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公开(公告)号:DE10296953T5
公开(公告)日:2004-04-29
申请号:DE10296953
申请日:2002-06-06
Applicant: IBM
Inventor: BRYANT ANDRES , IEONG MEIKEI , MULLER K PAUL , NOWAK EDWARD J , FRIED DAVID M , RANKIN JED
IPC: H01L21/336 , H01L21/8238 , H01L27/092 , H01L29/49 , H01L29/78 , H01L29/786 , H01L21/28
Abstract: A method for forming a transistor. A semiconductor substrate is provided. The semiconductor substrate is patterned to provide a first body edge. A first gate structure of a first fermi level is provided adjacent the first body edge. The semiconductor substrate is patterned to provide a second body edge. The first and second body edges of the semiconductor substrate define a transistor body. A second gate structure of a second fermi level is provided adjacent the second body edge. A substantially uniform dopant concentration density is formed throughout the transistor body.
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公开(公告)号:DE10296953B4
公开(公告)日:2010-04-08
申请号:DE10296953
申请日:2002-06-06
Applicant: IBM
Inventor: BRYANT ANDRES , IEONG MEIKEI , MULLER K PAUL , NOWAK EDWARD J , FRIED DAVID M , RANKIN JED
IPC: H01L21/283 , H01L21/336 , H01L21/8238 , H01L27/092 , H01L29/49 , H01L29/78 , H01L29/786
Abstract: A method for forming a transistor. A semiconductor substrate is provided. The semiconductor substrate is patterned to provide a first body edge. A first gate structure of a first fermi level is provided adjacent the first body edge. The semiconductor substrate is patterned to provide a second body edge. The first and second body edges of the semiconductor substrate define a transistor body. A second gate structure of a second fermi level is provided adjacent the second body edge. A substantially uniform dopant concentration density is formed throughout the transistor body.
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公开(公告)号:DE60223419T2
公开(公告)日:2008-09-04
申请号:DE60223419
申请日:2002-11-25
Applicant: IBM
Inventor: DORIS BRUCE B , CHIDAMBARRAO DURESETI , IEONG MEIKEI , MANDELMAN JACK A
IPC: H01L21/00 , H01L21/336 , H01L21/8238 , H01L27/092 , H01L27/12 , H01L29/786
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公开(公告)号:AU2002317778A1
公开(公告)日:2003-01-08
申请号:AU2002317778
申请日:2002-06-06
Applicant: IBM
Inventor: BRYANT ANDRES , RANKIN JED , IEONG MEIKEI , MULLER K PAUL , FRIED DAVID M , NOWAK EDWARD J
IPC: H01L21/336 , H01L21/8238 , H01L27/092 , H01L29/49 , H01L29/78 , H01L29/786 , H01L21/28
Abstract: A method for forming a transistor. A semiconductor substrate is provided. The semiconductor substrate is patterned to provide a first body edge. A first gate structure of a first fermi level is provided adjacent the first body edge. The semiconductor substrate is patterned to provide a second body edge. The first and second body edges of the semiconductor substrate define a transistor body. A second gate structure of a second fermi level is provided adjacent the second body edge. A substantially uniform dopant concentration density is formed throughout the transistor body.
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