Composite field emission source and method of fabricating the same
    25.
    发明申请
    Composite field emission source and method of fabricating the same 有权
    复合场发射源及其制造方法

    公开(公告)号:US20090167147A1

    公开(公告)日:2009-07-02

    申请号:US12154903

    申请日:2008-05-27

    Abstract: A method of fabricating a composite field emission source is provided. A first stage of film-forming process is performed by using RF magnetron sputtering, so as to form a nano structure film on a substrate, in which the nano structure film is a petal-like structure composed of a plurality of nano graphite walls. Afterward, a second stage of film-forming process is performed for increasing carbon accumulation amount on the nano structure film. Therefore, the composite field emission source with high strength and nano coral-like structures can be obtained, whereby improving the effect and life of electric field emission.

    Abstract translation: 提供了一种制造复合场致发射源的方法。 通过使用RF磁控管溅射进行成膜处理的第一阶段,以在纳米结构膜为由多个纳米石墨壁构成的花瓣状结构的基板上形成纳米结构膜。 之后,进行第二阶段的成膜工艺以增加纳米结构膜上的碳积累量。 因此,可以获得具有高强度和纳米珊瑚状结构的复合场发射源,从而提高电场发射的效果和寿命。

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