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公开(公告)号：WO2015048664A1
公开(公告)日：2015-04-02
申请号：PCT/US2014/058088
申请日：2014-09-29
Applicant: MKS INSTRUMENTS, INC.
Inventor： BRUCKER, Gerardo, A. , SWINNEY, Timothy, C. , KELLY, Brandon, J. , FUNARI, Alfred, A. , SCHOTT, Michael, N. , SCHARTAU, Kristian, S.
IPC: H01J41/06
CPC classification number: G01L21/34 , G01L19/06 , H01J9/50 , H01J41/06 , Y02W30/828 , Y10T29/49007
Abstract: A cold cathode ionization vacuum gauge includes an extended anode electrode and a cathode electrode surrounding the anode electrode along its length and forming a discharge space between the anode electrode and the cathode electrode. The vacuum gauge further includes an electrically conductive guard ring electrode interposed between the cathode electrode and the anode electrode about a base of the anode electrode to collect leakage electrical current, and a discharge starter device disposed over and electrically connected with the guard ring electrode, the starter device having a plurality of tips directed toward the anode and forming a gap between the tips and the anode.
Abstract translation: 冷阴极电离真空计包括延伸的阳极电极和沿其长度包围阳极电极的阴极电极，并在阳极电极和阴极电极之间形成放电空间。 真空计进一步包括导电保护环电极，其围绕阳极电极的底部插入在阴极电极和阳极电极之间以收集泄漏电流;以及放电启动器装置，设置在保护环电极上并与保护环电极电连接， 启动器装置具有指向阳极的多个尖端并且在尖端和阳极之间形成间隙。
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公开(公告)号：WO2014135229A1
公开(公告)日：2014-09-12
申请号：PCT/EP2013064511
申请日：2013-07-09
Applicant: INFICON GMBH
Inventor： ANDREAUS BERNHARD , ENDERES ROLF , WÜEST MARTIN , UNTERMARZONER OSKAR , STOCKER RUDOLF
Abstract: An ionization vacuum measuring cell comprises an anode (3A) and a cathode (4K) in a measuring chamber (107). The measuring chamber (107) is arranged in a housing (101) which has a vacuum-tight feedthrough (103) for a connection rod (104) of the cathode (4K) towards the outside. The measuring chamber (107) holds the rod (104) in a feedthrough (109) which is electrically insulating only. The measuring chamber (107) in the housing (101) can be exchanged by means of a releasable plug connection (106).
Abstract translation: 电离真空电池包括在测量室（107）中的阳极（3A）和阴极（4K）。 测量室（107），壳体（101），用于通过真空密封通道（103）将阴极（4K）的连接杆（104）连接到外部。 测量室（107）将杆（104）保持在纯电绝缘套管（109）中。 通过可拆卸的插头连接（106），壳体（101）中的测量室（107）是可更换的。
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公开(公告)号：WO2006094927A2
公开(公告)日：2006-09-14
申请号：PCT/EP2006/060397
申请日：2006-03-02
Applicant: INFICON GMBH , WETZIG, Daniel , GERDAU, Ludolf
Inventor： WETZIG, Daniel , GERDAU, Ludolf
IPC: H01J41/06
Abstract: Die Erfindung bezieht sich auf einen Kaltkathoden-Drucksensor (10) mit einem gasdichten Gehäuse ( 12), mit einem Testgas-Einlass (18), einer Anode (14) und einer Kathode (16,17) in dem Gehäuse ( 12) und einer auf die Kathode (16,17) gerichteten Strahlungsquelle (20) zum Zünden einer Kaltkathoden-Entladung. Das Gehäuse (12) ist mindestens teilweise aus Glas gebildet. Die Strahlungsquelle (20) ist außerhalb des Gehäuses (12) angeordnet und strahlt durch das Gehäuse-Glas auf die Kathode (16,17). Die Strahlungsquelle (20) strahlt im Wesentlichen Strahlung einer Wellenlänge von mehr als 350 nm und weniger als 1.400 nm aus.
Abstract translation: 本发明涉及一种冷阴极压力传感器（10）与气密壳体（12），具有一个标定气体入口（18），阳极（14）和在壳体（12）的阴极（16,17）和一个 涉及用于点亮冷阴极放电的阴极（16,17）的辐射源（20）。 所述壳体（12）至少部分地由玻璃形成。 所述辐射源（20）被布置在所述壳体（12）的外侧，并通过在阴极（16,17）的外壳玻璃辐射。 所述辐射源（20）发射辐射基本上波长大于350nm且小于1400纳米更长。
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24.发明公开IONIZATION GAUGE HAVING ELECTRON MULTIPLIER COLD EMMISSION SOURCE 审中-公开IONISATIONSMESSGERÄT与电子倍增器冷任务SOURCE
公开(公告)号：EP2232224A4
公开(公告)日：2015-07-01
申请号：EP08868368
申请日：2008-12-17
Applicant: MKS INSTR INC
Inventor： BRUCKER GERARDO A
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25.发明公开IONIZATION GAUGE HAVING ELECTRON MULTIPLIER COLD EMMISSION SOURCE 审中-公开IONISATIONSMESSGERÄT与电子倍增器冷任务SOURCE
公开(公告)号：EP2232224A2
公开(公告)日：2010-09-29
申请号：EP08868368.5
申请日：2008-12-17
Applicant: Brooks Automation, Inc.
Inventor： BRUCKER, Gerardo, A.
Abstract: An ionization gauge includes an electron generator array that includes a microchannel plate that includes an electron generating portion of the microchannel plate comprising a source for generating seed electrons and an electron multiplier portion of the microchannel plate, responsive to the seed electrons generated by the electron generating portion, that multiplies the electrons. The ionization gauge includes an ionization volume in which the electrons impact a gaseous species, and a collector electrode for collecting ions formed by the impact between the electrons and gas species. The collector electrode can be surrounded by the anode, or the ionization gauge can be formed with multiple collector electrodes. The source of electrons can provide for a spontaneous emission of electrons, where the electrons are multiplied in a cascade.
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Patent Agency Ranking
公开(公告)号：EP1725847A2
公开(公告)日：2006-11-29
申请号：EP05725266.0
申请日：2005-03-10
Applicant: Brooks Automation, Inc.
Inventor： ARNOLD, Paul, C. , RUTT, Paul, M.
Abstract: An ionization gauge for isolating an electron source from gas molecules includes the electron source for generating electrons, a collector electrode for collecting ions formed by the impact between the electrons and gas molecules, and an electron window which isolates the electron source from the gas molecules. The ionization gauge can have an anode which defines an anode volume and retains the electrons in a region of the anode. The ionization gauge can have a plurality of electron sources and/or collector electrodes. The collector electrode(s) can be located within the anode volume or outside the anode volume. The ionization gauge can have a mass filter for separating the ions based on mass-to-charge ratio. The ionization gauge can be a Bayard-Alpert type that measures pressure or a residual gas analyzer that determines a gas type.
Abstract translation: 用于将电子源与气体分子隔离的电离计包括用于产生电子的电子源，用于收集由电子和气体分子之间的碰撞形成的离子的集电极以及将电子源与气体分子隔离的电子窗口。 电离计可具有限定阳极体积并将电子保持在阳极区域中的阳极。 电离计可以具有多个电子源和/或集电极。 集电极可位于阳极体积内或阳极体积外。 电离计可以具有用于基于质荷比分离离子的质量过滤器。 电离规可以是测量压力的Bayard-Alpert型或确定气体类型的残余气体分析仪。
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公开(公告)号：EP0622621B1
公开(公告)日：1998-07-15
申请号：EP94301848.1
申请日：1994-03-15
Applicant: THE FREDERICKS COMPANY
Inventor： Drubetsky, Emil , Taylor, Donald R., Jr.
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公开(公告)号：EP0799413A1
公开(公告)日：1997-10-08
申请号：EP95932704.0
申请日：1995-09-09
Applicant: LEYBOLD VACUUM GmbH
Inventor： KÜSTER, Gerhard
Abstract: The invention pertains to a Penning measuring cell (1) with an electrode system that comprises an anode (5) and a cathode (2), which are situated in the magnetic field of a permanent magnet (8, 9), and with an ignition aid (11) for the electrode system (2, 5). To ensure rapid and reliable ignition the invention proposes attaching to the anode (5) as ignition aid (11) at least one metal strip (11) the free end of which extends towards the cathode (2).
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29.发明公开
公开(公告)号：EP0622621A2
公开(公告)日：1994-11-02
申请号：EP94301848.1
申请日：1994-03-15
Applicant: THE FREDERICKS COMPANY
Inventor： Drubetsky, Emil , Taylor, Donald R., Jr.
Abstract: A cold cathode ionization gauge includes a first electrode (12) and a second electrode (20) which are spaced apart and insulated from one another and have a common axis. A magnetic field generator surrounds the gauge and applies a magnetic field along the common axis of the electrodes. The magnetic field generator includes at least one pair of opposed axially magnetized magnets (32, 34) adjacent to each other. The magnet arrangement minimizes magnetic flux outside the gauge while increasing the strength of the magnetic flux inside the gauge. The magnetic arrangement also allows the gauge to be ignited in a very high vacuum, thereby extending the operating range of the gauge.
Abstract translation: 冷阴极电离计包括第一电极（12）和第二电极（20），第一电极（12）和第二电极（20）彼此间隔开并且彼此绝缘并具有公共轴线。 磁场发生器围绕测量仪并沿着电极的公共轴施加磁场。 磁场发生器包括彼此相邻的至少一对相对的轴向磁化磁体（32,34）。 磁体布置使仪表外侧的磁通量最小化，同时增加了量规内的磁通量的强度。 磁性装置还允许在非常高的真空中点燃仪表，从而延长量规的工作范围。
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公开(公告)号：EP4375635A3
公开(公告)日：2024-08-14
申请号：EP24165538.0
申请日：2019-05-21
Applicant: MKS Instruments, Inc.
Inventor： BRUCKER, Gerardo, A. , SWINNEY, Timothy, C. , PERCY, Clinton, L.
Abstract: A total pressure cold cathode ionization gauge is disclosed. An inverted magnetron electrode design is capable of simultaneously detecting and measuring total gas pressure in a high vacuum system, along with partial pressures of one or more gases, such as hydrogen, helium and water. In addition, a leak detector, such as a helium leak detector, is disclosed with a compact counterflow arrangement of a gas inlet passage to an ion detection passage.
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