公开(公告)号：US07939424B2

公开(公告)日：2011-05-10

申请号：US12212386

申请日：2008-09-17

Applicant: Yuri Erokhin ,  Paul Sullivan ,  Steven R. Walther ,  Peter Nunan

Inventor： Yuri Erokhin ,  Paul Sullivan ,  Steven R. Walther ,  Peter Nunan

IPC: H01L21/30 ,  H01L21/46

CPC classification number: H01L21/76251 ,  H01J37/20 ,  H01J37/3171 ,  H01J2237/201 ,  H01J2237/202 ,  H01L21/26506 ,  H01L21/6835 ,  H01L2221/68359 ,  H01L2924/30105

Abstract: A method for wafer bonding two substrates activated by ion implantation is disclosed. An in situ ion bonding chamber allows ion activation and bonding to occur within an existing process tool utilized in a manufacturing process line. Ion activation of at least one of the substrates is performed at low implant energies to ensure that the wafer material below the thin surface layers remains unaffected by the ion activation.

Abstract translation: 公开了一种通过离子注入激活的晶片接合两个基板的方法。 原位离子键合室允许离子激活和结合发生在制造工艺线中使用的现有工艺工具中。 在低注入能量下进行至少一个衬底的离子激活，以确保薄表面层下面的晶片材料不受离子激活的影响。

公开(公告)号：US20110027486A1

公开(公告)日：2011-02-03

申请号：US12590664

申请日：2009-11-12

Applicant: Kai-Li Jiang ,  Li-Na Zhang ,  Hao-Xu Zhang ,  Shou-Shan Fan

Inventor： Kai-Li Jiang ,  Li-Na Zhang ,  Hao-Xu Zhang ,  Shou-Shan Fan

IPC: B05D3/00

CPC classification number: H01J37/20 ,  G01N1/38 ,  H01J2237/201 ,  H01J2237/31745

Abstract: The present invention relates to a method for preparing a transmission electron microscope sample. An amount of nano-scale specimens and an amount of graphene sheets are dispersed into a solvent, thereby achieving a dispersed solution. A transmission electron microscope grid including a carbon nanotube film structure is provided. A portion of the carbon nanotube film structure is suspended. The dispersed solution is applied on the carbon nanotube film structure. The solvent in the carbon nanotube structure is removed.

Abstract translation: 本发明涉及一种透射电子显微镜样品的制备方法。 将一定量的纳米级样品和一定量的石墨烯片分散在溶剂中，从而实现分散溶液。 提供了包括碳纳米管膜结构的透射电子显微镜栅格。 一部分碳纳米管膜结构被悬浮。 将分散的溶液施加在碳纳米管膜结构上。 除去碳纳米管结构中的溶剂。

公开(公告)号：US20100323445A1

公开(公告)日：2010-12-23

申请号：US12695297

申请日：2010-01-28

Applicant: Kenneth Jeffrey Hayworth ,  Amy Au Hayworth

Inventor： Kenneth Jeffrey Hayworth ,  Amy Au Hayworth

IPC: C12N5/071

CPC classification number: G01N1/06 ,  G01N1/286 ,  G01N1/312 ,  G01N2001/066 ,  G01N2001/362 ,  H01J2237/201 ,  H01J2237/202 ,  H01J2237/26 ,  Y10T156/1052 ,  Y10T156/1056 ,  Y10T156/1057 ,  Y10T156/1059 ,  Y10T156/1062 ,  Y10T156/12 ,  Y10T156/1322 ,  Y10T156/1712

Abstract: Methods, apparatus and systems for collecting thin tissue samples for imaging. Thin tissue sections may be cut from tissue samples using a microtome-quality knife. In one example, tissue samples are mounted to a substrate that is rotated such that thin tissue sections are acquired via lathing. Collection of thin tissue sections may be facilitated by a conveyor belt. Thin tissue sections may be mounted to a thin substrate (e.g., by adhering thin tissue sections to a thin substrate via a roller mechanism) that may be imaged, for example, by an electron beam (e.g., in an electron microscope). This tissue sections may be strengthened before cutting via a blockface thinfilm deposition technique and/or a blockface taping technique. An automated reel-to-reel imaging technique may be employed for collected/mounted tissue sections to facilitate random-access imaging of tissue sections and maintaining a comprehensive library including a large volume of samples.

Abstract translation: 用于收集用于成像的薄组织样本的方法，装置和系统。 可以使用切片机质量刀从组织样品切割薄组织切片。 在一个实例中，将组织样品安装到旋转的基底上，使得通过车床获得薄的组织切片。 通过传送带可以促进薄组织切片的收集。 薄组织切片可以例如通过电子束（例如，在电子显微镜中）被安装到薄基底（例如，通过将薄组织切片通过辊机构粘附到薄基底上）。 在经由块状薄膜沉积技术和/或块状胶带技术切割之前，可以加强该组织切片。 可以采用自动卷线对卷成像技术来收集/安装的组织切片，以促进组织切片的随机取景成像并维持包括大量样品的综合库。

公开(公告)号：US20100314552A1

公开(公告)日：2010-12-16

申请号：US12547195

申请日：2009-08-25

Applicant: Junichi Tatemichi ,  Masatoshi Onoda ,  Kohichi Orihira

Inventor： Junichi Tatemichi ,  Masatoshi Onoda ,  Kohichi Orihira

IPC: C23C14/50

CPC classification number: H01L21/67213 ,  H01J37/20 ,  H01J2237/2007 ,  H01J2237/201 ,  H01J2237/204 ,  H01J2237/31701 ,  H01L21/68764 ,  H01L21/68771

Abstract: An ion implanter includes an implantation chamber into which an ion beam is introduced, a holder for holding substrates on two columns of a first column and a second column in an X-direction, and a holder driving unit having a function of setting the holder in a horizontal state and then positioning the holder in a substrate exchange position and a function of setting the holder in a standing state and then driving reciprocally and linearly the holder along the X-direction in an irradiation area of the ion beam. Also, the ion implanter includes two load lock mechanisms, and two substrate carrying units equipped with arms, which carry the substrates between the load lock mechanisms and a substrate exchange position respectively, every two arms.

Abstract translation: 离子注入机包括：入射离子束的注入室，用于将基板保持在X方向上的第一列和第二列的两列的保持器，以及具有将所述保持器设置为的功能的保持器驱动单元 水平状态，然后将保持器定位在基板更换位置中，并且具有将支架设置在立起状态，然后在离子束的照射区域沿X方向往复并直线地驱动保持器的功能。 此外，离子注入机还包括两个装载锁定机构，以及两个装有臂的基板承载单元，每个臂分别在两个载荷锁定机构和基板更换位置之间承载基板。

公开(公告)号：US07675050B2

公开(公告)日：2010-03-09

申请号：US11759876

申请日：2007-06-07

Applicant: Jiong Chen

Inventor： Jiong Chen

IPC: H01J37/317 ,  H01J37/28

CPC classification number: H01J37/3171 ,  H01J37/05 ,  H01J37/08 ,  H01J37/1472 ,  H01J2237/04756 ,  H01J2237/057 ,  H01J2237/083 ,  H01J2237/1503 ,  H01J2237/201 ,  H01J2237/20221 ,  H01J2237/30472 ,  H01J2237/31701

Abstract: An ion implantation apparatus with multiple operating modes is disclosed. The ion implantation apparatus has an ion source and an ion extraction means for extracting a ribbon-shaped ion beam therefrom. The ion implantation apparatus includes a magnetic analyzer for selecting ions with specific mass-to-charge ratio to pass through a mass slit to project onto a substrate. Multipole lenses are provided to control beam uniformity and collimation. A two-path beamline in which a second path incorporates a deceleration or acceleration system incorporating energy filtering is disclosed. Finally, methods of ion implantation are disclosed in which the mode of implantation may be switched from one-dimensional scanning of the target to two-dimensional scanning.

Abstract translation: 公开了一种具有多种工作模式的离子注入装置。 离子注入装置具有离子源和用于从其提取带状离子束的离子提取装置。 离子注入装置包括用于选择具有特定质荷比的离子的磁分析器，以通过质量狭缝投影到基底上。 提供多极镜头以控制光束的均匀性和准直。 公开了一种二路光束线，其中第二路径包括并入能量过滤的减速或加速系统。 最后，公开了离子注入的方法，其中注入模式可以从目标的一维扫描切换到二维扫描。

公开(公告)号：US07642523B1

公开(公告)日：2010-01-05

申请号：US11797364

申请日：2007-05-02

Applicant: Andrew J. Devitt

Inventor： Andrew J. Devitt

IPC: G01F23/00 ,  G21K5/08 ,  G21K5/10 ,  G01K5/08 ,  G01K5/10

CPC classification number: H01J37/18 ,  H01J37/185 ,  H01J37/20 ,  H01J2237/2006 ,  H01J2237/201 ,  H01J2237/20207 ,  H01J2237/20221 ,  H01J2237/20292 ,  H01J2237/204

Abstract: A stage for processing a substrate, especially useful for vacuum applications, has a recess just large enough to hold a substantially flat substrate and a chuck or holder, but not much more. The perimeter of both top and bottom of the stage has air bearing surfaces separated from the recess by differentially pumped grooves and seal lands. The air bearing lands are guided between two reference surfaces and the seal lands, being substantially coplanar, create a resistance to flow between the bearings and the recess. On the other side of one of the reference plates mounts the radiation source or process. The opposite reference plate may have a large aperture, non-contact pumping port. This improves vacuum capability and stage precision. The stage may operate in a vacuum environment itself or can provide multiple stages moving between processes or inspection steps within the same tool or process sequence.

Abstract translation: 用于处理衬底的阶段，特别适用于真空应用，具有足够大以容纳基本平坦的衬底和卡盘或保持器的凹部，但不是更多。 舞台的顶部和底部的周边具有通过差分泵浦凹槽和密封平台与凹槽分离的空气轴承表面。 空气轴承平台在两个参考表面之间引导，并且密封平台基本上共面，从而产生轴承和凹槽之间的流动阻力。 在其中一个参考板的另一侧安装辐射源或过程。 相对的参考板可以具有大孔径非接触式泵送端口。 这提高了真空能力和阶段精度。 该阶段可以在真空环境中操作，或者可以在相同的工具或过程顺序内的过程或检查步骤之间提供多个阶段的移动。

公开(公告)号：US20090166536A1

公开(公告)日：2009-07-02

申请号：US12342897

申请日：2008-12-23

Applicant: Mitsuo Suga ,  Hidetoshi Nishiyama

Inventor： Mitsuo Suga ,  Hidetoshi Nishiyama

IPC: G01N23/02 ,  G01N21/01

CPC classification number: H01J37/20 ,  H01J37/26 ,  H01J2237/2004 ,  H01J2237/2005 ,  H01J2237/201 ,  H01J2237/204 ,  H01J2237/206 ,  H01J2237/262 ,  H01J2237/28

Abstract: A sample holder used in SEM (scanning electron microscopy) or TEM (transmission electron microscopy) permitting observation and inspection at higher resolution. The holder has a frame-like member provided with an opening that is covered with a film. The film has a first surface on which a sample is held. The thickness D of the film and the length L of the portion of the film providing a cover over the opening in the frame-like member satisfy a relationship given by L/D

Abstract translation: 用于SEM（扫描电子显微镜）或TEM（透射电子显微镜）中的样品架，允许以更高分辨率观察和检查。 保持器具有设置有被膜覆盖的开口的框架状构件。 该膜具有保持样品的第一表面。 膜的厚度D和在框状构件的开口上设置盖的膜的部分的长度L满足由L / D <200,000给出的关系。

公开(公告)号：US20090045349A1

公开(公告)日：2009-02-19

申请号：US11660929

申请日：2005-08-25

Applicant: David Sprinzak ,  Yiftah Karni ,  Yitzhak Ronen

Inventor： David Sprinzak ,  Yiftah Karni ,  Yitzhak Ronen

IPC: G01N21/51 ,  G01K5/10

CPC classification number: H01J37/20 ,  G01N23/2204 ,  H01J2237/2004 ,  H01J2237/2006 ,  H01J2237/2007 ,  H01J2237/201

Abstract: A sample container assembly for use in a microscope including a sample enclosure, an electron beam permeable, fluid impermeable, membrane sealing the sample enclosure from a volume outside the sample enclosure and a pressure controller assembly communicating between the sample enclosure and a volume outside the sample enclosure.

Abstract translation: 用于显微镜的样品容器组件，包括样品外壳，电子束可透过的流体不可渗透的膜，将样品外壳与样品外壳外的体积密封;以及在样品外壳和样品外部的体积之间连通的压力控制器组件 外壳。

公开(公告)号：US20090008578A1

公开(公告)日：2009-01-08

申请号：US12168241

申请日：2008-07-07

Applicant: Satoshi Tomimatsu ,  Kaoru Umemura ,  Yuichi Madokoro ,  Yoshimi Kawanami ,  Yasunori Doi

Inventor： Satoshi Tomimatsu ,  Kaoru Umemura ,  Yuichi Madokoro ,  Yoshimi Kawanami ,  Yasunori Doi

IPC: H01J37/08

CPC classification number: G01N1/32 ,  G01N1/28 ,  G01N2001/028 ,  G01N2001/045 ,  G01N2001/282 ,  H01J37/20 ,  H01J37/302 ,  H01J37/3056 ,  H01J2237/2007 ,  H01J2237/201 ,  H01J2237/202 ,  H01J2237/31732 ,  H01J2237/31745 ,  H01J2237/31749

Abstract: A specimen fabrication apparatus, including: an ion beam irradiating optical system to irradiate a sample placed in a chamber, with an ion beam; a specimen holder to mount a specimen separated by the irradiation with the ion beam; a holder cassette to hold the specimen holder; a sample stage to hold the sample and the holder cassette; and a probe to move the specimen to the specimen holder, wherein the holder cassette is transferred to outside of the chamber in a condition of holding the specimen holder with the specimen mounted.

Abstract translation: 一种标本制造装置，包括：离子束照射光学系统，用离子束照射放置在室中的样品; 用于安装通过用离子束照射分离的样本的样本保持器; 用于保持样品架的保持器盒; 用于保持样品和保持器盒的样品台; 以及用于将样本移动到样本保持器的探针，其中，在保持样本保持器的状态下，保持器盒被转移到腔室的外部。

公开(公告)号：US20080296497A1

公开(公告)日：2008-12-04

申请号：US12168232

申请日：2008-07-07

Applicant: Satoshi TOMIMATSU ,  Kaoru Umemura ,  Yuichi Madokoro ,  Yoshimi Kawanami ,  Yasunori Doi

Inventor： Satoshi TOMIMATSU ,  Kaoru Umemura ,  Yuichi Madokoro ,  Yoshimi Kawanami ,  Yasunori Doi

IPC: G01N23/00

CPC classification number: G01N1/32 ,  G01N1/28 ,  G01N2001/028 ,  G01N2001/045 ,  G01N2001/282 ,  H01J37/20 ,  H01J37/302 ,  H01J37/3056 ,  H01J2237/2007 ,  H01J2237/201 ,  H01J2237/202 ,  H01J2237/31732 ,  H01J2237/31745 ,  H01J2237/31749

Abstract: A system for analyzing a semiconductor device, including: a first ion beam apparatus including: a sample stage to mount a sample substrate; a vacuum chamber in which the sample stage is placed; an ion beam irradiating optical system to irradiate the sample substrate; a specimen holder that accommodates a plurality of specimens separated from the sample substrate by the irradiation of the ion beam; and a probe to extract the separated specimen from the sample substrate, and to transfer the separated specimen to the specimen holder; a second ion beam apparatus that carries out a finishing process to the specimen; and an analyzer to analyze the finished specimen, wherein the first ion beam apparatus separates the specimen and the probe in a vacuum condition.

Abstract translation: 一种用于分析半导体器件的系统，包括：第一离子束装置，包括：样品台，用于安装样品基板; 其中放置样品台的真空室; 离子束照射光学系统照射样品基板; 样本保持器，其容纳通过离子束的照射与样品基板分离的多个样本; 以及从所述样品基材中提取分离出的试样并将分离的试样转移到所述试样保持器的探针。 对样品进行精加工的第二离子束装置; 以及用于分析成品样品的分析器，其中所述第一离子束装置在真空条件下分离所述样品和所述探针。