STRUCTURE AND FABRICATION OF ELECTRON-EMITTING DEVICE HAVING ELECTRODE WITH OPENINGS THAT FACILITATE SHORT-CIRCUIT REPAIR
    22.
    发明公开
    STRUCTURE AND FABRICATION OF ELECTRON-EMITTING DEVICE HAVING ELECTRODE WITH OPENINGS THAT FACILITATE SHORT-CIRCUIT REPAIR 审中-公开
    STRUKTUR UND HERSTELLUNG EINER ELEKTRONENEMITTIERENDEN VORRICHTUNG MIT ELEKTRODE,MIT ZUR ERLEICHTERUNG VON KURZSCHLUSSPREPARATURVERSEHENÖFFNUNGEN

    公开(公告)号:EP1075705A4

    公开(公告)日:2001-07-25

    申请号:EP99918715

    申请日:1999-04-19

    CPC classification number: H01J3/022 H01J2329/00

    Abstract: An electrode (12 or 30) of an electron-emitting device has a plurality of openings (16 or 60) spaced laterally apart from one another. The openings can be used, as needed, in selectively separating one or more parts of the electrode from the remainder of the electrode during corrective test directed towards repairing any short-circuit defects that may exist between the electrode and other overlying or underlying electrodes. When the electrode with the openings is an emitter electrode (12), each opening (16) normally extends fully across an overlying control electrode (30). When the electrode with the openings is a control electrode (30), each opening (60) normally extends fully across an underlying emitter electrode (12). The short-circuit repair procedure typically entails directing light energy on appropriate portions of the electrode with the openings.

    Abstract translation: 电子发射器件的电极(12或30)具有多个彼此横向隔开的开口(16或60)。 根据需要,这些开口可以用于在纠正测试期间选择性地将电极的一个或多个部分从电极的其余部分分离,以指导修复可能存在于电极与其他上覆或下层电极之间的任何短路缺陷。 当具有开口的电极是发射电极(12)时,每个开口(16)通常完全跨过覆盖的控制电极(30)延伸。 当具有开口的电极是控制电极(30)时,每个开口(60)通常完全延伸穿过下面的发射电极(12)。 短路修复程序通常需要将光能引导到具有开口的电极的适当部分上。

    Negative ion-based neutral beam injector

    公开(公告)号:NZ745718A

    公开(公告)日:2019-12-20

    申请号:NZ74571813

    申请日:2013-09-04

    Applicant: TAE TECH INC

    Abstract: Until quite recently, the neutral beams used in magnetic fusion research, material processing, etching, sterilisation and other applications were all formed from positive ions. Neutral beams require energies well beyond that accessible with positive ions. Negative-ion-based neutral beams have been developed in recent years. However, beam currents achieved so far are significantly less than that produced quite routinely by positive ion sources. A negative ion-based beam injector comprises an ion source adapted to produce a negative ion beam, wherein the ion source includes a plasma box with internal walls maintainable at elevated temperatures of about 150-200° C, a pre-accelerator, a high energy accelerator interconnected to and spaced apart from the pre-accelerator and ion source by a transition zone interposing the pre-accelerator and the high energy accelerator, wherein the transition zone comprises a pair of deflecting magnets that enable a beam from the pre-accelerator to shift off axis from an axis of the pre-accelerator and onto a non-coaxial axis of the accelerator before entering the high energy accelerator, wherein the pre-accelerator include one or more positively biased electrodes to repel back streaming positive ions.

    Focusing lens for electron emitter
    26.
    发明专利

    公开(公告)号:AU2002310391A1

    公开(公告)日:2003-01-02

    申请号:AU2002310391

    申请日:2002-06-10

    Abstract: An electron lens is used for focusing electrons from a cathode to an anode. The lens includes a first conductive layer with a first opening at a first distance from the cathode. The first conductive layer is held at a first voltage. The lens also includes a second conductive layer with a second opening at a second distance from the first conductive layer and a third distance from the anode. The second conductive layer is held at a second voltage substantially equal to the voltage of the anode. The first and second openings are chosen based on the first voltage, the second voltage, the first distance, the second distance and the third distance. The opening focuses the electrons emitted from the cathode onto the anode to a spot size preferably less than 40 nanometers. The force created between the cathode and anode is minimized by the structure of the lens.

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