Abstract:
The invention relates to a method for preparing doped oxide material, in which method substantially all the reactants (B, D) forming the oxide material are brought to a vaporous reduced form in the gas phase and after this to react with each other in order to form oxide particles (P). According to the invention, said reactants (B, D) in vaporous and reduced form are mixed together to a gas flow (BD) of reactants, which gas flow (BD) is further condensated fast in such a manner that substantially all the component parts of the reactants (B, D) reach a supersaturated state substantially simultaneously by forming oxide particles (P) in such a manner that there is no time to reach chemical phase balances.
Abstract:
개시되는 내용은 약 300nm 미만의 파장에서 작동하는 리소그래피 장치의 리소그래피 조사의 광 경로에 사용될 수 있는 OD-도핑 합성 실리카 유리를 포함한다. OD-도핑된 합성 실리카 유리는 동등한 OH 농도를 갖는 비-OD-도핑된 실리카 유리에 비하여 현저히 낮은 편파-유발 복굴절을 갖는다는 것이 확인되었다. 또한 OD-도핑된 합성 실리카 유리를 제조하는 방법이 개시되며, 그러한 유리를 포함하는 광학 부재, 그러한 광학 부재를 포함하는 리소그래피 시스템이 개시된다. 상기유리는 특히, 약 193nm에서의 현저히 낮은 편파-유발 복굴절 값 때문에 이머젼 리소그래피 시스템에 적합하다. 리소그래피, 복굴절, 광학부재, 실리카 유리, 도핑
Abstract:
A multicore optical fiber, includes: a core which is formed of silica glass doped with at least fluorine, the core having a relative refractive index difference with respect to a refractive index of silica as a reference being -0.30% to -0.10%; and a clad that is formed of silica glass doped with at least fluorine, the clad including a first clad surrounding an outer periphery of the core and a second clad provided outside the first clad, in which a relative refractive index difference between the first clad and the core is 0.8% or more, and a refractive index of the second clad is higher than a refractive index of the first clad and lower than a refractive index of the core.
Abstract:
An optical fiber with large effective area, low bending loss and low attenuation. The optical fiber includes a core, an inner cladding region, and an outer cladding region. The core region includes a spatially uniform updopant to minimize low Rayleigh scattering and a relative refractive index and radius configured to provide large effective area. The inner cladding region features a large trench volume to minimize bending loss. The core may be doped with Cl and the inner cladding region may be doped with F.
Abstract:
Manufacturing an optical fiber by using an outside vapor deposition technique for making a substrate, applying one or more layers to the substrate using a radial pressing technique to form a soot blank, sintering the soot blank in the presence of a gaseous refractive index-modifying dopant, and drawing the sintered soot blank, provides a more efficient and cost effective process for generating complex refractive index profiles.
Abstract:
According to some embodiments, the optical fiber comprises: (i) a core (12) having a first index of refraction n 1 ; (ii) a cladding (14) surrounding the core and having a second index of refraction n 2 , such that n 1 >n 2 , wherein cladding has at two sets of stress rods (13a,13b) extending longitudinally through the length of the optical fiber, wherein the two sets of stress rods have CTE coefficients and/or softening points different from one another and different from that of cladding.
Abstract translation:根据一些实施例,光纤包括:(i)具有第一折射率n 1的芯(12); (ii)围绕所述芯并且具有第二折射率n 2的包层(14),使得n 1> n 2,其中包层具有两组应力棒(13a,13b),纵向延伸穿过所述长度的 光纤,其中两组应力棒具有彼此不同且不同于包层的CTE系数和/或软化点。
Abstract:
What is disclosed includes OD-doped synthetic silica glass capable of being used in optical elements for use in lithography below about 300 nm. OD-doped synthetic silica glass was found to have significantly lower polarization-induced birefringence value than non-OD-doped silica glass with comparable concentration of OH. Also disclosed are processes for making OD-dopes synthetic silica glasses, optical member comprising such glasses, and lithographic systems comprising such optical member. The glass is particularly suitable for immersion lithographic systems due to the exceptionally low polarization-induced birefringence values at about 193 nm.