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公开(公告)号：US11499218B2
公开(公告)日：2022-11-15
申请号：US16730947
申请日：2019-12-30
Applicant: Si-Ware Systems
Inventor： Mostafa Medhat , Bassem Mortada , Yasser Sabry , Sebastian Nazeer , Yasseen Nada , Mohamed Sadek , Bassam A. Saadany
Abstract: A shadow mask having two or more levels of openings enables selective step coverage of micro-fabricated structures within a micro-optical bench device. The shadow mask includes a first opening within a top surface of the shadow mask and a second opening within the bottom surface of the shadow mask. The second opening is aligned with the first opening and has a second width less than a first width of the first opening. An overlap between the first opening and the second opening forms a hole within the shadow mask through which selective coating of micro-fabricated structures within the micro-optical bench device may occur.
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Patent Agency Ranking
公开(公告)号：US11085825B2
公开(公告)日：2021-08-10
申请号：US16368771
申请日：2019-03-28
Applicant: Si-Ware Systems
Inventor： Mostafa Medhat , Bassem Mortada , Yasser Sabry , Mohamed Hossam , Momen Anwar , Ahmed Shebl , Hisham Haddara , Bassam A. Saadany
Abstract: Aspects of the disclosure relate to a self-referenced spectrometer for providing simultaneous measurement of a background or reference spectral density and a sample or other spectral density. The self-referenced spectrometer includes an interferometer optically coupled to receive an input beam and to direct the input beam along a first optical path to produce a first interfering beam and a second optical path to produce a second interfering beam, where each interfering beam is produced prior to an output of the interferometer. The spectrometer further includes a detector optically coupled to simultaneously detect a first interference signal produced from the first interfering beam and a second interference signal produced from the second interfering beam, and a processor configured to process the first interference signal and the second interference signal and to utilize the second interference signal as a reference signal in processing the first interference signal.
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公开(公告)号：US10782342B2
公开(公告)日：2020-09-22
申请号：US15818736
申请日：2017-11-20
Applicant: Si-Ware Systems
Inventor： Bassam Saadany , Mostafa Medhat , Muhammad Nagi , Ahmed Shebl , Yasser M. Sabry , Bassem Mortada , Diaa Khalil
Abstract: Aspects relate to an integrated optical probe card and a system for performing wafer testing of optical micro-electro-mechanical systems (MEMS) structures with an in-plane optical axis. On-wafer optical screening of optical MEMS structures may be performed utilizing one or more micro-optical bench components to redirect light between an out-of-plane direction that is perpendicular to the in-plane optical axis to an in-plane direction that is parallel to the in-plane optical axis to enable testing of the optical MEMS structures with vertical injection of the light.
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公开(公告)号：US20190301939A1
公开(公告)日：2019-10-03
申请号：US16368771
申请日：2019-03-28
Applicant: Si-Ware Systems
Inventor： Mostafa Medhat , Bassem Mortada , Yasser Sabry , Mohamed Hossam , Momen Anwar , Ahmed Shebl , Hisham Haddara , Bassam A. Saadany
Abstract: Aspects of the disclosure relate to a self-referenced spectrometer for providing simultaneous measurement of a background or reference spectral density and a sample or other spectral density. The self-referenced spectrometer includes an interferometer optically coupled to receive an input beam and to direct the input beam along a first optical path to produce a first interfering beam and a second optical path to produce a second interfering beam, where each interfering beam is produced prior to an output of the interferometer. The spectrometer further includes a detector optically coupled to simultaneously detect a first interference signal produced from the first interfering beam and a second interference signal produced from the second interfering beam, and a processor configured to process the first interference signal and the second interference signal and to utilize the second interference signal as a reference signal in processing the first interference signal.
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公开(公告)号：US20180143245A1
公开(公告)日：2018-05-24
申请号：US15818736
申请日：2017-11-20
Applicant: Si-Ware Systems
Inventor： Bassam Saadany , Mostafa Medhat , Muhammad Nagi , Ahmed Shebl , Yasser M. Sabry , Bassem Mortada , Diaa Khalil
Abstract: Aspects of the disclosure relate to an integrated optical probe card and a system for performing wafer testing of optical micro-electro-mechanical systems (MEMS) structures with an in-plane optical axis. On-wafer optical screening of optical MEMS structures may be performed utilizing one or more micro-optical bench components to redirect light between an out-of-plane direction that is perpendicular to the in-plane optical axis to an in-plane direction that is parallel to the in-plane optical axis to enable testing of the optical MEMS structures with vertical injection of the light.
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公开(公告)号：US09658053B2
公开(公告)日：2017-05-23
申请号：US14165997
申请日：2014-01-28
Applicant: Si-Ware Systems
Inventor： Mostafa Medhat , Bassem Mortada , Ahmed Othman El Shater , Muhammed Nagy , Mina Gad Seif , Bassam A. Saadany , Amr N. Hafez
CPC classification number: G01B9/02068 , G01B7/08 , G01B9/02071 , G01B2290/35 , G01J3/45 , G01J3/4532 , G01J3/4535 , G02B26/0841
Abstract: A Micro-Electro-Mechanical System (MEMS) interferometer provides for self-calibration of mirror positioning of a moveable mirror. The moveable mirror is coupled to a MEMS actuator having a variable capacitance. The MEMS interferometer includes a capacitive sensing circuit for determining the capacitance of the MEMS actuator at two or more known positions of the moveable mirror and a calibration module for using the actuator capacitances at the known positions to compensate for any drift in the capacitive sensing circuit.
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