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    31.
    发明专利
    未知

    公开(公告)号：DE60001479D1

    公开(公告)日：2003-04-03

    申请号：DE60001479

    申请日：2000-08-21

    Applicant: LUCENT TECHNOLOGIES INC

    Inventor： ANATOLYEVICH AKSYUK VLADIMIR ,  BISHOP DAVID JOHN

    IPC: F16S1/02 ,  B81B3/00 ,  B81B5/00 ,  B81B7/00 ,  G01N13/10 ,  G02B26/08

    Abstract: A micro-electro-mechanical optical device is disclosed. The micro-electro-mechanical optical device includes a micro-electro-mechanical structure coupled with an optical device. Both the micro-electro-mechanical structure and the optical device are disposed on a substrate surface. The micro-electro-mechanical structure lifts the optical device a predetermined distance above the plane of the substrate surface. Thereafter, the lifted optical device is moveable relative to the plane of the substrate surface in response to an electrostatic field generated between the optical device and the substrate.

    MICRO-ELECTRO-MECHANICAL OPTICAL DEVICE
    35.
    发明专利
    MICRO-ELECTRO-MECHANICAL OPTICAL DEVICE 未知

    公开(公告)号：CA2322122A1

    公开(公告)日：2001-04-08

    申请号：CA2322122

    申请日：2000-10-03

    Applicant: LUCENT TECHNOLOGIES INC

    Inventor： PARDO FLAVIO ,  BISHOP DAVID JOHN ,  AKSYUK VLADIMIR ANATOLYEVICH ,  BOLLE CRISTIAN A ,  GILES RANDY CLINTON

    IPC: B81B3/00 ,  B81B5/00 ,  B81B7/00 ,  B81B7/02 ,  G02B26/08

    Abstract: A micro-electro-mechanical (MEM] optical device having a reduced footprint f or increasing yield on a substrate. The MEM device includes an optical element having an outer edge and supported by a support structure disposed on a substrate. The support structure is mechanically connected to the substrate through first and secon d pairs of beams which move the structure to an active position for elevating the optic device above the substrate. When in an elevated position, the optical device can be selectively tilted for deflecting optic signals. The beams are connected at one end to the support structure, at the other end to the substrate and are disposed so that the first and second bea m ends are located proximate the optical device outer edge. In a preferred embodiment, a stiction force reducing element is included on the outer edge of the optical device f or reducing the contact area between the optic device edge and the substrate.

    38.
    发明专利
    未知

    公开(公告)号：DE60016692T2

    公开(公告)日：2005-12-15

    申请号：DE60016692

    申请日：2000-10-09

    Applicant: LUCENT TECHNOLOGIES INC

    Inventor： BISHOP DAVID JOHN ,  JIN SUNGHO ,  KIM JUNGSANG ,  RAMIREZ AINISSA G

    IPC: B81B3/00 ,  H01H50/00 ,  H01H50/42 ,  H01H51/22 ,  H01H51/27

    Abstract: An actuation device employing square-loop latchable magnetic material (14, 16) having a magnetization direction (polarization) capable of being changed in response to exposure to an external magnetic field is disclosed. The magnetic field is created by a conductor assembly with non-solenoid configuration. Once the magnetization direction of the material is so changed, the external magnetic field is no longer required to maintain the new magnetization direction. The latchable magnetic material (14) is disposed on the mobile electrode (20) of a switching device, and another magnetic material (16) is disposed in spaced relation to the latchable magnetic material on a stationary electrode or surface (28). By applying an electrical current to a conductor assembly arranged proximate the latchable material, a magnetic field is created about the latchable magnetic material, to change the magnetization direction and thereby enable the attraction or repulsion of another magnetic material located on the stationary electrode. The resulting relative displacement of the mobile (20) and stationary (18) electrodes effects the selective connection or disconnection of electrical contacts carried on or associated with the respective electrodes of the actuation device without requiring additional power in order to maintain the switched state of the electrodes.

    39.
    发明专利
    未知

    公开(公告)号：DE69825226D1

    公开(公告)日：2004-09-02

    申请号：DE69825226

    申请日：1998-09-08

    Applicant: LUCENT TECHNOLOGIES INC

    Inventor： AKSYUK VLADIMIR ANATOLYEVICH ,  BISHOP DAVID JOHN ,  GAMMEL PETER LEDEL

    IPC: G12B5/00 ,  G01N37/00 ,  G01Q10/04 ,  G01Q60/18 ,  G02B21/26 ,  H02N1/00 ,  G02B21/00

    Abstract: A micromachined xyz stage, and microscopes utilizing such a stage, are disclosed. The xyz stage includes co-planar x- and y-drive means linked to a sample stage. Such x- and y- drive means are operable to position the sample stage in an x-y plane. The xyz stage further includes z-drive means operable to moves the sample stage out of the x-y plane. The z-drive means can be implemented by suspending a flat-plate electrode over the sample stage using hinged plate supports. As a voltage is applied across the plate electrode and the sample stage, an electrostatic force is generated, causing the sample stage to move towards the plate electrode. The hinged plate supports facilitate assembly of the z-drive means, in addition to providing support for it in its assembled configuration. By incorporating an optical fiber, the aperture of which has be drawn down to submicron size, a near-field scanning optical microscope can be formed. By forming a micromachined tip on the xyz stage, a scanning tunneling microscope or an atomic force microscope can be formed.

    40.
    发明专利
    未知

    公开(公告)号：DE69811563T2

    公开(公告)日：2004-02-19

    申请号：DE69811563

    申请日：1998-05-05

    Applicant: LUCENT TECHNOLOGIES INC

    Inventor： AKSYUK VLADIMIR ANATOLYEVICH ,  GAMMEL PETER LEDEL ,  BISHOP DAVID JOHN

    IPC: G02B6/35 ,  G02B26/08 ,  G02B6/26 ,  G02B26/02

    Abstract: Optical switches utilizing electrostatically-driven actuators formed from micro machined plates are disclosed. Under an applied voltage, a movable plate moves toward a fixed plate or a conductive region of an underlying support. The switches further include a mechanical linkage from the actuator to an optical device. The displacement of the movable plate generated at the actuator is transferred, via the mechanical linkage, to the optical device. The optical device, which is positioned in close proximity to optically-aligned spaced optical fibers, is movable into and out of an optical path defined by the optical cores of the optical fibers by the action of the actuator. An "in-plane" optical switch includes an actuator having two vertically-oriented electrodes, which generates a substantially horizontally-directed displacement of the movable plate and the linked optical device. An "out-of-plane" optical switch includes an actuator having at least one horizontally-disposed suspended above a conductive region of an underlying support. The actuator generates a substantially vertically-directed displacement of the movable plate and the linked optical device.

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