patent Agency Ranking
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公开(公告)号：KR1019990002817A
公开(公告)日：1999-01-15
申请号：KR1019970026529
申请日：1997-06-23
Applicant: 한국에너지기술연구원
IPC: H01L21/20
Abstract: Cds는 Ⅱ-Ⅵ족 화합물 반도체의 일종으로 주로 태양전지의 창문층(Window layer)의 용도로 주로 연구되고 있으며 광학전자 분야에서도 많이 연구되고 있는 물질이다.
박막을 제조하는 방법으로는 진공증착, 스퍼터링, 화학기상성장법, 전착법과 화학적인 방법이 주로 쓰이고 있다.
그중 화학적인 방법은 반응 용액중에서 CdS의 핵이 생겨 콜로이드가 형성되며, 형성된 클로이드가 기판에 달라붙어 이미 성장하고 있는 박막 미세조직의 치밀도를 저하시키고 두께가 고르지 않게 되며, 표면이 거칠게 되는 등의 문제가 발생되므로 질이 우수한 CdS 박막을 얻기 위하여 일반적으로 반응속도를 낮추고 반응용액의 화학적 조성과 pH 및 온도를 최적 조건으로 맞추는 방법이 쓰인다.
화학 반응은 정밀하게 제어하기가 어렵고 반응 용액의 화학적 조성등 실험조건의 메시한 변화에 따라 막의 물리적 성질과 미세조직이 급격히 변하는 문제가 있기때문에 재현성이 좋으면서도 빠르고 쉽게 우수한 특성의 박막을 양산할 수 있도록 공정을 개선할 필요가 있다.
화학적인 CdS 박막 제조 방법에서 박막 형성 조건을 엄밀하게 제어하는 대신에 형성 반응이 일어나는 반응 용액에 초음파를 가하면 막질 개선과 함께 공정이 단순해지고 제어가 쉬어지는 효과를 얻을 수 있다.
본 발명은 CdS 조성 원소를 함유한 반응 용액에 초음파를 가하여 제조공정을 개선하고 막질을 획기적으로 개선하는 방법이다.-
公开(公告)号：KR1020120139952A
公开(公告)日：2012-12-28
申请号：KR1020110059512
申请日：2011-06-20
Applicant: 한국에너지기술연구원
CPC classification number: Y02E10/50 , Y02P70/521 , H01L31/18 , H01L31/04
Abstract: PURPOSE: A container for collecting and storing silicon nanoparticles and an apparatus and method for depositing a silicion nanoparticle thin film using the same are provided to efficiently deposit nanoparticles on a substrate using carrier gas without an additional nanoparticle transfer unit. CONSTITUTION: A first inflow line(11) is connected to one side of a container(10). The nanoparticles are inputted to a first inflow line by carrier gas. A second inflow line(16) is connected to the other side of the container. The inputted nanoparticles are discharged to the outside through the second inflow line. A filter screen(13) is formed in the container. A discharge line(14) is connected to the container to discharge carrier gas passing through the filter screen to the outside. [Reference numerals] (AA) Carrier gas; (BB) Collected nanoparticles
Abstract translation: 目的：提供一种用于收集和储存硅纳米颗粒的容器以及使用该容器沉积硅胶纳米颗粒薄膜的装置和方法，以便在没有另外的纳米颗粒转移单元的情况下使用载气有效地将纳米颗粒沉积在基底上。 构成：第一流入管线（11）连接到容器（10）的一侧。 纳米颗粒通过载气输入到第一流入管线。 第二流入管线（16）连接到容器的另一侧。 输入的纳米颗粒通过第二流入管线排出到外部。 过滤网（13）形成在容器中。 排出管（14）与容器连接，将通过过滤网的载气排出到外部。 （附图标记）（AA）载气; （BB）收集的纳米颗粒
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公开(公告)号：KR1020120126485A
公开(公告)日：2012-11-21
申请号：KR1020110044317
申请日：2011-05-12
Applicant: 한국에너지기술연구원
Abstract: PURPOSE: An apparatus and a method for deposition of a silicone-based nano-particle thin film are provided to effectively deposit nano-particles on a substrate without a separate nano-particle transfer unit because the nano-particles are injected into a deposition chamber by the pressure difference between the deposition chamber and a nano-particle container. CONSTITUTION: An apparatus for deposition of a silicone-based nano-particle thin film comprises a nano-particle container(100) and a deposition chamber(200). Silicon-based nano-particles are led by carrier gas and collected in the nano-particle container. The nano-particles in the nano-particle container are injected into the deposition chamber by the pressure difference between the nano-particle container and the deposition chamber and deposited on a substrate(S) placed in the deposition chamber. A first inlet line(102) is provided between the nano-particle container and the deposition chamber. A flow controller is provided in the first inlet line. [Reference numerals] (AA) Nano particles + gas; (BB) Reaction gas; (CC) Nano particles
Abstract translation: 目的：提供一种用于沉积硅氧烷基纳米颗粒薄膜的装置和方法，以有效地将纳米颗粒沉积在基板上，而不需要单独的纳米颗粒转移单元，因为纳米颗粒通过 沉积室和纳米颗粒容器之间的压力差。 构成：用于沉积硅氧烷基纳米颗粒薄膜的装置包括纳米颗粒容器（100）和沉积室（200）。 硅基纳米颗粒由载气引导并收集在纳米颗粒容器中。 纳米颗粒容器中的纳米颗粒通过纳米颗粒容器和沉积室之间的压差被注入沉积室中，并沉积在沉积室中的衬底（S）上。 第一入口管线（102）设置在纳米颗粒容器和沉积室之间。 在第一入口管线中设置流量控制器。 （标号）（AA）纳米颗粒+气体; （BB）反应气体; （CC）纳米颗粒
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30.发明授权
公开(公告)号：KR101199221B1
公开(公告)日：2012-11-07
申请号：KR1020100090012
申请日：2010-09-14
Applicant: 한국에너지기술연구원
IPC: H01L31/0445 , H01L31/0216 , H01L21/20
CPC classification number: H01L31/03921 , H01L21/02532 , H01L21/02601 , H01L31/03682 , H01L31/1804 , Y02E10/546 , Y02E10/547 , Y02P70/521
Abstract: 실리콘계 나노입자 박막 증착방법, 실리콘계 나노입자 박막 및 이를 위한 실리콘계 나노입자 박막 증착장치가 제공된다.
본 발명에 따른 실리콘계 나노입자 박막 증착방법은 실리콘계 나노입자를 합성하는 합성단계; 및 상기 실리콘계 나노입자를 기판에 제 1 증착시키는 증착단계를 포함하는 것을 특징으로 하며, 본 발명에 따른 실리콘계 나노입자 증착 방법 및 장치는, 합성된 실리콘계 나노입자를 또 다른 공정에서 전처리하지 않고, 합성과 동시에 기판에 증착시키므로, 나노입자 오염에 따른 전지효율 저하의 문제를 방지할 수 있다. 또한, 단일 시스템에서 합성과 증착이 진행되므로 경제성이 우수하며, 더 나아가, 나노입자의 속도 및 기판 높이를 조절함으로써 대면적 기판에서 원하는 형태의 나노입자 박막의 증착이 가능하다.
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