公开(公告)号：US08697552B2

公开(公告)日：2014-04-15

申请号：US13363347

申请日：2012-01-31

Applicant: Babak Adibi ,  Moon Chun

Inventor： Babak Adibi ,  Moon Chun

IPC: H01L21/223

CPC classification number: H01L31/1876 ,  C23C14/042 ,  C23C14/48 ,  H01J37/185 ,  H01J37/3171 ,  H01J37/32412 ,  H01J37/32422 ,  H01J2237/0437 ,  H01J2237/184 ,  H01J2237/201 ,  H01J2237/327 ,  H01J2237/3365 ,  H01L21/2236 ,  H01L31/068 ,  H01L31/0682 ,  H01L31/1804 ,  H01L31/1864 ,  Y02E10/547 ,  Y02P70/521

Abstract: A method of ion implantation comprising: providing a plasma within a plasma region of a chamber; positively biasing a first grid plate, wherein the first grid plate comprises a plurality of apertures; negatively biasing a second grid plate, wherein the second grid plate comprises a plurality of apertures; flowing ions from the plasma in the plasma region through the apertures in the positively-biased first grid plate; flowing at least a portion of the ions that flowed through the apertures in the positively-biased first grid plate through the apertures in the negatively-biased second grid plate; and implanting a substrate with at least a portion of the ions that flowed through the apertures in the negatively-biased second grid plate.

Abstract translation: 一种离子注入的方法，包括：在室的等离子体区域内提供等离子体; 使第一格栅板向正偏置，其中第一格栅板包括多个孔; 负偏置第二格栅板，其中所述第二格板包括多个孔; 使来自等离子体区域中的等离子体的离子通过正偏置的第一格栅板中的孔流动; 使流经所述正偏置的第一格栅板中的孔的至少一部分离子流过负偏压的第二格栅板中的孔; 以及用至少一部分离子注入衬底，所述离子流过所述负偏压的第二栅格板中的所述孔。

公开(公告)号：US08558197B2

公开(公告)日：2013-10-15

申请号：US12882432

申请日：2010-09-15

Applicant: Heng-Gung Chen

Inventor： Heng-Gung Chen

IPC: G21G5/00

CPC classification number: H01J37/3171 ,  H01J37/20 ,  H01J2237/201 ,  H01J2237/20285 ,  H01J2237/24507

Abstract: An ion implanting system includes an ion beam generator configured for generating a first ion beam; a mass separation device configured for isolating a second ion beam including required ions from the first ion beam; a holder device configured for holding a plurality of substrates, wherein the holder device and the second ion beam reciprocate relative to each other along a first direction in straight line or arc to make the plurality of substrates pass across a projection region of the second ion beam; and a first detector configured for obtaining relevant parameters of the second ion beam. The above ion beam implanting system may increase the ion beam utilization rate. The ion implanting system further comprises a second detector arranged on the holder device which could fully scan across the projection range of the second ion beam and obtaining the relevant parameters of the second ion beam.

Abstract translation: 离子注入系统包括被配置用于产生第一离子束的离子束发生器; 质量分离装置，被配置为将包含所需离子的第二离子束与第一离子束隔离; 保持装置，其构造成保持多个基板，其中所述保持器装置和所述第二离子束沿着第一方向相对于彼此沿直线或弧线往复运动，以使所述多个基板穿过所述第二离子束的投影区域 ; 以及第一检测器，被配置为获得所述第二离子束的相关参数。 上述离子束注入系统可以增加离子束的利用率。 离子注入系统还包括布置在保持器装置上的第二检测器，其可完全扫描第二离子束的投影范围并获得第二离子束的相关参数。

公开(公告)号：US08366857B2

公开(公告)日：2013-02-05

申请号：US12695297

申请日：2010-01-28

Applicant: Kenneth Hayworth ,  Amy Au Hayworth

Inventor： Kenneth Hayworth ,  Amy Au Hayworth

IPC: B32B37/22 ,  B32B38/10 ,  B32B38/04 ,  B65C9/04 ,  B65C9/06 ,  G01N1/06 ,  B65H75/00 ,  B32B37/02 ,  B65H75/04 ,  B65H81/02

CPC classification number: G01N1/06 ,  G01N1/286 ,  G01N1/312 ,  G01N2001/066 ,  G01N2001/362 ,  H01J2237/201 ,  H01J2237/202 ,  H01J2237/26 ,  Y10T156/1052 ,  Y10T156/1056 ,  Y10T156/1057 ,  Y10T156/1059 ,  Y10T156/1062 ,  Y10T156/12 ,  Y10T156/1322 ,  Y10T156/1712

Abstract: Methods, apparatus and systems for collecting thin tissue samples for imaging. Thin tissue sections may be cut from tissue samples using a microtome-quality knife. In one example, tissue samples are mounted to a substrate that is rotated such that thin tissue sections are acquired via lathing. Collection of thin tissue sections may be facilitated by a conveyor belt. Thin tissue sections may be mounted to a thin substrate (e.g., by adhering thin tissue sections to a thin substrate via a roller mechanism) that may be imaged, for example, by an electron beam (e.g., in an electron microscope). This tissue sections may be strengthened before cutting via a blockface thinfilm deposition technique and/or a blockface taping technique. An automated reel-to-reel imaging technique may be employed for collected/mounted tissue sections to facilitate random-access imaging of tissue sections and maintaining a comprehensive library including a large volume of samples.

Abstract translation: 用于收集用于成像的薄组织样本的方法，装置和系统。 可以使用切片机质量刀从组织样品切割薄组织切片。 在一个实例中，将组织样品安装到旋转的基底上，使得通过车床获得薄的组织切片。 通过传送带可以促进薄组织切片的收集。 薄组织切片可以例如通过电子束（例如，在电子显微镜中）被安装到薄基底（例如，通过将薄组织切片通过辊机构粘附到薄基底上）。 在经由块状薄膜沉积技术和/或块状胶带技术切割之前，可以加强该组织切片。 可以采用自动卷线对卷成像技术来收集/安装的组织切片，以促进组织切片的随机取景成像并维持包括大量样品的综合库。

公开(公告)号：US20120117696A1

公开(公告)日：2012-05-10

申请号：US12942403

申请日：2010-11-09

Applicant: Michael Hatzistergos ,  Christopher M. Molella ,  Paul Ronsheim ,  Matthew F. Stanton

Inventor： Michael Hatzistergos ,  Christopher M. Molella ,  Paul Ronsheim ,  Matthew F. Stanton

IPC: G01Q70/00 ,  G01Q70/16

CPC classification number: H01J37/20 ,  B82Y35/00 ,  H01J37/285 ,  H01J2237/201 ,  H01J2237/2855

Abstract: An integrated coupon structure for atom probe tomography (APT) analysis includes a base portion and an array of microtip posts protruding from the base portion. Both the base portion and the microtip posts formed from a same metal material, and the microtip posts being shaped at an apex thereof so as to be adapted to receive a sample attached thereto.

Abstract translation: 用于原子探针断层摄影（APT）分析的综合优惠券结构包括基部和从基部突出的微尖柱阵列。 基座部分和微销支柱都由相同的金属材料形成，并且微尖柱在其顶点成形，以适于接收附着于其上的样品。

公开(公告)号：US08173971B2

公开(公告)日：2012-05-08

申请号：US12788037

申请日：2010-05-26

Applicant: Takashi Gunji ,  Hidetoshi Sato ,  Katsuya Kawakami ,  Hideki Yatabe

Inventor： Takashi Gunji ,  Hidetoshi Sato ,  Katsuya Kawakami ,  Hideki Yatabe

IPC: G01B15/00 ,  H01L21/677

CPC classification number: H01L21/67769 ,  H01J37/20 ,  H01J37/28 ,  H01J2237/201 ,  H01J2237/204 ,  H01J2237/2816 ,  H01J2237/2817 ,  H01L21/67236 ,  H01L21/67259 ,  H01L21/67742

Abstract: There is provided a mini environment type transfer unit which can efficiently transfer a sample to a critical dimension scanning electron microscope (CD-SEM) even in the case of use of a SMIF pod which can store only one photomask. In addition to a load port, a stocker which can store a plurality of photomasks is provided in the mini environment type transfer unit. A mask storage slot in which a plurality of storage units are stacked is provided in the stocker, and one photomask is stored in each storage unit. A sensor is provided in each storage unit to determine whether or not the photomask is normally stored. Additionally, a sensor is provided in each storage unit to detect whether or not the photomask exists.

Abstract translation: 提供了即使在使用只能存储一个光掩模的SMIF盒的情况下也可以将样品有效地转移到临界尺寸扫描电子显微镜（CD-SEM）的微型环境型转印单元。 除了负载端口之外，可以存储多个光掩模的储料器设置在迷你环境型转印单元中。 储存器中设置有多个存储单元堆叠的掩模存储槽，并且在每个存储单元中存储一个光掩模。 在每个存储单元中提供传感器以确定光掩模是否正常存储。 此外，在每个存储单元中提供传感器以检测是否存在光掩模。

公开(公告)号：US20120074320A1

公开(公告)日：2012-03-29

申请号：US13239535

申请日：2011-09-22

Applicant: Josef BIBERGER ,  Ralph Pulwey

Inventor： Josef BIBERGER ,  Ralph Pulwey

IPC: H01J37/26 ,  H01J37/20

CPC classification number: H01J37/28 ,  H01J37/20 ,  H01J2237/201 ,  H01J2237/20207 ,  H01J2237/20214 ,  H01J2237/20221 ,  H01J2237/20285 ,  H01J2237/20292

Abstract: A particle beam device and a sample receptacle apparatus, which has a sample holder, are disclosed. The sample holder is arranged in a movable fashion along at least a first axis and along at least a second axis. Furthermore, the sample holder is arranged in a rotatable fashion about a first axis of rotation and about a second axis of rotation. A first sample holding device is arranged relative to the sample holder in a rotatable fashion about a third axis of rotation, in which the third axis of rotation and the second axis of rotation are at least in part arranged laterally offset with respect to one another. Furthermore, a control apparatus is provided, in which the first sample holding device is rotatable about the third axis of rotation into an analysis position and/or treating position using the control apparatus.

Abstract translation: 公开了一种具有样品保持器的粒子束装置和样品容器装置。 样品保持器沿着至少第一轴线和至少第二轴线以可移动的方式布置。 此外，样品保持器围绕第一旋转轴线和约第二旋转轴线可旋转地布置。 第一样品保持装置以关于第三旋转轴线的可旋转方式相对于样品保持器布置，其中第三旋转轴线和第二旋转轴线至少部分地相对于彼此横向偏移地布置。 此外，提供一种控制装置，其中第一样品保持装置可以使用控制装置绕第三旋转轴线旋转到分析位置和/或处理位置。

公开(公告)号：US20120006711A1

公开(公告)日：2012-01-12

申请号：US13043220

申请日：2011-03-08

Applicant: Steven L. Goodman ,  Jack LaSee ,  Mark T. Nelson

Inventor： Steven L. Goodman ,  Jack LaSee ,  Mark T. Nelson

IPC: B65D85/48

CPC classification number: H01J37/20 ,  H01J2237/2007 ,  H01J2237/201

Abstract: A device for holding a specimen holder, the device including a body with a slot formed therein. The slot includes an interior for receiving the specimen holder which may be a flat disk with edges and a pair of opposing sides. The disk may be made of a resilient deformable material. The slot may be sized to receive the specimen holder through an open top end and may taper from top bottom, such that the bottom end of the slot is smaller than the specimen holder. The slot further configured to contact the specimen holder along edges of the specimen holder and to allow some sideways deformation of the specimen holder without either side of the specimen holder distant from the edges coming into contact with the interior of the slot.

Abstract translation: 一种用于保持试样保持器的装置，该装置包括其中形成有槽的主体。 狭槽包括用于容纳样品架的内部，其可以是具有边缘的平板和一对相对的侧面。 盘可以由弹性可变形材料制成。 狭槽的尺寸可以通过敞开的顶端容纳样品架，并且可以从顶部底部逐渐变细，使得狭槽的底端小于样品架。 所述槽进一步构造成沿着所述试样保持器的边缘接触所述试样保持器，并且允许所述试样保持器的一些侧向变形，而所述试样保持器的任何一侧远离所述边缘与所述槽的内部接触。

公开(公告)号：US20120000629A1

公开(公告)日：2012-01-05

申请号：US13172366

申请日：2011-06-29

Applicant: Masaya ODAGIRI ,  Yusuke MURAKI ,  Jin FUJIHARA

Inventor： Masaya ODAGIRI ,  Yusuke MURAKI ,  Jin FUJIHARA

IPC: F28D15/00

CPC classification number: H01L21/67248 ,  C23C16/4586 ,  C23C16/463 ,  H01J37/20 ,  H01J37/32724 ,  H01J37/32779 ,  H01J2237/2001 ,  H01J2237/201 ,  H01L21/68771

Abstract: A substrate processing apparatus includes a substrate stage for mounting two or more substrates thereon. The substrate stage includes substrate stage units. Each of the substrate stage units includes a central temperature control flow path for controlling the temperature of a central portion of each of the substrates and a peripheral temperature control flow path for controlling the temperature of a peripheral portion of each of the substrates. The central temperature control flow path and the peripheral temperature control flow path are formed independently of each other. The substrate stage includes one temperature control medium inlet port for introducing therethrough a temperature control medium into the peripheral temperature control flow path and temperature control medium outlet ports for discharging therethrough the temperature control medium from the peripheral temperature control flow path. The number of the temperature control medium outlet ports corresponds to the number of substrates.

Abstract translation: 基板处理装置包括用于在其上安装两个或更多个基板的基板台。 衬底台包括衬底台单元。 每个基板台单元包括用于控制每个基板的中心部分的温度的中央温度控制流路和用于控制每个基板的周边部分的温度的外围温度控制流路。 中央温度控制流路和周边温度控制流路彼此独立地形成。 基板台包括一个温度控制介质入口，用于将温度控制介质引入周边温度控制流路和温度控制介质出口，用于从温度控制流路通过温度控制介质排出。 温度控制介质出口的数量对应于基板的数量。

公开(公告)号：US20110155906A1

公开(公告)日：2011-06-30

申请号：US13000593

申请日：2009-06-11

Applicant: Shohei Terada ,  Yoshifumai Taniguchi

Inventor： Shohei Terada ,  Yoshifumai Taniguchi

IPC: H01J37/26 ,  H01J37/20

CPC classification number: H01J37/28 ,  H01J37/20 ,  H01J37/244 ,  H01J2237/201 ,  H01J2237/20264 ,  H01J2237/2446 ,  H01J2237/24485 ,  H01J2237/2802

Abstract: A transmission electron microscope apparatus, a sample holder and a sample stage and a method for acquiring spectral images as well are provided which can acquire spectral images at a time from a plurality of samples and measure highly accurate chemical shifts from electron energy loss spectra extracted from the spectral images.A transmission electron microscope apparatus comprises an electron gun for emitting an electron beam, a condenser lens for converging the emitted electron beam, a plurality of sample stages radiated with a converged electron beam and adapted to mount samples, a sample movement control unit for moving the sample stages, image-forming lenses for forming an image of an electron beam having transmitted through the plural samples, an electron spectrometer adapted to perform spectrometry of the electron beam in accordance with energy amounts the image-formed electron beam has and deliver spectral images obtained at convergence positions which are different in energy dispersion axis direction and in a direction orthogonal to the energy dispersion axis direction to thereby acquire spectral images from the plural samples at a time, and an image display unit for displaying acquired spectral images.

Abstract translation: 提供透射电子显微镜装置，样品架和样品台以及用于获取光谱图像的方法，其可以从多个样品一次获得光谱图像，并且从提取的电子能量损失谱测量高精度的化学位移 光谱图像。 一种透射电子显微镜装置，包括用于发射电子束的电子枪，用于会聚发射的电子束的聚光透镜，用会聚的电子束辐射并适合安装样品的多个样品台，用于移动 样品级，用于形成透过多个样品的电子束的图像的成像透镜，适于根据图像形成的电子束的能量进行电子束的光谱测定的电子光谱仪，并且传送所获得的光谱图像 在能量色散轴方向和与能量色散轴方向正交的方向上不同的会聚位置，从而一次从多个样本获取光谱图像，以及用于显示所取得的光谱图像的图像显示单元。

公开(公告)号：US07939801B2

公开(公告)日：2011-05-10

申请号：US12270422

申请日：2008-11-13

Applicant: Hiroto Kasai ,  Ken Harada

Inventor： Hiroto Kasai ,  Ken Harada

IPC: H01J37/26

CPC classification number: H01J37/26 ,  H01J37/141 ,  H01J37/20 ,  H01J2237/14 ,  H01J2237/20 ,  H01J2237/201 ,  H01J2237/2802

Abstract: An electron beam observation device includes a mechanism which disposes a specimen at an upstream side in an electron beam traveling direction outside an objective lens, from which an image is transferred under a magnification of ⅕ to 1/30, in addition to an inside of the objective lens in which a specimen is disposed at a time of ordinary observation.

Abstract translation: 一种电子束观察装置，其特征在于，具有将物镜外侧的电子束行进方向的上游侧的样本配置在除了内侧以外的图像在⅕〜 在普通观察时放置样本的物镜。