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公开(公告)号：SG109610A1
公开(公告)日：2005-03-30
申请号：SG200405050
申请日：2004-08-23
Applicant: ASML NETHERLANDS BV
Inventor： LOOPSTRA ERIK ROELOF , DIERICHS MARCEL MATHIJS THEODO , JASPER JOHANNES CHRISTIAAN MAR , MEIJER HENDRICUS JOHANNE MARIA , MICKAN UWE , MULKENS JOHANNES CATHARINUS HU , LIPSON MATTHEW , UITTERDIJK TAMMO , BASELMANS JOHANNES JACOBUS MAT
IPC: H01L21/027 , G02B1/10 , G03F7/20
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