公开(公告)号：AT329284T

公开(公告)日：2006-06-15

申请号：AT98949533

申请日：1998-09-24

Applicant: REFLECTIVITY INC

Inventor： HUIBER ANDREW GERRIT

IPC: G02B26/00 ,  G02B26/08

公开(公告)号：DE20122372U1

公开(公告)日：2005-05-19

申请号：DE20122372

申请日：2001-08-03

Applicant: REFLECTIVITY INC

IPC: B81B3/00 ,  B81B7/02 ,  B81B7/04 ,  B81C1/00 ,  G02B26/08 ,  G02B27/18 ,  G03B21/00 ,  G03B21/10 ,  H04N3/08 ,  H04N5/74 ,  G02B5/08 ,  G02F1/29

Abstract: A micro-mirror (24) is connected to a substrate (10) via a post (21), a hinge (18c), a post (16c) and metal areas (12a) and an array of the micro-mirrors is disposed in a rectangular shape with a capability of rotation around a switching axis between on and off states corresponding to pixels in a viewed image. Light is directed from a source to the mirrors non-perpendicularly to at least two sides of each mirror, while reflected light is received from collection optics. Independent claims are included for an array of movable micro-mirrors, for a method of positioning an image on a target, for a method of spatially modulating light beams, for an optical micro-mirror element, for a packaged micro-electromechanical device and for a method of making a micro-mirror.

公开(公告)号：AU2003263744A1

公开(公告)日：2003-12-22

申请号：AU2003263744

申请日：2003-06-11

Applicant: REFLECTIVITY INC

Inventor： PATEL SATYADEV ,  HUIBERS ANDREW ,  RICHARDS PETER ,  SHI HONGQIN ,  CHIANG STEVE ,  DUBOC ROBERT JR ,  GROBELNY THOMAS ,  DEHLINGER DIETRICH ,  SUN ANTHONY ,  CHEN HUNG NAN

IPC: B81B3/00 ,  B81B7/00 ,  B81C1/00 ,  B81C3/00 ,  B81C99/00 ,  G02B26/08 ,  H01L21/301 ,  H01L21/60 ,  H01L23/02 ,  H01L23/22 ,  H01L23/24 ,  H01L21/00 ,  H01L21/30 ,  H01L21/46 ,  G02B26/00

Abstract: A projection system, a spatial light modulator, and a method for forming a MEMS device is disclosed. The spatial light modulator can have two substrates bonded together with one of the substrates comprising a micromirror array. The two substrates can be bonded at the wafer level after depositing a getter material and/or solid or liquid lubricant on one or both of the wafers. The wafers can be bonded together hermetically if desired, and the pressure between the two substrates can be below atmosphere.

公开(公告)号：AU2003202257A1

公开(公告)日：2003-07-30

申请号：AU2003202257

申请日：2003-01-09

Applicant: REFLECTIVITY INC

Inventor： RICHARDS PETER

IPC: G02F1/1362 ,  G09G3/20 ,  G09G3/34 ,  G09G3/36 ,  G11C11/401 ,  G11C11/404 ,  G11C11/4074 ,  G11C11/24

Abstract: A voltage storage cell circuit includes an access transistor and a storage capacitor, wherein the source of said access transistor is connected to a bitline, the gate of said access transistor is connected to a wordline, and wherein the drain of said access transistor is connected to a first plate of said storage capacitor forming a storage node, and wherein the second plate of said storage capacitor is connected to a pump signal. This arrangement allows for a novel pixel circuit design with area requirements comparable to that of a 1T1C DRAM-like pixel cell, but with the advantage of an output voltage swing of the full range allowed by the breakdown voltage of the pass transistor. A spatial light modulator such as a micromirror array can comprise such a voltage storage cell.

公开(公告)号：AU5949201A

公开(公告)日：2001-11-12

申请号：AU5949201

申请日：2001-05-03

Applicant: REFLECTIVITY INC

Inventor： RICHARDS PETER W

IPC: G02F1/13 ,  G02F1/133 ,  G03B21/10 ,  G03B21/14 ,  G09G3/20 ,  G09G3/34 ,  G09G5/10

Abstract: Methods and apparatus for producing a pulse-width-modulated (PWM) grayscale or color image using a binary spatial light modulator. By staggering and re-quantizing the PWM intervals to a clock of a period based on the frame time divided by number of rows in the display, the system's peak bandwidth requirements are optimized for displays of arbitrary resolution and arbitrary choice of PWM waveform. Additionally, a gating circuit increases the optical efficiency of a spatial light modulator using this PWM method in a field-sequential color system by reducing the duration of the blanking period between color fields.

公开(公告)号：AU3298601A

公开(公告)日：2001-08-07

申请号：AU3298601

申请日：2001-01-25

Applicant: REFLECTIVITY INC

Inventor： HUIBERS ANDREW G ,  HEUREUX PETER J

IPC: B81B3/00 ,  B81B7/04 ,  G02B26/08

Abstract: A spatial light modulator having a substrate holding an array of deflectable (e.g. mirror) elements. The deflectable elements are deflectably coupled to the substrate via corresponding hinges, each hinge being disposed on a side of the deflectable element opposite to the side on which the substrate is disposed. By placing the hinge in this way the fill factor of the array is improved. The hinge can be provided flush against the deflectable element, or it can be provided with a gap between the deflectable element and the hinge. The hinge can be attached via one or more posts or walls connecting to the substrate, and with a flexible or deformable portion that is substantially or entirely hidden from view when viewed through the substrate (e.g. a glass substrate). In one embodiment, the hinge is connected to the undersides of both the substrate and the deflectable element, and connects towards a center part of the deflectable element. In this way, a longer hinge is provided thus reducing strain on any one part of the hinge. Advantages of the present invention include: (1) increased fill factor as the torsion hinge is hidden behind the reflective plate; (2) increased contrast due to fewer scattering optical surfaces exposed, and due to a greater ability to control their angle and geometry; and (3) increased geometric flexibility to optimize electro-mechanical performance and robustness with respect to manufacturing.

公开(公告)号：US20040233505A1

公开(公告)日：2004-11-25

申请号：US10346506

申请日：2003-01-15

Applicant: REFLECTIVITY, INC., a California corporation

Inventor： Andrew G. Huibers ,  Satyadev R. Patel

IPC: G02B026/00

CPC classification number: G02B26/0841

Abstract: A MEMS device is disclosed comprising: a substrate; a movable micromechanical element movable relative to the substrate; a connector and a hinge for allowing movement of the micromechanical element, wherein the connector is made of a material different than the hinge. In another embodiment of the invention, the connector has a conductivity greater than the hinge. In a further embodiment of the invention, the hinge provides at least 90% of the restoring force to the MEMS device, and the connector provides 10% or less of the restoring force. In a further embodiment of the invention, the connector and the hinge have different spring constants. In a still further embodiment of the invention, the connector experiences a lower strain at maximum deflection of the micromechanical element than the hinge.

Abstract translation: 公开了一种MEMS器件，包括：衬底; 可移动微机械元件，其相对于所述基板移动; 用于允许微机械元件移动的连接器和铰链，其中连接器由不同于铰链的材料制成。 在本发明的另一个实施例中，连接器的导电率大于铰链。 在本发明的另一实施例中，铰链提供至少90％的恢复力到MEMS装置，并且连接器提供10％或更小的恢复力。 在本发明的另一实施例中，连接器和铰链具有不同的弹簧常数。 在本发明的另一个实施例中，连接器在微机械元件的最大偏转处经受比铰链更低的应变。

公开(公告)号：US20040100594A1

公开(公告)日：2004-05-27

申请号：US10305507

申请日：2002-11-26

Applicant: REFLECTIVITY, INC., a California corporation

Inventor： Andrew G. Huibers ,  Peter W. Richards

IPC: G02F001/135

CPC classification number: B82Y30/00 ,  G02B26/0841 ,  H04N5/7458

Abstract: A projection system, a spatial light modulator, and a method for forming micromirrors are disclosed. A substrate comprises circuitry and electrodes for electrostatically deflecting micromirror elements that are disposed within an array of such elements forming the spatial light modulator. In one embodiment, the substrate is a silicon substrate having circuitry and electrodes thereon for electrostatically actuating adjacent micromirror elements, and the substrate is fully or selectively covered with a light absorbing material.

Abstract translation: 公开了投影系统，空间光调制器和用于形成微镜的方法。 衬底包括用于静电偏转微镜元件的电路和电极，微镜元件设置在形成空间光调制器的这种元件的阵列内。 在一个实施例中，衬底是具有电路和电极的硅衬底，用于静电地驱动相邻的微镜元件，并且衬底被完全或选择性地覆盖有光吸收材料。

公开(公告)号：US20030047533A1

公开(公告)日：2003-03-13

申请号：US10167272

申请日：2002-06-10

Applicant: REFLECTIVITY, INC., a California corporation

Inventor： Jason S. Reid ,  Nungavaram S. Viswanathan

IPC: C23F001/00 ,  C23C016/00

CPC classification number: B81C1/00476 ,  B81B2201/045 ,  B81C2201/0108 ,  B81C2201/112 ,  B81C2201/117 ,  B82Y30/00

Abstract: A method comprises depositing an organic material on a substrate; depositing additional material different from the organic material after depositing the organic material; and removing the organic material with a compressed fluid. Also disclosed is a method comprising: providing an organic layer on a substrate; after providing the organic layer, providing one or more layers of a material different than the organic material of the organic layer; removing the organic layer with a compressed fluid; and providing an anti-stiction agent with a compressed fluid to material remaining after removal of the organic layer.

Abstract translation: 一种方法包括在衬底上沉积有机材料; 在沉积有机材料之后沉积与有机材料不同的附加材料; 并用压缩流体除去有机材料。 还公开了一种方法，包括：在衬底上提供有机层; 在提供有机层之后，提供与有机层的有机材料不同的一层或多层材料; 用压缩流体去除有机层; 并且在去除有机层之后向剩余的材料提供具有压缩流体的抗静电剂。

公开(公告)号：US20030036215A1

公开(公告)日：2003-02-20

申请号：US10198389

申请日：2002-07-17

Applicant: REFLECTIVITY, INC., a Delaware Corporation

Inventor： Jason S. Reid

IPC: H01L021/00 ,  C23F001/00

CPC classification number: B81B3/0078 ,  B81B2201/045 ,  B81B2203/0118

Abstract: Micromechanical devices are provided that are capable of movement due to a flexible portion. The micromechanical device can have a flexible portion formed of an oxide of preferably an element from groups 3A to 6A of the periodic table (preferably from the first two rows of these groups) and a late transition metal (preferably from groups 8B or 1B of the periodic table). The micromechanical devices can be any device, particularly MEMS sensors or actuators preferably having a flexible portion such as an accelerometer, DC relay or RF switch, optical cross connect or optical switch, or a micromirror part of an array for direct view and projection displays. The flexible portion is preferably formed by sputtering a target having a group 8B or 1B element and a selected group 3A to 6A element, namely B, Al, In, Si, Ge, Sn, or Pb. The target can have other major constituents or impurities (e.g. additional group 3A to 6A element(s)). The target is reactively sputtered in a oxygen ambient so as to result in a sputtered hinge. It is possible to form both stiff and/or flexible portions of the micromechanical device in this way.

Abstract translation: 提供能够由于柔性部分而移动的微机械装置。 微机械装置可以具有柔性部分，该柔性部分由优选来自元素周期表3A〜6A族元素的氧化物（优选地来自这些基团的前两行）和后过渡金属（优选来自该组的第8B或1B族） 周期表）。 微机械装置可以是任何装置，特别是优选地具有诸如加速度计，DC继电器或RF开关，光交叉连接或光开关的柔性部分的MEMS传感器或致动器，或用于直视和投影显示器的阵列的微镜部分。 柔性部分优选通过溅射具有组8B或1B元素的靶和选定的3A至6A元素，即B，Al，In，Si，Ge，Sn或Pb来形成。 靶可以具有其它主要成分或杂质（例如另外的3A至6A族元素）。 目标物在氧气氛中反应溅射，以产生溅射铰链。 以这种方式可以形成微机械装置的刚性和/或柔性部分。