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公开(公告)号:DE102006056816A1
公开(公告)日:2007-10-04
申请号:DE102006056816
申请日:2006-12-01
Applicant: GEN ELECTRIC
Inventor: SAYIR HALUK , MEHMET ARIK , COOPER EVAN B , ICOZ TUNC , SCHAEPKENS MARC , LIU XIANG
Abstract: A thermal management assembly comprises a heat sink including a graphite layer having a first surface, a second surface, and a thickness comprising a graphene layer, where graphite layer is obtained by cleaving a graphene layer from a graphite sheet, where graphite layer exhibits a thermal conductivity, which is anisotropic in nature and is greater than 500 W/m[deg]C in a plane(s); and a support layer comprising a metal, a polymeric resin, and/or a ceramic disposed on a surface(s) of the graphite layer. A thermal management assembly comprises a base thermally coupled to the heat generating device; and a heat sink thermally coupled to the base. The heat sink comprises a graphite layer having a first surface, a second surface, and a thickness comprising a graphene layer, where graphite layer is obtained by cleaving a graphene layer from a graphite sheet, where graphite layer exhibits a thermal conductivity, which is anisotropic in nature and is greater than 500 W/m[deg]C in a plane(s); and a support layer, which comprises a metal, a polymeric resin, and/or a ceramic, the support layer is disposed on a surface(s) of the graphite layer by a process consisting coating, brushing, spraying, spreading, dipping, laminating, or powder coating. Before the support layer is disposed on the graphite layer, the graphite layer is treated by plasma etching, ion etching, and/or chemical etching. The support layer comprises parylene, and formed by applying parylene onto a surface of the graphite layer, where parylene is applied onto the surface by brushing, dipping, spraying, or a chemical vapor deposition process. It comprises a metal foil backed by a thermally conductive adhesive layer. Independent claims are also included for: (1) a heat dissipating fin (14) for use in thermal management assemblies, the fin comprising a graphite layer; (2) a cooling system; and (3) a method for constructing a thermal management system.
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公开(公告)号:CA2489478A1
公开(公告)日:2005-08-17
申请号:CA2489478
申请日:2004-12-09
Applicant: GEN ELECTRIC
Inventor: MCCONNELEE PAUL ALAN , SCHAEPKENS MARC , HELLER CHRISTIAN MARIA ANTON , FLANAGAN KEVIN WARNER , WANG HUA
Abstract: A composite article (10) comprises two polymeric substrate layers (20, 24), each of which has at least a diffusion-inhibiting barrier (30, 34) on one of the surfaces. The diffusion-inhibiting barriers (30, 34) are disposed such that they face each other within the composite article (10). Electronic devices (110) are disposed on such composite article (10) to reduce the rate of diffusion of chemical species i n the environment into the devices (110).
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公开(公告)号:AU2003293365A1
公开(公告)日:2004-07-29
申请号:AU2003293365
申请日:2003-12-04
Applicant: GEN ELECTRIC
Inventor: IACOVANGELO CHARLES , GILLETTE GREGORY RONALD , SCHAEPKENS MARC
IPC: C23C16/40 , C23C16/513
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公开(公告)号:AU2003218449A1
公开(公告)日:2003-11-17
申请号:AU2003218449
申请日:2003-03-31
Applicant: GEN ELECTRIC
Inventor: HAY GRANT , SCHAEPKENS MARC , SU ZHAOHUI , LIKIBI PARFAIT JEAN MARIE , ABBATIELLO NICHOLAS DONALD , MAHOOD JAMES ALAN
IPC: G02F1/1333 , B32B9/00 , C08G64/06 , C08J5/00 , C08L69/00 , G09F9/30 , H01L51/00 , H01L51/40 , H01L51/50 , H01L51/52 , H05B33/02 , H05B33/04 , H05B33/22 , H05B33/28 , C08G64/16
Abstract: A polymeric substrate comprising a high glass transition temperature polycarbonate for use in optical display devices and light emitting devices is provided in the present invention. A liquid crystal display, an organic electroluminescent device, and methods for use including the aforementioned polymeric substrate are also provided in the present invention.
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公开(公告)号:AT441065T
公开(公告)日:2009-09-15
申请号:AT03256496
申请日:2003-10-15
Applicant: GEN ELECTRIC
Inventor: SHIANG JOSEPH JOHN , SCHAEPKENS MARC , TURNER LARRY GENE
Abstract: A shaped light extraction luminaire (28) to gather light from an organic light emitting diode (OLED). Specifically, an inverted and truncated pyramid structure having a recessed area configured to receive an OLED is provided. The luminaire (28) is structured to increase the light emission of the OLED by capturing light emissions that would typically be lost by absorption within the OLED (10). The luminaire (28) includes angled sides (34) having a reflective material (36) disposed thereon. The luminaire (28) increases the light output of the OLED (10) such that it may be implemented in area lighting applications. Further, an array comprising a plurality of recessed areas and a plurality of angled sides (34) for each of the recessed areas may be implemented.
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公开(公告)号:DE102006056812A1
公开(公告)日:2008-03-27
申请号:DE102006056812
申请日:2006-12-01
Applicant: GEN ELECTRIC
Inventor: MARINER JOHN THOMAS , SANE AJIT , EBATA TOSHIKI , SCHAEPKENS MARC , LIU XIANG , FAN WEI
IPC: H01L21/68
Abstract: An apparatus for supporting a substrate (W) in a process chamber and regulating surface temperature of substrate comprises a base support having a surface to support substrate; a heating element (33) for heating the substrate to at least 300[deg] C; and at least one layer (600) of thermal pyrolytic graphite material embedded in base support, and having a thermal conductivity of at least 1000 W/m[deg] C in a plane parallel to substrate. The surface of the support has a maximum temperature variation of 10[deg] C between lowest point and a highest temperature point on surface of the support. An apparatus for supporting a wafer substrate (W) in a semiconductor process chamber, comprises a base substrate (10) containing bulk graphite, where the graphite base substrate has a top surface and a bottom surface facing away from the wafer supported on the apparatus; a first coating layer for coating the graphite base substrate; at least one layer (600) of thermal pyrolytic graphite (TPG) disposed on the first coating layer or disposed between the graphite base substrate and the first coating layer; a heating element (33) for heating the substrate to at least 300[deg] C and is disposed on the bottom surface of the coated graphite base substrate; an over-coating layer (300) for coating the base support; The coating layer comprises an electrically insulating material selected from one of an oxide, nitride, oxynitride of elements selected from aluminum (Al), boron (B), silicon (Si), gallium (Ga), refractory hard metals and/or transition metals. The over-coating layer comprises one of nitride, carbide, carbonitride, oxynitride of elements selected from B, Al, Si, Ga, yttrium, refractory hard metals, and/or transition metals; a zirconium phosphate having an sodium zirconium phosphate (NZP) structure of NaZr 2(PO 4) 3; a glass-ceramic composition containing at least one element selected from elements of the Group 2a, Group 3a and Group 4a; a barium oxide-alumina-boric oxide-silica (BaO-Al 2O 3-B 2O 3-SiO 2) glass; and a mixture of SiO 2 and a plasma-resistant material comprising an oxide or fluoride of yttrium (Y), scandium (Sc), lanthanum (La), cerium (Ce), gadolinium (Gd), europium (Eu), dysprosium (Dy) and yttrium-aluminum-garnet (YAG). The wafer supported by the apparatus has a maximum temperature variation of 10[deg] C between a lowest point and a highest temperature point on the wafer. The wafer substrate surface has a maximum temperature variation of 2[deg] C. The TPG layer has a thickness of 0.5-15 mm, and a thickness variation of less than 0.005 mm. The apparatus further comprises a susceptor disposed on the base support.
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公开(公告)号:DE102006056615A1
公开(公告)日:2008-01-10
申请号:DE102006056615
申请日:2006-11-30
Applicant: GEN ELECTRIC
Inventor: OLECHNOWICZ BENJAMIN J , RUSINKO DAVID M , FAN WEI , SARIGIANNIS DEMETRIUS , SCHAEPKENS MARC , LONGWORTH DOUGLAS A , LOU VICTOR L , LIU XIANG , KLUG JENNIFER
IPC: H01L21/20
Abstract: The device (10) has a base substrate on which a wafer is located. An electrical electrode is embedded in a surface of the base substrate. A functional element is penetrated into the device such that a gap is formed. Filler (230) seals the gap in the device. The filler has an etching rate of less than 1000 Angstrom per minute, if the device is exposed to a working environment in a temperature range of 25-600 degree Celsius, where it concerns with the halogens, reactive ions, plasma corroding, plasma cleaning or a gas cleaning environment at a working temperature of 400 degree Celsius. An independent claim is also included for a method for manufacturing of the wafer processing device.
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公开(公告)号:DE102006055895A1
公开(公告)日:2007-08-23
申请号:DE102006055895
申请日:2006-11-27
Applicant: GEN ELECTRIC
Inventor: OTAKA AKINOBU , HIGUCHI TAKESHI , PRASAD SRIDHAR RAMAPRASAD , FAN WEI , SCHAEPKENS MARC , LONGWORTH DOUGLAS A
Abstract: An etch resistant heater for use in a wafer processing assembly with an excellent ramp rate of at least 20° C. per minute. The heater is coated with a protective overcoating layer allowing the heater to have a radiation efficiency above 70% at elevated heater temperatures of >1500° C., and an etch rate in NF 3 at 600° C. of less than 100 A/min.
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公开(公告)号:CA2587922A1
公开(公告)日:2006-05-15
申请号:CA2587922
申请日:2005-11-15
Applicant: GEN ELECTRIC
Inventor: MCCONNELEE PAUL ALAN , ERLAT AHMET GUN , GORCZYCA THOMAS BERT , SCHAEPKENS MARC , KIM TAE WON , YAN MIN , HELLER CHRISTIAN MARIA ANTON
Abstract: A composite article with at least one high integrity protective coating, the high integrity protective coating having at least one planarizing layer and at least one organic-inorganic composition barrier coating layer. A method for depositing a high integrity protective coating.
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公开(公告)号:BR0316331A
公开(公告)日:2005-09-27
申请号:BR0316331
申请日:2003-11-20
Applicant: GEN ELECTRIC
Inventor: CHISHOLM BRET , OLCZAK EUGENE , SCHAEPKENS MARC , COYLE DENNIS
IPC: F21V8/00 , G02B1/11 , G02B5/20 , G02B5/28 , G02B5/30 , G02F1/13357 , G02F1/1335
Abstract: There is provided an optical structure. The optical structure includes a light source (14). The optical structure also includes an organic light management film (16) having an index of refraction of less than 1.7 disposed above the light source, and a transparent inorganic film (18) having an index of refraction of greater than 1.7 disposed adjacent the organic light management film (16). A optical device is also provided including the organic light management film (16) and the transparent inorganic film (18). A method of forming the optical structure is also provided. The method includes depositing the transparent inorganic film (18) under vacuum.
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